{"id":"https://openalex.org/W2029469330","doi":"https://doi.org/10.1109/3dic.2012.6263015","title":"Low temperature Au-Au bonding with VUV/O&lt;inf&gt;3&lt;/inf&gt; treatment","display_name":"Low temperature Au-Au bonding with VUV/O&lt;inf&gt;3&lt;/inf&gt; treatment","publication_year":2012,"publication_date":"2012-01-01","ids":{"openalex":"https://openalex.org/W2029469330","doi":"https://doi.org/10.1109/3dic.2012.6263015","mag":"2029469330"},"language":"en","primary_location":{"id":"doi:10.1109/3dic.2012.6263015","is_oa":false,"landing_page_url":"https://doi.org/10.1109/3dic.2012.6263015","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 IEEE International 3D Systems Integration Conference (3DIC), 2011 IEEE International","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5017356313","display_name":"Akiko Okada","orcid":null},"institutions":[{"id":"https://openalex.org/I150744194","display_name":"Waseda University","ror":"https://ror.org/00ntfnx83","country_code":"JP","type":"education","lineage":["https://openalex.org/I150744194"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Akiko Okada","raw_affiliation_strings":["Waseda University, Shinjuku, Tokyo, Japan","Waseda University, 3-4-1 Okubo, Shinzuku-ku, Tokyo 169-8555, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Waseda University, Shinjuku, Tokyo, Japan","institution_ids":["https://openalex.org/I150744194"]},{"raw_affiliation_string":"Waseda University, 3-4-1 Okubo, Shinzuku-ku, Tokyo 169-8555, Japan","institution_ids":["https://openalex.org/I150744194"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5090127415","display_name":"Masatsugu Nimura","orcid":null},"institutions":[{"id":"https://openalex.org/I150744194","display_name":"Waseda University","ror":"https://ror.org/00ntfnx83","country_code":"JP","type":"education","lineage":["https://openalex.org/I150744194"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Masatsugu Nimura","raw_affiliation_strings":["Waseda University, Shinjuku, Tokyo, Japan","Waseda University, 3-4-1 Okubo, Shinzuku-ku, Tokyo 169-8555, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Waseda University, Shinjuku, Tokyo, Japan","institution_ids":["https://openalex.org/I150744194"]},{"raw_affiliation_string":"Waseda University, 3-4-1 Okubo, Shinzuku-ku, Tokyo 169-8555, Japan","institution_ids":["https://openalex.org/I150744194"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034169650","display_name":"Naoko Unami","orcid":null},"institutions":[{"id":"https://openalex.org/I150744194","display_name":"Waseda University","ror":"https://ror.org/00ntfnx83","country_code":"JP","type":"education","lineage":["https://openalex.org/I150744194"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Naoko Unami","raw_affiliation_strings":["Waseda University, Shinjuku, Tokyo, Japan","Waseda University, 3-4-1 Okubo, Shinzuku-ku, Tokyo 169-8555, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Waseda University, Shinjuku, Tokyo, Japan","institution_ids":["https://openalex.org/I150744194"]},{"raw_affiliation_string":"Waseda University, 3-4-1 Okubo, Shinzuku-ku, Tokyo 169-8555, Japan","institution_ids":["https://openalex.org/I150744194"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072448642","display_name":"Akitsu Shigetou","orcid":"https://orcid.org/0000-0001-7054-3674"},"institutions":[{"id":"https://openalex.org/I205401836","display_name":"National Institute for Materials Science","ror":"https://ror.org/026v1ze26","country_code":"JP","type":"facility","lineage":["https://openalex.org/I205401836"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Akitsu Shigetou","raw_affiliation_strings":["National Institute for Materials and Science, Tsukuba, Ibaraki, Japan","National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044 (Japan)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Institute for Materials and Science, Tsukuba, Ibaraki, Japan","institution_ids":["https://openalex.org/I205401836"]},{"raw_affiliation_string":"National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044 (Japan)","institution_ids":["https://openalex.org/I205401836"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055358102","display_name":"Hirokazu