{"id":"https://openalex.org/W2009890240","doi":"https://doi.org/10.1108/03684921011046807","title":"Measurement and tracking control of the Z\u2010tilts error compensating stage of the nano\u2010measuring machine","display_name":"Measurement and tracking control of the Z\u2010tilts error compensating stage of the nano\u2010measuring machine","publication_year":2010,"publication_date":"2010-06-15","ids":{"openalex":"https://openalex.org/W2009890240","doi":"https://doi.org/10.1108/03684921011046807","mag":"2009890240"},"language":"en","primary_location":{"id":"doi:10.1108/03684921011046807","is_oa":false,"landing_page_url":"https://doi.org/10.1108/03684921011046807","pdf_url":null,"source":{"id":"https://openalex.org/S168682784","display_name":"Kybernetes","issn_l":"0368-492X","issn":["0368-492X","1758-7883"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319811","host_organization_name":"Emerald Publishing Limited","host_organization_lineage":["https://openalex.org/P4310319811"],"host_organization_lineage_names":["Emerald Publishing Limited"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Kybernetes","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5025226645","display_name":"Van\u2010Tsai Liu","orcid":"https://orcid.org/0000-0003-3034-3939"},"institutions":[{"id":"https://openalex.org/I40689657","display_name":"National Formosa University","ror":"https://ror.org/00q523p52","country_code":"TW","type":"education","lineage":["https://openalex.org/I40689657"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Van\u2010Tsai Liu","raw_affiliation_strings":["Department of Electrical Engineering, National Formosa University, Huwei, Taiwan","Department of Electrical Engineering National Formosa University. Huwei, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, National Formosa University, Huwei, Taiwan","institution_ids":["https://openalex.org/I40689657"]},{"raw_affiliation_string":"Department of Electrical Engineering National Formosa University. Huwei, Taiwan","institution_ids":["https://openalex.org/I40689657"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5012961802","display_name":"Chien\u2010Hung Liu","orcid":"https://orcid.org/0000-0001-8918-5627"},"institutions":[{"id":"https://openalex.org/I40689657","display_name":"National Formosa University","ror":"https://ror.org/00q523p52","country_code":"TW","type":"education","lineage":["https://openalex.org/I40689657"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chien\u2010Hung Liu","raw_affiliation_strings":["Institute of Electro\u2010optical and Materials Science, National Formosa University, Huwei, Taiwan","Institute of Electro-Optical and Materials Science, National Formosa University, Huwei, Taiwan#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Electro\u2010optical and Materials Science, National Formosa University, Huwei, Taiwan","institution_ids":["https://openalex.org/I40689657"]},{"raw_affiliation_string":"Institute of Electro-Optical and Materials Science, National Formosa University, Huwei, Taiwan#TAB#","institution_ids":["https://openalex.org/I40689657"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058317993","display_name":"Hau\u2010Wei Li","orcid":null},"institutions":[{"id":"https://openalex.org/I91807558","display_name":"National Cheng Kung University","ror":"https://ror.org/01b8kcc49","country_code":"TW","type":"education","lineage":["https://openalex.org/I91807558"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Hau\u2010Wei Li","raw_affiliation_strings":["Department of Aeronautics and Astronautics, National Chen Kung University, Tainan, Taiwan","(Department of Aeronautics and Astronautics, National Chen Kung University, Tainan, Taiwan)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Aeronautics and Astronautics, National Chen Kung University, Tainan, Taiwan","institution_ids":["https://openalex.org/I91807558"]},{"raw_affiliation_string":"(Department of Aeronautics and Astronautics, National Chen Kung University, Tainan, Taiwan)","institution_ids":["https://openalex.org/I91807558"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102842421","display_name":"Chieh\u2010Li Chen","orcid":"https://orcid.org/0000-0003-4857-0566"},"institutions":[{"id":"https://openalex.org/I91807558","display_name":"National Cheng Kung University","ror":"https://ror.org/01b8kcc49","country_code":"TW","type":"education","lineage":["https://openalex.org/I91807558"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chieh\u2010Li Chen","raw_affiliation_strings":["Department of Aeronautics and Astronautics, National Chen Kung University, Tainan, Taiwan","(Department of Aeronautics and Astronautics, National Chen Kung University, Tainan, Taiwan)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Aeronautics and Astronautics, National Chen Kung University, Tainan, Taiwan","institution_ids":["https://openalex.org/I91807558"]},{"raw_affiliation_string":"(Department of Aeronautics and Astronautics, National Chen Kung