{"id":"https://openalex.org/W2146944751","doi":"https://doi.org/10.1109/3dic.2009.5306526","title":"Ultralow impedance evaluation system of wideband frequency for power distribution network of decoupling capacitor embedded substrates","display_name":"Ultralow impedance evaluation system of wideband frequency for power distribution network of decoupling capacitor embedded substrates","publication_year":2009,"publication_date":"2009-09-01","ids":{"openalex":"https://openalex.org/W2146944751","doi":"https://doi.org/10.1109/3dic.2009.5306526","mag":"2146944751"},"language":"en","primary_location":{"id":"doi:10.1109/3dic.2009.5306526","is_oa":false,"landing_page_url":"https://doi.org/10.1109/3dic.2009.5306526","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 IEEE International Conference on 3D System Integration","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5056765632","display_name":"Katsuya Kikuchi","orcid":"https://orcid.org/0000-0001-7590-8409"},"institutions":[{"id":"https://openalex.org/I73613424","display_name":"National Institute of Advanced Industrial Science and Technology","ror":"https://ror.org/01703db54","country_code":"JP","type":"government","lineage":["https://openalex.org/I73613424"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Katsuya Kikuchi","raw_affiliation_strings":["NeRI, AIST Tsukuba Central 2, National Institute for Advanced Industrial Science and Technology, Tsukuba, Ibaraki, Japan","National Institute of Advanced Industrial Science and Technology (AIST), NeRI, AIST Tsukuba Central 2, 1-1-1 Umezono, Ibaraki 305-8568, Japan"],"affiliations":[{"raw_affiliation_string":"NeRI, AIST Tsukuba Central 2, National Institute for Advanced Industrial Science and Technology, Tsukuba, Ibaraki, Japan","institution_ids":["https://openalex.org/I73613424"]},{"raw_affiliation_string":"National Institute of Advanced Industrial Science and Technology (AIST), NeRI, AIST Tsukuba Central 2, 1-1-1 Umezono, Ibaraki 305-8568, Japan","institution_ids":["https://openalex.org/I73613424"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045567386","display_name":"Koichi Takemura","orcid":"https://orcid.org/0000-0002-8561-5877"},"institutions":[{"id":"https://openalex.org/I4210127336","display_name":"Association of Super-Advanced Electronics","ror":"https://ror.org/0292ym357","country_code":"JP","type":"other","lineage":["https://openalex.org/I4210127336"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Koichi Takemura","raw_affiliation_strings":["ASET (Association of Super-Advanced Electronics Technologies), Hachioji, Tokyo, Japan","Association of Super-Advanced Electronics Technologies (ASET), 550-1, Higashi Asakawa-cho, Hachiouji, Tokyo 193-8550, Japan"],"affiliations":[{"raw_affiliation_string":"ASET (Association of Super-Advanced Electronics Technologies), Hachioji, Tokyo, Japan","institution_ids":["https://openalex.org/I4210127336"]},{"raw_affiliation_string":"Association of Super-Advanced Electronics Technologies (ASET), 550-1, Higashi Asakawa-cho, Hachiouji, Tokyo 193-8550, Japan","institution_ids":["https://openalex.org/I4210127336"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110623522","display_name":"Chihiro Ueda","orcid":null},"institutions":[{"id":"https://openalex.org/I63030401","display_name":"Meisei University","ror":"https://ror.org/022yhjq53","country_code":"JP","type":"education","lineage":["https://openalex.org/I63030401"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Chihiro Ueda","raw_affiliation_strings":["Faculty of Informatics, Meisei University, Hino, Tokyo, Japan","Faculty of Informatics, Meisei University 2-1-1 Hodokubo, Hino, Tokyo 191-8506, Japan"],"affiliations":[{"raw_affiliation_string":"Faculty of Informatics, Meisei University, Hino, Tokyo, Japan","institution_ids":["https://openalex.org/I63030401"]},{"raw_affiliation_string":"Faculty of Informatics, Meisei University 2-1-1 Hodokubo, Hino, Tokyo 191-8506, Japan","institution_ids":["https://openalex.org/I63030401"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111607703","display_name":"Osamu Shimada","orcid":null},"institutions":[{"id":"https://openalex.org/I4210127336","display_name":"Association of Super-Advanced Electronics","ror":"https://ror.org/0292ym357","country_code":"JP","type":"other","lineage":["https://openalex.org/I4210127336"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Osamu Shimada","raw_affiliation_strings":["ASET (Association of Super-Advanced Electronics Technologies), Hachioji, Tokyo, Japan","Association of Super-Advanced Electronics Technologies (ASET), 550-1, Higashi Asakawa-cho, Hachiouji, Tokyo 193-8550, Japan"],"affiliations":[{"raw_affiliation_string":"ASET (Association of Super-Advanced Electronics