{"id":"https://openalex.org/W7141730467","doi":"https://doi.org/10.1016/j.engappai.2026.114590","title":"Enhanced visual state space model for real-time wafer defect detection","display_name":"Enhanced visual state space model for real-time wafer defect detection","publication_year":2026,"publication_date":"2026-03-27","ids":{"openalex":"https://openalex.org/W7141730467","doi":"https://doi.org/10.1016/j.engappai.2026.114590"},"language":"en","primary_location":{"id":"doi:10.1016/j.engappai.2026.114590","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.engappai.2026.114590","pdf_url":null,"source":{"id":"https://openalex.org/S900972176","display_name":"Engineering Applications of Artificial Intelligence","issn_l":"0952-1976","issn":["0952-1976","1873-6769"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Engineering Applications of Artificial Intelligence","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5130755278","display_name":"Rui Sun","orcid":null},"institutions":[{"id":"https://openalex.org/I1793135","display_name":"Yanbian University","ror":"https://ror.org/039xnh269","country_code":"CN","type":"education","lineage":["https://openalex.org/I1793135"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Rui Sun","raw_affiliation_strings":["College of Engineering, Yanbian University, Yanbian, 133002, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Engineering, Yanbian University, Yanbian, 133002, China","institution_ids":["https://openalex.org/I1793135"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102211515","display_name":"Dejin Zhao","orcid":null},"institutions":[{"id":"https://openalex.org/I1793135","display_name":"Yanbian University","ror":"https://ror.org/039xnh269","country_code":"CN","type":"education","lineage":["https://openalex.org/I1793135"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Dejin Zhao","raw_affiliation_strings":["College of Engineering, Yanbian University, Yanbian, 133002, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Engineering, Yanbian University, Yanbian, 133002, China","institution_ids":["https://openalex.org/I1793135"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049064771","display_name":"Jiajian Meng","orcid":"https://orcid.org/0000-0002-6534-7692"},"institutions":[{"id":"https://openalex.org/I194450716","display_name":"Jilin University","ror":"https://ror.org/00js3aw79","country_code":"CN","type":"education","lineage":["https://openalex.org/I194450716"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jiajian Meng","raw_affiliation_strings":["Key Laboratory of CNC Equipment Reliability, Ministry of Education, Jilin University, Changchun, 130025, China","The School of Mechanical and Aerospace Engineering, Jilin University, Changchun, 130025, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of CNC Equipment Reliability, Ministry of Education, Jilin University, Changchun, 130025, China","institution_ids":["https://openalex.org/I194450716"]},{"raw_affiliation_string":"The School of Mechanical and Aerospace Engineering, Jilin University, Changchun, 130025, China","institution_ids":["https://openalex.org/I194450716"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5003874305","display_name":"Jie Li","orcid":"https://orcid.org/0000-0001-6350-8299"},"institutions":[{"id":"https://openalex.org/I194450716","display_name":"Jilin University","ror":"https://ror.org/00js3aw79","country_code":"CN","type":"education","lineage":["https://openalex.org/I194450716"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jialin Li","raw_affiliation_strings":["Key Laboratory of CNC Equipment Reliability, Ministry of Education, Jilin University, Changchun, 130025, China","The School of Mechanical and Aerospace Engineering, Jilin University, Changchun, 130025, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of CNC Equipment Reliability, Ministry of Education, Jilin University, Changchun, 130025, China","institution_ids":["https://openalex.org/I194450716"]},{"raw_affiliation_string":"The School of Mechanical and Aerospace Engineering, Jilin University, Changchun, 130025, China","institution_ids":["https://openalex.org/I194450716"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5130371014","display_name":"Jingzhe Zhang","orcid":null},"institutions":[{"id":"https://openalex.org/I1793135","display_name":"Yanbian University","ror":"https://ror.org/039xnh269","country_code":"CN","type":"education","lineage":["https://openalex.org/I1793135"]},{"id":"https://openalex.org/I194450716","display_name":"Jilin University","ror":"https://ror.org/00js3aw79","country_code":"CN","type":"education","lineage":["https://openalex.org/I194450716"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Jingzhe Zhang","raw_affiliation_strings":["College of Engineering, Yanbian University, Yanbian, 133002, China","Key Laboratory of CNC Equipment Reliability, Ministry of Education, Jilin