{"id":"https://openalex.org/W7154602817","doi":"https://doi.org/10.1016/j.mejo.2026.107224","title":"Ion-implantation-free trench-filled epitaxial superjunction TMBS diodes for high-voltage 4H-SiC applications","display_name":"Ion-implantation-free trench-filled epitaxial superjunction TMBS diodes for high-voltage 4H-SiC applications","publication_year":2026,"publication_date":"2026-04-16","ids":{"openalex":"https://openalex.org/W7154602817","doi":"https://doi.org/10.1016/j.mejo.2026.107224"},"language":"en","primary_location":{"id":"doi:10.1016/j.mejo.2026.107224","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.mejo.2026.107224","pdf_url":null,"source":{"id":"https://openalex.org/S98831239","display_name":"Microelectronics Journal","issn_l":"1879-2391","issn":["1879-2391"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microelectronics Journal","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5039982278","display_name":"Chenghao Yu","orcid":"https://orcid.org/0000-0002-2542-944X"},"institutions":[{"id":"https://openalex.org/I50760025","display_name":"Hangzhou Dianzi University","ror":"https://ror.org/0576gt767","country_code":"CN","type":"education","lineage":["https://openalex.org/I50760025"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Cheng-Hao Yu","raw_affiliation_strings":["Zhejiang Key Laboratory of Optoelectronic Intelligent Imaging and Aerospace Sensing, School of Electronics and Information (School of IC Science and Engineering), Hangzhou Dianzi University, Hangzhou, 310018, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Zhejiang Key Laboratory of Optoelectronic Intelligent Imaging and Aerospace Sensing, School of Electronics and Information (School of IC Science and Engineering), Hangzhou Dianzi University, Hangzhou, 310018, China","institution_ids":["https://openalex.org/I50760025"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086592776","display_name":"Xiaodong Wu","orcid":"https://orcid.org/0000-0001-6489-8997"},"institutions":[{"id":"https://openalex.org/I50760025","display_name":"Hangzhou Dianzi University","ror":"https://ror.org/0576gt767","country_code":"CN","type":"education","lineage":["https://openalex.org/I50760025"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiao-Dong Wu","raw_affiliation_strings":["Zhejiang Key Laboratory of Optoelectronic Intelligent Imaging and Aerospace Sensing, School of Electronics and Information (School of IC Science and Engineering), Hangzhou Dianzi University, Hangzhou, 310018, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Zhejiang Key Laboratory of Optoelectronic Intelligent Imaging and Aerospace Sensing, School of Electronics and Information (School of IC Science and Engineering), Hangzhou Dianzi University, Hangzhou, 310018, China","institution_ids":["https://openalex.org/I50760025"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034772857","display_name":"Haitao Ge","orcid":null},"institutions":[{"id":"https://openalex.org/I50760025","display_name":"Hangzhou Dianzi University","ror":"https://ror.org/0576gt767","country_code":"CN","type":"education","lineage":["https://openalex.org/I50760025"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hai-Tao Ge","raw_affiliation_strings":["Zhejiang Key Laboratory of Optoelectronic Intelligent Imaging and Aerospace Sensing, School of Electronics and Information (School of IC Science and Engineering), Hangzhou Dianzi University, Hangzhou, 310018, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Zhejiang Key Laboratory of Optoelectronic Intelligent Imaging and Aerospace Sensing, School of Electronics and Information (School of IC Science and Engineering), Hangzhou Dianzi University, Hangzhou, 310018, China","institution_ids":["https://openalex.org/I50760025"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085016456","display_name":"Haomin Guo","orcid":"https://orcid.org/0000-0003-1049-7367"},"institutions":[{"id":"https://openalex.org/I50760025","display_name":"Hangzhou Dianzi University","ror":"https://ror.org/0576gt767","country_code":"CN","type":"education","lineage":["https://openalex.org/I50760025"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hao-Min Guo","raw_affiliation_strings":["Zhejiang Key Laboratory of Optoelectronic Intelligent Imaging and Aerospace Sensing, School of Electronics and Information (School of IC Science and Engineering), Hangzhou Dianzi University, Hangzhou, 