{"id":"https://openalex.org/W4237335165","doi":"https://doi.org/10.1007/978-3-540-79567-4_58","title":"Photolithography for Thin-Film-Transistor Liquid Crystal Displays","display_name":"Photolithography for Thin-Film-Transistor Liquid Crystal Displays","publication_year":2012,"publication_date":"2012-01-01","ids":{"openalex":"https://openalex.org/W4237335165","doi":"https://doi.org/10.1007/978-3-540-79567-4_58"},"language":"en","primary_location":{"id":"doi:10.1007/978-3-540-79567-4_58","is_oa":false,"landing_page_url":"https://doi.org/10.1007/978-3-540-79567-4_58","pdf_url":null,"source":{"id":"https://openalex.org/S4306511887","display_name":"Handbook of Visual Display Technology","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Handbook of Visual Display Technology","raw_type":"book-chapter"},"type":"book-chapter","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5074021774","display_name":"Wenyi Lin","orcid":null},"institutions":[{"id":"https://openalex.org/I125732723","display_name":"AU Optronics (Taiwan)","ror":"https://ror.org/0564r0810","country_code":"TW","type":"company","lineage":["https://openalex.org/I125732723"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Wen-yi Lin","raw_affiliation_strings":["Manufacturing Technology Center, AU Optronics Corporation, Taichung, Taiwan"],"affiliations":[{"raw_affiliation_string":"Manufacturing Technology Center, AU Optronics Corporation, Taichung, Taiwan","institution_ids":["https://openalex.org/I125732723"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016016039","display_name":"Wenbin Wu","orcid":"https://orcid.org/0000-0002-0101-5621"},"institutions":[{"id":"https://openalex.org/I125732723","display_name":"AU Optronics (Taiwan)","ror":"https://ror.org/0564r0810","country_code":"TW","type":"company","lineage":["https://openalex.org/I125732723"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"W. B. Wu","raw_affiliation_strings":["Manufacturing Technology Center, AU Optronics Corporation, Taichung, Taiwan"],"affiliations":[{"raw_affiliation_string":"Manufacturing Technology Center, AU Optronics Corporation, Taichung, Taiwan","institution_ids":["https://openalex.org/I125732723"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052285235","display_name":"Kai\u2010Chun Cheng","orcid":"https://orcid.org/0000-0002-1240-4219"},"institutions":[{"id":"https://openalex.org/I125732723","display_name":"AU Optronics (Taiwan)","ror":"https://ror.org/0564r0810","country_code":"TW","type":"company","lineage":["https://openalex.org/I125732723"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"K. C. Cheng","raw_affiliation_strings":["Manufacturing Technology Center, AU Optronics Corporation, Taichung, Taiwan"],"affiliations":[{"raw_affiliation_string":"Manufacturing Technology Center, AU Optronics Corporation, Taichung, Taiwan","institution_ids":["https://openalex.org/I125732723"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5110862915","display_name":"Hsin Hung Li","orcid":null},"institutions":[{"id":"https://openalex.org/I125732723","display_name":"AU Optronics (Taiwan)","ror":"https://ror.org/0564r0810","country_code":"TW","type":"company","lineage":["https://openalex.org/I125732723"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Hsin Hung Li","raw_affiliation_strings":["Manufacturing Technology Center, AU Optronics Corporation, Taichung, Taiwan"],"affiliations":[{"raw_affiliation_string":"Manufacturing Technology Center, AU Optronics Corporation, Taichung, Taiwan","institution_ids":["https://openalex.org/I125732723"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5074021774"],"corresponding_institution_ids":["https://openalex.org/I125732723"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.50472769,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"835","last_page":"859"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.9466000199317932,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.9466000199317932,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.9330000281333923,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/photoresist","display_name":"Photoresist","score":0.8657262921333313},{"id":"https://openalex.org/keywords/photolithography","display_name":"Photolithography","score":0.8368334174156189},{"id":"https://openalex.org/keywords/thin-film-transistor","display_name":"Thin-film transistor","score":0.6834023594856262},{"id":"https://openalex.org/keywords/liquid-crystal-display","display_name":"Liquid-crystal display","score":0.6371287107467651},{"id":"https://openalex.org/keywords/critical-dimension","display_name":"Critical