{"id":"https://openalex.org/W1988273639","doi":"https://doi.org/10.1007/s10836-009-5122-6","title":"Study of an Electrical Setup for Capacitive MEMS Accelerometers Test and Calibration","display_name":"Study of an Electrical Setup for Capacitive MEMS Accelerometers Test and Calibration","publication_year":2009,"publication_date":"2009-12-21","ids":{"openalex":"https://openalex.org/W1988273639","doi":"https://doi.org/10.1007/s10836-009-5122-6","mag":"1988273639"},"language":"en","primary_location":{"id":"doi:10.1007/s10836-009-5122-6","is_oa":false,"landing_page_url":"https://doi.org/10.1007/s10836-009-5122-6","pdf_url":null,"source":{"id":"https://openalex.org/S200807567","display_name":"Journal of Electronic Testing","issn_l":"0923-8174","issn":["0923-8174","1573-0727"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Electronic Testing","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5012205140","display_name":"Norbert Dumas","orcid":null},"institutions":[{"id":"https://openalex.org/I19894307","display_name":"Universit\u00e9 de Montpellier","ror":"https://ror.org/051escj72","country_code":"FR","type":"education","lineage":["https://openalex.org/I19894307"]},{"id":"https://openalex.org/I4210101743","display_name":"Laboratoire d'Informatique, de Robotique et de Micro\u00e9lectronique de Montpellier","ror":"https://ror.org/013yean28","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1326498283","https://openalex.org/I151295451","https://openalex.org/I19894307","https://openalex.org/I4210101743","https://openalex.org/I4210159245","https://openalex.org/I4412460525"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"funder","lineage":["https://openalex.org/I1294671590"]}],"countries":["FR"],"is_corresponding":true,"raw_author_name":"Norbert Dumas","raw_affiliation_strings":["LIRMM, University of Montpellier / CNRS, Montpellier, France","LIRMM \u2013 University of Montpellier, CNRS, Montpellier, France"],"affiliations":[{"raw_affiliation_string":"LIRMM, University of Montpellier / CNRS, Montpellier, France","institution_ids":["https://openalex.org/I4210101743","https://openalex.org/I19894307","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"LIRMM \u2013 University of Montpellier, CNRS, Montpellier, France","institution_ids":["https://openalex.org/I4210101743","https://openalex.org/I19894307","https://openalex.org/I1294671590"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040698879","display_name":"F. Aza\u0131\u0308s","orcid":"https://orcid.org/0000-0001-6458-5018"},"institutions":[{"id":"https://openalex.org/I19894307","display_name":"Universit\u00e9 de Montpellier","ror":"https://ror.org/051escj72","country_code":"FR","type":"education","lineage":["https://openalex.org/I19894307"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"funder","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210101743","display_name":"Laboratoire d'Informatique, de Robotique et de Micro\u00e9lectronique de Montpellier","ror":"https://ror.org/013yean28","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1326498283","https://openalex.org/I151295451","https://openalex.org/I19894307","https://openalex.org/I4210101743","https://openalex.org/I4210159245","https://openalex.org/I4412460525"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Florence Aza\u00efs","raw_affiliation_strings":["LIRMM, University of Montpellier / CNRS, Montpellier, France","LIRMM \u2013 University of Montpellier, CNRS, Montpellier, France"],"affiliations":[{"raw_affiliation_string":"LIRMM, University of Montpellier / CNRS, Montpellier, France","institution_ids":["https://openalex.org/I4210101743","https://openalex.org/I19894307","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"LIRMM \u2013 University of Montpellier, CNRS, Montpellier, France","institution_ids":["https://openalex.org/I4210101743","https://openalex.org/I19894307","https://openalex.org/I1294671590"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5003132918","display_name":"F. Mailly","orcid":"https://orcid.org/0000-0002-4030-0505"},"institutions":[{"id":"https://openalex.org/I19894307","display_name":"Universit\u00e9 de Montpellier","ror":"https://ror.org/051escj72","country_code":"FR","type":"education","lineage":["https://openalex.org/I19894307"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"funder","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210101743","display_name":"Laboratoire d'Informatique, de Robotique et de Micro\u00e9lectronique de Montpellier","ror":"https://ror.org/013yean28","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1326498283","https://openalex.org/I151295451","https://openalex.org/I19894307","https://openalex.org/I4210101743","https://openalex.org/I4210159245","https://openalex.org/I4412460525"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Fr\u00e9d\u00e9rick Mailly","raw_affiliation_strings":["LIRMM, University of Montpellier / CNRS, Montpellier, France","LIRMM \u2013 University of Montpellier, CNRS, Montpellier, France"],"affiliations":[{"raw_affiliation_string":"LIRMM, University of Montpellier / CNRS, Montpellier, France","institution_ids":["https://openalex.org/I4210101743","https://openalex.org/I19894307","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"LIRMM \u2013 University of Montpellier, CNRS, Montpellier, France","institution_ids":["https://openalex.org/I4210101743","https://openalex.org/I19894307","https://openalex.org/I1294671590"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5054580128","display_name":"Pascal Nouet","orcid":"https://orcid.org/0000-0003-2137-2623"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"funder","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I19894307","display_name":"Universit\u00e9 