{"id":"https://openalex.org/W2110689917","doi":"https://doi.org/10.1109/3dic.2009.5306534","title":"An innovative die to wafer 3D integration scheme: Die to wafer oxide or copper direct bonding with planarised oxide inter-die filling","display_name":"An innovative die to wafer 3D integration scheme: Die to wafer oxide or copper direct bonding with planarised oxide inter-die filling","publication_year":2009,"publication_date":"2009-09-01","ids":{"openalex":"https://openalex.org/W2110689917","doi":"https://doi.org/10.1109/3dic.2009.5306534","mag":"2110689917"},"language":"en","primary_location":{"id":"doi:10.1109/3dic.2009.5306534","is_oa":false,"landing_page_url":"https://doi.org/10.1109/3dic.2009.5306534","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 IEEE International Conference on 3D System Integration","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5004087886","display_name":"L. Di Cioccio","orcid":"https://orcid.org/0000-0002-9327-7118"},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":true,"raw_author_name":"Lea Di Cioccio","raw_affiliation_strings":["CEA, LETI, MINATEC, Grenoble, France","CEA/Leti-Minatec, Grenoble Cedex 9, France"],"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC, Grenoble, France","institution_ids":["https://openalex.org/I4210150049","https://openalex.org/I899635006","https://openalex.org/I106785703","https://openalex.org/I3020098449","https://openalex.org/I2738703131"]},{"raw_affiliation_string":"CEA/Leti-Minatec, Grenoble Cedex 9, France","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I106785703","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026052355","display_name":"Pierric Gueguen","orcid":null},"institutions":[{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Pierric Gueguen","raw_affiliation_strings":["CEA, LETI, MINATEC, Grenoble, France","CEA/Leti-Minatec, Grenoble Cedex 9, France"],"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC, Grenoble, France","institution_ids":["https://openalex.org/I4210150049","https://openalex.org/I899635006","https://openalex.org/I106785703","https://openalex.org/I3020098449","https://openalex.org/I2738703131"]},{"raw_affiliation_string":"CEA/Leti-Minatec, Grenoble Cedex 9, France","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I106785703","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037061459","display_name":"R. Ta\u00efbi","orcid":null},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Rachid Taibi","raw_affiliation_strings":["STMicroelectronics, Crolles Cedex, France"],"affiliations":[{"raw_affiliation_string":"STMicroelectronics, Crolles Cedex, France","institution_ids":["https://openalex.org/I4210104693"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5008648057","display_name":"Thomas Signamarcheix","orcid":null},"institutions":[{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Thomas Signamarcheix","raw_affiliation_strings":["CEA, LETI, MINATEC, Grenoble, France","CEA/Leti-Minatec, Grenoble Cedex 9, France"],"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC, Grenoble, France","institution_ids":["https://openalex.org/I4210150049","https://openalex.org/I899635006","https://openalex.org/I106785703","https://openalex.org/I3020098449","https://openalex.org/I2738703131"]},{"raw_affiliation_string":"CEA/Leti-Minatec, Grenoble Cedex 9, France","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I106785703","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011494970","display_name":"Laurent Bally","orcid":null},"institutions":[{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Laurent Bally","raw_affiliation_strings":["CEA, LETI, MINATEC, Grenoble, France","CEA/Leti-Minatec, Grenoble Cedex 9, France"],"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC, Grenoble, France","institution_ids":["https://openalex.org/I4210150049","https://openalex.org/I899635006","https://openalex.org/I106785703","https://openalex.org/I3020098449","https://openalex.org/I2738703131"]},{"raw_affiliation_string":"CEA/Leti-Minatec, Grenoble Cedex 9, France","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I106785703","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043458818","display_name":"L. Vandroux","orcid":null},"institutions":[{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Laurent Vandroux","raw_affiliation_strings":["CEA, LETI, MINATEC, Grenoble, France","CEA/Leti-Minatec, Grenoble Cedex 9, France"],"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC, Grenoble, France","institution_ids":["https://openalex.org/I4210150049","https://openalex.org/I899635006","https://openalex.org/I106785703","https://openalex.org/I3020098449","https://openalex.org/I2738703131"]},{"raw_affiliation_string":"CEA/Leti-Minatec, Grenoble Cedex 9, France","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I106785703","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033394992","display_name":"Marc Zussy","orcid":null},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Marc Zussy","raw_affiliation_strings":["CEA, LETI, MINATEC, Grenoble, France","CEA/Leti-Minatec, Grenoble Cedex 