310018, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Zhejiang Key Laboratory of Optoelectronic Intelligent Imaging and Aerospace Sensing, School of Electronics and Information (School of IC Science and Engineering), Hangzhou Dianzi University, Hangzhou, 310018, China","institution_ids":["https://openalex.org/I50760025"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5133821762","display_name":"Da-Wei Wang","orcid":null},"institutions":[{"id":"https://openalex.org/I50760025","display_name":"Hangzhou Dianzi University","ror":"https://ror.org/0576gt767","country_code":"CN","type":"education","lineage":["https://openalex.org/I50760025"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Da-Wei Wang","raw_affiliation_strings":["Zhejiang Key Laboratory of Optoelectronic Intelligent Imaging and Aerospace Sensing, School of Electronics and Information (School of IC Science and Engineering), Hangzhou Dianzi University, Hangzhou, 310018, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Zhejiang Key Laboratory of Optoelectronic Intelligent Imaging and Aerospace Sensing, School of Electronics and Information (School of IC Science and Engineering), Hangzhou Dianzi University, Hangzhou, 310018, China","institution_ids":["https://openalex.org/I50760025"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5133767396","display_name":"Chun-Sheng Jiang","orcid":null},"institutions":[{"id":"https://openalex.org/I29739308","display_name":"Guangxi Normal University","ror":"https://ror.org/02frt9q65","country_code":"CN","type":"education","lineage":["https://openalex.org/I29739308"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chun-Sheng Jiang","raw_affiliation_strings":["The Key Laboratory of Integrated Circuits and Microsystems (Guangxi Normal University), Education Department of Guangxi Zhuang Autonomous Region, Guilin, 541004, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"The Key Laboratory of Integrated Circuits and Microsystems (Guangxi Normal University), Education Department of Guangxi Zhuang Autonomous Region, Guilin, 541004, China","institution_ids":["https://openalex.org/I29739308"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5133757227","display_name":"Xiang Wang","orcid":null},"institutions":[{"id":"https://openalex.org/I50760025","display_name":"Hangzhou Dianzi University","ror":"https://ror.org/0576gt767","country_code":"CN","type":"education","lineage":["https://openalex.org/I50760025"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Xiang Wang","raw_affiliation_strings":["Zhejiang Key Laboratory of Optoelectronic Intelligent Imaging and Aerospace Sensing, School of Electronics and Information (School of IC Science and Engineering), Hangzhou Dianzi University, Hangzhou, 310018, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Zhejiang Key Laboratory of Optoelectronic Intelligent Imaging and Aerospace Sensing, School of Electronics and Information (School of IC Science and Engineering), Hangzhou Dianzi University, Hangzhou, 310018, China","institution_ids":["https://openalex.org/I50760025"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5133792197","display_name":"Wen-Sheng Zhao","orcid":null},"institutions":[{"id":"https://openalex.org/I50760025","display_name":"Hangzhou Dianzi University","ror":"https://ror.org/0576gt767","country_code":"CN","type":"education","lineage":["https://openalex.org/I50760025"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Wen-Sheng Zhao","raw_affiliation_strings":["Zhejiang Key Laboratory of Optoelectronic Intelligent Imaging and Aerospace Sensing, School of Electronics and Information (School of IC Science and Engineering), Hangzhou Dianzi University, Hangzhou, 310018, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Zhejiang Key Laboratory of Optoelectronic Intelligent Imaging and Aerospace Sensing, School of Electronics and Information (School of IC Science and Engineering), Hangzhou Dianzi University, Hangzhou, 310018, China","institution_ids":["https://openalex.org/I50760025"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":8,"corresponding_author_ids":["https://openalex.org/A5133757227","https://openalex.org/A5133792197","https://openalex.org/A5133821762"],"corresponding_institution_ids":["https://openalex.org/I50760025"],"apc_list":{"value":2370,"currency":"USD","value_usd":2370},"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.47642245,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"174","issue":null,"first_page":"107224","last_page":"107224"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10361","display_name":"Silicon