{"id":"https://openalex.org/W4388425154","doi":"https://doi.org/10.1007/s10845-023-02231-z","title":"Wafer map defect recognition based on multi-scale feature fusion and attention spatial pyramid pooling","display_name":"Wafer map defect recognition based on multi-scale feature fusion and attention spatial pyramid pooling","publication_year":2023,"publication_date":"2023-11-06","ids":{"openalex":"https://openalex.org/W4388425154","doi":"https://doi.org/10.1007/s10845-023-02231-z"},"language":"en","primary_location":{"id":"doi:10.1007/s10845-023-02231-z","is_oa":false,"landing_page_url":"https://doi.org/10.1007/s10845-023-02231-z","pdf_url":null,"source":{"id":"https://openalex.org/S161464388","display_name":"Journal of Intelligent Manufacturing","issn_l":"0956-5515","issn":["0956-5515","1572-8145"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Intelligent Manufacturing","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5001809515","display_name":"Shouhong Chen","orcid":"https://orcid.org/0000-0002-4910-2978"},"institutions":[{"id":"https://openalex.org/I5343935","display_name":"Guilin University of Electronic Technology","ror":"https://ror.org/05arjae42","country_code":"CN","type":"education","lineage":["https://openalex.org/I5343935"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shouhong Chen","raw_affiliation_strings":["Guangxi Key Laboratory of Automatic Detecting Technology and Instruments, School of Electronic Engineering & Automation, Guilin University of Electronic Technology, Guilin, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Guangxi Key Laboratory of Automatic Detecting Technology and Instruments, School of Electronic Engineering & Automation, Guilin University of Electronic Technology, Guilin, China","institution_ids":["https://openalex.org/I5343935"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102976608","display_name":"Zhentao Huang","orcid":"https://orcid.org/0009-0002-1598-8405"},"institutions":[{"id":"https://openalex.org/I5343935","display_name":"Guilin University of Electronic Technology","ror":"https://ror.org/05arjae42","country_code":"CN","type":"education","lineage":["https://openalex.org/I5343935"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhentao Huang","raw_affiliation_strings":["Guangxi Key Laboratory of Automatic Detecting Technology and Instruments, School of Electronic Engineering & Automation, Guilin University of Electronic Technology, Guilin, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Guangxi Key Laboratory of Automatic Detecting Technology and Instruments, School of Electronic Engineering & Automation, Guilin University of Electronic Technology, Guilin, China","institution_ids":["https://openalex.org/I5343935"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101900533","display_name":"Tao Wang","orcid":"https://orcid.org/0000-0002-1386-9587"},"institutions":[{"id":"https://openalex.org/I5343935","display_name":"Guilin University of Electronic Technology","ror":"https://ror.org/05arjae42","country_code":"CN","type":"education","lineage":["https://openalex.org/I5343935"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Tao Wang","raw_affiliation_strings":["Guangxi Key Laboratory of Automatic Detecting Technology and Instruments, School of Electronic Engineering & Automation, Guilin University of Electronic Technology, Guilin, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Guangxi Key Laboratory of Automatic Detecting Technology and Instruments, School of Electronic Engineering & Automation, Guilin University of Electronic Technology, Guilin, China","institution_ids":["https://openalex.org/I5343935"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5070758885","display_name":"Xingna Hou","orcid":"https://orcid.org/0000-0002-4299-3544"},"institutions":[{"id":"https://openalex.org/I5343935","display_name":"Guilin University of Electronic Technology","ror":"https://ror.org/05arjae42","country_code":"CN","type":"education","lineage":["https://openalex.org/I5343935"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Xingna Hou","raw_affiliation_strings":["Guangxi Key Laboratory of Automatic Detecting Technology and Instruments, School of Electronic Engineering & Automation, Guilin University of Electronic Technology, Guilin, China","School of Architecture and Transportation Engineering, Guilin University of Electronic Technology, Guilin, China"],"raw_orcid":"https://orcid.org/0000-0002-4299-3544","affiliations":[{"raw_affiliation_string":"Guangxi