dimension","score":0.6335194110870361},{"id":"https://openalex.org/keywords/overlay","display_name":"Overlay","score":0.615703821182251},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5974500775337219},{"id":"https://openalex.org/keywords/etching","display_name":"Etching (microfabrication)","score":0.510858952999115},{"id":"https://openalex.org/keywords/transistor","display_name":"Transistor","score":0.5107793807983398},{"id":"https://openalex.org/keywords/microelectronics","display_name":"Microelectronics","score":0.4980764389038086},{"id":"https://openalex.org/keywords/resist","display_name":"Resist","score":0.48755425214767456},{"id":"https://openalex.org/keywords/chemical-mechanical-planarization","display_name":"Chemical-mechanical planarization","score":0.482467919588089},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.46698564291000366},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.4599081873893738},{"id":"https://openalex.org/keywords/engineering-physics","display_name":"Engineering physics","score":0.3754340708255768},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.33677059412002563},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2637045681476593},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.24064719676971436},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.21710222959518433}],"concepts":[{"id":"https://openalex.org/C134406635","wikidata":"https://www.wikidata.org/wiki/Q1439684","display_name":"Photoresist","level":3,"score":0.8657262921333313},{"id":"https://openalex.org/C105487726","wikidata":"https://www.wikidata.org/wiki/Q622938","display_name":"Photolithography","level":2,"score":0.8368334174156189},{"id":"https://openalex.org/C87359718","wikidata":"https://www.wikidata.org/wiki/Q1271916","display_name":"Thin-film transistor","level":3,"score":0.6834023594856262},{"id":"https://openalex.org/C128019096","wikidata":"https://www.wikidata.org/wiki/Q83341","display_name":"Liquid-crystal display","level":2,"score":0.6371287107467651},{"id":"https://openalex.org/C207789793","wikidata":"https://www.wikidata.org/wiki/Q3028070","display_name":"Critical dimension","level":2,"score":0.6335194110870361},{"id":"https://openalex.org/C136085584","wikidata":"https://www.wikidata.org/wiki/Q910289","display_name":"Overlay","level":2,"score":0.615703821182251},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5974500775337219},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.510858952999115},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.5107793807983398},{"id":"https://openalex.org/C187937830","wikidata":"https://www.wikidata.org/wiki/Q175403","display_name":"Microelectronics","level":2,"score":0.4980764389038086},{"id":"https://openalex.org/C53524968","wikidata":"https://www.wikidata.org/wiki/Q7315582","display_name":"Resist","level":3,"score":0.48755425214767456},{"id":"https://openalex.org/C180088628","wikidata":"https://www.wikidata.org/wiki/Q1069404","display_name":"Chemical-mechanical planarization","level":3,"score":0.482467919588089},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.46698564291000366},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.4599081873893738},{"id":"https://openalex.org/C61696701","wikidata":"https://www.wikidata.org/wiki/Q770766","display_name":"Engineering physics","level":1,"score":0.3754340708255768},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.33677059412002563},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2637045681476593},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.24064719676971436},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.21710222959518433},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1007/978-3-540-79567-4_58","is_oa":false,"landing_page_url":"https://doi.org/10.1007/978-3-540-79567-4_58","pdf_url":null,"source":{"id":"https://openalex.org/S4306511887","display_name":"Handbook of Visual Display Technology","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Handbook of Visual Display Technology","raw_type":"book-chapter"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":3,"referenced_works":["https://openalex.org/W1555969351","https://openalex.org/W1964031095","https://openalex.org/W2076318930"],"related_works":["https://openalex.org/W2376266960","https://openalex.org/W2004754773","https://openalex.org/W2379376890","https://openalex.org/W2178933900","https://openalex.org/W4226294346","https://openalex.org/W2044269754","https://openalex.org/W2536782738","https://openalex.org/W2051685665","https://openalex.org/W2262246617","https://openalex.org/W3012517702"],"abstract_inverted_index":null,"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2016,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}