{"id":"https://openalex.org/W2021010673","doi":"https://doi.org/10.1108/01439910510573282","title":"Fixture\u2010based industrial robot calibration for silicon wafer handling","display_name":"Fixture\u2010based industrial robot calibration for silicon wafer handling","publication_year":2005,"publication_date":"2005-02-01","ids":{"openalex":"https://openalex.org/W2021010673","doi":"https://doi.org/10.1108/01439910510573282","mag":"2021010673"},"language":"en","primary_location":{"id":"doi:10.1108/01439910510573282","is_oa":false,"landing_page_url":"https://doi.org/10.1108/01439910510573282","pdf_url":null,"source":{"id":"https://openalex.org/S166948985","display_name":"Industrial Robot the international journal of robotics research and application","issn_l":"0143-991X","issn":["0143-991X","1758-5791"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319811","host_organization_name":"Emerald Publishing Limited","host_organization_lineage":["https://openalex.org/P4310319811"],"host_organization_lineage_names":["Emerald Publishing Limited"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Industrial Robot: An International Journal","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5003835600","display_name":"Mike Tao Zhang","orcid":null},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Mike Tao Zhang","raw_affiliation_strings":["Intel Products (Shanghai) Ltd, Shanghai, People's Republic of China"],"affiliations":[{"raw_affiliation_string":"Intel Products (Shanghai) Ltd, Shanghai, People's Republic of China","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5010019244","display_name":"Ken Goldberg","orcid":"https://orcid.org/0000-0001-6747-9499"},"institutions":[{"id":"https://openalex.org/I95457486","display_name":"University of California, Berkeley","ror":"https://ror.org/01an7q238","country_code":"US","type":"education","lineage":["https://openalex.org/I95457486"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Ken Goldberg","raw_affiliation_strings":["Department of Electrical Engineering and Computer Science, University of UC Berkeley, Berkeley, CA, USA","Department of Industrial Engineering and Operations Research"],"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering and Computer Science, University of UC Berkeley, Berkeley, CA, USA","institution_ids":["https://openalex.org/I95457486"]},{"raw_affiliation_string":"Department of Industrial Engineering and Operations Research","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5003835600"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.724,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.85722002,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"32","issue":"1","first_page":"43","last_page":"48"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11159","display_name":"Manufacturing Process and Optimization","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11159","display_name":"Manufacturing Process and Optimization","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11741","display_name":"Flexible and Reconfigurable Manufacturing Systems","score":0.9955999851226807,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10571","display_name":"Robotic Mechanisms and Dynamics","score":0.9940999746322632,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/fixture","display_name":"Fixture","score":0.8990699052810669},{"id":"https://openalex.org/keywords/robot","display_name":"Robot","score":0.6872998476028442},{"id":"https://openalex.org/keywords/calibration","display_name":"Calibration","score":0.6444567441940308},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.517876386642456},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4642980694770813},{"id":"https://openalex.org/keywords/scara","display_name":"SCARA","score":0.4425353407859802},{"id":"https://openalex.org/keywords/compensation","display_name":"Compensation (psychology)","score":0.4281255304813385},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.39339640736579895},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.37860986590385437},{"id":"https://openalex.org/keywords/reliability-engineering","display_name":"Reliability engineering","score":0.3330128788948059},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.22765174508094788},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.18736588954925537},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.11267530918121338}],"concepts":[{"id":"https://openalex.org/C2781122048","wikidata":"https://www.wikidata.org/wiki/Q15983064","display_name":"Fixture","level":2,"score":0.8990699052810669},{"id":"https://openalex.org/C90509273","wikidata":"https://www.wikidata.org/wiki/Q11012","display_name":"Robot","level":2,"score":0.6872998476028442},{"id":"https://openalex.org/C165838908","wikidata":"https://www.wikidata.org/wiki/Q736777","display_name":"Calibration","level":2,"score":0.6444567441940308},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.517876386642456},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4642980694770813},{"id":"https://openalex.org/C158732272","wikidata":"https://www.wikidata.org/wiki/Q1484792","display_name":"SCARA","level":3,"score":0.4425353407859802},{"id":"https://openalex.org/C2780023022","wikidata":"https://www.wikidata.org/wiki/Q1338171","display_name":"Compensation (psychology)","level":2,"score":0.4281255304813385},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.39339640736579895},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.37860986590385437},{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.3330128788948059},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.22765174508094788},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.18736588954925537},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.11267530918121338},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C11171543","wikidata":"https://www.wikidata.org/wiki/Q41630","display_name":"Psychoanalysis","level":1,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1108/01439910510573282","is_oa":false,"landing_page_url":"https://doi.org/10.1108/01439910510573282","pdf_url":null,"source":{"id":"https://openalex.org/S166948985","display_name":"Industrial Robot the international journal of robotics research and application","issn_l":"0143-991X","issn":["0143-991X","1758-5791"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319811","host_organization_name":"Emerald Publishing Limited","host_organization_lineage":["https://openalex.org/P4310319811"],"host_organization_lineage_names":["Emerald Publishing Limited"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Industrial Robot: An International Journal","raw_type":"journal-article"},{"id":"pmh:oai:CiteSeerX.psu:10.1.1.200.8950","is_oa":false,"landing_page_url":"http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.200.8950","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"http://ford.ieor.berkeley.edu/tzhang/mike-adept-v6.1.pdf","raw_type":"text"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.4399999976158142,"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":18,"referenced_works":["https://openalex.org/W1525998562","https://openalex.org/W1565487035","https://openalex.org/W1968176439","https://openalex.org/W1985269120","https://openalex.org/W1990012555","https://openalex.org/W2013821876","https://openalex.org/W2026334435","https://openalex.org/W2058447477","https://openalex.org/W2059823988","https://openalex.org/W2105274125","https://openalex.org/W2106617478","https://openalex.org/W2115599516","https://openalex.org/W2120052517","https://openalex.org/W2135415581","https://openalex.org/W2150344946","https://openalex.org/W2162581882","https://openalex.org/W2914817139","https://openalex.org/W6631660729"],"related_works":["https://openalex.org/W152605265","https://openalex.org/W3095489175","https://openalex.org/W2573045761","https://openalex.org/W1486209696","https://openalex.org/W1968617831","https://openalex.org/W3169911176","https://openalex.org/W2358205927","https://openalex.org/W2058659183","https://openalex.org/W4230747644","https://openalex.org/W2575395363"],"abstract_inverted_index":{"Purpose":[0],"Semiconductor":[1,86],"manufacturing":[2,87],"industry":[3],"requires":[4,88],"highly":[5],"accurate":[6],"robot":[7,40],"operation":[8],"with":[9],"short":[10],"install/setup":[11],"downtime.":[12],"Design/methodology/approach":[13],"We":[14,111,125],"develop":[15,112],"a":[16,32,35,62,102,117,131],"fast,":[17],"low":[18],"cost":[19],"and":[20,34,45,57,90,116],"easy\u2010to\u2010operate":[21,91],"calibration":[22,92,123],"system":[23,28],"for":[24,94],"wafer\u2010handling":[25,95],"robots.":[26,96],"The":[27],"is":[29],"defined":[30],"by":[31,82,130],"fixture":[33,55,113],"simple":[36,118],"compensation":[37],"algorithm.":[38],"Given":[39],"repeatability,":[41],"end":[42,80],"effector":[43,81],"uncertainties,":[44],"the":[46,69,75,79],"tolerance":[47,64,76],"requirements":[48],"of":[49,78],"wafer":[50],"placement":[51,58],"points,":[52],"we":[53,72,100],"derive":[54],"design":[56,114],"specifications":[59],"based":[60],"on":[61],"statistical":[63],"model.":[65],"Findings":[66],"By":[67],"employing":[68],"fixture\u2010based":[70],"calibration,":[71],"successfully":[73],"relax":[74],"requirement":[77],"20":[83],"times.":[84],"Originality/value":[85],"fast":[89],"systems":[93],"In":[97],"this":[98,107],"paper,":[99],"describe":[101],"new":[103],"methodology":[104],"to":[105,121],"solve":[106],"problem":[108],"using":[109],"fixtures.":[110],"criteria":[115],"compensate":[119],"algorithm":[120],"satisfy":[122],"requirements.":[124],"also":[126],"verify":[127],"our":[128],"approach":[129],"physical":[132],"example.":[133]},"counts_by_year":[{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2013,"cited_by_count":1}],"updated_date":"2026-04-05T17:49:38.594831","created_date":"2025-10-10T00:00:00"}