{"id":"https://openalex.org/W2265219777","doi":"https://doi.org/10.1080/00207543.2015.1109153","title":"Analysing semiconductor manufacturing big data for root cause detection of excursion for yield enhancement","display_name":"Analysing semiconductor manufacturing big data for root cause detection of excursion for yield enhancement","publication_year":2015,"publication_date":"2015-11-17","ids":{"openalex":"https://openalex.org/W2265219777","doi":"https://doi.org/10.1080/00207543.2015.1109153","mag":"2265219777"},"language":"en","primary_location":{"id":"doi:10.1080/00207543.2015.1109153","is_oa":false,"landing_page_url":"https://doi.org/10.1080/00207543.2015.1109153","pdf_url":null,"source":{"id":"https://openalex.org/S65690446","display_name":"International Journal of Production Research","issn_l":"0020-7543","issn":["0020-7543","1366-588X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320547","host_organization_name":"Taylor & Francis","host_organization_lineage":["https://openalex.org/P4310320547","https://openalex.org/P4310320449"],"host_organization_lineage_names":["Taylor & Francis","Informa"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"International Journal of Production Research","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5020132059","display_name":"Chen\u2013Fu Chien","orcid":"https://orcid.org/0000-0003-3328-4946"},"institutions":[{"id":"https://openalex.org/I25846049","display_name":"National Tsing Hua University","ror":"https://ror.org/00zdnkx70","country_code":"TW","type":"education","lineage":["https://openalex.org/I25846049"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Chen-Fu Chien","raw_affiliation_strings":["Department of Industrial Engineering & Engineering Management, National Tsing Hua University, Hsinchu, Taiwan"],"raw_orcid":"https://orcid.org/0000-0003-3328-4946","affiliations":[{"raw_affiliation_string":"Department of Industrial Engineering & Engineering Management, National Tsing Hua University, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I25846049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042989386","display_name":"Chiao-Wen Liu","orcid":null},"institutions":[{"id":"https://openalex.org/I25846049","display_name":"National Tsing Hua University","ror":"https://ror.org/00zdnkx70","country_code":"TW","type":"education","lineage":["https://openalex.org/I25846049"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chiao-Wen Liu","raw_affiliation_strings":["Department of Industrial Engineering & Engineering Management, National Tsing Hua University, Hsinchu, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Industrial Engineering & Engineering Management, National Tsing Hua University, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I25846049"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5110003524","display_name":"Shih\u2010Chung Chuang","orcid":null},"institutions":[{"id":"https://openalex.org/I25846049","display_name":"National Tsing Hua University","ror":"https://ror.org/00zdnkx70","country_code":"TW","type":"education","lineage":["https://openalex.org/I25846049"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Shih-Chung Chuang","raw_affiliation_strings":["Department of Industrial Engineering & Engineering Management, National Tsing Hua University, Hsinchu, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Industrial Engineering & Engineering Management, National Tsing Hua University, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I25846049"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5020132059"],"corresponding_institution_ids":["https://openalex.org/I25846049"],"apc_list":null,"apc_paid":null,"fwci":7.1565,"has_fulltext":false,"cited_by_count":92,"citation_normalized_percentile":{"value":0.96531737,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":94,"max":100},"biblio":{"volume":"55","issue":"17","first_page":"5095","last_page":"5107"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11443","display_name":"Advanced Statistical Process Monitoring","score":0.9955000281333923,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},{"id":"https://openalex.org/T11159","display_name":"Manufacturing Process and Optimization","score":0.9950000047683716,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.6655945777893066},{"id":"https://openalex.org/keywords/root-cause","display_name":"Root