University, Tainan, Taiwan)","institution_ids":["https://openalex.org/I91807558"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100754708","display_name":"Chun\u2010Liang Lin","orcid":"https://orcid.org/0000-0002-8520-3450"},"institutions":[{"id":"https://openalex.org/I162838928","display_name":"National Chung Hsing University","ror":"https://ror.org/05vn3ca78","country_code":"TW","type":"education","lineage":["https://openalex.org/I162838928"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chun\u2010Liang Lin","raw_affiliation_strings":["Department of Electrical Engineering, National Chung Hsing University, Taichung, Taiwan","Department of Electrical Engineering , National Chung-Hsing University, Taichung, Taiwan#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, National Chung Hsing University, Taichung, Taiwan","institution_ids":["https://openalex.org/I162838928"]},{"raw_affiliation_string":"Department of Electrical Engineering , National Chung-Hsing University, Taichung, Taiwan#TAB#","institution_ids":["https://openalex.org/I162838928"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5082247652","display_name":"Yu\u2010Chen Lin","orcid":"https://orcid.org/0000-0002-6735-0473"},"institutions":[{"id":"https://openalex.org/I162838928","display_name":"National Chung Hsing University","ror":"https://ror.org/05vn3ca78","country_code":"TW","type":"education","lineage":["https://openalex.org/I162838928"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Yu\u2010Chen Lin","raw_affiliation_strings":["Department of Electrical Engineering, National Chung Hsing University, Taichung, Taiwan","Department of Electrical Engineering , National Chung-Hsing University, Taichung, Taiwan#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, National Chung Hsing University, Taichung, Taiwan","institution_ids":["https://openalex.org/I162838928"]},{"raw_affiliation_string":"Department of Electrical Engineering , National Chung-Hsing University, Taichung, Taiwan#TAB#","institution_ids":["https://openalex.org/I162838928"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.07985248,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"39","issue":"6","first_page":"1029","last_page":"1039"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9940999746322632,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/feed-forward","display_name":"Feed forward","score":0.8369442224502563},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.826117753982544},{"id":"https://openalex.org/keywords/controller","display_name":"Controller (irrigation)","score":0.6049884557723999},{"id":"https://openalex.org/keywords/compensation","display_name":"Compensation (psychology)","score":0.5769868493080139},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5738418698310852},{"id":"https://openalex.org/keywords/trajectory","display_name":"Trajectory","score":0.5096085071563721},{"id":"https://openalex.org/keywords/motion-system","display_name":"Motion system","score":0.4801727831363678},{"id":"https://openalex.org/keywords/nonlinear-system","display_name":"Nonlinear system","score":0.4645170271396637},{"id":"https://openalex.org/keywords/tracking-error","display_name":"Tracking error","score":0.46231162548065186},{"id":"https://openalex.org/keywords/motion-control","display_name":"Motion control","score":0.4462837874889374},{"id":"https://openalex.org/keywords/tracking","display_name":"Tracking (education)","score":0.4253697991371155},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.38871660828590393},{"id":"https://openalex.org/keywords/robot","display_name":"Robot","score":0.23587071895599365},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2160806655883789},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.21221336722373962},{"id":"https://openalex.org/keywords/motion","display_name":"Motion (physics)","score":0.1889580488204956},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.1856495440006256},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1787753403186798}],"concepts":[{"id":"https://openalex.org/C38858127","wikidata":"https://www.wikidata.org/wiki/Q5441228","display_name":"Feed forward","level":2,"score":0.8369442224502563},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.826117753982544},{"id":"https://openalex.org/C203479927","wikidata":"https://www.wikidata.org/wiki/Q5165939","display_name":"Controller (irrigation)","level":2,"score":0.6049884557723999},{"id":"https://openalex.org/C2780023022","wikidata":"https://www.wikidata.org/wiki/Q1338171","display_name":"Compensation (psychology)","level":2,"score":0.5769868493080139},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5738418698310852},{"id":"https://openalex.org/C13662910","wikidata":"https://www.wikidata.org/wiki/Q193139","display_name":"Trajectory","level":2,"score":0.5096085071563721},{"id":"https://openalex.org/C100673868","wikidata":"https://www.wikidata.org/wiki/Q6917799","display_name":"Motion