{"id":"https://openalex.org/W4388044031","doi":"https://doi.org/10.1007/s11432-022-3668-0","title":"Defect evolution in GaN thin film heterogeneously integrated with CMOS-compatible Si(100) substrate by ion-cutting technology","display_name":"Defect evolution in GaN thin film heterogeneously integrated with CMOS-compatible Si(100) substrate by ion-cutting technology","publication_year":2023,"publication_date":"2023-10-20","ids":{"openalex":"https://openalex.org/W4388044031","doi":"https://doi.org/10.1007/s11432-022-3668-0"},"language":"en","primary_location":{"id":"doi:10.1007/s11432-022-3668-0","is_oa":false,"landing_page_url":"https://doi.org/10.1007/s11432-022-3668-0","pdf_url":null,"source":{"id":"https://openalex.org/S4210218743","display_name":"Science China Information Sciences","issn_l":"1674-733X","issn":["1674-733X","1869-1919"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319965","host_organization_name":"Springer Nature","host_organization_lineage":["https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Science China Information Sciences","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5011832305","display_name":"Hangning Shi","orcid":"https://orcid.org/0000-0003-0739-9002"},"institutions":[{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]},{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hangning Shi","raw_affiliation_strings":["State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China","University of Chinese Academy of Sciences, Beijing, 100049, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China","institution_ids":["https://openalex.org/I4210147322","https://openalex.org/I19820366"]},{"raw_affiliation_string":"University of Chinese Academy of Sciences, Beijing, 100049, China","institution_ids":["https://openalex.org/I4210165038"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086101325","display_name":"Ailun Yi","orcid":"https://orcid.org/0000-0002-8244-8866"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]},{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ailun Yi","raw_affiliation_strings":["State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China","University of Chinese Academy of Sciences, Beijing, 100049, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China","institution_ids":["https://openalex.org/I4210147322","https://openalex.org/I19820366"]},{"raw_affiliation_string":"University of Chinese Academy of Sciences, Beijing, 100049, China","institution_ids":["https://openalex.org/I4210165038"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080158271","display_name":"Jiaxin Ding","orcid":"https://orcid.org/0000-0002-0009-9237"},"institutions":[{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jiaxin Ding","raw_affiliation_strings":["State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China","University of Chinese Academy of Sciences, Beijing, 100049, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China","institution_ids":["https://openalex.org/I4210147322","https://openalex.org/I19820366"]},{"raw_affiliation_string":"University of Chinese Academy of Sciences, Beijing, 100049, China","institution_ids":["https://openalex.org/I4210165038"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5104198082","display_name":"Xudong Liu","orcid":null},"institutions":[{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]},{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xudong Liu","raw_affiliation_strings":["State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China","University of Chinese Academy of Sciences, Beijing, 100049, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China","institution_ids":["https://openalex.org/I4210147322","https://openalex.org/I19820366"]},{"raw_affiliation_string":"University of Chinese Academy of Sciences, Beijing, 100049, China","institution_ids":["https://openalex.org/I4210165038"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Qingcheng Qin","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I148128674","display_name":"University of Shanghai for Science and Technology","ror":"https://ror.org/00ay9v204","country_code":"CN","type":"education","lineage":["https://openalex.org/I148128674"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qingcheng Qin","raw_affiliation_strings":["School of Materials and Chemistry, University of Shanghai for Science and Technology, Shanghai, 200093, China","State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China"],"affiliations":[{"raw_affiliation_string":"School of Materials and Chemistry, University of Shanghai for Science and Technology, Shanghai, 200093, China","institution_ids":["https://openalex.org/I148128674"]},{"raw_affiliation_string":"State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China","institution_ids":["https://openalex.org/I4210147322","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101850341","display_name":"Juemin Yi","orcid":"https://orcid.org/0000-0003-3239-676X"},"institutions":[{"id":"https://openalex.org/I4210092495","display_name":"Suzhou