Key Laboratory of Automatic Detecting Technology and Instruments, School of Electronic Engineering & Automation, Guilin University of Electronic Technology, Guilin, China","institution_ids":["https://openalex.org/I5343935"]},{"raw_affiliation_string":"School of Architecture and Transportation Engineering, Guilin University of Electronic Technology, Guilin, China","institution_ids":["https://openalex.org/I5343935"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100643093","display_name":"Ma Jun","orcid":"https://orcid.org/0000-0001-9227-6191"},"institutions":[{"id":"https://openalex.org/I5343935","display_name":"Guilin University of Electronic Technology","ror":"https://ror.org/05arjae42","country_code":"CN","type":"education","lineage":["https://openalex.org/I5343935"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jun Ma","raw_affiliation_strings":["Guangxi Key Laboratory of Automatic Detecting Technology and Instruments, School of Electronic Engineering & Automation, Guilin University of Electronic Technology, Guilin, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Guangxi Key Laboratory of Automatic Detecting Technology and Instruments, School of Electronic Engineering & Automation, Guilin University of Electronic Technology, Guilin, China","institution_ids":["https://openalex.org/I5343935"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5070758885"],"corresponding_institution_ids":["https://openalex.org/I5343935"],"apc_list":{"value":2390,"currency":"EUR","value_usd":2990},"apc_paid":null,"fwci":6.6745,"has_fulltext":false,"cited_by_count":36,"citation_normalized_percentile":{"value":0.96909186,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":98,"max":100},"biblio":{"volume":"36","issue":"1","first_page":"271","last_page":"284"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9957000017166138,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.8051021099090576},{"id":"https://openalex.org/keywords/pyramid","display_name":"Pyramid (geometry)","score":0.6938334703445435},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.6746839284896851},{"id":"https://openalex.org/keywords/pooling","display_name":"Pooling","score":0.6403385400772095},{"id":"https://openalex.org/keywords/convolutional-neural-network","display_name":"Convolutional neural network","score":0.573410153388977},{"id":"https://openalex.org/keywords/deep-learning","display_name":"Deep learning","score":0.5552444458007812},{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.5516701936721802},{"id":"https://openalex.org/keywords/pattern-recognition","display_name":"Pattern recognition (psychology)","score":0.550977349281311},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.47314345836639404},{"id":"https://openalex.org/keywords/feature","display_name":"Feature (linguistics)","score":0.44953447580337524},{"id":"https://openalex.org/keywords/artificial-neural-network","display_name":"Artificial neural network","score":0.4274534285068512},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.37931978702545166},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.339740127325058},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.28768885135650635},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.18129763007164001},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.1351671814918518}],"concepts":[{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.8051021099090576},{"id":"https://openalex.org/C142575187","wikidata":"https://www.wikidata.org/wiki/Q3358290","display_name":"Pyramid (geometry)","level":2,"score":0.6938334703445435},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.6746839284896851},{"id":"https://openalex.org/C70437156","wikidata":"https://www.wikidata.org/wiki/Q7228652","display_name":"Pooling","level":2,"score":0.6403385400772095},{"id":"https://openalex.org/C81363708","wikidata":"https://www.wikidata.org/wiki/Q17084460","display_name":"Convolutional neural network","level":2,"score":0.573410153388977},{"id":"https://openalex.org/C108583219","wikidata":"https://www.wikidata.org/wiki/Q197536","display_name":"Deep learning","level":2,"score":0.5552444458007812},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.5516701936721802},{"id":"https://openalex.org/C153180895","wikidata":"https://www.wikidata.org/wiki/Q7148389","display_name":"Pattern recognition (psychology)","level":2,"score":0.550977349281311},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.47314345836639404},{"id":"https://openalex.org/C2776401178","wikidata":"https://www.wikidata.org/wiki/Q12050496","display_name":"Feature (linguistics)","level":2,"score":0.44953447580337524},{"id":"https://openalex.org/C50644808","wikidata":"https://www.wikidata.org/wiki/Q192776","display_name":"Artificial neural network","level":2,"score":0.4274534285068512},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.37931978702545166},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.339740127325058},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.28768885135650635},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.18129763007164001},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.1351671814918518},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C41895202","wikidata":"https://www.wikidata.org/wiki/Q8162","display_name":"Linguistics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1007/s10845-023-02231-z","is_oa":false,"landing_page_url":"https://doi.org/10.1007/s10845-023-02231-z","pdf_url":null,"source":{"id":"https://openalex.org/S161464388","display_name":"Journal of Intelligent Manufacturing","issn_l":"0956-5515","issn":["0956-5515","1572-8145"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Intelligent Manufacturing","raw_type":"journal-article"},{"id":"pmh:oai:RePEc:spr:joinma:v:36:y:2025:i:1:d:10.1007_s10845-023-02231-z","is_oa":false,"landing_page_url":"http://link.springer.com/10.1007/s10845-023-02231-z","pdf_url":null,"source":{"id":"https://openalex.org/S4306401271","display_name":"RePEc: Research Papers in Economics","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I77793887","host_organization_name":"Federal Reserve Bank of St. Louis","host_organization_lineage":["https://openalex.org/I77793887"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Industry, innovation and infrastructure","score":0.5299999713897705,"id":"https://metadata.un.org/sdg/9"}],"awards":[{"id":"https://openalex.org/G5156376780","display_name":null,"funder_award_id":"No. 2022KY0197","funder_id":"https://openalex.org/F4320327602","funder_display_name":"Middle-aged and Young Teachers' Basic Ability Promotion Project of Guangxi"},{"id":"https://openalex.org/G6234045746","display_name":"\u9762\u5411TSV\u7684\u4e09\u7ef4\u96c6\u6210\u7535\u8def\u6545\u969c\u975e\u63a5\u89e6\u6d4b\u8bd5\u65b9\u6cd5\u7814\u7a76","funder_award_id":"61661013","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320327602","display_name":"Middle-aged and Young Teachers' Basic Ability Promotion Project of Guangxi","ror":null}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":34,"referenced_works":["https://openalex.org/W1985204311","https://openalex.org/W2020286945","https://openalex.org/W2104441235","https://openalex.org/W2109255472","https://openalex.org/W2120196566","https://openalex.org/W2286515324","https://openalex.org/W2790607928","https://openalex.org/W2792944472","https://openalex.org/W2798589477","https://openalex.org/W2805484002","https://openalex.org/W2920311927","https://openalex.org/W2962835968","https://openalex.org/W2962858109","https://openalex.org/W2970409000","https://openalex.org/W3005244013","https://openalex.org/W3017220377","https://openalex.org/W3021503798","https://openalex.org/W3024903722","https://openalex.org/W3082906739","https://openalex.org/W3100487172","https://openalex.org/W3139531532","https://openalex.org/W3169045948","https://openalex.org/W3197290064","https://openalex.org/W3201304935","https://openalex.org/W3207056758","https://openalex.org/W4214914131","https://openalex.org/W4231856837","https://openalex.org/W4280534250","https://openalex.org/W4283387112","https://openalex.org/W4286687376","https://openalex.org/W4292722430","https://openalex.org/W4293868792","https://openalex.org/W4309845474","https://openalex.org/W4378648357"],"related_works":["https://openalex.org/W2022849497","https://openalex.org/W2810679507","https://openalex.org/W2407190427","https://openalex.org/W3081299480","https://openalex.org/W2919210741","https://openalex.org/W2907584218","https://openalex.org/W3002446410","https://openalex.org/W4390224712","https://openalex.org/W4322096758","https://openalex.org/W2992897358"],"abstract_inverted_index":null,"counts_by_year":[{"year":2026,"cited_by_count":10},{"year":2025,"cited_by_count":20},{"year":2024,"cited_by_count":6}],"updated_date":"2026-06-28T08:01:55.173337","created_date":"2025-10-10T00:00:00"}