{"id":"https://openalex.org/W2292451936","doi":"https://doi.org/10.1007/s00502-015-0372-8","title":"Parametererregte mikroelektromechanische Systeme (MEMS)","display_name":"Parametererregte mikroelektromechanische Systeme (MEMS)","publication_year":2015,"publication_date":"2015-11-05","ids":{"openalex":"https://openalex.org/W2292451936","doi":"https://doi.org/10.1007/s00502-015-0372-8","mag":"2292451936"},"language":"de","primary_location":{"id":"doi:10.1007/s00502-015-0372-8","is_oa":false,"landing_page_url":"https://doi.org/10.1007/s00502-015-0372-8","pdf_url":null,"source":{"id":"https://openalex.org/S36874608","display_name":"e+i Elektrotechnik und Informationstechnik","issn_l":"0932-383X","issn":["0932-383X","1613-7620"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"e & i Elektrotechnik und Informationstechnik","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5026615489","display_name":"Till Jochen Kniffka","orcid":null},"institutions":[{"id":"https://openalex.org/I145847075","display_name":"TU Wien","ror":"https://ror.org/04d836q62","country_code":"AT","type":"education","lineage":["https://openalex.org/I145847075"]}],"countries":["AT"],"is_corresponding":true,"raw_author_name":"Till Jochen Kniffka","raw_affiliation_strings":["Institut f\u00fcr Mechanik und Mechatronik, Technische Universit\u00e4t Wien, Getreidemarkt 9, 1060, Wien, \u00d6sterreich"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut f\u00fcr Mechanik und Mechatronik, Technische Universit\u00e4t Wien, Getreidemarkt 9, 1060, Wien, \u00d6sterreich","institution_ids":["https://openalex.org/I145847075"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5113874876","display_name":"Horst Ecker","orcid":null},"institutions":[{"id":"https://openalex.org/I145847075","display_name":"TU Wien","ror":"https://ror.org/04d836q62","country_code":"AT","type":"education","lineage":["https://openalex.org/I145847075"]}],"countries":["AT"],"is_corresponding":false,"raw_author_name":"Horst Ecker","raw_affiliation_strings":["Institut f\u00fcr Mechanik und Mechatronik, Technische Universit\u00e4t Wien, Getreidemarkt 9, 1060, Wien, \u00d6sterreich"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut f\u00fcr Mechanik und Mechatronik, Technische Universit\u00e4t Wien, Getreidemarkt 9, 1060, Wien, \u00d6sterreich","institution_ids":["https://openalex.org/I145847075"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5026615489"],"corresponding_institution_ids":["https://openalex.org/I145847075"],"apc_list":{"value":3090,"currency":"USD","value_usd":3090},"apc_paid":null,"fwci":0.1604,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.60980689,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"132","issue":"8","first_page":"456","last_page":"461"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9979000091552734,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10188","display_name":"Advanced machining processes and optimization","score":0.9973000288009644,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.34466269612312317}],"concepts":[{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.34466269612312317}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1007/s00502-015-0372-8","is_oa":false,"landing_page_url":"https://doi.org/10.1007/s00502-015-0372-8","pdf_url":null,"source":{"id":"https://openalex.org/S36874608","display_name":"e+i Elektrotechnik und Informationstechnik","issn_l":"0932-383X","issn":["0932-383X","1613-7620"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"e & i Elektrotechnik und Informationstechnik","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.6299999952316284,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W1997190669","https://openalex.org/W2011329129","https://openalex.org/W2014765202","https://openalex.org/W2027333056","https://openalex.org/W2047508353","https://openalex.org/W2054910566","https://openalex.org/W2107497609","https://openalex.org/W2113756216","https://openalex.org/W2146988025","https://openalex.org/W2152986152","https://openalex.org/W3098043213","https://openalex.org/W4241474002","https://openalex.org/W4285719527"],"related_works":["https://openalex.org/W2935759653","https://openalex.org/W3105167352","https://openalex.org/W54078636","https://openalex.org/W2954470139","https://openalex.org/W1501425562","https://openalex.org/W2902782467","https://openalex.org/W3084825885","https://openalex.org/W2298861036","https://openalex.org/W3148032049","https://openalex.org/W2271181815"],"abstract_inverted_index":null,"counts_by_year":[{"year":2020,"cited_by_count":1},{"year":2016,"cited_by_count":1}],"updated_date":"2026-07-23T08:03:31.855105","created_date":"2025-10-10T00:00:00"}