{"id":"https://openalex.org/W1985545712","doi":"https://doi.org/10.1108/01439910810909538","title":"Wafer prealigning robot based on shape center calculation","display_name":"Wafer prealigning robot based on shape center calculation","publication_year":2008,"publication_date":"2008-10-17","ids":{"openalex":"https://openalex.org/W1985545712","doi":"https://doi.org/10.1108/01439910810909538","mag":"1985545712"},"language":"en","primary_location":{"id":"doi:10.1108/01439910810909538","is_oa":false,"landing_page_url":"https://doi.org/10.1108/01439910810909538","pdf_url":null,"source":{"id":"https://openalex.org/S166948985","display_name":"Industrial Robot the international journal of robotics research and application","issn_l":"0143-991X","issn":["0143-991X","1758-5791"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319811","host_organization_name":"Emerald Publishing Limited","host_organization_lineage":["https://openalex.org/P4310319811"],"host_organization_lineage_names":["Emerald Publishing Limited"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Industrial Robot: An International Journal","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5058388737","display_name":"Zhuang Fu","orcid":"https://orcid.org/0000-0001-8825-4029"},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Z. Fu","raw_affiliation_strings":["State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai, People\u2018s Republic of China","State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai, People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai, People\u2018s Republic of China","institution_ids":["https://openalex.org/I183067930"]},{"raw_affiliation_string":"State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai, People's Republic of China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069276533","display_name":"Cheng Huang","orcid":"https://orcid.org/0000-0002-5935-727X"},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"C.X. Huang","raw_affiliation_strings":["State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai, People\u2018s Republic of China","State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai, People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai, People\u2018s Republic of China","institution_ids":["https://openalex.org/I183067930"]},{"raw_affiliation_string":"State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai, People's Republic of China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000876124","display_name":"Runlong Liu","orcid":null},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"R.Q. Liu","raw_affiliation_strings":["State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai, People\u2018s Republic of China","State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai, People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai, People\u2018s Republic of China","institution_ids":["https://openalex.org/I183067930"]},{"raw_affiliation_string":"State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai, People's Republic of China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103401600","display_name":"Yan Zheng Zhao","orcid":null},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Y.Z. Zhao","raw_affiliation_strings":["State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai, People\u2018s Republic of China","State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai, People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai, People\u2018s Republic of China","institution_ids":["https://openalex.org/I183067930"]},{"raw_affiliation_string":"State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai, People's Republic of China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5051221275","display_name":"Qixin Cao","orcid":"https://orcid.org/0000-0001-5462-9857"},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Q.X. Cao","raw_affiliation_strings":["State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai, People\u2018s Republic of China","State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai, People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai, People\u2018s Republic of China","institution_ids":["https://openalex.org/I183067930"]},{"raw_affiliation_string":"State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai, People's Republic of China","institution_ids":["https://openalex.org/I183067930"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I183067930"],"apc_list":null,"apc_paid":null,"fwci":0.4912,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.67581532,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":"35","issue":"6","first_page":"536","last_page":"540"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.794903039932251},{"id":"https://openalex.org/keywords/robot","display_name":"Robot","score":0.6803168058395386},{"id":"https://openalex.org/keywords/compensation","display_name":"Compensation (psychology)","score":0.4762299656867981},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.4516087472438812},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.41892534494400024},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.4154694080352783},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.35330313444137573},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.32530534267425537},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.18479323387145996},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.1805885136127472},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.11199325323104858}],"concepts":[{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.794903039932251},{"id":"https://openalex.org/C90509273","wikidata":"https://www.wikidata.org/wiki/Q11012","display_name":"Robot","level":2,"score":0.6803168058395386},{"id":"https://openalex.org/C2780023022","wikidata":"https://www.wikidata.org/wiki/Q1338171","display_name":"Compensation (psychology)","level":2,"score":0.4762299656867981},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.4516087472438812},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.41892534494400024},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.4154694080352783},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.35330313444137573},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.32530534267425537},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.18479323387145996},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.1805885136127472},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.11199325323104858},{"id":"https://openalex.org/C11171543","wikidata":"https://www.wikidata.org/wiki/Q41630","display_name":"Psychoanalysis","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1108/01439910810909538","is_oa":false,"landing_page_url":"https://doi.org/10.1108/01439910810909538","pdf_url":null,"source":{"id":"https://openalex.org/S166948985","display_name":"Industrial Robot the international journal of robotics research and application","issn_l":"0143-991X","issn":["0143-991X","1758-5791"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319811","host_organization_name":"Emerald Publishing Limited","host_organization_lineage":["https://openalex.org/P4310319811"],"host_organization_lineage_names":["Emerald Publishing Limited"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Industrial Robot: An International Journal","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W18946845","https://openalex.org/W1746770016","https://openalex.org/W1980032027","https://openalex.org/W2049732729","https://openalex.org/W2066022024","https://openalex.org/W2358520635","https://openalex.org/W2373687031"],"related_works":["https://openalex.org/W2899084033","https://openalex.org/W2123031254","https://openalex.org/W2766317712","https://openalex.org/W2362161990","https://openalex.org/W4234617567","https://openalex.org/W3013527083","https://openalex.org/W1514072355","https://openalex.org/W2007638944","https://openalex.org/W4386420626","https://openalex.org/W2378507391"],"abstract_inverted_index":{"Purpose":[0],"The":[1,25,95,108],"aim":[2],"of":[3,21,63,73],"this":[4],"paper":[5],"is":[6,28,43,54,80,110,135],"to":[7,56,112],"provide":[8],"a":[9,31,46],"new":[10,84],"wafer":[11,85,113,121],"prealigning":[12,86,114,122],"robot":[13,87,96,109,123],"for":[14,115],"the":[15,19,36,41,58,64,71,74,83,90,99,116,126,138],"photo\u2010etching":[16,117],"facility":[17],"during":[18],"manufacturing":[20],"IC":[22],"products.":[23],"Design/methodology/approach":[24],"shape":[26,76,100,127],"center":[27,101,128],"measured":[29,44],"by":[30,45],"reflection\u2010style":[32],"laser":[33,48],"sensor":[34],"in":[35,137],"wafer's":[37,75],"radial":[38,59],"direction,":[39],"and":[40,61,134],"position":[42],"penetration\u2010style":[47],"sensor.":[49],"A":[50,120],"dynamic":[51],"error":[52],"compensation":[53],"applied":[55],"eliminate":[57],"runout":[60],"wobble":[62],"rotary":[65],"stage,":[66],"which":[67],"have":[68],"effects":[69],"on":[70,125],"measurement":[72],"center.":[77],"Findings":[78],"It":[79],"found":[81],"that":[82,98],"can":[88,102],"satisfy":[89],"accuracy":[91],"requirement.":[92],"Research":[93],"limitations/implications":[94],"requires":[97],"be":[103],"accurately":[104],"calculated.":[105],"Practical":[106],"implications":[107],"applicable":[111],"facility.":[118],"Originality/value":[119],"based":[124],"calculation":[129],"method":[130],"has":[131],"been":[132],"developed":[133],"described":[136],"paper.":[139]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2023,"cited_by_count":1}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}