{"id":"https://openalex.org/W1989706532","doi":"https://doi.org/10.1109/3dic.2012.6263007","title":"Effect of frequency in the 3D integration of a PZT-actuated MEMS switch using a single crystal silicon asymmetric beam","display_name":"Effect of frequency in the 3D integration of a PZT-actuated MEMS switch using a single crystal silicon asymmetric beam","publication_year":2012,"publication_date":"2012-01-01","ids":{"openalex":"https://openalex.org/W1989706532","doi":"https://doi.org/10.1109/3dic.2012.6263007","mag":"1989706532"},"language":"en","primary_location":{"id":"doi:10.1109/3dic.2012.6263007","is_oa":false,"landing_page_url":"https://doi.org/10.1109/3dic.2012.6263007","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 IEEE International 3D Systems Integration Conference (3DIC), 2011 IEEE International","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5110325877","display_name":"Fumihiko Nakazawa","orcid":null},"institutions":[{"id":"https://openalex.org/I4210127336","display_name":"Association of Super-Advanced Electronics","ror":"https://ror.org/0292ym357","country_code":"JP","type":"other","lineage":["https://openalex.org/I4210127336"]},{"id":"https://openalex.org/I2252096349","display_name":"Fujitsu (Japan)","ror":"https://ror.org/038e2g226","country_code":"JP","type":"company","lineage":["https://openalex.org/I2252096349"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Fumihiko Nakazawa","raw_affiliation_strings":["3D-Integration Technology Research Department, ASET (Association of Super-Advanced Electronics Technologies), Japan","FUJITSU Limited, Japan"],"affiliations":[{"raw_affiliation_string":"3D-Integration Technology Research Department, ASET (Association of Super-Advanced Electronics Technologies), Japan","institution_ids":["https://openalex.org/I4210127336"]},{"raw_affiliation_string":"FUJITSU Limited, Japan","institution_ids":["https://openalex.org/I2252096349"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5063522772","display_name":"Takeaki Shimanouchi","orcid":null},"institutions":[{"id":"https://openalex.org/I2252096349","display_name":"Fujitsu (Japan)","ror":"https://ror.org/038e2g226","country_code":"JP","type":"company","lineage":["https://openalex.org/I2252096349"]},{"id":"https://openalex.org/I4210127336","display_name":"Association of Super-Advanced Electronics","ror":"https://ror.org/0292ym357","country_code":"JP","type":"other","lineage":["https://openalex.org/I4210127336"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Takeaki Shimanouchi","raw_affiliation_strings":["3D-Integration Technology Research Department, ASET (Association of Super-Advanced Electronics Technologies), Japan","FUJITSU Limited, Japan"],"affiliations":[{"raw_affiliation_string":"3D-Integration Technology Research Department, ASET (Association of Super-Advanced Electronics Technologies), Japan","institution_ids":["https://openalex.org/I4210127336"]},{"raw_affiliation_string":"FUJITSU Limited, Japan","institution_ids":["https://openalex.org/I2252096349"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103707368","display_name":"Tadashi Nakatani","orcid":null},"institutions":[{"id":"https://openalex.org/I2252096349","display_name":"Fujitsu (Japan)","ror":"https://ror.org/038e2g226","country_code":"JP","type":"company","lineage":["https://openalex.org/I2252096349"]},{"id":"https://openalex.org/I4210127336","display_name":"Association of Super-Advanced Electronics","ror":"https://ror.org/0292ym357","country_code":"JP","type":"other","lineage":["https://openalex.org/I4210127336"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Tadashi Nakatani","raw_affiliation_strings":["3D-Integration Technology Research Department, ASET (Association of Super-Advanced Electronics Technologies), Japan","FUJITSU Limited, Japan"],"affiliations":[{"raw_affiliation_string":"3D-Integration Technology Research Department, ASET (Association of Super-Advanced Electronics Technologies), Japan","institution_ids":["https://openalex.org/I4210127336"]},{"raw_affiliation_string":"FUJITSU Limited, Japan","institution_ids":["https://openalex.org/I2252096349"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5012129904","display_name":"T. Katsuki","orcid":null},"institutions":[{"id":"https://openalex.org/I4210127336","display_name":"Association of Super-Advanced Electronics","ror":"https://ror.org/0292ym357","country_code":"JP","type":"other","lineage":["https://openalex.org/I4210127336"]},{"id":"https://openalex.org/I2252096349","display_name":"Fujitsu (Japan)","ror":"https://ror.org/038e2g226","country_code":"JP","type":"company","lineage":["https://openalex.org/I2252096349"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Takashi Katsuki","raw_affiliation_strings":["3D-Integration Technology Research Department, ASET (Association of Super-Advanced Electronics Technologies), Japan","FUJITSU Limited, Japan"],"affiliations":[{"raw_affiliation_string":"3D-Integration Technology Research Department, ASET (Association of Super-Advanced Electronics Technologies), Japan","institution_ids":["https://openalex.org/I4210127336"]},{"raw_affiliation_string":"FUJITSU Limited, Japan","institution_ids":["https://openalex.org/I2252096349"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5008236563","display_name":"H. Okuda","orcid":null},"institutions":[{"id":"https://openalex.org/I2252096349","display_name":"Fujitsu (Japan)","ror":"https://ror.org/038e2g226","country_code":"JP","type":"company","lineage":["https://openalex.org/I2252096349"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hisao Okuda","raw_affiliation_strings":["FUJITSU Limited, Japan"],"affiliations":[{"raw_affiliation_string":"FUJITSU Limited, Japan","institution_ids":["https://openalex.org/I2252096349"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073990880","display_name":"Osamu Toyoda","orcid":null},"institutions":[{"id":"https://openalex.org/I4210127336","display_name":"Association of Super-Advanced Electronics","ror":"https://ror.org/0292ym357","country_code":"JP","type":"other","lineage":["https://openalex.org/I4210127336"]},{"id":"https://openalex.org/I2252096349","display_name":"Fujitsu (Japan)","ror":"https://ror.org/038e2g226","country_code":"JP","type":"company","lineage":["https://openalex.org/I2252096349"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Osamu Toyoda","raw_affiliation_strings":["3D-Integration Technology Research Department, ASET (Association of Super-Advanced Electronics Technologies), Japan","FUJITSU Limited, Japan"],"affiliations":[{"raw_affiliation_string":"3D-Integration Technology Research Department, ASET (Association of Super-Advanced Electronics Technologies), Japan","institution_ids":["https://openalex.org/I4210127336"]},{"raw_affiliation_string":"FUJITSU Limited, Japan","institution_ids":["https://openalex.org/I2252096349"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5102167690","display_name":"Satoshi Ueda","orcid":null},"institutions":[{"id":"https://openalex.org/I4210127336","display_name":"Association of Super-Advanced Electronics","ror":"https://ror.org/0292ym357","country_code":"JP","type":"other","lineage":["https://openalex.org/I4210127336"]},{"id":"https://openalex.org/I2252096349","display_name":"Fujitsu (Japan)","ror":"https://ror.org/038e2g226","country_code":"JP","type":"company","lineage":["https://openalex.org/I2252096349"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Satoshi Ueda","raw_affiliation_strings":["3D-Integration Technology Research Department, ASET (Association of Super-Advanced Electronics Technologies), Japan","FUJITSU Limited, Japan"],"affiliations":[{"raw_affiliation_string":"3D-Integration Technology Research Department, ASET (Association of Super-Advanced Electronics Technologies), Japan","institution_ids":["https://openalex.org/I4210127336"]},{"raw_affiliation_string":"FUJITSU Limited, Japan","institution_ids":["https://openalex.org/I2252096349"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5110325877"],"corresponding_institution_ids":["https://openalex.org/I2252096349","https://openalex.org/I4210127336"],"apc_list":null,"apc_paid":null,"fwci":0.491,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.66819573,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"18","issue":null,"first_page":"1","last_page":"5"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.8668378591537476},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7786787152290344},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.6330932974815369},{"id":"https://openalex.org/keywords/radio-frequency","display_name":"Radio frequency","score":0.6002457737922668},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.5510061383247375},{"id":"https://openalex.org/keywords/beam","display_name":"Beam (structure)","score":0.5490619540214539},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5357745289802551},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.507389485836029},{"id":"https://openalex.org/keywords/transducer","display_name":"Transducer","score":0.4932822585105896},{"id":"https://openalex.org/keywords/insertion-loss","display_name":"Insertion