9, France"],"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC, Grenoble, France","institution_ids":["https://openalex.org/I4210150049","https://openalex.org/I899635006","https://openalex.org/I106785703","https://openalex.org/I3020098449","https://openalex.org/I2738703131"]},{"raw_affiliation_string":"CEA/Leti-Minatec, Grenoble Cedex 9, France","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I106785703","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5013838245","display_name":"S. Verrun","orcid":null},"institutions":[{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Sophie Verrun","raw_affiliation_strings":["CEA, LETI, MINATEC, Grenoble, France","CEA/Leti-Minatec, Grenoble Cedex 9, France"],"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC, Grenoble, France","institution_ids":["https://openalex.org/I4210150049","https://openalex.org/I899635006","https://openalex.org/I106785703","https://openalex.org/I3020098449","https://openalex.org/I2738703131"]},{"raw_affiliation_string":"CEA/Leti-Minatec, Grenoble Cedex 9, France","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I106785703","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5083809568","display_name":"J. Dechamp","orcid":null},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Jerome Dechamp","raw_affiliation_strings":["CEA, LETI, MINATEC, Grenoble, France","CEA/Leti-Minatec, Grenoble Cedex 9, France"],"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC, Grenoble, France","institution_ids":["https://openalex.org/I4210150049","https://openalex.org/I899635006","https://openalex.org/I106785703","https://openalex.org/I3020098449","https://openalex.org/I2738703131"]},{"raw_affiliation_string":"CEA/Leti-Minatec, Grenoble Cedex 9, France","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I106785703","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108282276","display_name":"Patrick Leduc","orcid":null},"institutions":[{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Patrick Leduc","raw_affiliation_strings":["CEA, LETI, MINATEC, Grenoble, France","CEA/Leti-Minatec, Grenoble Cedex 9, France"],"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC, Grenoble, France","institution_ids":["https://openalex.org/I4210150049","https://openalex.org/I899635006","https://openalex.org/I106785703","https://openalex.org/I3020098449","https://openalex.org/I2738703131"]},{"raw_affiliation_string":"CEA/Leti-Minatec, Grenoble Cedex 9, France","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I106785703","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5025019764","display_name":"M. Assous","orcid":null},"institutions":[{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Myriam Assous","raw_affiliation_strings":["CEA, LETI, MINATEC, Grenoble, France","CEA/Leti-Minatec, Grenoble Cedex 9, France"],"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC, Grenoble, France","institution_ids":["https://openalex.org/I4210150049","https://openalex.org/I899635006","https://openalex.org/I106785703","https://openalex.org/I3020098449","https://openalex.org/I2738703131"]},{"raw_affiliation_string":"CEA/Leti-Minatec, Grenoble Cedex 9, France","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I106785703","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042498129","display_name":"D. Bouchu","orcid":null},"institutions":[{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"David Bouchu","raw_affiliation_strings":["CEA, LETI, MINATEC, Grenoble, France","CEA/Leti-Minatec, Grenoble Cedex 9, France"],"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC, Grenoble, France","institution_ids":["https://openalex.org/I4210150049","https://openalex.org/I899635006","https://openalex.org/I106785703","https://openalex.org/I3020098449","https://openalex.org/I2738703131"]},{"raw_affiliation_string":"CEA/Leti-Minatec, Grenoble Cedex 9, France","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I106785703","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022942527","display_name":"F. de Cr\u00e9cy","orcid":null},"institutions":[{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Francois de Crecy","raw_affiliation_strings":["CEA, LETI, MINATEC, Grenoble, France","CEA/Leti-Minatec, Grenoble Cedex 9, France"],"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC, Grenoble, France","institution_ids":["https://openalex.org/I4210150049","https://openalex.org/I899635006","https://openalex.org/I106785703","https://openalex.org/I3020098449","https://openalex.org/I2738703131"]},{"raw_affiliation_string":"CEA/Leti-Minatec, Grenoble Cedex 9, France","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I106785703","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039265788","display_name":"L.L. Chapelon","orcid":"https://orcid.org/0000-0002-5044-0982"},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Laurent-Luc Chapelon","raw_affiliation_strings":["STMicroelectronics, Crolles Cedex, France"],"affiliations":[{"raw_affiliation_string":"STMicroelectronics, Crolles Cedex, France","institution_ids":["https://openalex.org/I4210104693"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5007776830","display_name":"L. Clavelier","orcid":null},"institutions":[{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I106785703","display_name":"Institut polytechnique de