University, Changchun, 130025, China","The School of Mechanical and Aerospace Engineering, Jilin University, Changchun, 130025, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Engineering, Yanbian University, Yanbian, 133002, China","institution_ids":["https://openalex.org/I1793135"]},{"raw_affiliation_string":"Key Laboratory of CNC Equipment Reliability, Ministry of Education, Jilin University, Changchun, 130025, China","institution_ids":["https://openalex.org/I194450716"]},{"raw_affiliation_string":"The School of Mechanical and Aerospace Engineering, Jilin University, Changchun, 130025, China","institution_ids":["https://openalex.org/I194450716"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5130371014","display_name":"Jingzhe Zhang","orcid":null},"institutions":[{"id":"https://openalex.org/I1793135","display_name":"Yanbian University","ror":"https://ror.org/039xnh269","country_code":"CN","type":"education","lineage":["https://openalex.org/I1793135"]},{"id":"https://openalex.org/I194450716","display_name":"Jilin University","ror":"https://ror.org/00js3aw79","country_code":"CN","type":"education","lineage":["https://openalex.org/I194450716"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jingzhe Zhang","raw_affiliation_strings":["College of Engineering, Yanbian University, Yanbian, 133002, China","Key Laboratory of CNC Equipment Reliability, Ministry of Education, Jilin University, Changchun, 130025, China","The School of Mechanical and Aerospace Engineering, Jilin University, Changchun, 130025, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Engineering, Yanbian University, Yanbian, 133002, China","institution_ids":["https://openalex.org/I1793135"]},{"raw_affiliation_string":"Key Laboratory of CNC Equipment Reliability, Ministry of Education, Jilin University, Changchun, 130025, China","institution_ids":["https://openalex.org/I194450716"]},{"raw_affiliation_string":"The School of Mechanical and Aerospace Engineering, Jilin University, Changchun, 130025, China","institution_ids":["https://openalex.org/I194450716"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100374427","display_name":"Bo Li","orcid":"https://orcid.org/0000-0002-4384-7418"},"institutions":[{"id":"https://openalex.org/I1793135","display_name":"Yanbian University","ror":"https://ror.org/039xnh269","country_code":"CN","type":"education","lineage":["https://openalex.org/I1793135"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bo Li","raw_affiliation_strings":["College of Engineering, Yanbian University, Yanbian, 133002, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Engineering, Yanbian University, Yanbian, 133002, China","institution_ids":["https://openalex.org/I1793135"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5127796488","display_name":"Dexin Kong","orcid":null},"institutions":[{"id":"https://openalex.org/I1793135","display_name":"Yanbian University","ror":"https://ror.org/039xnh269","country_code":"CN","type":"education","lineage":["https://openalex.org/I1793135"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Dexin Kong","raw_affiliation_strings":["College of Engineering, Yanbian University, Yanbian, 133002, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Engineering, Yanbian University, Yanbian, 133002, China","institution_ids":["https://openalex.org/I1793135"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5130806571","display_name":"Xu Zhu","orcid":null},"institutions":[{"id":"https://openalex.org/I1793135","display_name":"Yanbian University","ror":"https://ror.org/039xnh269","country_code":"CN","type":"education","lineage":["https://openalex.org/I1793135"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xu Zhu","raw_affiliation_strings":["College of Engineering, Yanbian University, Yanbian, 133002, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Engineering, Yanbian University, Yanbian, 133002, China","institution_ids":["https://openalex.org/I1793135"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5129161521","display_name":"Yi Xing","orcid":null},"institutions":[{"id":"https://openalex.org/I1793135","display_name":"Yanbian University","ror":"https://ror.org/039xnh269","country_code":"CN","type":"education","lineage":["https://openalex.org/I1793135"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yi Xing","raw_affiliation_strings":["College of Engineering, Yanbian University, Yanbian, 133002, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Engineering, Yanbian University, Yanbian, 133002, China","institution_ids":["https://openalex.org/I1793135"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5130770343","display_name":"Jianhai Zhang","orcid":null},"institutions":[{"id":"https://openalex.org/I1793135","display_name":"Yanbian University","ror":"https://ror.org/039xnh269","country_code":"CN","type":"education","lineage":["https://openalex.org/I1793135"]},{"id":"https://openalex.org/I194450716","display_name":"Jilin