loss","score":0.4662178158760071},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3637448847293854},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.20140907168388367},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1610935628414154},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.07053592801094055}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.8668378591537476},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7786787152290344},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.6330932974815369},{"id":"https://openalex.org/C74064498","wikidata":"https://www.wikidata.org/wiki/Q3396184","display_name":"Radio frequency","level":2,"score":0.6002457737922668},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5510061383247375},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.5490619540214539},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5357745289802551},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.507389485836029},{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.4932822585105896},{"id":"https://openalex.org/C90327742","wikidata":"https://www.wikidata.org/wiki/Q947396","display_name":"Insertion loss","level":2,"score":0.4662178158760071},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3637448847293854},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.20140907168388367},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1610935628414154},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.07053592801094055},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/3dic.2012.6263007","is_oa":false,"landing_page_url":"https://doi.org/10.1109/3dic.2012.6263007","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 IEEE International 3D Systems Integration Conference (3DIC), 2011 IEEE International","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.8199999928474426,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320321679","display_name":"Ministry of Economy, Trade and Industry","ror":"https://ror.org/055tm7f07"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":15,"referenced_works":["https://openalex.org/W199706877","https://openalex.org/W1539439118","https://openalex.org/W2005963883","https://openalex.org/W2018817588","https://openalex.org/W2026363840","https://openalex.org/W2036527340","https://openalex.org/W2070394675","https://openalex.org/W2095725533","https://openalex.org/W2113758686","https://openalex.org/W2135064357","https://openalex.org/W2136007489","https://openalex.org/W2164251907","https://openalex.org/W2929422303","https://openalex.org/W4230282064","https://openalex.org/W6632203421"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W2060249924","https://openalex.org/W1516468884","https://openalex.org/W1604868505","https://openalex.org/W2917030261","https://openalex.org/W2404132866","https://openalex.org/W2012676207","https://openalex.org/W2146388118","https://openalex.org/W2090056954","https://openalex.org/W3147236441"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"the":[3,78],"effect":[4,98],"of":[5,7,99,101,136],"frequency":[6,9,100],"radio":[8],"microelectromechanical":[10],"system":[11],"(RF":[12],"MEMS)":[13],"3D":[14,102,122],"integration":[15,103],"with":[16,106,133],"an":[17,107,129],"actual":[18],"device.":[19],"A":[20],"piezoelectric":[21],"transducer":[22],"(PZT)-actuated":[23],"RF":[24,108,130],"MEMS":[25,109,131],"switch":[26,59,110,132],"that":[27,120],"uses":[28],"a":[29,43,53,112,121,125,134],"single":[30],"crystal":[31],"silicon":[32],"asymmetric":[33],"beam":[34,45],"was":[35,61,104,141],"designed,":[36],"fabricated,":[37],"and":[38,70,85,90,111,128],"evaluated.":[39],"We":[40,118],"successfully":[41,142],"drove":[42],"stiff":[44],"(with":[46],"spring":[47],"constant":[48],">;":[49],"2,000":[50],"N/m)":[51],"despite":[52],"low":[54,67],"voltage":[55],"(<;15":[56],"V).":[57],"The":[58,81,97],"lifetime":[60],"4":[62],"\u00d7":[63,74],"107":[64],"cycles":[65,76],"at":[66],"contact":[68],"resistance":[69],"more":[71,137],"than":[72,138],"1":[73],"109":[75],"for":[77],"PZT":[79],"actuator.":[80],"overall":[82],"insertion":[83],"loss":[84],"isolation":[86],"were":[87],"-0.3":[88],"dB":[89],"-25":[91],"dB,":[92],"respectively,":[93],"up":[94],"to":[95],"5GHz.":[96],"simulated":[105],"ground":[113],"plane":[114],"placed":[115],"over":[116],"it.":[117],"discovered":[119],"IC":[123,127],"comprising":[124],"control":[126],"distance":[135],"80":[139],"\u03bcm":[140],"integrated.":[143]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}