cause","score":0.6100056767463684},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.5472069978713989},{"id":"https://openalex.org/keywords/yield","display_name":"Yield (engineering)","score":0.5418920516967773},{"id":"https://openalex.org/keywords/excursion","display_name":"Excursion","score":0.525736927986145},{"id":"https://openalex.org/keywords/big-data","display_name":"Big data","score":0.5100491642951965},{"id":"https://openalex.org/keywords/root-cause-analysis","display_name":"Root cause analysis","score":0.46630704402923584},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.4536939263343811},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4201638996601105},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.40970343351364136},{"id":"https://openalex.org/keywords/reliability-engineering","display_name":"Reliability engineering","score":0.37165406346321106},{"id":"https://openalex.org/keywords/data-mining","display_name":"Data mining","score":0.26730597019195557},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.17188507318496704},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.1644597351551056}],"concepts":[{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.6655945777893066},{"id":"https://openalex.org/C84945661","wikidata":"https://www.wikidata.org/wiki/Q7366567","display_name":"Root cause","level":2,"score":0.6100056767463684},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.5472069978713989},{"id":"https://openalex.org/C134121241","wikidata":"https://www.wikidata.org/wiki/Q899301","display_name":"Yield (engineering)","level":2,"score":0.5418920516967773},{"id":"https://openalex.org/C2780550144","wikidata":"https://www.wikidata.org/wiki/Q1156976","display_name":"Excursion","level":2,"score":0.525736927986145},{"id":"https://openalex.org/C75684735","wikidata":"https://www.wikidata.org/wiki/Q858810","display_name":"Big data","level":2,"score":0.5100491642951965},{"id":"https://openalex.org/C130963320","wikidata":"https://www.wikidata.org/wiki/Q1401207","display_name":"Root cause analysis","level":2,"score":0.46630704402923584},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.4536939263343811},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4201638996601105},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.40970343351364136},{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.37165406346321106},{"id":"https://openalex.org/C124101348","wikidata":"https://www.wikidata.org/wiki/Q172491","display_name":"Data mining","level":1,"score":0.26730597019195557},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.17188507318496704},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.1644597351551056},{"id":"https://openalex.org/C17744445","wikidata":"https://www.wikidata.org/wiki/Q36442","display_name":"Political science","level":0,"score":0.0},{"id":"https://openalex.org/C199539241","wikidata":"https://www.wikidata.org/wiki/Q7748","display_name":"Law","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1080/00207543.2015.1109153","is_oa":false,"landing_page_url":"https://doi.org/10.1080/00207543.2015.1109153","pdf_url":null,"source":{"id":"https://openalex.org/S65690446","display_name":"International Journal of Production Research","issn_l":"0020-7543","issn":["0020-7543","1366-588X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320547","host_organization_name":"Taylor & Francis","host_organization_lineage":["https://openalex.org/P4310320547","https://openalex.org/P4310320449"],"host_organization_lineage_names":["Taylor & Francis","Informa"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"International Journal of Production Research","raw_type":"journal-article"},{"id":"pmh:oai:RePEc:taf:tprsxx:v:55:y:2017:i:17:p:5095-5107","is_oa":false,"landing_page_url":"http://hdl.handle.net/10.1080/00207543.2015.1109153","pdf_url":null,"source":{"id":"https://openalex.org/S4306401271","display_name":"RePEc: Research Papers in Economics","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I77793887","host_organization_name":"Federal Reserve Bank of St. Louis","host_organization_lineage":["https://openalex.org/I77793887"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G1706077365","display_name":null,"funder_award_id":"NSC 100-2628-E-007\u2013017-MY3","funder_id":"https://openalex.org/F4320321040","funder_display_name":"National Science