{"id":"https://openalex.org/W4319444035","doi":"https://doi.org/10.1108/dta-08-2022-0341","title":"A sensor data mining process for identifying root causes associated with low yield in semiconductor manufacturing","display_name":"A sensor data mining process for identifying root causes associated with low yield in semiconductor manufacturing","publication_year":2023,"publication_date":"2023-02-07","ids":{"openalex":"https://openalex.org/W4319444035","doi":"https://doi.org/10.1108/dta-08-2022-0341"},"language":"en","primary_location":{"id":"doi:10.1108/dta-08-2022-0341","is_oa":false,"landing_page_url":"https://doi.org/10.1108/dta-08-2022-0341","pdf_url":null,"source":{"id":"https://openalex.org/S4210171756","display_name":"Data Technologies and Applications","issn_l":"2514-9288","issn":["2514-9288","2514-9318"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319811","host_organization_name":"Emerald Publishing Limited","host_organization_lineage":["https://openalex.org/P4310319811"],"host_organization_lineage_names":["Emerald Publishing Limited"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Data Technologies and Applications","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100319320","display_name":"Eunji Kim","orcid":"https://orcid.org/0000-0003-4857-521X"},"institutions":[{"id":"https://openalex.org/I67900169","display_name":"Chung-Ang University","ror":"https://ror.org/01r024a98","country_code":"KR","type":"education","lineage":["https://openalex.org/I67900169"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Eunji Kim","raw_affiliation_strings":["Department of Business Administration, Chung-Ang University, Seoul, South Korea"],"raw_orcid":"https://orcid.org/0000-0003-4857-521X","affiliations":[{"raw_affiliation_string":"Department of Business Administration, Chung-Ang University, Seoul, South Korea","institution_ids":["https://openalex.org/I67900169"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077964506","display_name":"Jinwon An","orcid":"https://orcid.org/0000-0003-4163-3843"},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jinwon An","raw_affiliation_strings":["Department of Industrial Engineering, Seoul National University, Seoul, South Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Industrial Engineering, Seoul National University, Seoul, South Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073572223","display_name":"Hyun-Chang Cho","orcid":null},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Hyun-Chang Cho","raw_affiliation_strings":["Department of Industrial Engineering, Seoul National University, Seoul, South Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Industrial Engineering, Seoul National University, Seoul, South Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017305201","display_name":"Sungzoon Cho","orcid":"https://orcid.org/0000-0002-1695-1973"},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Sungzoon Cho","raw_affiliation_strings":["Department of Industrial Engineering, Seoul National University, Seoul, South Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Industrial Engineering, Seoul National University, Seoul, South Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5019312494","display_name":"Byeongeon Lee","orcid":null},"institutions":[{"id":"https://openalex.org/I2250650973","display_name":"Samsung (South Korea)","ror":"https://ror.org/04w3jy968","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Byeongeon Lee","raw_affiliation_strings":["Mechatronics R&D Center, Samsung Electronics, Gyeonggi-do, South Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Mechatronics R&D Center, Samsung Electronics, Gyeonggi-do, South Korea","institution_ids":["https://openalex.org/I2250650973"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.2782,"has_fulltext":false,"cited_by_count":7,"citation_normalized_percentile":{"value":0.82056694,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":99},"biblio":{"volume":"57","issue":"3","first_page":"397","last_page":"417"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10876","display_name":"Fault Detection and Control Systems","score":0.9955000281333923,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11443","display_name":"Advanced Statistical Process Monitoring","score":0.9894000291824341,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/excursion","display_name":"Excursion","score":0.7401707172393799},{"id":"https://openalex.org/keywords/identification","display_name":"Identification (biology)","score":0.7347555160522461},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.6491695046424866},{"id":"https://openalex.org/keywords/root-cause","display_name":"Root cause","score":0.584839940071106},{"id":"https://openalex.org/keywords/data-mining","display_name":"Data mining","score":0.5605611205101013},{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.5274403691291809},{"id":"https://openalex.org/keywords/root-cause-analysis","display_name":"Root cause analysis","score":0.5187044739723206},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4836253225803375},{"id":"https://openalex.org/keywords/time-domain","display_name":"Time domain","score":0.4221463203430176},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.39869266748428345},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.35587412118911743},{"id":"https://openalex.org/keywords/reliability-engineering","display_name":"Reliability engineering","score":0.35013145208358765},{"id":"https://openalex.org/keywords/computer-vision","display_name":"Computer vision","score":0.17931559681892395}],"concepts":[{"id":"https://openalex.org/C2780550144","wikidata":"https://www.wikidata.org/wiki/Q1156976","display_name":"Excursion","level":2,"score":0.7401707172393799},{"id":"https://openalex.org/C116834253","wikidata":"https://www.wikidata.org/wiki/Q2039217","display_name":"Identification (biology)","level":2,"score":0.7347555160522461},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.6491695046424866},{"id":"https://openalex.org/C84945661","wikidata":"https://www.wikidata.org/wiki/Q7366567","display_name":"Root cause","level":2,"score":0.584839940071106},{"id":"https://openalex.org/C124101348","wikidata":"https://www.wikidata.org/wiki/Q172491","display_name":"Data mining","level":1,"score":0.5605611205101013},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.5274403691291809},{"id":"https://openalex.org/C130963320","wikidata":"https://www.wikidata.org/wiki/Q1401207","display_name":"Root cause analysis","level":2,"score":0.5187044739723206},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4836253225803375},{"id":"https://openalex.org/C103824480","wikidata":"https://www.wikidata.org/wiki/Q185889","display_name":"Time domain","level":2,"score":0.4221463203430176},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.39869266748428345},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.35587412118911743},{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.35013145208358765},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.17931559681892395},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C199539241","wikidata":"https://www.wikidata.org/wiki/Q7748","display_name":"Law","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.0},{"id":"https://openalex.org/C59822182","wikidata":"https://www.wikidata.org/wiki/Q441","display_name":"Botany","level":1,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C17744445","wikidata":"https://www.wikidata.org/wiki/Q36442","display_name":"Political science","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1108/dta-08-2022-0341","is_oa":false,"landing_page_url":"https://doi.org/10.1108/dta-08-2022-0341","pdf_url":null,"source":{"id":"https://openalex.org/S4210171756","display_name":"Data Technologies and Applications","issn_l":"2514-9288","issn":["2514-9288","2514-9318"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319811","host_organization_name":"Emerald Publishing Limited","host_organization_lineage":["https://openalex.org/P4310319811"],"host_organization_lineage_names":["Emerald Publishing Limited"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Data Technologies and Applications","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":31,"referenced_works":["https://openalex.org/W1965833531","https://openalex.org/W1975976573","https://openalex.org/W1991691583","https://openalex.org/W2016211854","https://openalex.org/W2023084735","https://openalex.org/W2026249211","https://openalex.org/W2044855549","https://openalex.org/W2055019723","https://openalex.org/W2123615281","https://openalex.org/W2132733568","https://openalex.org/W2139833307","https://openalex.org/W2227956997","https://openalex.org/W2265219777","https://openalex.org/W2343275297","https://openalex.org/W2431155281","https://openalex.org/W2553245249","https://openalex.org/W2586757676","https://openalex.org/W2594332903","https://openalex.org/W2612322835","https://openalex.org/W2758078378","https://openalex.org/W2769240689","https://openalex.org/W2783371800","https://openalex.org/W2789585590","https://openalex.org/W2800015774","https://openalex.org/W2895083706","https://openalex.org/W2911964244","https://openalex.org/W2946530240","https://openalex.org/W2964245146","https://openalex.org/W2998854917","https://openalex.org/W3017264588","https://openalex.org/W3027507763"],"related_works":["https://openalex.org/W2754538212","https://openalex.org/W2030594396","https://openalex.org/W4200610016","https://openalex.org/W3045668461","https://openalex.org/W2490884653","https://openalex.org/W4255366506","https://openalex.org/W2183996497","https://openalex.org/W2056250485","https://openalex.org/W2799474201","https://openalex.org/W2885010905"],"abstract_inverted_index":{"Purpose":[0],"The":[1,58,105,126,145],"purpose":[2],"of":[3,12,51,61,101],"this":[4],"paper":[5,39],"is":[6,84,148],"to":[7,97,154],"identify":[8],"the":[9,17,31,35,48,99,102,110,134,141],"root":[10,77],"cause":[11,78],"low":[13,55],"yield":[14,56],"problems":[15],"in":[16,34,94],"semiconductor":[18,92],"manufacturing":[19,27],"process":[20,32,45,59],"using":[21,86,121],"sensor":[22,42,72,143],"data":[23,43,66,74,88],"continuously":[24],"collected":[25,89],"from":[26,90,140],"equipment":[28],"and":[29,70,76,113,137,152],"describe":[30],"environment":[33],"equipment.":[36],"Design/methodology/approach":[37],"This":[38],"proposes":[40],"a":[41,91],"mining":[44],"based":[46],"on":[47],"sequential":[49,62],"modeling":[50],"random":[52],"forests":[53],"for":[54],"diagnosis.":[57],"consists":[60],"steps:":[63],"problem":[64],"definition,":[65],"preparation,":[67],"excursion":[68,111,135],"time":[69,112,136],"critical":[71,114,138],"identification,":[73],"visualization":[75],"identification.":[79],"Findings":[80],"A":[81],"case":[82],"study":[83],"conducted":[85],"real-world":[87],"manufacturer":[93],"South":[95],"Korea":[96],"demonstrate":[98],"effectiveness":[100],"diagnosis":[103],"process.":[104],"proposed":[106,127],"model":[107],"successfully":[108],"identified":[109,117],"sensors":[115,139],"previously":[116],"by":[118],"domain":[119,130],"engineers":[120,131],"costly":[122],"manual":[123],"examination.":[124],"Originality/value":[125],"procedure":[128],"helps":[129],"narrow":[132],"down":[133],"massive":[142],"data.":[144],"procedure's":[146],"outcome":[147],"highly":[149],"interpretable,":[150],"informative":[151],"easy":[153],"visualize.":[155]},"counts_by_year":[{"year":2026,"cited_by_count":3},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":2}],"updated_date":"2026-07-01T08:55:40.977307","created_date":"2025-10-10T00:00:00"}