{"id":"https://openalex.org/W2108598150","doi":"https://doi.org/10.1016/0262-8856(91)90042-n","title":"Calculating the surface topography of integrated circuit wafers from SEM images","display_name":"Calculating the surface topography of integrated circuit wafers from SEM images","publication_year":1991,"publication_date":"1991-02-01","ids":{"openalex":"https://openalex.org/W2108598150","doi":"https://doi.org/10.1016/0262-8856(91)90042-n","mag":"2108598150"},"language":"en","primary_location":{"id":"doi:10.1016/0262-8856(91)90042-n","is_oa":false,"landing_page_url":"https://doi.org/10.1016/0262-8856(91)90042-n","pdf_url":null,"source":{"id":"https://openalex.org/S177430994","display_name":"Image and Vision Computing","issn_l":"0262-8856","issn":["0262-8856","1872-8138"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Image and Vision Computing","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5022062624","display_name":"Timothy P Ellison","orcid":null},"institutions":[{"id":"https://openalex.org/I28407311","display_name":"University of Manchester","ror":"https://ror.org/027m9bs27","country_code":"GB","type":"education","lineage":["https://openalex.org/I28407311"]}],"countries":["GB"],"is_corresponding":true,"raw_author_name":"Timothy P Ellison","raw_affiliation_strings":["Wolfson Image Analysis Unit, Department of Medical BioPhysics, University of Manchester, Manchester M19 3PT, UK"],"affiliations":[{"raw_affiliation_string":"Wolfson Image Analysis Unit, Department of Medical BioPhysics, University of Manchester, Manchester M19 3PT, UK","institution_ids":["https://openalex.org/I28407311"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5067224766","display_name":"Chris Taylor","orcid":"https://orcid.org/0000-0001-7867-9533"},"institutions":[{"id":"https://openalex.org/I28407311","display_name":"University of Manchester","ror":"https://ror.org/027m9bs27","country_code":"GB","type":"education","lineage":["https://openalex.org/I28407311"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Christopher J Taylor","raw_affiliation_strings":["Wolfson Image Analysis Unit, Department of Medical BioPhysics, University of Manchester, Manchester M19 3PT, UK"],"affiliations":[{"raw_affiliation_string":"Wolfson Image Analysis Unit, Department of Medical BioPhysics, University of Manchester, Manchester M19 3PT, UK","institution_ids":["https://openalex.org/I28407311"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5022062624"],"corresponding_institution_ids":["https://openalex.org/I28407311"],"apc_list":{"value":2270,"currency":"USD","value_usd":2270},"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":9,"citation_normalized_percentile":{"value":0.25279924,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"9","issue":"1","first_page":"3","last_page":"9"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9936000108718872,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.993399977684021,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.8273543119430542},{"id":"https://openalex.org/keywords/photometric-stereo","display_name":"Photometric stereo","score":0.6819980144500732},{"id":"https://openalex.org/keywords/surface","display_name":"Surface (topology)","score":0.6131881475448608},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.6095618009567261},{"id":"https://openalex.org/keywords/computer-vision","display_name":"Computer vision","score":0.6045039892196655},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5178189873695374},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5007345676422119},{"id":"https://openalex.org/keywords/surface-reconstruction","display_name":"Surface reconstruction","score":0.4979054927825928},{"id":"https://openalex.org/keywords/integrated-circuit","display_name":"Integrated circuit","score":0.4805110692977905},{"id":"https://openalex.org/keywords/scanning-electron-microscope","display_name":"Scanning electron microscope","score":0.46166685223579407},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.45658937096595764},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.42786404490470886},{"id":"https://openalex.org/keywords/image","display_name":"Image (mathematics)","score":0.4205043315887451},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2266508936882019},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.16256415843963623},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.16114145517349243},{"id":"https://openalex.org/keywords/geometry","display_name":"Geometry","score":0.12584006786346436}],"concepts":[{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.8273543119430542},{"id":"https://openalex.org/C44365914","wikidata":"https://www.wikidata.org/wiki/Q17120636","display_name":"Photometric stereo","level":3,"score":0.6819980144500732},{"id":"https://openalex.org/C2776799497","wikidata":"https://www.wikidata.org/wiki/Q484298","display_name":"Surface (topology)","level":2,"score":0.6131881475448608},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.6095618009567261},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.6045039892196655},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5178189873695374},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5007345676422119},{"id":"https://openalex.org/C20885615","wikidata":"https://www.wikidata.org/wiki/Q825595","display_name":"Surface reconstruction","level":3,"score":0.4979054927825928},{"id":"https://openalex.org/C530198007","wikidata":"https://www.wikidata.org/wiki/Q80831","display_name":"Integrated circuit","level":2,"score":0.4805110692977905},{"id":"https://openalex.org/C26771246","wikidata":"https://www.wikidata.org/wiki/Q321095","display_name":"Scanning electron microscope","level":2,"score":0.46166685223579407},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.45658937096595764},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.42786404490470886},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.4205043315887451},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2266508936882019},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.16256415843963623},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.16114145517349243},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.12584006786346436},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.1016/0262-8856(91)90042-n","is_oa":false,"landing_page_url":"https://doi.org/10.1016/0262-8856(91)90042-n","pdf_url":null,"source":{"id":"https://openalex.org/S177430994","display_name":"Image and Vision Computing","issn_l":"0262-8856","issn":["0262-8856","1872-8138"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Image and Vision Computing","raw_type":"journal-article"},{"id":"pmh:oai:pure.atira.dk:openaire_cris_publications/ede8852d-f759-41c7-a483-ec9387518ecd","is_oa":false,"landing_page_url":"https://research.manchester.ac.uk/en/publications/ede8852d-f759-41c7-a483-ec9387518ecd","pdf_url":null,"source":{"id":"https://openalex.org/S4306400662","display_name":"Research Explorer (The University of Manchester)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I28407311","host_organization_name":"University of Manchester","host_organization_lineage":["https://openalex.org/I28407311"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Ellison, T P & Taylor, C J 1991, 'Calculating the surface topography of integrated circuit wafers from SEM images', Image and Vision Computing, vol. 9, no. 1, pp. 3-9.","raw_type":"info:eu-repo/semantics/publishedVersion"},{"id":"pmh:oai:CiteSeerX.psu:10.1.1.331.8480","is_oa":false,"landing_page_url":"http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.331.8480","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"http://www.bmva.org/bmvc/1990/bmvc-90-034.pdf","raw_type":"text"},{"id":"pmh:oai:CiteSeerX.psu:10.1.1.643.3229","is_oa":false,"landing_page_url":"http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.643.3229","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"http://www.bmva.org/bmvc/1990/bmvc-90-034.pdf","raw_type":"text"},{"id":"pmh:oai:pure.atira.dk:openaire_cris_publications/0710985e-bf73-4814-bc79-d974dd0901b7","is_oa":false,"landing_page_url":"https://research.manchester.ac.uk/en/publications/0710985e-bf73-4814-bc79-d974dd0901b7","pdf_url":null,"source":{"id":"https://openalex.org/S4306400662","display_name":"Research Explorer (The University of Manchester)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I28407311","host_organization_name":"University of Manchester","host_organization_lineage":["https://openalex.org/I28407311"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Ellison, T P & Taylor, C 1990, Calculating the surface topography of integrated circuit wafers from SEM images. in host publication. BMVA Press, British Machine Vision Conference, 1/01/24.","raw_type":"info:eu-repo/semantics/conferenceObject"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":17,"referenced_works":["https://openalex.org/W97083571","https://openalex.org/W1540478814","https://openalex.org/W1733746640","https://openalex.org/W1990779621","https://openalex.org/W2109427656","https://openalex.org/W2111296481","https://openalex.org/W2118268147","https://openalex.org/W2129666524","https://openalex.org/W2138127543","https://openalex.org/W2556637545","https://openalex.org/W2911709767","https://openalex.org/W3035034968","https://openalex.org/W6631264613","https://openalex.org/W6637766639","https://openalex.org/W6661196919","https://openalex.org/W6730197395","https://openalex.org/W6793175765"],"related_works":["https://openalex.org/W2071501285","https://openalex.org/W1904220063","https://openalex.org/W2118082161","https://openalex.org/W2082914599","https://openalex.org/W2756570351","https://openalex.org/W2147504644","https://openalex.org/W2116599779","https://openalex.org/W2146630859","https://openalex.org/W2057629199","https://openalex.org/W2383958830"],"abstract_inverted_index":null,"counts_by_year":[{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":1}],"updated_date":"2026-04-05T17:49:38.594831","created_date":"2025-10-10T00:00:00"}