{"id":"https://openalex.org/W2083818984","doi":"https://doi.org/10.1093/ietele/e91-c.3.318","title":"Improvements in Fabrication Process for Nb-Based Single Flux Quantum Circuits in Japan","display_name":"Improvements in Fabrication Process for Nb-Based Single Flux Quantum Circuits in Japan","publication_year":2008,"publication_date":"2008-03-01","ids":{"openalex":"https://openalex.org/W2083818984","doi":"https://doi.org/10.1093/ietele/e91-c.3.318","mag":"2083818984"},"language":"en","primary_location":{"id":"doi:10.1093/ietele/e91-c.3.318","is_oa":false,"landing_page_url":"https://doi.org/10.1093/ietele/e91-c.3.318","pdf_url":null,"source":{"id":"https://openalex.org/S2489501747","display_name":"IEICE Transactions on Electronics","issn_l":"0916-8524","issn":["0916-8524","1745-1353"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4320800604","host_organization_name":"Institute of Electronics, Information and Communication Engineers","host_organization_lineage":["https://openalex.org/P4320800604"],"host_organization_lineage_names":["Institute of Electronics, Information and Communication Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEICE Transactions on Electronics","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5049219928","display_name":"Mutsuo Hidaka","orcid":"https://orcid.org/0000-0002-9970-2744"},"institutions":[{"id":"https://openalex.org/I4210144711","display_name":"International Superconductivity Technology Center","ror":"https://ror.org/04048e026","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4210144711"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"M. HIDAKA","raw_affiliation_strings":["Superconductivity Research Laboratory, International Superconductivity Technology Center","The Institute of Electronics, Information and Communication Engineers"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Superconductivity Research Laboratory, International Superconductivity Technology Center","institution_ids":["https://openalex.org/I4210144711"]},{"raw_affiliation_string":"The Institute of Electronics, Information and Communication Engineers","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018879082","display_name":"S. Nagasawa","orcid":"https://orcid.org/0000-0002-1118-5202"},"institutions":[{"id":"https://openalex.org/I4210144711","display_name":"International Superconductivity Technology Center","ror":"https://ror.org/04048e026","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4210144711"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"S. NAGASAWA","raw_affiliation_strings":["Superconductivity Research Laboratory, International Superconductivity Technology Center","The Institute of Electronics, Information and Communication Engineers"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Superconductivity Research Laboratory, International Superconductivity Technology Center","institution_ids":["https://openalex.org/I4210144711"]},{"raw_affiliation_string":"The Institute of Electronics, Information and Communication Engineers","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111739784","display_name":"K. Hinode","orcid":null},"institutions":[{"id":"https://openalex.org/I4210144711","display_name":"International Superconductivity Technology Center","ror":"https://ror.org/04048e026","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4210144711"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"K. HINODE","raw_affiliation_strings":["Superconductivity Research Laboratory, International Superconductivity Technology Center"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Superconductivity Research Laboratory, International Superconductivity Technology Center","institution_ids":["https://openalex.org/I4210144711"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5087748704","display_name":"Toshimi SATOH","orcid":"https://orcid.org/0000-0003-3263-6399"},"institutions":[{"id":"https://openalex.org/I4210144711","display_name":"International Superconductivity Technology Center","ror":"https://ror.org/04048e026","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4210144711"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"T. SATOH","raw_affiliation_strings":["Superconductivity Research Laboratory, International Superconductivity Technology Center"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Superconductivity Research Laboratory, International Superconductivity Technology Center","institution_ids":["https://openalex.org/I4210144711"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4210144711"],"apc_list":null,"apc_paid":null,"fwci":5.2185,"has_fulltext":false,"cited_by_count":34,"citation_normalized_percentile":{"value":0.96041548,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"E91-C","issue":"3","first_page":"318","last_page":"324"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10037","display_name":"Physics of Superconductivity and Magnetism","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10037","display_name":"Physics of Superconductivity and Magnetism","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10382","display_name":"Quantum and electron transport phenomena","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10049","display_name":"Magnetic properties of thin films","score":0.9977999925613403,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.7185102701187134},{"id":"https://openalex.org/keywords/magnetic-flux-quantum","display_name":"Magnetic flux quantum","score":0.6994954347610474},{"id":"https://openalex.org/keywords/josephson-effect","display_name":"Josephson effect","score":0.6906408071517944},{"id":"https://openalex.org/keywords/electronic-circuit","display_name":"Electronic circuit","score":0.6679758429527283},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.5861784219741821},{"id":"https://openalex.org/keywords/squid","display_name":"Squid","score":0.541155219078064},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.5303329229354858},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5173896551132202},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.46576547622680664},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.46552202105522156},{"id":"https://openalex.org/keywords/shift-register","display_name":"Shift register","score":0.43483906984329224},{"id":"https://openalex.org/keywords/integrated-circuit","display_name":"Integrated