{"id":"https://openalex.org/W1969533100","doi":"https://doi.org/10.1016/s0026-2714(02)00204-4","title":"Characterization of Trench MOS Gate Structures Utilizing Photon Emission Microscopy","display_name":"Characterization of Trench MOS Gate Structures Utilizing Photon Emission Microscopy","publication_year":2002,"publication_date":"2002-09-01","ids":{"openalex":"https://openalex.org/W1969533100","doi":"https://doi.org/10.1016/s0026-2714(02)00204-4","mag":"1969533100"},"language":"en","primary_location":{"id":"doi:10.1016/s0026-2714(02)00204-4","is_oa":false,"landing_page_url":"https://doi.org/10.1016/s0026-2714(02)00204-4","pdf_url":null,"source":{"id":"https://openalex.org/S133646729","display_name":"Microelectronics Reliability","issn_l":"0026-2714","issn":["0026-2714","1872-941X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microelectronics Reliability","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5012458529","display_name":"Masanori Usui","orcid":"https://orcid.org/0000-0002-2227-5983"},"institutions":[{"id":"https://openalex.org/I4210165351","display_name":"Toyota Central Research and Development Laboratories (Japan)","ror":"https://ror.org/05mjgqe69","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210125472","https://openalex.org/I4210165351"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Masanori Usui","raw_affiliation_strings":["Toyota Central Research and Development Laboratories, Inc., Nagakute, Aichi, 480-1192, Japan","Toyota Central Research and Development Laboratories Inc., Nagakute, Aichi, 480-1192, Japan"],"affiliations":[{"raw_affiliation_string":"Toyota Central Research and Development Laboratories, Inc., Nagakute, Aichi, 480-1192, Japan","institution_ids":["https://openalex.org/I4210165351"]},{"raw_affiliation_string":"Toyota Central Research and Development Laboratories Inc., Nagakute, Aichi, 480-1192, Japan","institution_ids":["https://openalex.org/I4210165351"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010814600","display_name":"Takahide Sugiyama","orcid":null},"institutions":[{"id":"https://openalex.org/I4210165351","display_name":"Toyota Central Research and Development Laboratories (Japan)","ror":"https://ror.org/05mjgqe69","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210125472","https://openalex.org/I4210165351"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Takahide Sugiyama","raw_affiliation_strings":["Toyota Central Research and Development Laboratories, Inc., Nagakute, Aichi, 480-1192, Japan","Toyota Central Research and Development Laboratories Inc., Nagakute, Aichi, 480-1192, Japan"],"affiliations":[{"raw_affiliation_string":"Toyota Central Research and Development Laboratories, Inc., Nagakute, Aichi, 480-1192, Japan","institution_ids":["https://openalex.org/I4210165351"]},{"raw_affiliation_string":"Toyota Central Research and Development Laboratories Inc., Nagakute, Aichi, 480-1192, Japan","institution_ids":["https://openalex.org/I4210165351"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5087239878","display_name":"M. Ishiko","orcid":null},"institutions":[{"id":"https://openalex.org/I4210165351","display_name":"Toyota Central Research and Development Laboratories (Japan)","ror":"https://ror.org/05mjgqe69","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210125472","https://openalex.org/I4210165351"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Masayasu Ishiko","raw_affiliation_strings":["Toyota Central Research and Development Laboratories, Inc., Nagakute, Aichi, 480-1192, Japan","Toyota Central Research and Development Laboratories Inc., Nagakute, Aichi, 480-1192, Japan"],"affiliations":[{"raw_affiliation_string":"Toyota Central Research and Development Laboratories, Inc., Nagakute, Aichi, 480-1192, Japan","institution_ids":["https://openalex.org/I4210165351"]},{"raw_affiliation_string":"Toyota Central Research and Development Laboratories Inc., Nagakute, Aichi, 480-1192, Japan","institution_ids":["https://openalex.org/I4210165351"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5025458882","display_name":"Jun Morimoto","orcid":"https://orcid.org/0000-0002-4115-1919"},"institutions":[{"id":"https://openalex.org/I4210137853","display_name":"Toyota Motor Corporation (Japan)","ror":"https://ror.org/02zqm6r10","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210125472","https://openalex.org/I4210137853"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Jun Morimoto","raw_affiliation_strings":["Electronics Engineering Division