{"id":"https://openalex.org/W4210269882","doi":"https://doi.org/10.1109/3dic52383.2021.9687618","title":"Electrical and Performance Benefits of Advanced Monolithic Cooling for 2.5D Heterogeneous ICs","display_name":"Electrical and Performance Benefits of Advanced Monolithic Cooling for 2.5D Heterogeneous ICs","publication_year":2021,"publication_date":"2021-10-01","ids":{"openalex":"https://openalex.org/W4210269882","doi":"https://doi.org/10.1109/3dic52383.2021.9687618"},"language":"en","primary_location":{"id":"doi:10.1109/3dic52383.2021.9687618","is_oa":false,"landing_page_url":"https://doi.org/10.1109/3dic52383.2021.9687618","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE International 3D Systems Integration Conference (3DIC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5046721249","display_name":"Sreejith Kochupurackal Rajan","orcid":"https://orcid.org/0000-0001-9986-8755"},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Sreejith Kochupurackal Rajan","raw_affiliation_strings":["School of Electrical and Computer Engineering, Georgia Institute of Technology,Atlanta,GA,30332"],"affiliations":[{"raw_affiliation_string":"School of Electrical and Computer Engineering, Georgia Institute of Technology,Atlanta,GA,30332","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5063505002","display_name":"Ankit Kaul","orcid":"https://orcid.org/0000-0003-0301-1349"},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Ankit Kaul","raw_affiliation_strings":["School of Electrical and Computer Engineering, Georgia Institute of Technology,Atlanta,GA,30332"],"affiliations":[{"raw_affiliation_string":"School of Electrical and Computer Engineering, Georgia Institute of Technology,Atlanta,GA,30332","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113913514","display_name":"Gary S. May","orcid":null},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]},{"id":"https://openalex.org/I84218800","display_name":"University of California, Davis","ror":"https://ror.org/05rrcem69","country_code":"US","type":"education","lineage":["https://openalex.org/I84218800"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Gary S. May","raw_affiliation_strings":["School of Electrical and Computer Engineering, Georgia Institute of Technology,Atlanta,GA,30332","University of California, Davis, CA"],"affiliations":[{"raw_affiliation_string":"School of Electrical and Computer Engineering, Georgia Institute of Technology,Atlanta,GA,30332","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"University of California, Davis, CA","institution_ids":["https://openalex.org/I84218800"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5044507102","display_name":"Muhannad S. Bakir","orcid":"https://orcid.org/0000-0002-0380-0842"},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Muhannad S. Bakir","raw_affiliation_strings":["School of Electrical and Computer Engineering, Georgia Institute of Technology,Atlanta,GA,30332"],"affiliations":[{"raw_affiliation_string":"School of Electrical and Computer Engineering, Georgia Institute of Technology,Atlanta,GA,30332","institution_ids":["https://openalex.org/I130701444"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5046721249"],"corresponding_institution_ids":["https://openalex.org/I130701444"],"apc_list":null,"apc_paid":null,"fwci":0.1109,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.43734433,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"5"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10998","display_name":"Heat Transfer and Optimization","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10998","display_name":"Heat Transfer and Optimization","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10361","display_name":"Silicon Carbide Semiconductor Technologies","score":0.9927999973297119,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/heat-sink","display_name":"Heat sink","score":0.8081768155097961},{"id":"https://openalex.org/keywords/thermal-management-of-electronic-devices-and-systems","display_name":"Thermal management of electronic devices and systems","score":0.6956872344017029},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5651702880859375},{"id":"https://openalex.org/keywords/three-dimensional-integrated-circuit","display_name":"Three-dimensional integrated circuit","score":0.531922459602356},{"id":"https://openalex.org/keywords/microfluidics","display_name":"Microfluidics","score":0.5222969055175781},{"id":"https://openalex.org/keywords/water-cooling","display_name":"Water cooling","score":0.4835069477558136},{"id":"https://openalex.org/keywords/thermal","display_name":"Thermal","score":0.4554235339164734},{"id":"https://openalex.org/keywords/dissipation","display_name":"Dissipation","score":0.4444003999233246},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.43225789070129395},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.42795953154563904},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.42366573214530945},{"id":"https://openalex.org/keywords/passive-cooling","display_name":"Passive cooling","score":0.416413277387619},{"id":"https://openalex.org/keywords/inlet","display_name":"Inlet","score":0.4161222279071808},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3074948787689209},{"id":"https://openalex.org/keywords/integrated-circuit","display_name":"Integrated circuit","score":0.305999219417572},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2262292504310608},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.1456564962863922},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.12495031952857971}],"concepts":[{"id":"https://openalex.org/C186937647","wikidata":"https://www.wikidata.org/wiki/Q1796959","display_name":"Heat