{"id":"https://openalex.org/W2093637366","doi":"https://doi.org/10.1016/j.microrel.2007.07.068","title":"Suppression of Ge\u2013O and Ge\u2013N bonding at Ge\u2013HfO2 and Ge\u2013TiO2 interfaces by deposition onto plasma-nitrided passivated Ge substrates: Integration issues Ge gate stacks into advanced devices","display_name":"Suppression of Ge\u2013O and Ge\u2013N bonding at Ge\u2013HfO2 and Ge\u2013TiO2 interfaces by deposition onto plasma-nitrided passivated Ge substrates: Integration issues Ge gate stacks into advanced devices","publication_year":2007,"publication_date":"2007-09-04","ids":{"openalex":"https://openalex.org/W2093637366","doi":"https://doi.org/10.1016/j.microrel.2007.07.068","mag":"2093637366"},"language":"en","primary_location":{"id":"doi:10.1016/j.microrel.2007.07.068","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.microrel.2007.07.068","pdf_url":null,"source":{"id":"https://openalex.org/S133646729","display_name":"Microelectronics Reliability","issn_l":"0026-2714","issn":["0026-2714","1872-941X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microelectronics Reliability","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5007168562","display_name":"S. Lee","orcid":"https://orcid.org/0009-0005-9323-984X"},"institutions":[{"id":"https://openalex.org/I137902535","display_name":"North Carolina State University","ror":"https://ror.org/04tj63d06","country_code":"US","type":"education","lineage":["https://openalex.org/I137902535"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S. Lee","raw_affiliation_strings":["Department of Physics, North Carolina State University, Raleigh, NC 27695-8202, USA","Department of Physics, North Carolina State University, Raleigh NC 27695-8202, USA"],"affiliations":[{"raw_affiliation_string":"Department of Physics, North Carolina State University, Raleigh, NC 27695-8202, USA","institution_ids":["https://openalex.org/I137902535"]},{"raw_affiliation_string":"Department of Physics, North Carolina State University, Raleigh NC 27695-8202, USA","institution_ids":["https://openalex.org/I137902535"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112214122","display_name":"J.P. Long","orcid":null},"institutions":[{"id":"https://openalex.org/I137902535","display_name":"North Carolina State University","ror":"https://ror.org/04tj63d06","country_code":"US","type":"education","lineage":["https://openalex.org/I137902535"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J.P. Long","raw_affiliation_strings":["Department of Physics, North Carolina State University, Raleigh, NC 27695-8202, USA","Department of Physics, North Carolina State University, Raleigh NC 27695-8202, USA"],"affiliations":[{"raw_affiliation_string":"Department of Physics, North Carolina State University, Raleigh, NC 27695-8202, USA","institution_ids":["https://openalex.org/I137902535"]},{"raw_affiliation_string":"Department of Physics, North Carolina State University, Raleigh NC 27695-8202, USA","institution_ids":["https://openalex.org/I137902535"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111857649","display_name":"G. Lucovsky","orcid":null},"institutions":[{"id":"https://openalex.org/I137902535","display_name":"North Carolina State University","ror":"https://ror.org/04tj63d06","country_code":"US","type":"education","lineage":["https://openalex.org/I137902535"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"G. Lucovsky","raw_affiliation_strings":["Department of Physics, North Carolina State University, Raleigh, NC 27695-8202, USA","Department of Physics, North Carolina State University, Raleigh NC 27695-8202, USA"],"affiliations":[{"raw_affiliation_string":"Department of Physics, North Carolina State University, Raleigh, NC 27695-8202, USA","institution_ids":["https://openalex.org/I137902535"]},{"raw_affiliation_string":"Department of Physics, North Carolina State University, Raleigh NC 27695-8202, USA","institution_ids":["https://openalex.org/I137902535"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045012255","display_name":"Jerry L. Whitten","orcid":"https://orcid.org/0000-0002-3339-7425"},"institutions":[{"id":"https://openalex.org/I137902535","display_name":"North Carolina State University","ror":"https://ror.org/04tj63d06","country_code":"US","type":"education","lineage":["https://openalex.org/I137902535"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J.L. Whitten","raw_affiliation_strings":["Department of Physics, North Carolina State University, Raleigh, NC 27695-8202, USA","Department of Physics, North Carolina State University, Raleigh NC 27695-8202, USA"],"affiliations":[{"raw_affiliation_string":"Department of Physics, North Carolina State University, Raleigh, NC 27695-8202, USA","institution_ids":["https://openalex.org/I137902535"]},{"raw_affiliation_string":"Department of Physics, North Carolina State University, Raleigh NC 27695-8202, USA","institution_ids":["https://openalex.org/I137902535"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5047449616","display_name":"Hyungtak Seo","orcid":"https://orcid.org/0000-0001-9485-6405"},"institutions":[{"id":"https://openalex.org/I137902535","display_name":"North Carolina State University","ror":"https://ror.org/04tj63d06","country_code":"US","type":"education","lineage":["https://openalex.org/I137902535"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"H. Seo","raw_affiliation_strings":["Department