{"id":"https://openalex.org/W1975180619","doi":"https://doi.org/10.1007/s11432-010-4179-2","title":"Comparison of the RF MEMS switches with dielectric layers on the bridge\u2019s lower surface and on the transmission line","display_name":"Comparison of the RF MEMS switches with dielectric layers on the bridge\u2019s lower surface and on the transmission line","publication_year":2011,"publication_date":"2011-02-01","ids":{"openalex":"https://openalex.org/W1975180619","doi":"https://doi.org/10.1007/s11432-010-4179-2","mag":"1975180619"},"language":"en","primary_location":{"id":"doi:10.1007/s11432-010-4179-2","is_oa":false,"landing_page_url":"https://doi.org/10.1007/s11432-010-4179-2","pdf_url":null,"source":{"id":"https://openalex.org/S4210218743","display_name":"Science China Information Sciences","issn_l":"1674-733X","issn":["1674-733X","1869-1919"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319965","host_organization_name":"Springer Nature","host_organization_lineage":["https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Science China Information Sciences","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5048176906","display_name":"Kenle Chen","orcid":"https://orcid.org/0000-0002-2168-9420"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"KenLe Chen","raw_affiliation_strings":["National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, 100871, China","Peking University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, 100871, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Peking University","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5077632077","display_name":"Jinwen Zhang","orcid":"https://orcid.org/0000-0001-8828-114X"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"JinWen Zhang","raw_affiliation_strings":["National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, 100871, China","Peking University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, 100871, China","institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Peking University","institution_ids":["https://openalex.org/I20231570"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5048176906"],"corresponding_institution_ids":["https://openalex.org/I20231570","https://openalex.org/I4210119392"],"apc_list":{"value":2990,"currency":"USD","value_usd":2990},"apc_paid":null,"fwci":0.6954,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.74047812,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"54","issue":"2","first_page":"396","last_page":"406"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.7852651476860046},{"id":"https://openalex.org/keywords/dielectric","display_name":"Dielectric","score":0.7137019634246826},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6474027633666992},{"id":"https://openalex.org/keywords/transmission-line","display_name":"Transmission line","score":0.6056264042854309},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5958821177482605},{"id":"https://openalex.org/keywords/hfss","display_name":"HFSS","score":0.5755451321601868},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5613155364990234},{"id":"https://openalex.org/keywords/dielectric-loss","display_name":"Dielectric loss","score":0.5244845747947693},{"id":"https://openalex.org/keywords/insertion-loss","display_name":"Insertion loss","score":0.5207728743553162},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.4966018795967102},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.47840532660484314},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.474933922290802},{"id":"https://openalex.org/keywords/electric-power-transmission","display_name":"Electric power transmission","score":0.4726639986038208},{"id":"https://openalex.org/keywords/line","display_name":"Line (geometry)","score":0.4482906460762024},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3355768322944641},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1895132064819336},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.16162922978401184},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.15548139810562134},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.09930726885795593}],"concepts":[{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.7852651476860046},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.7137019634246826},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6474027633666992},{"id":"https://openalex.org/C33441834","wikidata":"https://www.wikidata.org/wiki/Q693004","display_name":"Transmission line","level":2,"score":0.6056264042854309},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5958821177482605},{"id":"https://openalex.org/C2776844852","wikidata":"https://www.wikidata.org/wiki/Q106872782","display_name":"HFSS","level":4,"score":0.5755451321601868},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5613155364990234},{"id":"https://openalex.org/C91066073","wikidata":"https://www.wikidata.org/wiki/Q1417868","display_name":"Dielectric loss","level":3,"score":0.5244845747947693},{"id":"https://openalex.org/C90327742","wikidata":"https://www.wikidata.org/wiki/Q947396","display_name":"Insertion loss","level":2,"score":0.5207728743553162},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.4966018795967102},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.47840532660484314},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.474933922290802},{"id":"https://openalex.org/C140311924","wikidata":"https://www.wikidata.org/wiki/Q200928","display_name":"Electric power transmission","level":2,"score":0.4726639986038208},{"id":"https://openalex.org/C198352243","wikidata":"https://www.wikidata.org/wiki/Q37105","display_name":"Line (geometry)","level":2,"score":0.4482906460762024},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3355768322944641},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1895132064819336},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.16162922978401184},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.15548139810562134},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.09930726885795593},{"id":"https://openalex.org/C21822782","wikidata":"https://www.wikidata.org/wiki/Q131214","display_name":"Antenna (radio)","level":2,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C170349913","wikidata":"https://www.wikidata.org/wiki/Q13402882","display_name":"Microstrip antenna","level":3,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1007/s11432-010-4179-2","is_oa":false,"landing_page_url":"https://doi.org/10.1007/s11432-010-4179-2","pdf_url":null,"source":{"id":"https://openalex.org/S4210218743","display_name":"Science China Information Sciences","issn_l":"1674-733X","issn":["1674-733X","1869-1919"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319965","host_organization_name":"Springer Nature","host_organization_lineage":["https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Science China Information Sciences","raw_type":"journal-article"},{"id":"mag:3139969156","is_oa":false,"landing_page_url":null,"pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":null,"raw_source_name":null,"raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.6899999976158142}],"awards":[],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":21,"referenced_works":["https://openalex.org/W199706877","https://openalex.org/W2003503719","https://openalex.org/W2018150592","https://openalex.org/W2020457891","https://openalex.org/W2071206044","https://openalex.org/W2097374163","https://openalex.org/W2107614184","https://openalex.org/W2113165532","https://openalex.org/W2114689113","https://openalex.org/W2117867096","https://openalex.org/W2119455330","https://openalex.org/W2120274187","https://openalex.org/W2124468286","https://openalex.org/W2128640706","https://openalex.org/W2131764130","https://openalex.org/W2136106860","https://openalex.org/W2136296352","https://openalex.org/W2154200695","https://openalex.org/W2156285590","https://openalex.org/W2946723398","https://openalex.org/W4230282064"],"related_works":["https://openalex.org/W2386664453","https://openalex.org/W2146443761","https://openalex.org/W2366726072","https://openalex.org/W2047912615","https://openalex.org/W2106709610","https://openalex.org/W1549300402","https://openalex.org/W2351854274","https://openalex.org/W2736653639","https://openalex.org/W1556114801","https://openalex.org/W2105929458"],"abstract_inverted_index":null,"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2013,"cited_by_count":2},{"year":2012,"cited_by_count":1}],"updated_date":"2026-07-23T08:03:31.855105","created_date":"2025-10-10T00:00:00"}