Noma","orcid":"https://orcid.org/0000-0002-3196-3120"},"institutions":[{"id":"https://openalex.org/I4210145865","display_name":"IBM Research - Tokyo","ror":"https://ror.org/04915qk43","country_code":"JP","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4210145865"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hirokazu Noma","raw_affiliation_strings":["IBM Research Tokyo, Yamato, Kanagawa, Japan","IBM Research - Tokyo, 1623-14 Shimotsuruma, Yamato-shi, Kanagawa 242-8502, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research Tokyo, Yamato, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210145865"]},{"raw_affiliation_string":"IBM Research - Tokyo, 1623-14 Shimotsuruma, Yamato-shi, Kanagawa 242-8502, Japan","institution_ids":["https://openalex.org/I4210145865"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068016358","display_name":"Katsuyuki Sakuma","orcid":"https://orcid.org/0000-0001-8162-7064"},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Katsuyuki Sakuma","raw_affiliation_strings":["Microelectronics Division, IBM, Corporation, Hopewell Junction, NY, USA","IBM Corporation, Microelectronics Division, 2070 Route 52, Hopewell Jct, NY 12533, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Microelectronics Division, IBM, Corporation, Hopewell Junction, NY, USA","institution_ids":["https://openalex.org/I1341412227"]},{"raw_affiliation_string":"IBM Corporation, Microelectronics Division, 2070 Route 52, Hopewell Jct, NY 12533, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109152704","display_name":"Jun Mizuno","orcid":null},"institutions":[{"id":"https://openalex.org/I150744194","display_name":"Waseda University","ror":"https://ror.org/00ntfnx83","country_code":"JP","type":"education","lineage":["https://openalex.org/I150744194"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Jun Mizuno","raw_affiliation_strings":["Waseda University, Shinjuku, Tokyo, Japan","Waseda University, 3-4-1 Okubo, Shinzuku-ku, Tokyo 169-8555, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Waseda University, Shinjuku, Tokyo, Japan","institution_ids":["https://openalex.org/I150744194"]},{"raw_affiliation_string":"Waseda University, 3-4-1 Okubo, Shinzuku-ku, Tokyo 169-8555, Japan","institution_ids":["https://openalex.org/I150744194"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5113615582","display_name":"Shuichi Shoji","orcid":null},"institutions":[{"id":"https://openalex.org/I150744194","display_name":"Waseda University","ror":"https://ror.org/00ntfnx83","country_code":"JP","type":"education","lineage":["https://openalex.org/I150744194"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Shuichi Shoji","raw_affiliation_strings":["Waseda University, Shinjuku, Tokyo, Japan","Waseda University, 3-4-1 Okubo, Shinzuku-ku, Tokyo 169-8555, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Waseda University, Shinjuku, Tokyo, Japan","institution_ids":["https://openalex.org/I150744194"]},{"raw_affiliation_string":"Waseda University, 3-4-1 Okubo, Shinzuku-ku, Tokyo 169-8555, Japan","institution_ids":["https://openalex.org/I150744194"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"5"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10460","display_name":"Electronic Packaging and Soldering Technologies","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/x-ray-photoelectron-spectroscopy","display_name":"X-ray photoelectron spectroscopy","score":0.7433605194091797},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.42280322313308716},{"id":"https://openalex.org/keywords/spectroscopy","display_name":"Spectroscopy","score":0.41640934348106384},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.38745108246803284},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.3817981481552124},{"id":"https://openalex.org/keywords/nuclear-chemistry","display_name":"Nuclear chemistry","score":0.34252387285232544},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3321703374385834},{"id":"https://openalex.org/keywords/stereochemistry","display_name":"Stereochemistry","score":0.32765886187553406},{"id":"https://openalex.org/keywords/crystallography","display_name":"Crystallography","score":0.3228607475757599},{"id":"https://openalex.org/keywords/organic-chemistry","display_name":"Organic