Technologies), Hachioji, Tokyo, Japan","institution_ids":["https://openalex.org/I4210127336"]},{"raw_affiliation_string":"Association of Super-Advanced Electronics Technologies (ASET), 550-1, Higashi Asakawa-cho, Hachiouji, Tokyo 193-8550, Japan","institution_ids":["https://openalex.org/I4210127336"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067196142","display_name":"Toshio Gomyo","orcid":null},"institutions":[{"id":"https://openalex.org/I4210127336","display_name":"Association of Super-Advanced Electronics","ror":"https://ror.org/0292ym357","country_code":"JP","type":"other","lineage":["https://openalex.org/I4210127336"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Toshio Gomyo","raw_affiliation_strings":["ASET (Association of Super-Advanced Electronics Technologies), Hachioji, Tokyo, Japan","Association of Super-Advanced Electronics Technologies (ASET), 550-1, Higashi Asakawa-cho, Hachiouji, Tokyo 193-8550, Japan"],"affiliations":[{"raw_affiliation_string":"ASET (Association of Super-Advanced Electronics Technologies), Hachioji, Tokyo, Japan","institution_ids":["https://openalex.org/I4210127336"]},{"raw_affiliation_string":"Association of Super-Advanced Electronics Technologies (ASET), 550-1, Higashi Asakawa-cho, Hachiouji, Tokyo 193-8550, Japan","institution_ids":["https://openalex.org/I4210127336"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5015589499","display_name":"Yukiharu Takeuchi","orcid":null},"institutions":[{"id":"https://openalex.org/I4210127336","display_name":"Association of Super-Advanced Electronics","ror":"https://ror.org/0292ym357","country_code":"JP","type":"other","lineage":["https://openalex.org/I4210127336"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yukiharu Takeuchi","raw_affiliation_strings":["ASET (Association of Super-Advanced Electronics Technologies), Hachioji, Tokyo, Japan","Association of Super-Advanced Electronics Technologies (ASET), 550-1, Higashi Asakawa-cho, Hachiouji, Tokyo 193-8550, Japan"],"affiliations":[{"raw_affiliation_string":"ASET (Association of Super-Advanced Electronics Technologies), Hachioji, Tokyo, Japan","institution_ids":["https://openalex.org/I4210127336"]},{"raw_affiliation_string":"Association of Super-Advanced Electronics Technologies (ASET), 550-1, Higashi Asakawa-cho, Hachiouji, Tokyo 193-8550, Japan","institution_ids":["https://openalex.org/I4210127336"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103635668","display_name":"Toshikazu Okubo","orcid":null},"institutions":[{"id":"https://openalex.org/I4210127336","display_name":"Association of Super-Advanced Electronics","ror":"https://ror.org/0292ym357","country_code":"JP","type":"other","lineage":["https://openalex.org/I4210127336"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Toshikazu Okubo","raw_affiliation_strings":["ASET (Association of Super-Advanced Electronics Technologies), Hachioji, Tokyo, Japan","Association of Super-Advanced Electronics Technologies (ASET), 550-1, Higashi Asakawa-cho, Hachiouji, Tokyo 193-8550, Japan"],"affiliations":[{"raw_affiliation_string":"ASET (Association of Super-Advanced Electronics Technologies), Hachioji, Tokyo, Japan","institution_ids":["https://openalex.org/I4210127336"]},{"raw_affiliation_string":"Association of Super-Advanced Electronics Technologies (ASET), 550-1, Higashi Asakawa-cho, Hachiouji, Tokyo 193-8550, Japan","institution_ids":["https://openalex.org/I4210127336"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109318026","display_name":"Kazuhiro Baba","orcid":null},"institutions":[{"id":"https://openalex.org/I4210127336","display_name":"Association of Super-Advanced Electronics","ror":"https://ror.org/0292ym357","country_code":"JP","type":"other","lineage":["https://openalex.org/I4210127336"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kazuhiro Baba","raw_affiliation_strings":["ASET (Association of Super-Advanced Electronics Technologies), Hachioji, Tokyo, Japan","Association of Super-Advanced Electronics Technologies (ASET), 550-1, Higashi Asakawa-cho, Hachiouji, Tokyo 193-8550, Japan"],"affiliations":[{"raw_affiliation_string":"ASET (Association of Super-Advanced Electronics Technologies), Hachioji, Tokyo, Japan","institution_ids":["https://openalex.org/I4210127336"]},{"raw_affiliation_string":"Association of Super-Advanced Electronics Technologies (ASET), 550-1, Higashi Asakawa-cho, Hachiouji, Tokyo 193-8550, Japan","institution_ids":["https://openalex.org/I4210127336"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061495708","display_name":"Masahiro Aoyagi","orcid":"https://orcid.org/0000-0002-8145-5909"},"institutions":[{"id":"https://openalex.org/I73613424","display_name":"National Institute of Advanced Industrial Science