University","ror":"https://ror.org/00js3aw79","country_code":"CN","type":"education","lineage":["https://openalex.org/I194450716"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Jianhai Zhang","raw_affiliation_strings":["College of Engineering, Yanbian University, Yanbian, 133002, China","Key Laboratory of CNC Equipment Reliability, Ministry of Education, Jilin University, Changchun, 130025, China","The School of Mechanical and Aerospace Engineering, Jilin University, Changchun, 130025, China"],"raw_orcid":"https://orcid.org/0009-0009-8120-3427","affiliations":[{"raw_affiliation_string":"College of Engineering, Yanbian University, Yanbian, 133002, China","institution_ids":["https://openalex.org/I1793135"]},{"raw_affiliation_string":"Key Laboratory of CNC Equipment Reliability, Ministry of Education, Jilin University, Changchun, 130025, China","institution_ids":["https://openalex.org/I194450716"]},{"raw_affiliation_string":"The School of Mechanical and Aerospace Engineering, Jilin University, Changchun, 130025, China","institution_ids":["https://openalex.org/I194450716"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5130770343","display_name":"Jianhai Zhang","orcid":null},"institutions":[{"id":"https://openalex.org/I1793135","display_name":"Yanbian University","ror":"https://ror.org/039xnh269","country_code":"CN","type":"education","lineage":["https://openalex.org/I1793135"]},{"id":"https://openalex.org/I194450716","display_name":"Jilin University","ror":"https://ror.org/00js3aw79","country_code":"CN","type":"education","lineage":["https://openalex.org/I194450716"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jianhai Zhang","raw_affiliation_strings":["College of Engineering, Yanbian University, Yanbian, 133002, China","Key Laboratory of CNC Equipment Reliability, Ministry of Education, Jilin University, Changchun, 130025, China","The School of Mechanical and Aerospace Engineering, Jilin University, Changchun, 130025, China"],"raw_orcid":"https://orcid.org/0009-0009-8120-3427","affiliations":[{"raw_affiliation_string":"College of Engineering, Yanbian University, Yanbian, 133002, China","institution_ids":["https://openalex.org/I1793135"]},{"raw_affiliation_string":"Key Laboratory of CNC Equipment Reliability, Ministry of Education, Jilin University, Changchun, 130025, China","institution_ids":["https://openalex.org/I194450716"]},{"raw_affiliation_string":"The School of Mechanical and Aerospace Engineering, Jilin University, Changchun, 130025, China","institution_ids":["https://openalex.org/I194450716"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":12,"corresponding_author_ids":["https://openalex.org/A5130371014","https://openalex.org/A5130770343"],"corresponding_institution_ids":["https://openalex.org/I1793135","https://openalex.org/I194450716"],"apc_list":{"value":3170,"currency":"USD","value_usd":3170},"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.53676532,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"175","issue":null,"first_page":"114590","last_page":"114590"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.8549000024795532,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.8549000024795532,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10036","display_name":"Advanced Neural Network Applications","score":0.10289999842643738,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10627","display_name":"Advanced Image and Video Retrieval Techniques","score":0.0032999999821186066,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.6920999884605408},{"id":"https://openalex.org/keywords/feature","display_name":"Feature (linguistics)","score":0.5972999930381775},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.49380001425743103},{"id":"https://openalex.org/keywords/generalization","display_name":"Generalization","score":0.45989999175071716},{"id":"https://openalex.org/keywords/inference","display_name":"Inference","score":0.45350000262260437},{"id":"https://openalex.org/keywords/pattern-recognition","display_name":"Pattern recognition (psychology)","score":0.43950000405311584},{"id":"https://openalex.org/keywords/field","display_name":"Field (mathematics)","score":0.41609999537467957},{"id":"https://openalex.org/keywords/stability","display_name":"Stability (learning theory)","score":0.3970000147819519},{"id":"https://openalex.org/keywords/false-alarm","display_name":"False alarm","score":0.387800008058548}],"concepts":[{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.7857000231742859},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6920999884605408},{"id":"https://openalex.org/C2776401178","wikidata":"https://www.wikidata.org/wiki/Q12050496","display_name":"Feature (linguistics)","level":2,"score":0.5972999930381775},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.5529999732971191},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.49380001425743103},{"id":"https://openalex.org/C177148314","wikidata":"https://www.wikidata.org/wiki/Q170084","display_name":"Generalization","level":2,"score":0.45989999175071716},{"id":"https://openalex.org/C2776214188","wikidata":"https://www.wikidata.org/wiki/Q408386","display_name":"Inference","level":2,"score":0.45350000262260437},{"id":"https://openalex.org/C153180895","wikidata":"https://www.wikidata.org/wiki/Q7148389","display_name":"Pattern recognition (psychology)","level":2,"score":0.43950000405311584},{"id":"https://openalex.org/C9652623","wikidata":"https://www.wikidata.org/wiki/Q190109","display_name":"Field (mathematics)","level":2,"score":0.41609999537467957},{"id":"https://openalex.org/C112972136","wikidata":"https://www.wikidata.org/wiki/Q7595718","display_name":"Stability (learning theory)","level":2,"score":0.3970000147819519},{"id":"https://openalex.org/C2776836416","wikidata":"https://www.wikidata.org/wiki/Q1364844","display_name":"False alarm","level":2,"score":0.387800008058548},{"id":"https://openalex.org/C83665646","wikidata":"https://www.wikidata.org/wiki/Q42139305","display_name":"Feature vector","level":2,"score":0.38519999384880066},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.3603000044822693},{"id":"https://openalex.org/C78371743","wikidata":"https://www.wikidata.org/wiki/Q1672829","display_name":"Optical proximity correction","level":3,"score":0.3472000062465668},{"id":"https://openalex.org/C185798385","wikidata":"https://www.wikidata.org/wiki/Q1161707","display_name":"Benchmark (surveying)","level":2,"score":0.3402000069618225},{"id":"https://openalex.org/C52622490","wikidata":"https://www.wikidata.org/wiki/Q1026626","display_name":"Feature extraction","level":2,"score":0.3181999921798706},{"id":"https://openalex.org/C4775677","wikidata":"https://www.wikidata.org/wiki/Q7449393","display_name":"Semiconductor device modeling","level":3,"score":0.3066999912261963},{"id":"https://openalex.org/C73586568","wikidata":"https://www.wikidata.org/wiki/Q2600211","display_name":"Parameter space","level":2,"score":0.3034000098705292},{"id":"https://openalex.org/C2776151529","wikidata":"https://www.wikidata.org/wiki/Q3045304","display_name":"Object detection","level":3,"score":0.30149999260902405},{"id":"https://openalex.org/C111335779","wikidata":"https://www.wikidata.org/wiki/Q3454686","display_name":"Reduction (mathematics)","level":2,"score":0.2808000147342682},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.2799000144004822},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.2791000008583069},{"id":"https://openalex.org/C124101348","wikidata":"https://www.wikidata.org/wiki/Q172491","display_name":"Data mining","level":1,"score":0.2720000147819519},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.26600000262260437},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.26010000705718994},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.2596000134944916},{"id":"https://openalex.org/C163294075","wikidata":"https://www.wikidata.org/wiki/Q581861","display_name":"Noise reduction","level":2,"score":0.257099986076355},{"id":"https://openalex.org/C114289077","wikidata":"https://www.wikidata.org/wiki/Q3284399","display_name":"Statistical model","level":2,"score":0.25450000166893005},{"id":"https://openalex.org/C5339829","wikidata":"https://www.wikidata.org/wiki/Q1425977","display_name":"Machine vision","level":2,"score":0.2524000108242035},{"id":"https://openalex.org/C2778827112","wikidata":"https://www.wikidata.org/wiki/Q22245680","display_name":"Feature engineering","level":3,"score":0.2522999942302704}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1016/j.engappai.2026.114590","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.engappai.2026.114590","pdf_url":null,"source":{"id":"https://openalex.org/S900972176","display_name":"Engineering Applications of Artificial Intelligence","issn_l":"0952-1976","issn":["0952-1976","1873-6769"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Engineering Applications of Artificial Intelligence","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/9","score":0.537878692150116,"display_name":"Industry, innovation and infrastructure"}],"awards":[{"id":"https://openalex.org/G6751635893","display_name":null,"funder_award_id":"51775147","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W2345074982","https://openalex.org/W2595507424","https://openalex.org/W2922187519","https://openalex.org/W2944303778","https://openalex.org/W3008902695","https://openalex.org/W3164104137","https://openalex.org/W3165012668","https://openalex.org/W4292722430","https://openalex.org/W4360993849","https://openalex.org/W4379876437","https://openalex.org/W4396541948","https://openalex.org/W4403096396","https://openalex.org/W4414333247"],"related_works":[],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2026-05-18T06:02:51.519808","created_date":"2026-03-28T00:00:00"}