Institute of Nano-tech and Nano-bionics","ror":"https://ror.org/0027d9x02","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Juemin Yi","raw_affiliation_strings":["Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, 215123, China"],"affiliations":[{"raw_affiliation_string":"Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, 215123, China","institution_ids":["https://openalex.org/I4210092495","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066914924","display_name":"Junjie Hu","orcid":"https://orcid.org/0000-0002-1909-7573"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210092495","display_name":"Suzhou Institute of Nano-tech and Nano-bionics","ror":"https://ror.org/0027d9x02","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Junjie Hu","raw_affiliation_strings":["Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, 215123, China"],"affiliations":[{"raw_affiliation_string":"Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, 215123, China","institution_ids":["https://openalex.org/I4210092495","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100415855","display_name":"Miao Wang","orcid":"https://orcid.org/0000-0002-7900-2468"},"institutions":[{"id":"https://openalex.org/I63354593","display_name":"Sichuan Normal University","ror":"https://ror.org/043dxc061","country_code":"CN","type":"education","lineage":["https://openalex.org/I63354593"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I2801798921","display_name":"Helmholtz-Zentrum Dresden-Rossendorf","ror":"https://ror.org/01zy2cs03","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I2801798921"]},{"id":"https://openalex.org/I4210092495","display_name":"Suzhou Institute of Nano-tech and Nano-bionics","ror":"https://ror.org/0027d9x02","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}],"countries":["CN","DE"],"is_corresponding":false,"raw_author_name":"Miao Wang","raw_affiliation_strings":["College of Physics and Electronic Engineering, Sichuan Normal University, Chengdu, 610101, China","Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstr\u00dfe 400, Dresden, 01328, Germany","Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, 215123, China"],"affiliations":[{"raw_affiliation_string":"College of Physics and Electronic Engineering, Sichuan Normal University, Chengdu, 610101, China","institution_ids":["https://openalex.org/I63354593"]},{"raw_affiliation_string":"Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstr\u00dfe 400, Dresden, 01328, Germany","institution_ids":["https://openalex.org/I2801798921"]},{"raw_affiliation_string":"Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, 215123, China","institution_ids":["https://openalex.org/I4210092495","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110635540","display_name":"Demin Cai","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Demin Cai","raw_affiliation_strings":["Suzhou Nanowin Science and Technology Co., Ltd., Suzhou, 215123, China"],"affiliations":[{"raw_affiliation_string":"Suzhou Nanowin Science and Technology Co., Ltd., Suzhou, 215123, China","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100358526","display_name":"Jianfeng Wang","orcid":"https://orcid.org/0000-0003-2076-9805"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210092495","display_name":"Suzhou Institute of Nano-tech and Nano-bionics","ror":"https://ror.org/0027d9x02","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jianfeng Wang","raw_affiliation_strings":["Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, 215123, China","Suzhou Nanowin Science and Technology Co., Ltd., Suzhou, 215123, China"],"affiliations":[{"raw_affiliation_string":"Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, 215123, China","institution_ids":["https://openalex.org/I4210092495","https://openalex.org/I19820366"]},{"raw_affiliation_string":"Suzhou Nanowin Science and Technology Co., Ltd., Suzhou, 215123, China","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100613367","display_name":"Ke Xu","orcid":"https://orcid.org/0000-0002-7992-6257"},"institutions":[{"id":"https://openalex.org/I4210092495","display_name":"Suzhou Institute of Nano-tech and Nano-bionics","ror":"https://ror.org/0027d9x02","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ke Xu","raw_affiliation_strings":["Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, 215123, China","Suzhou Nanowin Science and Technology Co., Ltd., Suzhou, 215123, China"],"affiliations":[{"raw_affiliation_string":"Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, 215123, China","institution_ids":["https://openalex.org/I4210092495","https://openalex.org/I19820366"]},{"raw_affiliation_string":"Suzhou Nanowin Science and Technology Co., Ltd., Suzhou, 215123, China","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5090266874","display_name":"Fengwen Mu","orcid":"https://orcid.org/0000-0001-7396-9347"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Fengwen Mu","raw_affiliation_strings":["SABers Co., Ltd., Tianjin, 