{"id":"https://openalex.org/W2114663315","doi":"https://doi.org/10.1109/acc.2005.1470533","title":"Nanoscale path planning and motion control","display_name":"Nanoscale path planning and motion control","publication_year":2005,"publication_date":"2005-08-10","ids":{"openalex":"https://openalex.org/W2114663315","doi":"https://doi.org/10.1109/acc.2005.1470533","mag":"2114663315"},"language":"en","primary_location":{"id":"doi:10.1109/acc.2005.1470533","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2005.1470533","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 2005, American Control Conference, 2005.","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5026895634","display_name":"Huzefa Shakir","orcid":null},"institutions":[{"id":"https://openalex.org/I91045830","display_name":"Texas A&M University","ror":"https://ror.org/01f5ytq51","country_code":"US","type":"education","lineage":["https://openalex.org/I91045830"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"H. Shakir","raw_affiliation_strings":["Department of Mechanical Engineering, Texas A and M University, College Station, TX, USA","Dept. of Mech. Eng., Texas A&M Univ., College Station, TX, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Texas A and M University, College Station, TX, USA","institution_ids":["https://openalex.org/I91045830"]},{"raw_affiliation_string":"Dept. of Mech. Eng., Texas A&M Univ., College Station, TX, USA","institution_ids":["https://openalex.org/I91045830"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5110772819","display_name":"Won-jong Kim","orcid":null},"institutions":[{"id":"https://openalex.org/I91045830","display_name":"Texas A&M University","ror":"https://ror.org/01f5ytq51","country_code":"US","type":"education","lineage":["https://openalex.org/I91045830"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Won-jong Kim","raw_affiliation_strings":["Department of Mechanical Engineering, Texas A and M University, College Station, TX, USA","Dept. of Mech. Eng., Texas A&M Univ., College Station, TX, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Texas A and M University, College Station, TX, USA","institution_ids":["https://openalex.org/I91045830"]},{"raw_affiliation_string":"Dept. of Mech. Eng., Texas A&M Univ., College Station, TX, USA","institution_ids":["https://openalex.org/I91045830"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I91045830"],"apc_list":null,"apc_paid":null,"fwci":3.9473,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.92802785,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":null,"biblio":{"volume":"2","issue":null,"first_page":"3604","last_page":"3609"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9970999956130981,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nanomanufacturing","display_name":"Nanomanufacturing","score":0.915124773979187},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.6246097683906555},{"id":"https://openalex.org/keywords/motion-planning","display_name":"Motion planning","score":0.6033663749694824},{"id":"https://openalex.org/keywords/motion-control","display_name":"Motion control","score":0.5736091136932373},{"id":"https://openalex.org/keywords/controller","display_name":"Controller (irrigation)","score":0.5259939432144165},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4845987558364868},{"id":"https://openalex.org/keywords/maglev","display_name":"Maglev","score":0.4828256070613861},{"id":"https://openalex.org/keywords/overshoot","display_name":"Overshoot (microwave communication)","score":0.47269394993782043},{"id":"https://openalex.org/keywords/observability","display_name":"Observability","score":0.46020007133483887},{"id":"https://openalex.org/keywords/optimal-control","display_name":"Optimal control","score":0.428438663482666},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.4098503887653351},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3144644498825073},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.2059537172317505},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.16300073266029358},{"id":"https://openalex.org/keywords/robot","display_name":"Robot","score":0.14939197897911072},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.1328311562538147},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.11490368843078613},{"id":"https://openalex.org/keywords/mathematical-optimization","display_name":"Mathematical optimization","score":0.08980277180671692}],"concepts":[{"id":"https://openalex.org/C46312889","wikidata":"https://www.wikidata.org/wiki/Q950502","display_name":"Nanomanufacturing","level":2,"score":0.915124773979187},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.6246097683906555},{"id":"https://openalex.org/C81074085","wikidata":"https://www.wikidata.org/wiki/Q366872","display_name":"Motion planning","level":3,"score":0.6033663749694824},{"id":"https://openalex.org/C145565327","wikidata":"https://www.wikidata.org/wiki/Q852514","display_name":"Motion control","level":3,"score":0.5736091136932373},{"id":"https://openalex.org/C203479927","wikidata":"https://www.wikidata.org/wiki/Q5165939","display_name":"Controller (irrigation)","level":2,"score":0.5259939432144165},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4845987558364868},{"id":"https://openalex.org/C196781063","wikidata":"https://www.wikidata.org/wiki/Q160047","display_name":"Maglev","level":2,"score":0.4828256070613861},{"id":"https://openalex.org/C2780323453","wikidata":"https://www.wikidata.org/wiki/Q7113957","display_name":"Overshoot (microwave communication)","level":2,"score":0.47269394993782043},{"id":"https://openalex.org/C36299963","wikidata":"https://www.wikidata.org/wiki/Q1369844","display_name":"Observability","level":2,"score":0.46020007133483887},{"id":"https://openalex.org/C91575142","wikidata":"https://www.wikidata.org/wiki/Q1971426","display_name":"Optimal control","level":2,"score":0.428438663482666},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.4098503887653351},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3144644498825073},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.2059537172317505},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.16300073266029358},{"id":"https://openalex.org/C90509273","wikidata":"https://www.wikidata.org/wiki/Q11012","display_name":"Robot","level":2,"score":0.14939197897911072},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.1328311562538147},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.11490368843078613},{"id":"https://openalex.org/C126255220","wikidata":"https://www.wikidata.org/wiki/Q141495","display_name":"Mathematical optimization","level":1,"score":0.08980277180671692},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C28826006","wikidata":"https://www.wikidata.org/wiki/Q33521","display_name":"Applied mathematics","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C6557445","wikidata":"https://www.wikidata.org/wiki/Q173113","display_name":"Agronomy","level":1,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/acc.2005.1470533","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2005.1470533","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 2005, American Control Conference, 2005.","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.47999998927116394,"display_name":"Sustainable cities and communities","id":"https://metadata.un.org/sdg/11"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":19,"referenced_works":["https://openalex.org/W135479744","https://openalex.org/W608131479","https://openalex.org/W1635768976","https://openalex.org/W1983523907","https://openalex.org/W2003178460","https://openalex.org/W2009375586","https://openalex.org/W2027621852","https://openalex.org/W2047514129","https://openalex.org/W2094638737","https://openalex.org/W2109634453","https://openalex.org/W2135982380","https://openalex.org/W2140289176","https://openalex.org/W2149398254","https://openalex.org/W2169025893","https://openalex.org/W2170357685","https://openalex.org/W3145810204","https://openalex.org/W4238110342","https://openalex.org/W6684901006","https://openalex.org/W6685055668"],"related_works":["https://openalex.org/W2067051746","https://openalex.org/W3134944649","https://openalex.org/W4361864837","https://openalex.org/W2349467427","https://openalex.org/W3169368101","https://openalex.org/W2376546541","https://openalex.org/W2210985827","https://openalex.org/W2370142120","https://openalex.org/W4206062456","https://openalex.org/W2361630402"],"abstract_inverted_index":{"This":[0],"paper":[1,115],"addresses":[2],"nanoscale":[3,31,59],"path":[4,54,74],"planning":[5,55,75,121],"and":[6,23,28,62,66,78,87,104,108,137,170,199,201],"motion":[7,41],"control,":[8],"which":[9],"is":[10],"essential":[11],"in":[12,45,52,73,113,120,168,175,194],"key":[13],"nanomanufacturing":[14,192],"applications":[15,25,47,193],"such":[16],"as":[17,133,135,151,178,180],"microstereolithography":[18],"(/spl":[19],"mu/STL),":[20],"dip-pen-nanolithography":[21],"(DPN),":[22],"scanning":[24],"for":[26,189],"imaging":[27],"manipulation":[29],"of":[30,132,163,196],"surface":[32],"phenomena,":[33],"with":[34,49,153,172],"the":[35,50,58,97,129,138,143,147,154,173,190],"magnetic-levitation":[36],"(maglev)":[37],"technology.":[38],"We":[39],"identified":[40],"trajectories":[42],"commonly":[43],"used":[44],"industrial":[46],"along":[48],"challenges":[51],"optimal":[53,89,122],"to":[56,95,116],"meet":[57],"motion-control":[60],"objectives":[61],"achieve":[63],"precise":[64],"positioning":[65,98],"maximum":[67],"throughput":[68],"simultaneously.":[69],"Key":[70],"control":[71,79],"parameters":[72],"are":[76,93,111],"determined,":[77],"design":[80],"methodologies":[81],"including":[82],"a":[83],"well-damped":[84],"lead-lag":[85,126,158],"controller":[86,127,141],"an":[88],"linear":[90],"quadratic":[91],"regulator":[92],"proposed":[94,101],"satisfy":[96],"requirements.":[99],"The":[100,124,160,183],"methodologies,":[102],"individually":[103],"collectively,":[105],"were":[106],"implemented,":[107],"experimental":[109],"results":[110],"presented":[112],"this":[114],"illustrate":[117],"their":[118],"effectiveness":[119],"trajectories.":[123],"damped":[125],"exhibited":[128],"command":[130,176],"overshoot":[131],"small":[134,179],"0.37%,":[136],"multivariable":[139],"LQ":[140],"reduced":[142],"dynamic":[144],"coupling":[145],"between":[146],"axes":[148],"by":[149],"97.1%":[150],"compared":[152],"decoupled":[155],"single-input-single-output":[156],"(SISO)":[157],"controllers.":[159],"position":[161,197],"resolution":[162,198],"5":[164],"nm":[165],"was":[166],"achieved":[167],"x":[169],"y":[171],"errors":[174],"tracking":[177],"4.5":[181],"nm.":[182],"maglev":[184],"stage":[185],"demonstrated":[186],"excellent":[187],"performances":[188],"chosen":[191],"terms":[195],"accuracy,":[200],"speed.":[202]},"counts_by_year":[],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}