{"id":"https://openalex.org/W2004353310","doi":"https://doi.org/10.1016/s0026-2714(02)00216-0","title":"Investigation of Sensitivity Improvement on Passive Voltage Contrast for Defect Isolation","display_name":"Investigation of Sensitivity Improvement on Passive Voltage Contrast for Defect Isolation","publication_year":2002,"publication_date":"2002-09-01","ids":{"openalex":"https://openalex.org/W2004353310","doi":"https://doi.org/10.1016/s0026-2714(02)00216-0","mag":"2004353310"},"language":"en","primary_location":{"id":"doi:10.1016/s0026-2714(02)00216-0","is_oa":false,"landing_page_url":"https://doi.org/10.1016/s0026-2714(02)00216-0","pdf_url":null,"source":{"id":"https://openalex.org/S133646729","display_name":"Microelectronics Reliability","issn_l":"0026-2714","issn":["0026-2714","1872-941X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microelectronics Reliability","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5084725245","display_name":"Jon C. Lee","orcid":null},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Jon C. Lee","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, Ltd. No. 6, Creation Road 2, SBIP, Hsin-Chu, 300, Taiwan, ROC"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, Ltd. No. 6, Creation Road 2, SBIP, Hsin-Chu, 300, Taiwan, ROC","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000457592","display_name":"C.H. Chen","orcid":null},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"C.H. Chen","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, Ltd. No. 6, Creation Road 2, SBIP, Hsin-Chu, 300, Taiwan, ROC"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, Ltd. No. 6, Creation Road 2, SBIP, Hsin-Chu, 300, Taiwan, ROC","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075647711","display_name":"David Su","orcid":"https://orcid.org/0009-0002-1013-6510"},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"David Su","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, Ltd. No. 6, Creation Road 2, SBIP, Hsin-Chu, 300, Taiwan, ROC"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, Ltd. No. 6, Creation Road 2, SBIP, Hsin-Chu, 300, Taiwan, ROC","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5113561902","display_name":"J.H. Chuang","orcid":null},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"J.H. Chuang","raw_affiliation_strings":["Taiwan Semiconductor Manufacturing Company, Ltd. No. 6, Creation Road 2, SBIP, Hsin-Chu, 300, Taiwan, ROC"],"affiliations":[{"raw_affiliation_string":"Taiwan Semiconductor Manufacturing Company, Ltd. No. 6, Creation Road 2, SBIP, Hsin-Chu, 300, Taiwan, ROC","institution_ids":["https://openalex.org/I4210120917"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5084725245"],"corresponding_institution_ids":["https://openalex.org/I4210120917"],"apc_list":{"value":2190,"currency":"USD","value_usd":2190},"apc_paid":null,"fwci":2.3973,"has_fulltext":false,"cited_by_count":17,"citation_normalized_percentile":{"value":0.88522244,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":96},"biblio":{"volume":"42","issue":"9-11","first_page":"1707","last_page":"1710"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11032","display_name":"VLSI and Analog Circuit Testing","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/1708","display_name":"Hardware and Architecture"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.998199999332428,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/reliability-engineering","display_name":"Reliability engineering","score":0.7354120016098022},{"id":"https://openalex.org/keywords/reliability","display_name":"Reliability (semiconductor)","score":0.6738361120223999},{"id":"https://openalex.org/keywords/root-cause","display_name":"Root cause","score":0.582108736038208},{"id":"https://openalex.org/keywords/static-random-access-memory","display_name":"Static random-access memory","score":0.5720558762550354},{"id":"https://openalex.org/keywords/production-line","display_name":"Production line","score":0.4686889946460724},{"id":"https://openalex.org/keywords/schedule","display_name":"Schedule","score":0.45489731431007385},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.4488978385925293},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.4207776188850403},{"id":"https://openalex.org/keywords/gate-oxide","display_name":"Gate oxide","score":0.41246843338012695},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.39935702085494995},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3153817057609558},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.30620908737182617},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.27051541209220886},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.18465059995651245},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.13448289036750793},{"id":"https://openalex.org/keywords/transistor","display_name":"Transistor","score":0.07459121942520142},{"id":"https://openalex.org/keywords/power","display_name":"Power (physics)","score":0.07303813099861145}],"concepts":[{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.7354120016098022},{"id":"https://openalex.org/C43214815","wikidata":"https://www.wikidata.org/wiki/Q7310987","display_name":"Reliability (semiconductor)","level":3,"score":0.6738361120223999},{"id":"https://openalex.org/C84945661","wikidata":"https://www.wikidata.org/wiki/Q7366567","display_name":"Root cause","level":2,"score":0.582108736038208},{"id":"https://openalex.org/C68043766","wikidata":"https://www.wikidata.org/wiki/Q267416","display_name":"Static random-access memory","level":2,"score":0.5720558762550354},{"id":"https://openalex.org/C99862985","wikidata":"https://www.wikidata.org/wiki/Q10858068","display_name":"Production line","level":2,"score":0.4686889946460724},{"id":"https://openalex.org/C68387754","wikidata":"https://www.wikidata.org/wiki/Q7271585","display_name":"Schedule","level":2,"score":0.45489731431007385},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.4488978385925293},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.4207776188850403},{"id":"https://openalex.org/C2361726","wikidata":"https://www.wikidata.org/wiki/Q5527031","display_name":"Gate oxide","level":4,"score":0.41246843338012695},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.39935702085494995},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3153817057609558},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.30620908737182617},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.27051541209220886},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.18465059995651245},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.13448289036750793},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.07459121942520142},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.07303813099861145},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1016/s0026-2714(02)00216-0","is_oa":false,"landing_page_url":"https://doi.org/10.1016/s0026-2714(02)00216-0","pdf_url":null,"source":{"id":"https://openalex.org/S133646729","display_name":"Microelectronics Reliability","issn_l":"0026-2714","issn":["0026-2714","1872-941X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microelectronics Reliability","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.4399999976158142,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W3151633427","https://openalex.org/W2212894501","https://openalex.org/W2793465010","https://openalex.org/W3024050170","https://openalex.org/W4293253840","https://openalex.org/W4378977321","https://openalex.org/W1976168335","https://openalex.org/W4308090481","https://openalex.org/W3211992815","https://openalex.org/W179354024"],"abstract_inverted_index":null,"counts_by_year":[{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":2},{"year":2015,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}