{"id":"https://openalex.org/W2017170578","doi":"https://doi.org/10.1016/s0026-2714(01)00068-3","title":"Sub-100 nm CMOS circuit performance with high-K gate dielectrics","display_name":"Sub-100 nm CMOS circuit performance with high-K gate dielectrics","publication_year":2001,"publication_date":"2001-07-01","ids":{"openalex":"https://openalex.org/W2017170578","doi":"https://doi.org/10.1016/s0026-2714(01)00068-3","mag":"2017170578"},"language":"en","primary_location":{"id":"doi:10.1016/s0026-2714(01)00068-3","is_oa":false,"landing_page_url":"https://doi.org/10.1016/s0026-2714(01)00068-3","pdf_url":null,"source":{"id":"https://openalex.org/S133646729","display_name":"Microelectronics Reliability","issn_l":"0026-2714","issn":["0026-2714","1872-941X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microelectronics Reliability","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5058442976","display_name":"Nihar R. Mohapatra","orcid":"https://orcid.org/0000-0002-8827-5417"},"institutions":[{"id":"https://openalex.org/I162827531","display_name":"Indian Institute of Technology Bombay","ror":"https://ror.org/02qyf5152","country_code":"IN","type":"education","lineage":["https://openalex.org/I162827531"]}],"countries":["IN"],"is_corresponding":true,"raw_author_name":"N.R. Mohapatra","raw_affiliation_strings":["Department of Electrical Engineering, Indian Institute of Technology, Bombay 400076, India","Department of Electrical Engineering Indian Institute of Technology, Bombay 400076, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Indian Institute of Technology, Bombay 400076, India","institution_ids":["https://openalex.org/I162827531"]},{"raw_affiliation_string":"Department of Electrical Engineering Indian Institute of Technology, Bombay 400076, India","institution_ids":["https://openalex.org/I162827531"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031386131","display_name":"Arka Dutta","orcid":"https://orcid.org/0000-0001-5332-0751"},"institutions":[{"id":"https://openalex.org/I162827531","display_name":"Indian Institute of Technology Bombay","ror":"https://ror.org/02qyf5152","country_code":"IN","type":"education","lineage":["https://openalex.org/I162827531"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"A. Dutta","raw_affiliation_strings":["Department of Electrical Engineering, Indian Institute of Technology, Bombay 400076, India","Department of Electrical Engineering Indian Institute of Technology, Bombay 400076, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Indian Institute of Technology, Bombay 400076, India","institution_ids":["https://openalex.org/I162827531"]},{"raw_affiliation_string":"Department of Electrical Engineering Indian Institute of Technology, Bombay 400076, India","institution_ids":["https://openalex.org/I162827531"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056804355","display_name":"G. Sridhar","orcid":"https://orcid.org/0000-0002-3020-5678"},"institutions":[{"id":"https://openalex.org/I162827531","display_name":"Indian Institute of Technology Bombay","ror":"https://ror.org/02qyf5152","country_code":"IN","type":"education","lineage":["https://openalex.org/I162827531"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"G. Sridhar","raw_affiliation_strings":["Department of Electrical Engineering, Indian Institute of Technology, Bombay 400076, India","Department of Electrical Engineering Indian Institute of Technology, Bombay 400076, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Indian Institute of Technology, Bombay 400076, India","institution_ids":["https://openalex.org/I162827531"]},{"raw_affiliation_string":"Department of Electrical Engineering Indian Institute of Technology, Bombay 400076, India","institution_ids":["https://openalex.org/I162827531"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033005768","display_name":"Madhav P. Desai","orcid":null},"institutions":[{"id":"https://openalex.org/I162827531","display_name":"Indian Institute of Technology Bombay","ror":"https://ror.org/02qyf5152","country_code":"IN","type":"education","lineage":["https://openalex.org/I162827531"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"M.P. Desai","raw_affiliation_strings":["Department of Electrical Engineering, Indian Institute of Technology, Bombay 400076, India","Department of Electrical Engineering Indian Institute of Technology, Bombay 400076, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Indian Institute of Technology, Bombay 400076, India","institution_ids":["https://openalex.org/I162827531"]},{"raw_affiliation_string":"Department of Electrical Engineering Indian Institute of Technology, Bombay 400076, India","institution_ids":["https://openalex.org/I162827531"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5065019619","display_name":"V. Ramgopal Rao","orcid":"https://orcid.org/0000-0001-9157-957X"},"institutions":[{"id":"https://openalex.org/I162827531","display_name":"Indian Institute of Technology Bombay","ror":"https://ror.org/02qyf5152","country_code":"IN","type":"education","lineage":["https://openalex.org/I162827531"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"V.R. Rao","raw_affiliation_strings":["Department of Electrical Engineering, Indian Institute of Technology, Bombay 400076, India","Department of Electrical Engineering Indian Institute of Technology, Bombay 400076, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Indian Institute of Technology, Bombay 