{"id":"https://openalex.org/W4406356293","doi":"https://doi.org/10.1109/3dic63395.2024.10830072","title":"Activation of Copper Surfaces by VUV - Redox Method Using a Xenon Excimer Lamp","display_name":"Activation of Copper Surfaces by VUV - Redox Method Using a Xenon Excimer Lamp","publication_year":2024,"publication_date":"2024-09-25","ids":{"openalex":"https://openalex.org/W4406356293","doi":"https://doi.org/10.1109/3dic63395.2024.10830072"},"language":"en","primary_location":{"id":"doi:10.1109/3dic63395.2024.10830072","is_oa":false,"landing_page_url":"https://doi.org/10.1109/3dic63395.2024.10830072","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 International 3D Systems Integration Conference (3DIC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5088299224","display_name":"Shinichi Endo","orcid":"https://orcid.org/0000-0002-6736-3207"},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Shinichi Endo","raw_affiliation_strings":["Ushio Inc.,Photon process global business unit, Photon process division,Himeji,Hyogo,Japan"],"affiliations":[{"raw_affiliation_string":"Ushio Inc.,Photon process global business unit, Photon process division,Himeji,Hyogo,Japan","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5025868058","display_name":"Akihiro Shimizu","orcid":"https://orcid.org/0000-0003-3269-5903"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Akihiro Shimizu","raw_affiliation_strings":["Ushio Inc.,Photon process global business unit, Photon process division,Himeji,Hyogo,Japan"],"affiliations":[{"raw_affiliation_string":"Ushio Inc.,Photon process global business unit, Photon process division,Himeji,Hyogo,Japan","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5088299224"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.16526552,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"3"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10192","display_name":"Catalytic Processes in Materials Science","score":0.670199990272522,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10192","display_name":"Catalytic Processes in Materials Science","score":0.670199990272522,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10313","display_name":"Surface Modification and Superhydrophobicity","score":0.6152999997138977,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10850","display_name":"Heat Transfer and Boiling Studies","score":0.5586000084877014,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/xenon","display_name":"Xenon","score":0.9037809371948242},{"id":"https://openalex.org/keywords/copper","display_name":"Copper","score":0.7868399620056152},{"id":"https://openalex.org/keywords/excimer","display_name":"Excimer","score":0.7525413036346436},{"id":"https://openalex.org/keywords/redox","display_name":"Redox","score":0.5640213489532471},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5183878540992737},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.41837409138679504},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.3129135072231293},{"id":"https://openalex.org/keywords/atomic-physics","display_name":"Atomic physics","score":0.1593659222126007},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.13023152947425842},{"id":"https://openalex.org/keywords/metallurgy","display_name":"Metallurgy","score":0.08519050478935242},{"id":"https://openalex.org/keywords/fluorescence","display_name":"Fluorescence","score":0.06985011696815491}],"concepts":[{"id":"https://openalex.org/C548442186","wikidata":"https://www.wikidata.org/wiki/Q1106","display_name":"Xenon","level":2,"score":0.9037809371948242},{"id":"https://openalex.org/C544778455","wikidata":"https://www.wikidata.org/wiki/Q753","display_name":"Copper","level":2,"score":0.7868399620056152},{"id":"https://openalex.org/C74561354","wikidata":"https://www.wikidata.org/wiki/Q901723","display_name":"Excimer","level":3,"score":0.7525413036346436},{"id":"https://openalex.org/C55904794","wikidata":"https://www.wikidata.org/wiki/Q82682","display_name":"Redox","level":2,"score":0.5640213489532471},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5183878540992737},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.41837409138679504},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3129135072231293},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.1593659222126007},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.13023152947425842},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.08519050478935242},{"id":"https://openalex.org/C91881484","wikidata":"https://www.wikidata.org/wiki/Q191807","display_name":"Fluorescence","level":2,"score":0.06985011696815491}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/3dic63395.2024.10830072","is_oa":false,"landing_page_url":"https://doi.org/10.1109/3dic63395.2024.10830072","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 International 3D Systems Integration Conference (3DIC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":3,"referenced_works":["https://openalex.org/W2036529578","https://openalex.org/W2078688128","https://openalex.org/W2169657429"],"related_works":["https://openalex.org/W1509496066","https://openalex.org/W2042485348","https://openalex.org/W1972029629","https://openalex.org/W4254694604","https://openalex.org/W4386275799","https://openalex.org/W4238845334","https://openalex.org/W1982241411","https://openalex.org/W2000068717","https://openalex.org/W2074774938","https://openalex.org/W2066173127"],"abstract_inverted_index":{"A":[0],"technology":[1],"(Vacuum":[2],"ultraviolet":[3,16,67,123],"ozone":[4],"(VUV/O<inf":[5],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[6,35],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">3</inf>)":[7],"modification":[8,37],"is":[9,49,91],"known":[10],"that":[11],"uses":[12],"172":[13],"nm":[14],"vacuum":[15,66,122],"light":[17,124],"generated":[18,62],"from":[19],"a":[20,29],"xenon":[21],"excimer":[22],"lamp":[23],"to":[24,56,87,93],"modify":[25],"the":[26,33,39,42,57,64,70,73,77,107,117],"surface":[27,40,79,111],"of":[28,41,59,76,110,113],"material.":[30],"However,":[31],"in":[32,125],"VUV/O<inf":[34],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">3</inf>":[36],"method,":[38,119],"treated":[43],"material":[44],"becomes":[45],"hydrophilic":[46],"as":[47],"it":[48,90],"covered":[50],"with":[51],"oxidizing":[52],"functional":[53],"groups":[54],"due":[55],"action":[58],"active":[60],"oxygen":[61],"by":[63],"high-energy":[65],"light.":[68],"At":[69],"same":[71],"time,":[72],"original":[74],"properties":[75],"sample":[78],"are":[80,86],"weakened.":[81],"In":[82,102],"cases":[83],"where":[84],"metals":[85],"be":[88],"joined,":[89],"desirable":[92],"have":[94],"little":[95],"organic":[96],"contamination":[97],"and":[98,128],"no":[99],"oxide":[100],"film.":[101],"this":[103],"study,":[104],"we":[105],"report":[106],"experimental":[108],"results":[109],"activation":[112],"copper":[114],"samples":[115],"using":[116],"VUV-Redox":[118],"which":[120],"irradiates":[121],"reduction":[126],"gas":[127],"redox":[129],"gas.":[130]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}