{"id":"https://openalex.org/W1481482547","doi":"https://doi.org/10.1016/s1088-467x(99)00030-x","title":"Knowledge acquisition from batch semiconductor manufacturing data","display_name":"Knowledge acquisition from batch semiconductor manufacturing data","publication_year":1999,"publication_date":"1999-11-01","ids":{"openalex":"https://openalex.org/W1481482547","doi":"https://doi.org/10.1016/s1088-467x(99)00030-x","mag":"1481482547"},"language":"en","primary_location":{"id":"doi:10.1016/s1088-467x(99)00030-x","is_oa":false,"landing_page_url":"https://doi.org/10.1016/s1088-467x(99)00030-x","pdf_url":null,"source":{"id":"https://openalex.org/S2498839158","display_name":"Intelligent Data Analysis","issn_l":"1088-467X","issn":["1088-467X","1571-4128"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310318577","host_organization_name":"IOS Press","host_organization_lineage":["https://openalex.org/P4310318577"],"host_organization_lineage_names":["IOS Press"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Intelligent Data Analysis","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5097581393","display_name":"M DELCASTILLOSOBRINO","orcid":null},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"M DELCASTILLOSOBRINO","raw_affiliation_strings":["Instituto de Autom\u00e1tica Industrial, N-III, km.22,8. Desv\u0131\u0301o La Poveda, 28500 Arganda del Rey, Madrid, Spain","Instituto de Autom\u00e1tica Industrial, N-III, km.22, 8. Desv\u00edo La Poveda, 28500 Arganda del Rey, Madrid, Spain"],"affiliations":[{"raw_affiliation_string":"Instituto de Autom\u00e1tica Industrial, N-III, km.22,8. Desv\u0131\u0301o La Poveda, 28500 Arganda del Rey, Madrid, Spain","institution_ids":[]},{"raw_affiliation_string":"Instituto de Autom\u00e1tica Industrial, N-III, km.22, 8. Desv\u00edo La Poveda, 28500 Arganda del Rey, Madrid, Spain","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5097607927","display_name":"L BARRIOSBRAVO","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"L BARRIOSBRAVO","raw_affiliation_strings":["Instituto de Autom\u00e1tica Industrial, N-III, km.22,8. Desv\u0131\u0301o La Poveda, 28500 Arganda del Rey, Madrid, Spain","Instituto de Autom\u00e1tica Industrial, N-III, km.22, 8. Desv\u00edo La Poveda, 28500 Arganda del Rey, Madrid, Spain"],"affiliations":[{"raw_affiliation_string":"Instituto de Autom\u00e1tica Industrial, N-III, km.22,8. Desv\u0131\u0301o La Poveda, 28500 Arganda del Rey, Madrid, Spain","institution_ids":[]},{"raw_affiliation_string":"Instituto de Autom\u00e1tica Industrial, N-III, km.22, 8. Desv\u00edo La Poveda, 28500 Arganda del Rey, Madrid, Spain","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5097581393"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":7,"citation_normalized_percentile":{"value":0.11567458,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"3","issue":"5","first_page":"399","last_page":"408"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11443","display_name":"Advanced Statistical Process Monitoring","score":0.9805999994277954,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},{"id":"https://openalex.org/T12535","display_name":"Machine Learning and Data Classification","score":0.9660000205039978,"subfield":{"id":"https://openalex.org/subfields/1702","display_name":"Artificial Intelligence"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.6944921016693115},{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.6926841735839844},{"id":"https://openalex.org/keywords/manufacturing-engineering","display_name":"Manufacturing engineering","score":0.5812852382659912},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.560172975063324},{"id":"https://openalex.org/keywords/quality","display_name":"Quality (philosophy)","score":0.5533447861671448},{"id":"https://openalex.org/keywords/wafer-fabrication","display_name":"Wafer fabrication","score":0.549789547920227},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.5304728746414185},{"id":"https://openalex.org/keywords/production-line","display_name":"Production line","score":0.5222947597503662},{"id":"https://openalex.org/keywords/knowledge-extraction","display_name":"Knowledge extraction","score":0.48432719707489014},{"id":"https://openalex.org/keywords/raw-data","display_name":"Raw data","score":0.4523351192474365},{"id":"https://openalex.org/keywords/expert-system","display_name":"Expert system","score":0.4339215159416199},{"id":"https://openalex.org/keywords/industrial-engineering","display_name":"Industrial engineering","score":0.3869602680206299},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.32836031913757324},{"id":"https://openalex.org/keywords/data-mining","display_name":"Data mining","score":0.2980650067329407},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.27154988050460815},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.12632164359092712},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.11601155996322632}],"concepts":[{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6944921016693115},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.6926841735839844},{"id":"https://openalex.org/C117671659","wikidata":"https://www.wikidata.org/wiki/Q11049265","display_name":"Manufacturing