system","level":3,"score":0.4801727831363678},{"id":"https://openalex.org/C158622935","wikidata":"https://www.wikidata.org/wiki/Q660848","display_name":"Nonlinear system","level":2,"score":0.4645170271396637},{"id":"https://openalex.org/C183356978","wikidata":"https://www.wikidata.org/wiki/Q1779213","display_name":"Tracking error","level":3,"score":0.46231162548065186},{"id":"https://openalex.org/C145565327","wikidata":"https://www.wikidata.org/wiki/Q852514","display_name":"Motion control","level":3,"score":0.4462837874889374},{"id":"https://openalex.org/C2775936607","wikidata":"https://www.wikidata.org/wiki/Q466845","display_name":"Tracking (education)","level":2,"score":0.4253697991371155},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.38871660828590393},{"id":"https://openalex.org/C90509273","wikidata":"https://www.wikidata.org/wiki/Q11012","display_name":"Robot","level":2,"score":0.23587071895599365},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2160806655883789},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.21221336722373962},{"id":"https://openalex.org/C104114177","wikidata":"https://www.wikidata.org/wiki/Q79782","display_name":"Motion (physics)","level":2,"score":0.1889580488204956},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.1856495440006256},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1787753403186798},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C6557445","wikidata":"https://www.wikidata.org/wiki/Q173113","display_name":"Agronomy","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C1276947","wikidata":"https://www.wikidata.org/wiki/Q333","display_name":"Astronomy","level":1,"score":0.0},{"id":"https://openalex.org/C11171543","wikidata":"https://www.wikidata.org/wiki/Q41630","display_name":"Psychoanalysis","level":1,"score":0.0},{"id":"https://openalex.org/C19417346","wikidata":"https://www.wikidata.org/wiki/Q7922","display_name":"Pedagogy","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1108/03684921011046807","is_oa":false,"landing_page_url":"https://doi.org/10.1108/03684921011046807","pdf_url":null,"source":{"id":"https://openalex.org/S168682784","display_name":"Kybernetes","issn_l":"0368-492X","issn":["0368-492X","1758-7883"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319811","host_organization_name":"Emerald Publishing Limited","host_organization_lineage":["https://openalex.org/P4310319811"],"host_organization_lineage_names":["Emerald Publishing Limited"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Kybernetes","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Peace, Justice and strong institutions","score":0.6600000262260437,"id":"https://metadata.un.org/sdg/16"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W1995911701","https://openalex.org/W2012843503","https://openalex.org/W2013348033","https://openalex.org/W2046265181","https://openalex.org/W2087268202","https://openalex.org/W2115996838","https://openalex.org/W2116759368","https://openalex.org/W2171695274"],"related_works":["https://openalex.org/W2077728074","https://openalex.org/W2161688277","https://openalex.org/W2089306986","https://openalex.org/W2057244293","https://openalex.org/W1589486833","https://openalex.org/W2116883285","https://openalex.org/W2363100562","https://openalex.org/W2072651397","https://openalex.org/W2362304986","https://openalex.org/W2349635642"],"abstract_inverted_index":{"Purpose":[0],"The":[1,76],"purpose":[2],"of":[3,35,62,86],"this":[4],"paper":[5,105],"is":[6,27,54,90,97],"to":[7,13,29,56,99,107],"develop":[8,108],"the":[9,18,32,40,59,87,115],"multi\u2010degree\u2010of\u2010freedom":[10],"measurement":[11],"system":[12],"test,":[14],"verify,":[15],"and":[16,80],"control":[17,111],"nano\u2010measuring":[19,88],"machine.":[20],"Design/methodology/approach":[21],"A":[22],"generic":[23,41],"differential":[24,42],"model":[25],"approach":[26],"constructed":[28],"numerically":[30],"describe":[31],"hysteresis":[33,60],"effects":[34],"piezoelectric":[36,64,116],"actuators.":[37],"Based":[38],"on":[39],"model,":[43],"a":[44,48,63,93,109,121,126],"feedforward":[45,123],"compensator":[46,124],"with":[47,125],"proportional":[49],"integral":[50],"(PI)":[51],"type":[52,128],"controller":[53],"designed":[55],"compensate":[57],"for":[58,114],"nonlinearity":[61],"actuated":[65],"three":[66],"degree\u2010of\u2010freedom":[67],"coplanar":[68],"nanostage":[69],"which":[70,119],"can":[71],"provide":[72],"high\u2010precision":[73],"applications.":[74],"Findings":[75],"Z\u2010tilts":[77],"(z,":[78],"pitch,":[79],"roll":[81],"motion)":[82],"error":[83],"compensation":[84],"stage":[85],"machine":[89],"accomplished.":[91],"Moreover,":[92],"high\u2010resolution":[94],"laser":[95],"interferometer":[96],"used":[98],"measure":[100],"position":[101],"accurately.":[102],"Originality/value":[103],"This":[104],"contributes":[106],"tracking":[110],"design":[112],"method":[113],"motion":[117],"platform":[118],"combines":[120],"closed\u2010loop":[122],"PI":[127],"controller.":[129]},"counts_by_year":[],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}