Council"},{"id":"https://openalex.org/G1774148270","display_name":null,"funder_award_id":"NSC102-2622-E-007-013","funder_id":"https://openalex.org/F4320321040","funder_display_name":"National Science Council"}],"funders":[{"id":"https://openalex.org/F4320321040","display_name":"National Science Council","ror":"https://ror.org/02kv4zf79"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":46,"referenced_works":["https://openalex.org/W1528905581","https://openalex.org/W1566641586","https://openalex.org/W1587362683","https://openalex.org/W1878920975","https://openalex.org/W1975617480","https://openalex.org/W1975976573","https://openalex.org/W1998103843","https://openalex.org/W2000268559","https://openalex.org/W2003132325","https://openalex.org/W2005407075","https://openalex.org/W2005615234","https://openalex.org/W2011251964","https://openalex.org/W2015079391","https://openalex.org/W2026535637","https://openalex.org/W2032099903","https://openalex.org/W2034489756","https://openalex.org/W2044855549","https://openalex.org/W2046602365","https://openalex.org/W2049058890","https://openalex.org/W2056945148","https://openalex.org/W2060542593","https://openalex.org/W2061240327","https://openalex.org/W2066956616","https://openalex.org/W2068395870","https://openalex.org/W2070690609","https://openalex.org/W2082026549","https://openalex.org/W2086574514","https://openalex.org/W2094566035","https://openalex.org/W2104950057","https://openalex.org/W2119479037","https://openalex.org/W2120826257","https://openalex.org/W2124084923","https://openalex.org/W2127861000","https://openalex.org/W2137130182","https://openalex.org/W2147069407","https://openalex.org/W2157776123","https://openalex.org/W2319794630","https://openalex.org/W2801490189","https://openalex.org/W2892194316","https://openalex.org/W2911964244","https://openalex.org/W3016054986","https://openalex.org/W4230681702","https://openalex.org/W4238688872","https://openalex.org/W4252671862","https://openalex.org/W4285719527","https://openalex.org/W4300363951"],"related_works":["https://openalex.org/W2030594396","https://openalex.org/W2754538212","https://openalex.org/W2490884653","https://openalex.org/W4200610016","https://openalex.org/W2183996497","https://openalex.org/W129587375","https://openalex.org/W2110363179","https://openalex.org/W2056250485","https://openalex.org/W2535098331","https://openalex.org/W2799474201"],"abstract_inverted_index":{"With":[0],"the":[1,16,36,118,124],"shrinking":[2],"feature":[3],"size":[4],"of":[5,18,114],"integrated":[6],"circuits":[7],"driven":[8],"by":[9],"continuous":[10],"technology":[11,44],"migrations":[12],"for":[13,24,41,68,81,87,98],"wafer":[14],"fabrication,":[15],"control":[17],"tightening":[19],"critical":[20,23],"dimensions":[21],"is":[22,31],"yield":[25,37,89,99,126],"enhancement,":[26],"while":[27],"physical":[28],"failure":[29],"analysis":[30],"increasingly":[32],"difficult.":[33],"In":[34],"particular,":[35],"ramp":[38],"up":[39],"stage":[40],"implementing":[42],"new":[43,47],"node":[45],"involves":[46],"production":[48,125],"processes,":[49],"unstable":[50],"machine":[51],"configurations,":[52],"big":[53,85],"data":[54,86],"with":[55],"multiple":[56],"co-linearity":[57],"and":[58,122],"high":[59],"dimensionality":[60],"that":[61],"can":[62],"hardly":[63],"rely":[64],"on":[65],"previous":[66],"experience":[67],"detecting":[69],"root":[70,96,112],"causes.":[71],"This":[72],"research":[73],"aims":[74],"to":[75,93,108,116],"propose":[76],"a":[77],"novel":[78],"data-driven":[79],"approach":[80,103],"Analysing":[82],"semiconductor":[83],"manufacturing":[84],"low":[88],"(namely,":[90],"excursions)":[91],"diagnosis":[92],"detect":[94,110],"process":[95],"causes":[97,113],"enhancement.":[100],"The":[101],"proposed":[102],"has":[104],"shown":[105],"practical":[106],"viability":[107],"efficiently":[109],"possible":[111],"excursion":[115],"reduce":[117],"trouble":[119],"shooting":[120],"time":[121],"improve":[123],"effectively.":[127]},"counts_by_year":[{"year":2026,"cited_by_count":5},{"year":2025,"cited_by_count":6},{"year":2024,"cited_by_count":11},{"year":2023,"cited_by_count":8},{"year":2022,"cited_by_count":11},{"year":2021,"cited_by_count":11},{"year":2020,"cited_by_count":19},{"year":2019,"cited_by_count":7},{"year":2018,"cited_by_count":8},{"year":2017,"cited_by_count":4},{"year":2016,"cited_by_count":2}],"updated_date":"2026-08-15T07:11:24.734988","created_date":"2025-10-10T00:00:00"}