{"id":"https://openalex.org/W4378472962","doi":"https://doi.org/10.1088/2632-2153/acd988","title":"Realistic mask generation for matter-wave lithography via machine learning","display_name":"Realistic mask generation for matter-wave lithography via machine learning","publication_year":2023,"publication_date":"2023-05-26","ids":{"openalex":"https://openalex.org/W4378472962","doi":"https://doi.org/10.1088/2632-2153/acd988"},"language":"en","primary_location":{"id":"doi:10.1088/2632-2153/acd988","is_oa":true,"landing_page_url":"https://doi.org/10.1088/2632-2153/acd988","pdf_url":"https://iopscience.iop.org/article/10.1088/2632-2153/acd988/pdf","source":{"id":"https://openalex.org/S4210200687","display_name":"Machine Learning Science and Technology","issn_l":"2632-2153","issn":["2632-2153"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Machine Learning: Science and Technology","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://iopscience.iop.org/article/10.1088/2632-2153/acd988/pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5054096360","display_name":"Johannes Fiedler","orcid":"https://orcid.org/0000-0002-2179-0625"},"institutions":[{"id":"https://openalex.org/I4432739","display_name":"University of Bergen","ror":"https://ror.org/03zga2b32","country_code":"NO","type":"education","lineage":["https://openalex.org/I4432739"]}],"countries":["NO"],"is_corresponding":true,"raw_author_name":"Johannes Fiedler","raw_affiliation_strings":["Department of Physics and Technology, University of Bergen, All\u00e9gaten 55, 5007 Bergen, Norway"],"raw_orcid":"https://orcid.org/0000-0002-2179-0625","affiliations":[{"raw_affiliation_string":"Department of Physics and Technology, University of Bergen, All\u00e9gaten 55, 5007 Bergen, Norway","institution_ids":["https://openalex.org/I4432739"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054007985","display_name":"Adri\u00e0 Salvador Palau","orcid":"https://orcid.org/0000-0001-5611-2851"},"institutions":[{"id":"https://openalex.org/I4432739","display_name":"University of Bergen","ror":"https://ror.org/03zga2b32","country_code":"NO","type":"education","lineage":["https://openalex.org/I4432739"]}],"countries":["NO"],"is_corresponding":false,"raw_author_name":"Adri\u00e1 Salvador Palau","raw_affiliation_strings":["Department of Physics and Technology, University of Bergen, All\u00e9gaten 55, 5007 Bergen, Norway"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics and Technology, University of Bergen, All\u00e9gaten 55, 5007 Bergen, Norway","institution_ids":["https://openalex.org/I4432739"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082215362","display_name":"Eivind Kristen Osestad","orcid":"https://orcid.org/0009-0002-3332-0732"},"institutions":[{"id":"https://openalex.org/I4432739","display_name":"University of Bergen","ror":"https://ror.org/03zga2b32","country_code":"NO","type":"education","lineage":["https://openalex.org/I4432739"]}],"countries":["NO"],"is_corresponding":false,"raw_author_name":"Eivind Kristen Osestad","raw_affiliation_strings":["Department of Physics and Technology, University of Bergen, All\u00e9gaten 55, 5007 Bergen, Norway"],"raw_orcid":"https://orcid.org/0009-0002-3332-0732","affiliations":[{"raw_affiliation_string":"Department of Physics and Technology, University of Bergen, All\u00e9gaten 55, 5007 Bergen, Norway","institution_ids":["https://openalex.org/I4432739"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078448870","display_name":"Pekka Parviainen","orcid":"https://orcid.org/0000-0001-8416-6750"},"institutions":[{"id":"https://openalex.org/I4432739","display_name":"University of Bergen","ror":"https://ror.org/03zga2b32","country_code":"NO","type":"education","lineage":["https://openalex.org/I4432739"]}],"countries":["NO"],"is_corresponding":false,"raw_author_name":"Pekka Parviainen","raw_affiliation_strings":["Department of Informatics, University of Bergen, HIB\u2014Thorm\u00f8hlens gate 55, 5006 Bergen, Norway"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Informatics, University of Bergen, HIB\u2014Thorm\u00f8hlens gate 55, 