engineering","level":1,"score":0.5812852382659912},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.560172975063324},{"id":"https://openalex.org/C2779530757","wikidata":"https://www.wikidata.org/wiki/Q1207505","display_name":"Quality (philosophy)","level":2,"score":0.5533447861671448},{"id":"https://openalex.org/C35750839","wikidata":"https://www.wikidata.org/wiki/Q7959421","display_name":"Wafer fabrication","level":3,"score":0.549789547920227},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.5304728746414185},{"id":"https://openalex.org/C99862985","wikidata":"https://www.wikidata.org/wiki/Q10858068","display_name":"Production line","level":2,"score":0.5222947597503662},{"id":"https://openalex.org/C120567893","wikidata":"https://www.wikidata.org/wiki/Q1582085","display_name":"Knowledge extraction","level":2,"score":0.48432719707489014},{"id":"https://openalex.org/C132964779","wikidata":"https://www.wikidata.org/wiki/Q2110223","display_name":"Raw data","level":2,"score":0.4523351192474365},{"id":"https://openalex.org/C58328972","wikidata":"https://www.wikidata.org/wiki/Q184609","display_name":"Expert system","level":2,"score":0.4339215159416199},{"id":"https://openalex.org/C13736549","wikidata":"https://www.wikidata.org/wiki/Q4489420","display_name":"Industrial engineering","level":1,"score":0.3869602680206299},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.32836031913757324},{"id":"https://openalex.org/C124101348","wikidata":"https://www.wikidata.org/wiki/Q172491","display_name":"Data mining","level":1,"score":0.2980650067329407},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.27154988050460815},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.12632164359092712},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.11601155996322632},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C111472728","wikidata":"https://www.wikidata.org/wiki/Q9471","display_name":"Epistemology","level":1,"score":0.0},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1016/s1088-467x(99)00030-x","is_oa":false,"landing_page_url":"https://doi.org/10.1016/s1088-467x(99)00030-x","pdf_url":null,"source":{"id":"https://openalex.org/S2498839158","display_name":"Intelligent Data Analysis","issn_l":"1088-467X","issn":["1088-467X","1571-4128"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310318577","host_organization_name":"IOS Press","host_organization_lineage":["https://openalex.org/P4310318577"],"host_organization_lineage_names":["IOS Press"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Intelligent Data Analysis","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.5899999737739563,"id":"https://metadata.un.org/sdg/9","display_name":"Industry, innovation and infrastructure"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320313831","display_name":"Comunidad de Madrid","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W1523293200","https://openalex.org/W1531110464","https://openalex.org/W1969733464","https://openalex.org/W1970406594","https://openalex.org/W2033626294","https://openalex.org/W2034292254","https://openalex.org/W2035566964","https://openalex.org/W2035703056","https://openalex.org/W2067642555","https://openalex.org/W2110414574","https://openalex.org/W2166906188"],"related_works":["https://openalex.org/W2146435486","https://openalex.org/W2170726572","https://openalex.org/W2006086900","https://openalex.org/W1483119123","https://openalex.org/W2377558694","https://openalex.org/W2394172622","https://openalex.org/W1594978932","https://openalex.org/W2083418455","https://openalex.org/W2140718007","https://openalex.org/W2025046394"],"abstract_inverted_index":{"Semiconductor":[0],"manufacturing":[1,25,68,89],"data":[2,100,103],"consist":[3],"of":[4,14,16,35,59,67,119],"the":[5,8,12,24,33,36,50,56,76,88,94,99,109,115,120],"processes":[6],"and":[7,28,107],"machines":[9],"involved":[10],"in":[11,138],"production":[13],"batches":[15],"semiconductor":[17],"circuit":[18],"wafers.":[19],"Wafer":[20],"quality":[21,61],"depends":[22],"on":[23,81,87],"line":[26],"status":[27],"it":[29],"is":[30,46],"measured":[31],"at":[32,132],"end":[34],"line.":[37],"We":[38],"have":[39],"developed":[40],"a":[41],"knowledge":[42,77,144],"discovery":[43,145],"system":[44],"that":[45],"intended":[47],"to":[48,85,104],"help":[49],"yield":[51,71],"analysis":[52,72,130],"expert":[53],"by":[54,74,114],"learning":[55],"tentative":[57],"causes":[58],"low":[60],"wafers":[62],"from":[63,101],"an":[64],"exhaustive":[65],"amount":[66],"data.":[69],"The":[70,117],"expert,":[73],"using":[75,142],"discovered,":[78],"will":[79],"decide":[80],"which":[82],"corrective":[83],"actions":[84],"perform":[86],"process.":[90],"This":[91],"paper":[92],"discusses":[93],"transformations":[95],"carried":[96],"out":[97],"within":[98],"raw":[102],"discovered":[105],"knowledge,":[106],"also":[108,127],"two":[110],"main":[111],"tasks":[112,125],"performed":[113],"system.":[116],"features":[118],"inductive":[121],"algorithm":[122],"performing":[123],"those":[124],"are":[126,140],"described.":[128],"Yield":[129],"experts":[131],"Lucent":[133],"Technologies,":[134],"Bell":[135],"Labs":[136],"Innovations":[137],"Spain":[139],"currently":[141],"this":[143],"application.":[146]},"counts_by_year":[],"updated_date":"2026-02-25T21:11:00.739837","created_date":"2025-10-10T00:00:00"}