Carbide Semiconductor Technologies","score":0.9363999962806702,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10361","display_name":"Silicon Carbide Semiconductor Technologies","score":0.9363999962806702,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11920","display_name":"Pulsed Power Technology Applications","score":0.027899999171495438,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.004399999976158142,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/diode","display_name":"Diode","score":0.6320000290870667},{"id":"https://openalex.org/keywords/epitaxy","display_name":"Epitaxy","score":0.5239999890327454},{"id":"https://openalex.org/keywords/light-emitting-diode","display_name":"Light-emitting diode","score":0.38420000672340393},{"id":"https://openalex.org/keywords/doping","display_name":"Doping","score":0.24469999969005585}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7833999991416931},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.7242000102996826},{"id":"https://openalex.org/C78434282","wikidata":"https://www.wikidata.org/wiki/Q11656","display_name":"Diode","level":2,"score":0.6320000290870667},{"id":"https://openalex.org/C110738630","wikidata":"https://www.wikidata.org/wiki/Q1135540","display_name":"Epitaxy","level":3,"score":0.5239999890327454},{"id":"https://openalex.org/C176666156","wikidata":"https://www.wikidata.org/wiki/Q25504","display_name":"Light-emitting diode","level":2,"score":0.38420000672340393},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.296999990940094},{"id":"https://openalex.org/C61696701","wikidata":"https://www.wikidata.org/wiki/Q770766","display_name":"Engineering physics","level":1,"score":0.28139999508857727},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.24570000171661377},{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.24469999969005585},{"id":"https://openalex.org/C2989315489","wikidata":"https://www.wikidata.org/wiki/Q2659774","display_name":"Semiconductor materials","level":3,"score":0.24150000512599945}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1016/j.mejo.2026.107224","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.mejo.2026.107224","pdf_url":null,"source":{"id":"https://openalex.org/S98831239","display_name":"Microelectronics Journal","issn_l":"1879-2391","issn":["1879-2391"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microelectronics Journal","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G6742523017","display_name":null,"funder_award_id":"U 24A20296","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G7401291417","display_name":null,"funder_award_id":"LY24F040004","funder_id":"https://openalex.org/F4320338464","funder_display_name":"Natural Science Foundation of Zhejiang Province"},{"id":"https://openalex.org/G7744196946","display_name":null,"funder_award_id":"2025SZRJJ1018","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320338464","display_name":"Natural Science Foundation of Zhejiang Province","ror":"https://ror.org/01h0zpd94"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":30,"referenced_works":["https://openalex.org/W1596616341","https://openalex.org/W2036667154","https://openalex.org/W2053187981","https://openalex.org/W2057436559","https://openalex.org/W2072155156","https://openalex.org/W2097170177","https://openalex.org/W2103552551","https://openalex.org/W2127407240","https://openalex.org/W2131457834","https://openalex.org/W2151594378","https://openalex.org/W2313138297","https://openalex.org/W2506710595","https://openalex.org/W2768392800","https://openalex.org/W2789152496","https://openalex.org/W2799914021","https://openalex.org/W2892142656","https://openalex.org/W2910374904","https://openalex.org/W2912810028","https://openalex.org/W2912938934","https://openalex.org/W2957944557","https://openalex.org/W3004102186","https://openalex.org/W3170148601","https://openalex.org/W3199097129","https://openalex.org/W4309965778","https://openalex.org/W4401328866","https://openalex.org/W4403390506","https://openalex.org/W4403707878","https://openalex.org/W4406948113","https://openalex.org/W4407462007","https://openalex.org/W4415054499"],"related_works":[],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2026-06-19T15:47:20.252518","created_date":"2026-04-17T00:00:00"}