and Technology","ror":"https://ror.org/01703db54","country_code":"JP","type":"government","lineage":["https://openalex.org/I73613424"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Masahiro Aoyagi","raw_affiliation_strings":["NeRI, AIST Tsukuba Central 2, National Institute for Advanced Industrial Science and Technology, Tsukuba, Ibaraki, Japan","National Institute of Advanced Industrial Science and Technology (AIST), NeRI, AIST Tsukuba Central 2, 1-1-1 Umezono, Ibaraki 305-8568, Japan"],"affiliations":[{"raw_affiliation_string":"NeRI, AIST Tsukuba Central 2, National Institute for Advanced Industrial Science and Technology, Tsukuba, Ibaraki, Japan","institution_ids":["https://openalex.org/I73613424"]},{"raw_affiliation_string":"National Institute of Advanced Industrial Science and Technology (AIST), NeRI, AIST Tsukuba Central 2, 1-1-1 Umezono, Ibaraki 305-8568, Japan","institution_ids":["https://openalex.org/I73613424"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111843622","display_name":"Toshio Sud\u00f4","orcid":null},"institutions":[{"id":"https://openalex.org/I171481255","display_name":"Shibaura Institute of Technology","ror":"https://ror.org/020wjcq07","country_code":"JP","type":"education","lineage":["https://openalex.org/I171481255"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Toshio Sudo","raw_affiliation_strings":["Department of Electronic Engineering, Shibaura Institute of Technology, Koto, Tokyo, Japan","Department of Electronic Engineering, Shibaura Institute of Technology, 3-7-5 Toyosu, Koto-ku, Tokyo 135-8548 JAPAN"],"affiliations":[{"raw_affiliation_string":"Department of Electronic Engineering, Shibaura Institute of Technology, Koto, Tokyo, Japan","institution_ids":["https://openalex.org/I171481255"]},{"raw_affiliation_string":"Department of Electronic Engineering, Shibaura Institute of Technology, 3-7-5 Toyosu, Koto-ku, Tokyo 135-8548 JAPAN","institution_ids":["https://openalex.org/I171481255"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5110482137","display_name":"Kanji \u014ctsuka","orcid":null},"institutions":[{"id":"https://openalex.org/I63030401","display_name":"Meisei University","ror":"https://ror.org/022yhjq53","country_code":"JP","type":"education","lineage":["https://openalex.org/I63030401"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kanji Otsuka","raw_affiliation_strings":["Faculty of Informatics, Meisei University, Hino, Tokyo, Japan","Faculty of Informatics, Meisei University 2-1-1 Hodokubo, Hino, Tokyo 191-8506, Japan"],"affiliations":[{"raw_affiliation_string":"Faculty of Informatics, Meisei University, Hino, Tokyo, Japan","institution_ids":["https://openalex.org/I63030401"]},{"raw_affiliation_string":"Faculty of Informatics, Meisei University 2-1-1 Hodokubo, Hino, Tokyo 191-8506, Japan","institution_ids":["https://openalex.org/I63030401"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":11,"corresponding_author_ids":["https://openalex.org/A5056765632"],"corresponding_institution_ids":["https://openalex.org/I73613424"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.16032444,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11444","display_name":"Electromagnetic Compatibility and Noise Suppression","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11444","display_name":"Electromagnetic Compatibility and Noise Suppression","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12495","display_name":"Electrostatic Discharge in Electronics","score":0.9958999752998352,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/electrical-impedance","display_name":"Electrical impedance","score":0.7665833234786987},{"id":"https://openalex.org/keywords/wideband","display_name":"Wideband","score":0.5958097577095032},{"id":"https://openalex.org/keywords/damping-factor","display_name":"Damping factor","score":0.5892543196678162},{"id":"https://openalex.org/keywords/decoupling","display_name":"Decoupling (probability)","score":0.5172239542007446},{"id":"https://openalex.org/keywords/capacitor","display_name":"Capacitor","score":0.5151204466819763},{"id":"https://openalex.org/keywords/impedance-matching","display_name":"Impedance matching","score":0.4796338677406311},{"id":"https://openalex.org/keywords/electromagnetic-compatibility","display_name":"Electromagnetic compatibility","score":0.4715569019317627},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.45614194869995117},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.43333151936531067},{"id":"https://openalex.org/keywords/network-analyzer","display_name":"Network analyzer (electrical)","score":0.42365527153015137},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4081641137599945},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.40532392263412476},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3132632374763489},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.21650275588035583}],"concepts":[{"id":"https://openalex.org/C17829176","wikidata":"https://www.wikidata.org/wiki/Q179043","display_name":"Electrical impedance","level":2,"score":0.7665833234786987},{"id":"https://openalex.org/C2780202535","wikidata":"https://www.wikidata.org/wiki/Q4524457","display_name":"Wideband","level":2,"score":0.5958097577095032},{"id":"https://openalex.org/C48427663","wikidata":"https://www.wikidata.org/wiki/Q1269719","display_name":"Damping factor","level":4,"score":0.5892543196678162},{"id":"https://openalex.org/C205606062","wikidata":"https://www.wikidata.org/wiki/Q5249645","display_name":"Decoupling (probability)","level":2,"score":0.5172239542007446},{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.5151204466819763},{"id":"https://openalex.org/C612350","wikidata":"https://www.wikidata.org/wiki/Q1761108","display_name":"Impedance matching","level":3,"score":0.4796338677406311},{"id":"https://openalex.org/C125470083","wikidata":"https://www.wikidata.org/wiki/Q747288","display_name":"Electromagnetic compatibility","level":2,"score":0.4715569019317627},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.45614194869995117},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.43333151936531067},{"id":"https://openalex.org/C99101257","wikidata":"https://www.wikidata.org/wiki/Q1529374","display_name":"Network analyzer (electrical)","level":2,"score":0.42365527153015137},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4081641137599945},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.40532392263412476},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3132632374763489},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.21650275588035583},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.0},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/3dic.2009.5306526","is_oa":false,"landing_page_url":"https://doi.org/10.1109/3dic.2009.5306526","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 IEEE International Conference on 3D System Integration","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.8199999928474426,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W1601320711","https://openalex.org/W1970831471","https://openalex.org/W2009195513","https://openalex.org/W2044971431","https://openalex.org/W2054069008","https://openalex.org/W2068362851","https://openalex.org/W2101547863","https://openalex.org/W2125671371","https://openalex.org/W2127948067","https://openalex.org/W2128259088"],"related_works":["https://openalex.org/W1686358238","https://openalex.org/W4312456876","https://openalex.org/W4389275032","https://openalex.org/W2087608731","https://openalex.org/W2169133247","https://openalex.org/W2952275760","https://openalex.org/W3173107869","https://openalex.org/W4389274694","https://openalex.org/W2357609133","https://openalex.org/W4225318211"],"abstract_inverted_index":{"We":[0],"developed":[1],"an":[2,75,145],"impedance":[3,17,26,109,119,139],"analyzer":[4],"system":[5,77],"with":[6,111,144],"a":[7,36,48,57,73,142],"wide":[8],"frequency":[9,91],"range":[10,92],"for":[11,78],"evaluating":[12],"ultralow":[13],"impedance.":[14],"The":[15],"four-point":[16,37],"measurement":[18,27],"technique":[19,38],"is":[20,44,62,114,132],"introduced":[21],"using":[22,103],"this":[23],"system.":[24],"This":[25],"can":[28,99,120,151],"be":[29,100,121,152],"reliably":[30],"and":[31,56,137],"accurately":[32],"carried":[33],"out":[34],"by":[35],"where":[39],"one":[40],"pair":[41,59],"of":[42,60,81,83,93,141],"contacts":[43,61],"used":[45,63],"to":[46,64,96],"inject":[47],"signal":[49,68],"into":[50],"the":[51,66,70,79,90,117,125,128,135],"device":[52],"under":[53],"test":[54],"(DUT),":[55],"second":[58],"sense":[65],"resulting":[67],"across":[69],"DUT.":[71],"As":[72],"result,":[74],"evaluation":[76,110,140],"tens":[80],"micro-ohms":[82],"trans-impedance":[84],"Z":[85],"<sub":[86],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[87],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">21</sub>":[88],"in":[89],"10":[94],"Hz":[95],"40":[97],"GHz":[98],"realized.":[101,115,153],"By":[102],"two":[104],"microwave":[105],"contact":[106],"probes,":[107],"PDN":[108,118],"contacted":[112],"pads":[113],"Therefore,":[116],"measured":[122],"directly":[123],"without":[124],"connectors":[126],"during":[127],"measurement.":[129],"Moreover,":[130],"it":[131],"expected":[133],"that":[134],"accurate":[136],"wideband":[138],"substrate":[143],"electromagnetic":[146],"band":[147],"gap":[148],"(EBG)":[149],"structure":[150]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}