5006 Bergen, Norway","institution_ids":["https://openalex.org/I4432739"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5041686736","display_name":"Bodil Holst","orcid":"https://orcid.org/0000-0001-6809-2579"},"institutions":[{"id":"https://openalex.org/I4432739","display_name":"University of Bergen","ror":"https://ror.org/03zga2b32","country_code":"NO","type":"education","lineage":["https://openalex.org/I4432739"]}],"countries":["NO"],"is_corresponding":false,"raw_author_name":"Bodil Holst","raw_affiliation_strings":["Department of Physics and Technology, University of Bergen, All\u00e9gaten 55, 5007 Bergen, Norway"],"raw_orcid":"https://orcid.org/0000-0001-6809-2579","affiliations":[{"raw_affiliation_string":"Department of Physics and Technology, University of Bergen, All\u00e9gaten 55, 5007 Bergen, Norway","institution_ids":["https://openalex.org/I4432739"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5054096360"],"corresponding_institution_ids":["https://openalex.org/I4432739"],"apc_list":{"value":1600,"currency":"GBP","value_usd":1962},"apc_paid":{"value":1600,"currency":"GBP","value_usd":1962},"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.04941901,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"4","issue":"2","first_page":"025028","last_page":"025028"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10425","display_name":"Cold Atom Physics and Bose-Einstein Condensates","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10425","display_name":"Cold Atom Physics and Bose-Einstein Condensates","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11996","display_name":"Random lasers and scattering media","score":0.9973999857902527,"subfield":{"id":"https://openalex.org/subfields/3102","display_name":"Acoustics and Ultrasonics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10020","display_name":"Quantum Information and Cryptography","score":0.996399998664856,"subfield":{"id":"https://openalex.org/subfields/1702","display_name":"Artificial Intelligence"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.690848171710968},{"id":"https://openalex.org/keywords/wavefront","display_name":"Wavefront","score":0.5835299491882324},{"id":"https://openalex.org/keywords/metastability","display_name":"Metastability","score":0.543701171875},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.49306365847587585},{"id":"https://openalex.org/keywords/scalar","display_name":"Scalar (mathematics)","score":0.4865371286869049},{"id":"https://openalex.org/keywords/binary-number","display_name":"Binary number","score":0.4602154493331909},{"id":"https://openalex.org/keywords/holography","display_name":"Holography","score":0.45243149995803833},{"id":"https://openalex.org/keywords/population","display_name":"Population","score":0.4190797209739685},{"id":"https://openalex.org/keywords/quantum","display_name":"Quantum","score":0.4177109897136688},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.38847848773002625},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3826186954975128},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.3483182191848755},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.171648770570755},{"id":"https://openalex.org/keywords/quantum-mechanics","display_name":"Quantum mechanics","score":0.1605936884880066}],"concepts":[{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.690848171710968},{"id":"https://openalex.org/C165699331","wikidata":"https://www.wikidata.org/wiki/Q461533","display_name":"Wavefront","level":2,"score":0.5835299491882324},{"id":"https://openalex.org/C89464430","wikidata":"https://www.wikidata.org/wiki/Q849516","display_name":"Metastability","level":2,"score":0.543701171875},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.49306365847587585},{"id":"https://openalex.org/C57691317","wikidata":"https://www.wikidata.org/wiki/Q1289248","display_name":"Scalar (mathematics)","level":2,"score":0.4865371286869049},{"id":"https://openalex.org/C48372109","wikidata":"https://www.wikidata.org/wiki/Q3913","display_name":"Binary