de Montpellier","ror":"https://ror.org/051escj72","country_code":"FR","type":"education","lineage":["https://openalex.org/I19894307"]},{"id":"https://openalex.org/I4210101743","display_name":"Laboratoire d'Informatique, de Robotique et de Micro\u00e9lectronique de Montpellier","ror":"https://ror.org/013yean28","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1326498283","https://openalex.org/I151295451","https://openalex.org/I19894307","https://openalex.org/I4210101743","https://openalex.org/I4210159245","https://openalex.org/I4412460525"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Pascal Nouet","raw_affiliation_strings":["LIRMM, University of Montpellier / CNRS, Montpellier, France","LIRMM \u2013 University of Montpellier, CNRS, Montpellier, France"],"affiliations":[{"raw_affiliation_string":"LIRMM, University of Montpellier / CNRS, Montpellier, France","institution_ids":["https://openalex.org/I4210101743","https://openalex.org/I19894307","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"LIRMM \u2013 University of Montpellier, CNRS, Montpellier, France","institution_ids":["https://openalex.org/I4210101743","https://openalex.org/I19894307","https://openalex.org/I1294671590"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5012205140"],"corresponding_institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I19894307","https://openalex.org/I4210101743"],"apc_list":{"value":2390,"currency":"EUR","value_usd":2990},"apc_paid":null,"fwci":1.2159,"has_fulltext":false,"cited_by_count":10,"citation_normalized_percentile":{"value":0.79784812,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"26","issue":"1","first_page":"111","last_page":"125"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.8906216621398926},{"id":"https://openalex.org/keywords/calibration","display_name":"Calibration","score":0.7839387059211731},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.7516910433769226},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7407064437866211},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.7309094667434692},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.4687744677066803},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3865334391593933},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.35529768466949463},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.232499361038208},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.17333686351776123},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.11359351873397827},{"id":"https://openalex.org/keywords/statistics","display_name":"Statistics","score":0.06893950700759888},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.0660700798034668}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.8906216621398926},{"id":"https://openalex.org/C165838908","wikidata":"https://www.wikidata.org/wiki/Q736777","display_name":"Calibration","level":2,"score":0.7839387059211731},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.7516910433769226},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7407064437866211},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.7309094667434692},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.4687744677066803},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3865334391593933},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.35529768466949463},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.232499361038208},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.17333686351776123},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.11359351873397827},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.06893950700759888},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.0660700798034668},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1007/s10836-009-5122-6","is_oa":false,"landing_page_url":"https://doi.org/10.1007/s10836-009-5122-6","pdf_url":null,"source":{"id":"https://openalex.org/S200807567","display_name":"Journal of Electronic Testing","issn_l":"0923-8174","issn":["0923-8174","1573-0727"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Electronic Testing","raw_type":"journal-article"},{"id":"pmh:oai:HAL:lirmm-00432757v1","is_oa":false,"landing_page_url":"https://hal-lirmm.ccsd.cnrs.fr/lirmm-00432757","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL (Le Centre pour la Communication Scientifique Directe)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1294671590","host_organization_name":"Centre National de la Recherche Scientifique","host_organization_lineage":["https://openalex.org/I1294671590"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Journal of Electronic Testing: : Theory and Applications, 2010, 26-1, pp.111-125. ⟨10.1007/s10836-009-5122-6⟩","raw_type":"Journal articles"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W1518534996","https://openalex.org/W1576501108","https://openalex.org/W2008717550","https://openalex.org/W2035756086","https://openalex.org/W2036293085","https://openalex.org/W2096814969","https://openalex.org/W2102378583","https://openalex.org/W2117487644","https://openalex.org/W2136702931","https://openalex.org/W2149207200","https://openalex.org/W2160625879","https://openalex.org/W2276575750","https://openalex.org/W6694990122"],"related_works":["https://openalex.org/W3161496874","https://openalex.org/W2160325238","https://openalex.org/W2902633157","https://openalex.org/W2026330382","https://openalex.org/W2915680872","https://openalex.org/W2502505565","https://openalex.org/W756886103","https://openalex.org/W2554858923","https://openalex.org/W2356216756","https://openalex.org/W2359831757"],"abstract_inverted_index":null,"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2012,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}