300451, China"],"affiliations":[{"raw_affiliation_string":"SABers Co., Ltd., Tianjin, 300451, China","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009305405","display_name":"Tadatomo Suga","orcid":"https://orcid.org/0000-0002-1029-0326"},"institutions":[{"id":"https://openalex.org/I63030401","display_name":"Meisei University","ror":"https://ror.org/022yhjq53","country_code":"JP","type":"education","lineage":["https://openalex.org/I63030401"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Tadatomo Suga","raw_affiliation_strings":["Collaborative Research Center, Meisei University, Hino-shi, Tokyo, 191-8506, Japan"],"affiliations":[{"raw_affiliation_string":"Collaborative Research Center, Meisei University, Hino-shi, Tokyo, 191-8506, Japan","institution_ids":["https://openalex.org/I63030401"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091337685","display_name":"Ren\u00e9 Heller","orcid":"https://orcid.org/0000-0002-9831-0984"},"institutions":[{"id":"https://openalex.org/I2801798921","display_name":"Helmholtz-Zentrum Dresden-Rossendorf","ror":"https://ror.org/01zy2cs03","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I2801798921"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Ren\u00e9 Heller","raw_affiliation_strings":["Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstr\u00dfe 400, Dresden, 01328, Germany"],"affiliations":[{"raw_affiliation_string":"Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstr\u00dfe 400, Dresden, 01328, Germany","institution_ids":["https://openalex.org/I2801798921"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100742760","display_name":"Mao Wang","orcid":"https://orcid.org/0000-0003-4606-7203"},"institutions":[{"id":"https://openalex.org/I63354593","display_name":"Sichuan Normal University","ror":"https://ror.org/043dxc061","country_code":"CN","type":"education","lineage":["https://openalex.org/I63354593"]},{"id":"https://openalex.org/I4210092495","display_name":"Suzhou Institute of Nano-tech and Nano-bionics","ror":"https://ror.org/0027d9x02","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I2801798921","display_name":"Helmholtz-Zentrum Dresden-Rossendorf","ror":"https://ror.org/01zy2cs03","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I2801798921"]}],"countries":["CN","DE"],"is_corresponding":false,"raw_author_name":"Mao Wang","raw_affiliation_strings":["College of Physics and Electronic Engineering, Sichuan Normal University, Chengdu, 610101, China","Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstr\u00dfe 400, Dresden, 01328, Germany","Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, 215123, China"],"affiliations":[{"raw_affiliation_string":"College of Physics and Electronic Engineering, Sichuan Normal University, Chengdu, 610101, China","institution_ids":["https://openalex.org/I63354593"]},{"raw_affiliation_string":"Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstr\u00dfe 400, Dresden, 01328, Germany","institution_ids":["https://openalex.org/I2801798921"]},{"raw_affiliation_string":"Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, 215123, China","institution_ids":["https://openalex.org/I4210092495","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046683796","display_name":"Shengqiang Zhou","orcid":"https://orcid.org/0000-0002-4885-799X"},"institutions":[{"id":"https://openalex.org/I2801798921","display_name":"Helmholtz-Zentrum Dresden-Rossendorf","ror":"https://ror.org/01zy2cs03","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I2801798921"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Shengqiang Zhou","raw_affiliation_strings":["Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstr\u00dfe 400, Dresden, 01328, Germany"],"affiliations":[{"raw_affiliation_string":"Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstr\u00dfe 400, Dresden, 01328, Germany","institution_ids":["https://openalex.org/I2801798921"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046827300","display_name":"Wenhui Xu","orcid":"https://orcid.org/0000-0002-5152-9196"},"institutions":[{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wenhui Xu","raw_affiliation_strings":["State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China","University of Chinese Academy of Sciences, Beijing, 100049, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China","institution_ids":["https://openalex.org/I4210147322","https://openalex.org/I19820366"]},{"raw_affiliation_string":"University of Chinese Academy of Sciences, Beijing, 100049, China","institution_ids":["https://openalex.org/I4210165038"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101417308","display_name":"Kai Huang","orcid":"https://orcid.org/0009-0001-4162-2792"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Kai Huang","raw_affiliation_strings":["State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China","University of Chinese Academy of Sciences, Beijing, 