number","level":2,"score":0.4602154493331909},{"id":"https://openalex.org/C187590223","wikidata":"https://www.wikidata.org/wiki/Q527628","display_name":"Holography","level":2,"score":0.45243149995803833},{"id":"https://openalex.org/C2908647359","wikidata":"https://www.wikidata.org/wiki/Q2625603","display_name":"Population","level":2,"score":0.4190797209739685},{"id":"https://openalex.org/C84114770","wikidata":"https://www.wikidata.org/wiki/Q46344","display_name":"Quantum","level":2,"score":0.4177109897136688},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.38847848773002625},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3826186954975128},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3483182191848755},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.171648770570755},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.1605936884880066},{"id":"https://openalex.org/C144024400","wikidata":"https://www.wikidata.org/wiki/Q21201","display_name":"Sociology","level":0,"score":0.0},{"id":"https://openalex.org/C94375191","wikidata":"https://www.wikidata.org/wiki/Q11205","display_name":"Arithmetic","level":1,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C149923435","wikidata":"https://www.wikidata.org/wiki/Q37732","display_name":"Demography","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1088/2632-2153/acd988","is_oa":true,"landing_page_url":"https://doi.org/10.1088/2632-2153/acd988","pdf_url":"https://iopscience.iop.org/article/10.1088/2632-2153/acd988/pdf","source":{"id":"https://openalex.org/S4210200687","display_name":"Machine Learning Science and Technology","issn_l":"2632-2153","issn":["2632-2153"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Machine Learning: Science and Technology","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:a70957c3ac5f499f87eb0cacaf718061","is_oa":true,"landing_page_url":"https://doaj.org/article/a70957c3ac5f499f87eb0cacaf718061","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Machine Learning: Science and Technology, Vol 4, Iss 2, p 025028 (2023)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.1088/2632-2153/acd988","is_oa":true,"landing_page_url":"https://doi.org/10.1088/2632-2153/acd988","pdf_url":"https://iopscience.iop.org/article/10.1088/2632-2153/acd988/pdf","source":{"id":"https://openalex.org/S4210200687","display_name":"Machine Learning Science and Technology","issn_l":"2632-2153","issn":["2632-2153"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Machine Learning: Science and Technology","raw_type":"journal-article"},"sustainable_development_goals":[{"display_name":"Industry, innovation and infrastructure","score":0.6399999856948853,"id":"https://metadata.un.org/sdg/9"}],"awards":[{"id":"https://openalex.org/G468821283","display_name":"Design of a monolithic matter-wave interferometer for gravity sensing and navigation","funder_award_id":"101031712","funder_id":"https://openalex.org/F4320338337","funder_display_name":"H2020 Marie Sk\u0142odowska-Curie Actions"},{"id":"https://openalex.org/G8744864520","display_name":"Mask Based Lithography for Fast, Large Scale Pattern Generation with Nanometer Resolution","funder_award_id":"863127","funder_id":"https://openalex.org/F4320338336","funder_display_name":"H2020 Future and Emerging Technologies"}],"funders":[{"id":"https://openalex.org/F4320338336","display_name":"H2020 Future and Emerging Technologies","ror":null},{"id":"https://openalex.org/F4320338337","display_name":"H2020 Marie Sk\u0142odowska-Curie Actions","ror":null}],"has_content":{"grobid_xml":false,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4378472962.pdf"},"referenced_works_count":56,"referenced_works":["https://openalex.org/W1522301498","https://openalex.org/W1632930880","https://openalex.org/W1972268728","https://openalex.org/W1973840272","https://openalex.org/W1980543969","https://openalex.org/W1985435797","https://openalex.org/W1985546710","https://openalex.org/W1985965156","https://openalex.org/W2015443456","https://openalex.org/W2016283313","https://openalex.org/W2020819605","https://openalex.org/W2021243882","https://openalex.org/W2027646215","https