chemistry","score":0.15604093670845032},{"id":"https://openalex.org/keywords/nuclear-magnetic-resonance","display_name":"Nuclear magnetic resonance","score":0.1057087779045105}],"concepts":[{"id":"https://openalex.org/C175708663","wikidata":"https://www.wikidata.org/wiki/Q899559","display_name":"X-ray photoelectron spectroscopy","level":2,"score":0.7433605194091797},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.42280322313308716},{"id":"https://openalex.org/C32891209","wikidata":"https://www.wikidata.org/wiki/Q483666","display_name":"Spectroscopy","level":2,"score":0.41640934348106384},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.38745108246803284},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.3817981481552124},{"id":"https://openalex.org/C13965031","wikidata":"https://www.wikidata.org/wiki/Q243545","display_name":"Nuclear chemistry","level":1,"score":0.34252387285232544},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3321703374385834},{"id":"https://openalex.org/C71240020","wikidata":"https://www.wikidata.org/wiki/Q186011","display_name":"Stereochemistry","level":1,"score":0.32765886187553406},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.3228607475757599},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.15604093670845032},{"id":"https://openalex.org/C46141821","wikidata":"https://www.wikidata.org/wiki/Q209402","display_name":"Nuclear magnetic resonance","level":1,"score":0.1057087779045105},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/3dic.2012.6263015","is_oa":false,"landing_page_url":"https://doi.org/10.1109/3dic.2012.6263015","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 IEEE International 3D Systems Integration Conference (3DIC), 2011 IEEE International","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.800000011920929,"id":"https://metadata.un.org/sdg/6","display_name":"Clean water and sanitation"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320322638","display_name":"Waseda University","ror":"https://ror.org/00ntfnx83"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W1603466631","https://openalex.org/W1863116641","https://openalex.org/W1983191281","https://openalex.org/W1990980952","https://openalex.org/W2009195513","https://openalex.org/W2051909620","https://openalex.org/W2126971590","https://openalex.org/W2127177678"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W1563898689","https://openalex.org/W2562923617","https://openalex.org/W2343304170","https://openalex.org/W4312561360","https://openalex.org/W3082102535","https://openalex.org/W4319874906","https://openalex.org/W2154455733","https://openalex.org/W2792463447","https://openalex.org/W2177706619"],"abstract_inverted_index":{"This":[0],"paper":[1],"describes":[2],"low":[3],"temperature":[4],"Au-Au":[5,82,122],"bonding":[6,83],"with":[7,84],"vacuum":[8],"ultraviolet":[9],"(VUV)":[10],"irradiation":[11],"in":[12,71,121],"the":[13,37,75],"presence":[14],"of":[15,28,97,100],"oxygen":[16],"gas.":[17],"The":[18,33,55,81,95],"VUV/O":[19,38,76,85,114],"<sub":[20,39,77,86,115],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[21,40,78,87,116],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">3</sub>":[22,41,79,88,117],"treatment":[23,42,89,118],"can":[24],"remove":[25],"organic":[26],"contaminants":[27,60],"Au":[29,34,72],"surfaces":[30,35,73],"without":[31],"damages.":[32],"after":[36],"were":[43,61,67],"analyzed":[44],"by":[45,74],"X-ray":[46],"photoelectron":[47],"spectroscopy":[48],"(XPS)":[49],"and":[50,64],"atomic":[51],"force":[52],"microscopy":[53],"(AFM).":[54],"results":[56],"show":[57],"that":[58,65,113],"carbon-based":[59],"dramatically":[62],"decreased":[63],"there":[66],"no":[68],"serious":[69],"damages":[70],"treatment.":[80],"was":[90,107,111],"achieved":[91],"at":[92],"200":[93],"\u00b0C.":[94],"average":[96],"shear":[98],"strength":[99],"about":[101],"80":[102],"MPa":[103],"per":[104],"unit":[105],"area":[106],"obtained.":[108],"Therefore,":[109],"it":[110],"proved":[112],"is":[119],"effective":[120],"bonding.":[123]},"counts_by_year":[{"year":2015,"cited_by_count":1}],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}