sink","level":2,"score":0.8081768155097961},{"id":"https://openalex.org/C114834414","wikidata":"https://www.wikidata.org/wiki/Q15477170","display_name":"Thermal management of electronic devices and systems","level":2,"score":0.6956872344017029},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5651702880859375},{"id":"https://openalex.org/C59088047","wikidata":"https://www.wikidata.org/wiki/Q229370","display_name":"Three-dimensional integrated circuit","level":3,"score":0.531922459602356},{"id":"https://openalex.org/C8673954","wikidata":"https://www.wikidata.org/wiki/Q138845","display_name":"Microfluidics","level":2,"score":0.5222969055175781},{"id":"https://openalex.org/C7694927","wikidata":"https://www.wikidata.org/wiki/Q7667810","display_name":"Water cooling","level":2,"score":0.4835069477558136},{"id":"https://openalex.org/C204530211","wikidata":"https://www.wikidata.org/wiki/Q752823","display_name":"Thermal","level":2,"score":0.4554235339164734},{"id":"https://openalex.org/C135402231","wikidata":"https://www.wikidata.org/wiki/Q898440","display_name":"Dissipation","level":2,"score":0.4444003999233246},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.43225789070129395},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.42795953154563904},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.42366573214530945},{"id":"https://openalex.org/C79795727","wikidata":"https://www.wikidata.org/wiki/Q3068508","display_name":"Passive cooling","level":3,"score":0.416413277387619},{"id":"https://openalex.org/C201289731","wikidata":"https://www.wikidata.org/wiki/Q1172599","display_name":"Inlet","level":2,"score":0.4161222279071808},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3074948787689209},{"id":"https://openalex.org/C530198007","wikidata":"https://www.wikidata.org/wiki/Q80831","display_name":"Integrated circuit","level":2,"score":0.305999219417572},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2262292504310608},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.1456564962863922},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.12495031952857971},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/3dic52383.2021.9687618","is_oa":false,"landing_page_url":"https://doi.org/10.1109/3dic52383.2021.9687618","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 IEEE International 3D Systems Integration Conference (3DIC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.800000011920929,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[{"id":"https://openalex.org/G2423467375","display_name":null,"funder_award_id":"ECCS-2025462","funder_id":"https://openalex.org/F4320306076","funder_display_name":"National Science Foundation"},{"id":"https://openalex.org/G8757405185","display_name":null,"funder_award_id":"FA8650-16-1-7674","funder_id":"https://openalex.org/F4320332180","funder_display_name":"Defense Advanced Research Projects Agency"}],"funders":[{"id":"https://openalex.org/F4320306076","display_name":"National Science Foundation","ror":"https://ror.org/021nxhr62"},{"id":"https://openalex.org/F4320332180","display_name":"Defense Advanced Research Projects Agency","ror":"https://ror.org/02caytj08"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W2003852242","https://openalex.org/W2010148007","https://openalex.org/W2019616052","https://openalex.org/W2520782513","https://openalex.org/W2735023411","https://openalex.org/W2743687388","https://openalex.org/W2787275496","https://openalex.org/W2898566692","https://openalex.org/W2899682587","https://openalex.org/W2963558138","https://openalex.org/W3037152957","https://openalex.org/W3086899891","https://openalex.org/W3162568624","https://openalex.org/W3188178661"],"related_works":["https://openalex.org/W2901798837","https://openalex.org/W2016970881","https://openalex.org/W2755668490","https://openalex.org/W2139426011","https://openalex.org/W2786493094","https://openalex.org/W2126756942","https://openalex.org/W4399621287","https://openalex.org/W1987161438","https://openalex.org/W2888620174","https://openalex.org/W2161470416"],"abstract_inverted_index":{"The":[0],"rising":[1],"prominence":[2],"of":[3,22,41,89],"heterogeneous":[4],"integration,":[5],"coupled":[6],"with":[7,71,99,120],"increase":[8,109],"in":[9,29,68,92,110],"device":[10],"power,":[11],"presents":[12],"unique":[13],"thermal":[14,62],"challenges.":[15],"Past":[16],"work":[17],"has":[18],"demonstrated":[19],"the":[20,37,65,87,121,134],"benefits":[21,40],"mono-lithic":[23],"microfluidic":[24,72],"cooling":[25,73],"for":[26,103,114],"mitigating":[27],"these":[28],"2.5D":[30,94],"ICs.":[31],"In":[32],"this":[33,42],"paper,":[34],"we":[35,80],"evaluate":[36],"electrical":[38],"performance":[39],"technology":[43],"using":[44,124],"finite":[45],"element":[46],"modeling":[47],"and":[48,97],"experimental":[49],"demonstration":[50],"on":[51,86],"functional":[52],"silicon.":[53],"Ansys":[54],"models":[55],"show":[56],"up":[57],"to":[58,75,133],"23.3":[59],"\u00d7":[60],"lower":[61],"coupling":[63],"between":[64],"core":[66],"chiplets":[67,91],"a":[69,82,93,125],"CPU":[70],"compared":[74,132],"traditional":[76],"air-cooled":[77],"configurations.":[78],"Finally,":[79],"demonstrate":[81],"micropin-fin":[83],"heatsink":[84,123],"etched":[85],"backside":[88],"five":[90],"FPGA":[95],"package":[96],"capped":[98],"3D":[100],"printed":[101],"manifolds":[102],"fluid":[104],"delivery.":[105],"A":[106],"50.5":[107],"%":[108],"sustained":[111],"power":[112],"dissipation":[113],"similar":[115],"die":[116],"temperatures":[117],"was":[118],"achieved":[119],"monolithic":[122],"52.5":[126],"\u00b0C":[127],"DI":[128],"water":[129],"inlet,":[130],"when":[131],"stock":[135],"cold-plate.":[136]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}