III, Toyota Motor Corporation, Toyota, Aichi, 470-0309, Japan"],"affiliations":[{"raw_affiliation_string":"Electronics Engineering Division III, Toyota Motor Corporation, Toyota, Aichi, 470-0309, Japan","institution_ids":["https://openalex.org/I4210137853"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075613987","display_name":"Hirokazu Saitoh","orcid":null},"institutions":[{"id":"https://openalex.org/I4210137853","display_name":"Toyota Motor Corporation (Japan)","ror":"https://ror.org/02zqm6r10","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210125472","https://openalex.org/I4210137853"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hirokazu Saitoh","raw_affiliation_strings":["Electronics Engineering Division III, Toyota Motor Corporation, Toyota, Aichi, 470-0309, Japan"],"affiliations":[{"raw_affiliation_string":"Electronics Engineering Division III, Toyota Motor Corporation, Toyota, Aichi, 470-0309, Japan","institution_ids":["https://openalex.org/I4210137853"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5066949018","display_name":"Masaki Ajioka","orcid":null},"institutions":[{"id":"https://openalex.org/I4210137853","display_name":"Toyota Motor Corporation (Japan)","ror":"https://ror.org/02zqm6r10","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210125472","https://openalex.org/I4210137853"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Masaki Ajioka","raw_affiliation_strings":["Electronics Engineering Division III, Toyota Motor Corporation, Toyota, Aichi, 470-0309, Japan"],"affiliations":[{"raw_affiliation_string":"Electronics Engineering Division III, Toyota Motor Corporation, Toyota, Aichi, 470-0309, Japan","institution_ids":["https://openalex.org/I4210137853"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5012458529"],"corresponding_institution_ids":["https://openalex.org/I4210165351"],"apc_list":{"value":2190,"currency":"USD","value_usd":2190},"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.11476567,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"42","issue":"9-11","first_page":"1647","last_page":"1652"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/characterization","display_name":"Characterization (materials science)","score":0.7725558280944824},{"id":"https://openalex.org/keywords/trench","display_name":"Trench","score":0.6525859236717224},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.6073939204216003},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5672693252563477},{"id":"https://openalex.org/keywords/microscopy","display_name":"Microscopy","score":0.5168522000312805},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.3490040898323059},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.30573195219039917},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.22760024666786194}],"concepts":[{"id":"https://openalex.org/C2780841128","wikidata":"https://www.wikidata.org/wiki/Q5073781","display_name":"Characterization (materials science)","level":2,"score":0.7725558280944824},{"id":"https://openalex.org/C155310634","wikidata":"https://www.wikidata.org/wiki/Q1852785","display_name":"Trench","level":3,"score":0.6525859236717224},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6073939204216003},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5672693252563477},{"id":"https://openalex.org/C147080431","wikidata":"https://www.wikidata.org/wiki/Q1074953","display_name":"Microscopy","level":2,"score":0.5168522000312805},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3490040898323059},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.30573195219039917},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.22760024666786194},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1016/s0026-2714(02)00204-4","is_oa":false,"landing_page_url":"https://doi.org/10.1016/s0026-2714(02)00204-4","pdf_url":null,"source":{"id":"https://openalex.org/S133646729","display_name":"Microelectronics Reliability","issn_l":"0026-2714","issn":["0026-2714","1872-941X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microelectronics Reliability","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2019611465","https://openalex.org/W3157611879","https://openalex.org/W3164615570","https://openalex.org/W2313980841","https://openalex.org/W1995567374","https://openalex.org/W2999649267","https://openalex.org/W1987893528","https://openalex.org/W2737838463","https://openalex.org/W2086753183","https://openalex.org/W1966273737"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}