{"id":"https://openalex.org/W2152024964","doi":"https://doi.org/10.1109/acc.2005.1470338","title":"A novel sensing scheme for the displacement of electrostatically actuated microcantilevers","display_name":"A novel sensing scheme for the displacement of electrostatically actuated microcantilevers","publication_year":2005,"publication_date":"2005-08-10","ids":{"openalex":"https://openalex.org/W2152024964","doi":"https://doi.org/10.1109/acc.2005.1470338","mag":"2152024964"},"language":"en","primary_location":{"id":"doi:10.1109/acc.2005.1470338","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2005.1470338","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 2005, American Control Conference, 2005.","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5038211738","display_name":"Maria Napoli","orcid":"https://orcid.org/0000-0001-8882-6592"},"institutions":[{"id":"https://openalex.org/I154570441","display_name":"University of California, Santa Barbara","ror":"https://ror.org/02t274463","country_code":"US","type":"education","lineage":["https://openalex.org/I154570441"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"M. Napoli","raw_affiliation_strings":["University of California, Santa Barbara, CA, USA"],"affiliations":[{"raw_affiliation_string":"University of California, Santa Barbara, CA, USA","institution_ids":["https://openalex.org/I154570441"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016635412","display_name":"C. Olroyd","orcid":null},"institutions":[{"id":"https://openalex.org/I154570441","display_name":"University of California, Santa Barbara","ror":"https://ror.org/02t274463","country_code":"US","type":"education","lineage":["https://openalex.org/I154570441"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"C. Olroyd","raw_affiliation_strings":["University of California, Santa Barbara, CA, USA"],"affiliations":[{"raw_affiliation_string":"University of California, Santa Barbara, CA, USA","institution_ids":["https://openalex.org/I154570441"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071239059","display_name":"Bassam Bamieh","orcid":"https://orcid.org/0000-0001-9237-4613"},"institutions":[{"id":"https://openalex.org/I154570441","display_name":"University of California, Santa Barbara","ror":"https://ror.org/02t274463","country_code":"US","type":"education","lineage":["https://openalex.org/I154570441"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"B. Bamieh","raw_affiliation_strings":["University of California, Santa Barbara, CA, USA"],"affiliations":[{"raw_affiliation_string":"University of California, Santa Barbara, CA, USA","institution_ids":["https://openalex.org/I154570441"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5072174983","display_name":"Katherine Turner","orcid":"https://orcid.org/0000-0003-1666-1690"},"institutions":[{"id":"https://openalex.org/I154570441","display_name":"University of California, Santa Barbara","ror":"https://ror.org/02t274463","country_code":"US","type":"education","lineage":["https://openalex.org/I154570441"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"K. Turner","raw_affiliation_strings":["University of California, Santa Barbara, CA, USA"],"affiliations":[{"raw_affiliation_string":"University of California, Santa Barbara, CA, USA","institution_ids":["https://openalex.org/I154570441"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5038211738"],"corresponding_institution_ids":["https://openalex.org/I154570441"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":11,"citation_normalized_percentile":{"value":0.22745446,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"2475","last_page":"2480"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.7921026349067688},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.6821084022521973},{"id":"https://openalex.org/keywords/displacement","display_name":"Displacement (psychology)","score":0.6595618724822998},{"id":"https://openalex.org/keywords/measure","display_name":"Measure (data warehouse)","score":0.6074019074440002},{"id":"https://openalex.org/keywords/observer","display_name":"Observer (physics)","score":0.5983701944351196},{"id":"https://openalex.org/keywords/scheme","display_name":"Scheme (mathematics)","score":0.49378928542137146},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4800244867801666},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.42099612951278687},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.4031819701194763},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.3977387547492981},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.3410274386405945},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3236222267150879},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.23280495405197144},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.17311519384384155},{"id":"https://openalex.org/keywords/mathematical-analysis","display_name":"Mathematical analysis","score":0.11721405386924744},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.09768372774124146},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.09724587202072144},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.06293132901191711}],"concepts":[{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.7921026349067688},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.6821084022521973},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.6595618724822998},{"id":"https://openalex.org/C2780009758","wikidata":"https://www.wikidata.org/wiki/Q6804172","display_name":"Measure (data warehouse)","level":2,"score":0.6074019074440002},{"id":"https://openalex.org/C2780704645","wikidata":"https://www.wikidata.org/wiki/Q9251458","display_name":"Observer (physics)","level":2,"score":0.5983701944351196},{"id":"https://openalex.org/C77618280","wikidata":"https://www.wikidata.org/wiki/Q1155772","display_name":"Scheme (mathematics)","level":2,"score":0.49378928542137146},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4800244867801666},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.42099612951278687},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.4031819701194763},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.3977387547492981},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3410274386405945},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3236222267150879},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.23280495405197144},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.17311519384384155},{"id":"https://openalex.org/C134306372","wikidata":"https://www.wikidata.org/wiki/Q7754","display_name":"Mathematical analysis","level":1,"score":0.11721405386924744},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.09768372774124146},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.09724587202072144},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.06293132901191711},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C77088390","wikidata":"https://www.wikidata.org/wiki/Q8513","display_name":"Database","level":1,"score":0.0},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/acc.2005.1470338","is_oa":false,"landing_page_url":"https://doi.org/10.1109/acc.2005.1470338","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the 2005, American Control Conference, 2005.","raw_type":"proceedings-article"},{"id":"pmh:oai:CiteSeerX.psu:10.1.1.985.1534","is_oa":false,"landing_page_url":"http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.985.1534","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"https://engineering.ucsb.edu/%7Ebamieh/pubs/napolrbamtur05.pdf","raw_type":"text"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320306076","display_name":"National Science Foundation","ror":"https://ror.org/021nxhr62"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":25,"referenced_works":["https://openalex.org/W1482570919","https://openalex.org/W1504338025","https://openalex.org/W1505506151","https://openalex.org/W1578004187","https://openalex.org/W1607919898","https://openalex.org/W1969488369","https://openalex.org/W1970936215","https://openalex.org/W1980628557","https://openalex.org/W1992984362","https://openalex.org/W1997769666","https://openalex.org/W2016059623","https://openalex.org/W2027113586","https://openalex.org/W2033608712","https://openalex.org/W2037605277","https://openalex.org/W2038338324","https://openalex.org/W2050105096","https://openalex.org/W2064391301","https://openalex.org/W2073624869","https://openalex.org/W2082269729","https://openalex.org/W2107497609","https://openalex.org/W2118214210","https://openalex.org/W2141804226","https://openalex.org/W2921942079","https://openalex.org/W4231409469","https://openalex.org/W6630168276"],"related_works":["https://openalex.org/W2107125189","https://openalex.org/W2760996480","https://openalex.org/W2303727101","https://openalex.org/W2368223165","https://openalex.org/W2357307510","https://openalex.org/W2286084298","https://openalex.org/W1966104931","https://openalex.org/W2104720263","https://openalex.org/W2889334434","https://openalex.org/W2364226584"],"abstract_inverted_index":{"We":[0,71],"present":[1],"the":[2,13,35,44,47,57,79],"design":[3],"and":[4],"implementation":[5,80],"of":[6,15,39,81],"a":[7,87],"novel":[8],"sensing":[9,83],"scheme":[10],"to":[11,29,92],"reconstruct":[12],"displacement":[14],"electrostatically":[16],"actuated":[17],"microcantilevers":[18],"that":[19,42],"are":[20],"used":[21],"in":[22],"atomic":[23],"force":[24],"microscopy.":[25],"Our":[26],"approach":[27],"proposes":[28],"estimate":[30],"rather":[31],"than":[32],"measure":[33,93],"directly":[34],"displacement,":[36],"by":[37],"means":[38],"an":[40,51,61],"observer":[41,58],"uses":[43],"current":[45],"through":[46],"capacitive":[48],"cantilever":[49],"as":[50,60],"input.":[52],"In":[53],"particular,":[54],"we":[55],"formulate":[56],"problem":[59,67],"H/sub":[62],"/spl":[63],"infin//":[64],"optimal":[65],"filtering":[66],"for":[68],"periodic":[69],"systems.":[70],"show":[72],"here":[73],"our":[74],"first":[75],"experimental":[76],"results":[77],"regarding":[78],"this":[82],"scheme,":[84],"which":[85],"includes":[86],"custom":[88],"made":[89],"off-chip":[90],"circuit":[91],"very":[94],"small":[95],"currents":[96],"(few":[97],"p/spl":[98],"Lambda/)":[99],"at":[100],"high":[101],"frequencies":[102],"(/spl":[103],"ap/":[104],"100":[105],"kHz).":[106]},"counts_by_year":[{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":4},{"year":2014,"cited_by_count":1}],"updated_date":"2026-04-04T16:13:02.066488","created_date":"2025-10-10T00:00:00"}