circuit","score":0.41904258728027344},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.40767696499824524},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.32574087381362915},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2308686077594757},{"id":"https://openalex.org/keywords/superconductivity","display_name":"Superconductivity","score":0.20044761896133423},{"id":"https://openalex.org/keywords/condensed-matter-physics","display_name":"Condensed matter physics","score":0.09764251112937927}],"concepts":[{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.7185102701187134},{"id":"https://openalex.org/C39197057","wikidata":"https://www.wikidata.org/wiki/Q2265632","display_name":"Magnetic flux quantum","level":4,"score":0.6994954347610474},{"id":"https://openalex.org/C12038964","wikidata":"https://www.wikidata.org/wiki/Q764228","display_name":"Josephson effect","level":3,"score":0.6906408071517944},{"id":"https://openalex.org/C134146338","wikidata":"https://www.wikidata.org/wiki/Q1815901","display_name":"Electronic circuit","level":2,"score":0.6679758429527283},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.5861784219741821},{"id":"https://openalex.org/C2777743550","wikidata":"https://www.wikidata.org/wiki/Q81900","display_name":"Squid","level":2,"score":0.541155219078064},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.5303329229354858},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5173896551132202},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.46576547622680664},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.46552202105522156},{"id":"https://openalex.org/C49654631","wikidata":"https://www.wikidata.org/wiki/Q746165","display_name":"Shift register","level":3,"score":0.43483906984329224},{"id":"https://openalex.org/C530198007","wikidata":"https://www.wikidata.org/wiki/Q80831","display_name":"Integrated circuit","level":2,"score":0.41904258728027344},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.40767696499824524},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.32574087381362915},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2308686077594757},{"id":"https://openalex.org/C54101563","wikidata":"https://www.wikidata.org/wiki/Q124131","display_name":"Superconductivity","level":2,"score":0.20044761896133423},{"id":"https://openalex.org/C26873012","wikidata":"https://www.wikidata.org/wiki/Q214781","display_name":"Condensed matter physics","level":1,"score":0.09764251112937927},{"id":"https://openalex.org/C18903297","wikidata":"https://www.wikidata.org/wiki/Q7150","display_name":"Ecology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1093/ietele/e91-c.3.318","is_oa":false,"landing_page_url":"https://doi.org/10.1093/ietele/e91-c.3.318","pdf_url":null,"source":{"id":"https://openalex.org/S2489501747","display_name":"IEICE Transactions on Electronics","issn_l":"0916-8524","issn":["0916-8524","1745-1353"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4320800604","host_organization_name":"Institute of Electronics, Information and Communication Engineers","host_organization_lineage":["https://openalex.org/P4320800604"],"host_organization_lineage_names":["Institute of Electronics, Information and Communication Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEICE Transactions on Electronics","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":15,"referenced_works":["https://openalex.org/W1580987494","https://openalex.org/W1979703700","https://openalex.org/W2002206613","https://openalex.org/W2008332135","https://openalex.org/W2047695881","https://openalex.org/W2070720518","https://openalex.org/W2081290327","https://openalex.org/W2094911151","https://openalex.org/W2097606255","https://openalex.org/W2099175329","https://openalex.org/W2113672761","https://openalex.org/W2119344870","https://openalex.org/W2119587409","https://openalex.org/W2130930316","https://openalex.org/W2138218024"],"related_works":["https://openalex.org/W2037755119","https://openalex.org/W1997393729","https://openalex.org/W2071981960","https://openalex.org/W1657656773","https://openalex.org/W2271912174","https://openalex.org/W2355141158","https://openalex.org/W1979800967","https://openalex.org/W2118711425","https://openalex.org/W2026389845","https://openalex.org/W2009655854"],"abstract_inverted_index":{"We":[0,63,118,160],"developed":[1,65],"an":[2,120],"Nb-based":[3],"fabrication":[4,68],"process":[5,41,45,69],"for":[6,47,70,80],"single":[7],"flux":[8],"quantum":[9],"(SFQ)":[10],"circuits":[11,151],"in":[12,19,24,154],"a":[13,66,87,95,100,107,125,131,170],"Japanese":[14],"government":[15],"project":[16],"that":[17,178],"began":[18],"September":[20],"2002":[21],"and":[22,43,112,130,146,169],"ended":[23],"March":[25],"2007.":[26],"Our":[27],"conventional":[28],"process,":[29],"called":[30,73],"the":[31,40,53,74,136,155,166,181],"Standard":[32],"Process":[33,76],"(SDP),":[34],"was":[35,141],"improved":[36,54],"by":[37,134,165],"overhauling":[38],"all":[39,48],"steps":[42],"routine":[44],"checks":[46],"wafers.":[49],"Wafer":[50],"yield":[51],"with":[52,180],"SDP":[55],"dramatically":[56],"increased":[57],"from":[58],"50%":[59],"to":[60,144,177],"over":[61],"90%.":[62],"also":[64],"new":[67],"SFQ":[71,122],"circuits,":[72],"Advanced":[75],"(ADP).":[77],"The":[78,138],"specifications":[79],"ADP":[81],"are":[82],"nine":[83],"planarized":[84],"Nb":[85],"layers,":[86],"minimum":[88],"Josephson":[89],"junction":[90],"(JJ)":[91],"size":[92],"of":[93,98,105],"1\u00d71\u03bcm,":[94],"line":[96],"width":[97],"0.8\u03bcm,":[99],"JJ":[101],"critical":[102],"current":[103],"density":[104],"10kA/cm2,":[106],"2.4\u03a9":[108],"Mo":[109],"sheet":[110],"resistance,":[111],"vertically":[113],"stacked":[114],"superconductive":[115],"contact":[116],"holes.":[117],"fabricated":[119],"eight-bit":[121],"shift":[123,139],"register,":[124],"one":[126,156],"million":[127,157],"SQUID":[128,158],"array":[129],"16-kbit":[132,167],"RAM":[133,168],"using":[135],"ADP.":[137],"register":[140],"operated":[142],"up":[143],"120GHz":[145],"no":[147],"short":[148],"or":[149],"open":[150],"were":[152],"detected":[153],"array.":[159],"confirmed":[161],"correct":[162],"memory":[163],"operations":[164],"5.7":[171],"times":[172],"greater":[173],"integration":[174],"level":[175],"compared":[176],"possible":[179],"SDP.":[182]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":2},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":5},{"year":2013,"cited_by_count":1}],"updated_date":"2026-07-31T08:31:51.225901","created_date":"2025-10-10T00:00:00"}