://openalex.org/W2035054588","https://openalex.org/W2044500908","https://openalex.org/W2046421731","https://openalex.org/W2055556021","https://openalex.org/W2060927160","https://openalex.org/W2063323963","https://openalex.org/W2073445064","https://openalex.org/W2102944971","https://openalex.org/W2114697775","https://openalex.org/W2123512464","https://openalex.org/W2123708124","https://openalex.org/W2137983211","https://openalex.org/W2255980122","https://openalex.org/W2286730075","https://openalex.org/W2319888772","https://openalex.org/W2464582042","https://openalex.org/W2589165539","https://openalex.org/W2589585283","https://openalex.org/W2612349747","https://openalex.org/W2634969169","https://openalex.org/W2745602361","https://openalex.org/W2805507403","https://openalex.org/W2894120608","https://openalex.org/W2907688519","https://openalex.org/W3000690339","https://openalex.org/W3042203856","https://openalex.org/W3045875470","https://openalex.org/W3105743730","https://openalex.org/W3112139896","https://openalex.org/W3151683206","https://openalex.org/W3165438912","https://openalex.org/W3166077154","https://openalex.org/W3169283615","https://openalex.org/W4205703175","https://openalex.org/W4211065645","https://openalex.org/W4297790878","https://openalex.org/W4313021713","https://openalex.org/W6631190155","https://openalex.org/W6738897456","https://openalex.org/W6773433944","https://openalex.org/W6787086241","https://openalex.org/W6796057476","https://openalex.org/W6796210360"],"related_works":["https://openalex.org/W4307107610","https://openalex.org/W3213627526","https://openalex.org/W4226159838","https://openalex.org/W3138976155","https://openalex.org/W1992748572","https://openalex.org/W2108497790","https://openalex.org/W3102066851","https://openalex.org/W2082939555","https://openalex.org/W2078238515","https://openalex.org/W2587774296"],"abstract_inverted_index":{"Abstract":[0],"Fast":[1],"production":[2,16],"of":[3,17,40,54,68,125,147,160,175],"large-area":[4],"patterns":[5,178],"is":[6,80,140,152],"crucial":[7],"for":[8,117,179],"the":[9,37,41,52,55,59,69,74,89,97,133,148,157,161,173,183],"established":[10],"semiconductor":[11],"industry":[12],"and":[13,128],"enables":[14],"industrial-scale":[15],"next-generation":[18],"quantum":[19],"devices.":[20],"Metastable":[21],"atom":[22],"lithography":[23],"with":[24,58],"binary":[25],"holography":[26],"masks":[27],"has":[28],"been":[29],"suggested":[30],"as":[31],"a":[32,65,93,110,123],"higher":[33],"resolution/low-cost":[34],"alternative":[35],"to":[36,64,113,131,142,155,168],"current":[38],"state":[39],"art:":[42],"extreme":[43],"ultraviolet":[44],"lithography.":[45],"However,":[46],"it":[47],"was":[48],"recently":[49],"shown":[50],"that":[51,88,165],"interaction":[53],"metastable":[56,118],"atoms":[57],"mask":[60,76,94,114],"material":[61],"(SiN)":[62],"leads":[63],"strong":[66],"perturbation":[67],"wavefront,":[70],"not":[71],"included":[72],"in":[73,105],"existing":[75],"generation":[77,115,174],"theory,":[78],"which":[79],"based":[81,95],"on":[82,96],"classical":[83],"scalar":[84],"waves.":[85],"This":[86,150],"means":[87],"inverse":[90],"problem":[91],"(creating":[92],"desired":[98],"pattern)":[99],"cannot":[100],"be":[101],"solved":[102],"analytically,":[103],"even":[104],"1D.":[106],"Here":[107],"we":[108],"present":[109],"machine-learning":[111],"approach":[112],"targeted":[116],"atoms.":[119],"Our":[120],"algorithm":[121,164],"uses":[122],"combination":[124],"genetic":[126,162],"optimisation":[127,163],"deep":[129,137],"learning":[130],"obtain":[132],"mask.":[134,149],"A":[135],"novel":[136],"neural":[138],"architecture":[139],"trained":[141],"produce":[143],"an":[144],"initial":[145,158],"approximation":[146,151,185],"then":[153],"used":[154],"generate":[156],"population":[159],"can":[166],"converge":[167],"arbitrary":[169,176],"precision.":[170],"We":[171],"demonstrate":[172],"1D":[177],"system":[180],"dimensions":[181],"within":[182],"Fraunhofer":[184],"limit.":[186]},"counts_by_year":[],"updated_date":"2026-05-06T08:25:59.206177","created_date":"2025-10-10T00:00:00"}