400076, India","institution_ids":["https://openalex.org/I162827531"]},{"raw_affiliation_string":"Department of Electrical Engineering Indian Institute of Technology, Bombay 400076, India","institution_ids":["https://openalex.org/I162827531"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5058442976"],"corresponding_institution_ids":["https://openalex.org/I162827531"],"apc_list":{"value":2190,"currency":"USD","value_usd":2190},"apc_paid":null,"fwci":0.4359,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.68003775,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":93},"biblio":{"volume":"41","issue":"7","first_page":"1045","last_page":"1048"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.7301812767982483},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.6931369304656982},{"id":"https://openalex.org/keywords/dielectric","display_name":"Dielectric","score":0.6254534721374512},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5735552310943604},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5350042581558228},{"id":"https://openalex.org/keywords/permittivity","display_name":"Permittivity","score":0.5213652849197388},{"id":"https://openalex.org/keywords/high-\u03ba-dielectric","display_name":"High-\u03ba dielectric","score":0.5018777847290039},{"id":"https://openalex.org/keywords/gate-dielectric","display_name":"Gate dielectric","score":0.4980885982513428},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.49354255199432373},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.38339442014694214},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.23251193761825562},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.20750892162322998},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.1565699577331543},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.13433632254600525},{"id":"https://openalex.org/keywords/transistor","display_name":"Transistor","score":0.12181165814399719}],"concepts":[{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.7301812767982483},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.6931369304656982},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.6254534721374512},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5735552310943604},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5350042581558228},{"id":"https://openalex.org/C168651791","wikidata":"https://www.wikidata.org/wiki/Q211569","display_name":"Permittivity","level":3,"score":0.5213652849197388},{"id":"https://openalex.org/C16317505","wikidata":"https://www.wikidata.org/wiki/Q132013","display_name":"High-\u03ba dielectric","level":3,"score":0.5018777847290039},{"id":"https://openalex.org/C166972891","wikidata":"https://www.wikidata.org/wiki/Q5527011","display_name":"Gate dielectric","level":4,"score":0.4980885982513428},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.49354255199432373},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.38339442014694214},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.23251193761825562},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.20750892162322998},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.1565699577331543},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.13433632254600525},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.12181165814399719},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1016/s0026-2714(01)00068-3","is_oa":false,"landing_page_url":"https://doi.org/10.1016/s0026-2714(01)00068-3","pdf_url":null,"source":{"id":"https://openalex.org/S133646729","display_name":"Microelectronics Reliability","issn_l":"0026-2714","issn":["0026-2714","1872-941X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microelectronics Reliability","raw_type":"journal-article"},{"id":"pmh:oai:dsapce.library.iitb.ac.in:100/1413","is_oa":false,"landing_page_url":"http://doi.org/10.1016/S0026-2714(01)00068-3","pdf_url":null,"source":{"id":"https://openalex.org/S4306400899","display_name":"DSpace (IIT Bombay)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I162827531","host_organization_name":"Indian Institute of Technology Bombay","host_organization_lineage":["https://openalex.org/I162827531"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"11th Workshop on Dielectrics in Microelectronics (WoDiM 2000),MUNICH, GERMANY,NOV 13-15, 2000","raw_type":"Article; Proceedings Paper"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.7900000214576721,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320307102","display_name":"Intel Corporation","ror":"https://ror.org/01ek73717"},{"id":"https://openalex.org/F4320323448","display_name":"Indian Institute of Technology Bombay","ror":"https://ror.org/02qyf5152"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W2010409197","https://openalex.org/W2043060552","https://openalex.org/W2095928799","https://openalex.org/W2104197868","https://openalex.org/W2131965942","https://openalex.org/W2165091034"],"related_works":["https://openalex.org/W4243480707","https://openalex.org/W3140942752","https://openalex.org/W2903976092","https://openalex.org/W635954796","https://openalex.org/W2071712090","https://openalex.org/W2357046631","https://openalex.org/W3092007158","https://openalex.org/W2796938634","https://openalex.org/W2368176392","https://openalex.org/W1589267155"],"abstract_inverted_index":null,"counts_by_year":[{"year":2021,"cited_by_count":1}],"updated_date":"2026-07-02T09:51:11.867554","created_date":"2025-10-10T00:00:00"}