{"id":"https://openalex.org/W2097668939","doi":"https://doi.org/10.1109/acc.2007.4282414","title":"Robustness, Convergence, and Lyapunov Stability of a Nonlinear Iterative Learning Control Applied at a Wafer Scanner","display_name":"Robustness, Convergence, and Lyapunov Stability of a Nonlinear Iterative Learning Control Applied at a Wafer Scanner","publication_year":2007,"publication_date":"2007-07-01","ids":{"openalex":"https://openalex.org/W2097668939","doi":"https://doi.org/10.1109/acc.2007.4282414","mag":"2097668939"},"language":"en","primary_location":{"id":"doi:10.1109/acc.2007.4282414","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2007.4282414","pdf_url":null,"source":{"id":"https://openalex.org/S4210168941","display_name":"Proceedings of the ... American Control Conference/Proceedings of the American Control Conference","issn_l":"0743-1619","issn":["0743-1619","2378-5861"],"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2007 American Control Conference","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5088330069","display_name":"Marcel Heertjes","orcid":"https://orcid.org/0000-0001-6775-5078"},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":true,"raw_author_name":"Marcel Heertjes","raw_affiliation_strings":["Faculty of Mechanical Engineering, Dynamics and Control Technology, Eindhovan University of Technology, Eindhoven, Netherlands","Eindhoven university of Technology, Eindhoven,"],"affiliations":[{"raw_affiliation_string":"Faculty of Mechanical Engineering, Dynamics and Control Technology, Eindhovan University of Technology, Eindhoven, Netherlands","institution_ids":["https://openalex.org/I83019370"]},{"raw_affiliation_string":"Eindhoven university of Technology, Eindhoven,","institution_ids":["https://openalex.org/I83019370"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5111555542","display_name":"Tim Tso","orcid":null},"institutions":[{"id":"https://openalex.org/I927257375","display_name":"ASML (Netherlands)","ror":"https://ror.org/01vxknj13","country_code":"NL","type":"company","lineage":["https://openalex.org/I4210092504","https://openalex.org/I4210122849","https://openalex.org/I927257375"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Tim Tso","raw_affiliation_strings":["ASML, Veldhoven, Netherlands","ASML, 5504 DR, Veldhoven, The Netherlands, e-mail: tim.tso@asml.nl"],"affiliations":[{"raw_affiliation_string":"ASML, Veldhoven, Netherlands","institution_ids":["https://openalex.org/I927257375"]},{"raw_affiliation_string":"ASML, 5504 DR, Veldhoven, The Netherlands, e-mail: tim.tso@asml.nl","institution_ids":["https://openalex.org/I927257375"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5088330069"],"corresponding_institution_ids":["https://openalex.org/I83019370"],"apc_list":null,"apc_paid":null,"fwci":1.6475,"has_fulltext":false,"cited_by_count":10,"citation_normalized_percentile":{"value":0.78981481,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10791","display_name":"Advanced Control Systems Optimization","score":0.9779000282287598,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9722999930381775,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/robustness","display_name":"Robustness (evolution)","score":0.8813601732254028},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.7674133777618408},{"id":"https://openalex.org/keywords/nonlinear-system","display_name":"Nonlinear system","score":0.6978015899658203},{"id":"https://openalex.org/keywords/iterative-learning-control","display_name":"Iterative learning control","score":0.6895204186439514},{"id":"https://openalex.org/keywords/lyapunov-function","display_name":"Lyapunov function","score":0.5819106101989746},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5086113214492798},{"id":"https://openalex.org/keywords/lyapunov-redesign","display_name":"Lyapunov redesign","score":0.4872414171695709},{"id":"https://openalex.org/keywords/convergence","display_name":"Convergence (economics)","score":0.4843648374080658},{"id":"https://openalex.org/keywords/lyapunov-stability","display_name":"Lyapunov stability","score":0.46424564719200134},{"id":"https://openalex.org/keywords/robust-control","display_name":"Robust control","score":0.44800856709480286},{"id":"https://openalex.org/keywords/scanner","display_name":"Scanner","score":0.43597352504730225},{"id":"https://openalex.org/keywords/nonlinear-control","display_name":"Nonlinear control","score":0.4354686737060547},{"id":"https://openalex.org/keywords/mathematical-optimization","display_name":"Mathematical optimization","score":0.3556031286716461},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.3257614076137543},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.18116214871406555},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.12092450261116028}],"concepts":[{"id":"https://openalex.org/C63479239","wikidata":"https://www.wikidata.org/wiki/Q7353546","display_name":"Robustness (evolution)","level":3,"score":0.8813601732254028},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.7674133777618408},{"id":"https://openalex.org/C158622935","wikidata":"https://www.wikidata.org/wiki/Q660848","display_name":"Nonlinear system","level":2,"score":0.6978015899658203},{"id":"https://openalex.org/C117619785","wikidata":"https://www.wikidata.org/wiki/Q6094414","display_name":"Iterative learning control","level":3,"score":0.6895204186439514},{"id":"https://openalex.org/C60640748","wikidata":"https://www.wikidata.org/wiki/Q2337858","display_name":"Lyapunov function","level":3,"score":0.5819106101989746},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5086113214492798},{"id":"https://openalex.org/C37935115","wikidata":"https://www.wikidata.org/wiki/Q6707085","display_name":"Lyapunov redesign","level":4,"score":0.4872414171695709},{"id":"https://openalex.org/C2777303404","wikidata":"https://www.wikidata.org/wiki/Q759757","display_name":"Convergence (economics)","level":2,"score":0.4843648374080658},{"id":"https://openalex.org/C2776829284","wikidata":"https://www.wikidata.org/wiki/Q1341651","display_name":"Lyapunov stability","level":3,"score":0.46424564719200134},{"id":"https://openalex.org/C31531917","wikidata":"https://www.wikidata.org/wiki/Q915157","display_name":"Robust control","level":3,"score":0.44800856709480286},{"id":"https://openalex.org/C2779751349","wikidata":"https://www.wikidata.org/wiki/Q1474480","display_name":"Scanner","level":2,"score":0.43597352504730225},{"id":"https://openalex.org/C91581856","wikidata":"https://www.wikidata.org/wiki/Q2707001","display_name":"Nonlinear control","level":3,"score":0.4354686737060547},{"id":"https://openalex.org/C126255220","wikidata":"https://www.wikidata.org/wiki/Q141495","display_name":"Mathematical optimization","level":1,"score":0.3556031286716461},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.3257614076137543},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.18116214871406555},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.12092450261116028},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0},{"id":"https://openalex.org/C104317684","wikidata":"https://www.wikidata.org/wiki/Q7187","display_name":"Gene","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C50522688","wikidata":"https://www.wikidata.org/wiki/Q189833","display_name":"Economic growth","level":1,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/acc.2007.4282414","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2007.4282414","pdf_url":null,"source":{"id":"https://openalex.org/S4210168941","display_name":"Proceedings of the ... American Control Conference/Proceedings of the American Control Conference","issn_l":"0743-1619","issn":["0743-1619","2378-5861"],"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2007 American Control Conference","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":17,"referenced_works":["https://openalex.org/W1103986","https://openalex.org/W614117236","https://openalex.org/W1583599085","https://openalex.org/W1592544763","https://openalex.org/W1964949272","https://openalex.org/W1978198942","https://openalex.org/W2025198294","https://openalex.org/W2072229645","https://openalex.org/W2073756836","https://openalex.org/W2111388372","https://openalex.org/W2117200004","https://openalex.org/W2124039037","https://openalex.org/W2130773570","https://openalex.org/W2138263960","https://openalex.org/W2769493071","https://openalex.org/W6634823520","https://openalex.org/W6679473014"],"related_works":["https://openalex.org/W2119723453","https://openalex.org/W2534107666","https://openalex.org/W2210722882","https://openalex.org/W2548542549","https://openalex.org/W3127303167","https://openalex.org/W2350854666","https://openalex.org/W2892659929","https://openalex.org/W1591566337","https://openalex.org/W2120295900","https://openalex.org/W4230398471"],"abstract_inverted_index":{"The":[0,56],"robustness,":[1],"convergence,":[2],"and":[3,24],"Lyapunov":[4],"stability":[5],"properties":[6],"of":[7],"a":[8],"nonlinear":[9,31,57],"iterative":[10],"learning":[11],"control":[12],"with":[13,43],"applications":[14],"to":[15,61,72,74],"an":[16],"industrial":[17],"wafer":[18],"scanner":[19],"are":[20],"studied.":[21],"Both":[22],"measured":[23],"simulated,":[25],"it":[26],"is":[27,59],"demonstrated":[28,60],"that":[29,66],"the":[30,40,53],"design":[32,58],"balances":[33],"fast":[34],"convergence":[35,76],"under":[36,49],"'large-gain'":[37],"feedback":[38,51],"during":[39,52],"first":[41],"trials":[42],"sufficient":[44],"robustness":[45],"against":[46],"model":[47],"uncertainty":[48],"'small-gain'":[50],"subsequent":[54],"trials.":[55],"outperform":[62],"underlying":[63],"linear":[64],"designs":[65],"either":[67],"become":[68],"unstable":[69],"or":[70],"have":[71],"reside":[73],"lower":[75],"rates.":[77]},"counts_by_year":[{"year":2024,"cited_by_count":2},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2018,"cited_by_count":2},{"year":2014,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}