of Physics, North Carolina State University, Raleigh, NC 27695-8202, USA","Department of Physics, North Carolina State University, Raleigh NC 27695-8202, USA"],"affiliations":[{"raw_affiliation_string":"Department of Physics, North Carolina State University, Raleigh, NC 27695-8202, USA","institution_ids":["https://openalex.org/I137902535"]},{"raw_affiliation_string":"Department of Physics, North Carolina State University, Raleigh NC 27695-8202, USA","institution_ids":["https://openalex.org/I137902535"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5107867638","display_name":"J. L\u00fcning","orcid":null},"institutions":[{"id":"https://openalex.org/I4210120900","display_name":"Stanford Synchrotron Radiation Lightsource","ror":"https://ror.org/02vzbm991","country_code":"US","type":"facility","lineage":["https://openalex.org/I1330989302","https://openalex.org/I2801935854","https://openalex.org/I39565521","https://openalex.org/I4210120900","https://openalex.org/I97018004","https://openalex.org/I97018004"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J. L\u00fcning","raw_affiliation_strings":["Stanford Synchrotron Research Laboratory, Menlo Park, CA 94025, USA"],"affiliations":[{"raw_affiliation_string":"Stanford Synchrotron Research Laboratory, Menlo Park, CA 94025, USA","institution_ids":["https://openalex.org/I4210120900"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5111857649"],"corresponding_institution_ids":["https://openalex.org/I137902535"],"apc_list":{"value":2190,"currency":"USD","value_usd":2190},"apc_paid":null,"fwci":0.7139,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.74291778,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"48","issue":"3","first_page":"364","last_page":"369"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11169","display_name":"Silicon Nanostructures and Photoluminescence","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12588","display_name":"Electronic and Structural Properties of Oxides","score":0.9976000189781189,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7308322191238403},{"id":"https://openalex.org/keywords/germanium","display_name":"Germanium","score":0.6177430152893066},{"id":"https://openalex.org/keywords/nitriding","display_name":"Nitriding","score":0.5368547439575195},{"id":"https://openalex.org/keywords/suboxide","display_name":"Suboxide","score":0.5335679054260254},{"id":"https://openalex.org/keywords/semiconductor","display_name":"Semiconductor","score":0.5244015455245972},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.48886650800704956},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.4740050733089447},{"id":"https://openalex.org/keywords/plasma","display_name":"Plasma","score":0.4445635974407196},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.4400048851966858},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.3125060498714447},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.26381123065948486}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7308322191238403},{"id":"https://openalex.org/C550623735","wikidata":"https://www.wikidata.org/wiki/Q867","display_name":"Germanium","level":3,"score":0.6177430152893066},{"id":"https://openalex.org/C13862629","wikidata":"https://www.wikidata.org/wiki/Q720899","display_name":"Nitriding","level":3,"score":0.5368547439575195},{"id":"https://openalex.org/C2780634616","wikidata":"https://www.wikidata.org/wiki/Q425366","display_name":"Suboxide","level":3,"score":0.5335679054260254},{"id":"https://openalex.org/C108225325","wikidata":"https://www.wikidata.org/wiki/Q11456","display_name":"Semiconductor","level":2,"score":0.5244015455245972},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.48886650800704956},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.4740050733089447},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.4445635974407196},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.4400048851966858},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.3125060498714447},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.26381123065948486},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1016/j.microrel.2007.07.068","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.microrel.2007.07.068","pdf_url":null,"source":{"id":"https://openalex.org/S133646729","display_name":"Microelectronics Reliability","issn_l":"0026-2714","issn":["0026-2714","1872-941X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microelectronics Reliability","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W589995197","https://openalex.org/W1483744369","https://openalex.org/W2003124709","https://openalex.org/W2038194211","https://openalex.org/W2041996357","https://openalex.org/W2091070742","https://openalex.org/W2094814631","https://openalex.org/W2132172629","https://openalex.org/W3020938839","https://openalex.org/W4232570544","https://openalex.org/W4246065883"],"related_works":["https://openalex.org/W2098868561","https://openalex.org/W2369822801","https://openalex.org/W3147966573","https://openalex.org/W3146266562","https://openalex.org/W2367136781","https://openalex.org/W2513193535","https://openalex.org/W4312030501","https://openalex.org/W2385849489","https://openalex.org/W2560443655","https://openalex.org/W2327663427"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}