100049, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China","institution_ids":["https://openalex.org/I4210147322","https://openalex.org/I19820366"]},{"raw_affiliation_string":"University of Chinese Academy of Sciences, Beijing, 100049, China","institution_ids":["https://openalex.org/I4210165038"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057373127","display_name":"Tiangui You","orcid":"https://orcid.org/0000-0001-8978-4582"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Tiangui You","raw_affiliation_strings":["State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China","University of Chinese Academy of Sciences, Beijing, 100049, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China","institution_ids":["https://openalex.org/I4210147322","https://openalex.org/I19820366"]},{"raw_affiliation_string":"University of Chinese Academy of Sciences, Beijing, 100049, China","institution_ids":["https://openalex.org/I4210165038"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5071226980","display_name":"Xin Ou","orcid":"https://orcid.org/0000-0002-0316-9958"},"institutions":[{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Xin Ou","raw_affiliation_strings":["State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China","University of Chinese Academy of Sciences, Beijing, 100049, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China","institution_ids":["https://openalex.org/I4210147322","https://openalex.org/I19820366"]},{"raw_affiliation_string":"University of Chinese Academy of Sciences, Beijing, 100049, China","institution_ids":["https://openalex.org/I4210165038"]}]}],"institutions":[],"countries_distinct_count":3,"institutions_distinct_count":20,"corresponding_author_ids":["https://openalex.org/A5071226980"],"corresponding_institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210147322","https://openalex.org/I4210165038"],"apc_list":{"value":2390,"currency":"EUR","value_usd":2990},"apc_paid":null,"fwci":0.9501,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.73506712,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":99},"biblio":{"volume":"66","issue":"11","first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10099","display_name":"GaN-based semiconductor devices and materials","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10099","display_name":"GaN-based semiconductor devices and materials","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10781","display_name":"Plasma Diagnostics and Applications","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.8279213905334473},{"id":"https://openalex.org/keywords/ion","display_name":"Ion","score":0.6309001445770264},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.582534670829773},{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.5392723083496094},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.43229907751083374},{"id":"https://openalex.org/keywords/lattice","display_name":"Lattice (music)","score":0.42746275663375854},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.26870638132095337},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.09270203113555908}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8279213905334473},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.6309001445770264},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.582534670829773},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.5392723083496094},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.43229907751083374},{"id":"https://openalex.org/C2781204021","wikidata":"https://www.wikidata.org/wiki/Q6497091","display_name":"Lattice (music)","level":2,"score":0.42746275663375854},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.26870638132095337},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.09270203113555908},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1007/s11432-022-3668-0","is_oa":false,"landing_page_url":"https://doi.org/10.1007/s11432-022-3668-0","pdf_url":null,"source":{"id":"https://openalex.org/S4210218743","display_name":"Science China Information Sciences","issn_l":"1674-733X","issn":["1674-733X","1869-1919"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319965","host_organization_name":"Springer Nature","host_organization_lineage":["https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Science China Information Sciences","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":4,"referenced_works":["https://openalex.org/W2033142796","https://openalex.org/W2783783877","https://openalex.org/W3070985286","https://openalex.org/W3101378768"],"related_works":["https://openalex.org/W2074711307","https://openalex.org/W2650455045","https://openalex.org/W1991247872","https://openalex.org/W2025490475","https://openalex.org/W1980006732","https://openalex.org/W4308865600","https://openalex.org/W1980247835","https://openalex.org/W1994039910","https://openalex.org/W2280485952","https://openalex.org/W2025759951"],"abstract_inverted_index":null,"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":3}],"updated_date":"2026-01-20T23:28:44.954186","created_date":"2025-10-10T00:00:00"}