Grenoble","ror":"https://ror.org/05sbt2524","country_code":"FR","type":"education","lineage":["https://openalex.org/I106785703","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Laurent Clavelier","raw_affiliation_strings":["CEA/Leti-Minatec, Grenoble Cedex 9, France"],"affiliations":[{"raw_affiliation_string":"CEA/Leti-Minatec, Grenoble Cedex 9, France","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I106785703","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":15,"corresponding_author_ids":["https://openalex.org/A5004087886"],"corresponding_institution_ids":["https://openalex.org/I106785703","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210150049","https://openalex.org/I899635006"],"apc_list":null,"apc_paid":null,"fwci":2.9908,"has_fulltext":false,"cited_by_count":20,"citation_normalized_percentile":{"value":0.91383229,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10460","display_name":"Electronic Packaging and Soldering Technologies","score":0.9979000091552734,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10783","display_name":"Additive Manufacturing and 3D Printing Technologies","score":0.9901000261306763,"subfield":{"id":"https://openalex.org/subfields/2203","display_name":"Automotive Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/die","display_name":"Die (integrated circuit)","score":0.8674558401107788},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.7952120900154114},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7110528945922852},{"id":"https://openalex.org/keywords/oxide","display_name":"Oxide","score":0.6476974487304688},{"id":"https://openalex.org/keywords/stacking","display_name":"Stacking","score":0.5798119306564331},{"id":"https://openalex.org/keywords/wafer-bonding","display_name":"Wafer bonding","score":0.4700036644935608},{"id":"https://openalex.org/keywords/copper","display_name":"Copper","score":0.45030319690704346},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4385700821876526},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.4146023094654083},{"id":"https://openalex.org/keywords/metallurgy","display_name":"Metallurgy","score":0.34904375672340393},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.21170616149902344},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.08003512024879456}],"concepts":[{"id":"https://openalex.org/C111106434","wikidata":"https://www.wikidata.org/wiki/Q1072430","display_name":"Die (integrated circuit)","level":2,"score":0.8674558401107788},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.7952120900154114},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7110528945922852},{"id":"https://openalex.org/C2779851234","wikidata":"https://www.wikidata.org/wiki/Q50690","display_name":"Oxide","level":2,"score":0.6476974487304688},{"id":"https://openalex.org/C33347731","wikidata":"https://www.wikidata.org/wiki/Q285210","display_name":"Stacking","level":2,"score":0.5798119306564331},{"id":"https://openalex.org/C2779133538","wikidata":"https://www.wikidata.org/wiki/Q677010","display_name":"Wafer bonding","level":3,"score":0.4700036644935608},{"id":"https://openalex.org/C544778455","wikidata":"https://www.wikidata.org/wiki/Q753","display_name":"Copper","level":2,"score":0.45030319690704346},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4385700821876526},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.4146023094654083},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.34904375672340393},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.21170616149902344},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.08003512024879456},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/3dic.2009.5306534","is_oa":false,"landing_page_url":"https://doi.org/10.1109/3dic.2009.5306534","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 IEEE International Conference on 3D System Integration","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2017707213","https://openalex.org/W2053597733","https://openalex.org/W2228105431","https://openalex.org/W2025337696","https://openalex.org/W2073096817","https://openalex.org/W2488020685","https://openalex.org/W3043339446","https://openalex.org/W2540312267","https://openalex.org/W2068447932","https://openalex.org/W2936104641"],"abstract_inverted_index":{"An":[0],"innovative":[1],"die":[2],"to":[3,21,49,59],"wafer":[4,19],"stacking":[5],"is":[6,47,56],"proposed":[7],"for":[8],"3D":[9],"devices.":[10],"Known":[11],"good":[12],"dices":[13],"are":[14,30],"bonded":[15],"on":[16],"a":[17,37,40,61],"processed":[18],"thanks":[20],"direct":[22],"bonding.":[23],"Oxide":[24],"layers":[25,29],"or":[26],"patterned":[27],"oxide/copper":[28],"used":[31],"as":[32],"the":[33,51,67],"bonding":[34],"medium.":[35],"After":[36],"first":[38],"thinning,":[39],"low":[41],"stress":[42],"high":[43],"deposition":[44],"rate":[45],"oxide":[46],"deposited":[48],"embed":[50],"dices.":[52],"A":[53],"final":[54],"thinning":[55],"then":[57],"done":[58],"recover":[60],"flat":[62],"and":[63],"smooth":[64],"surface":[65],"before":[66],"trough":[68],"silicon":[69],"vias.":[70]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":3},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2012,"cited_by_count":3}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}