{"id":"https://openalex.org/W2066589851","doi":"https://doi.org/10.1007/bf01212360","title":"The P300: A system for automatic patterned wafer inspection","display_name":"The P300: A system for automatic patterned wafer inspection","publication_year":1988,"publication_date":"1988-12-01","ids":{"openalex":"https://openalex.org/W2066589851","doi":"https://doi.org/10.1007/bf01212360","mag":"2066589851"},"language":"en","primary_location":{"id":"doi:10.1007/bf01212360","is_oa":false,"landing_page_url":"https://doi.org/10.1007/bf01212360","pdf_url":null,"source":{"id":"https://openalex.org/S27728525","display_name":"Machine Vision and Applications","issn_l":"0932-8092","issn":["0932-8092","1432-1769"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Machine Vision and Applications","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5031458509","display_name":"Byron Dom","orcid":null},"institutions":[{"id":"https://openalex.org/I4210085935","display_name":"IBM Research - Almaden","ror":"https://ror.org/005w8dd04","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210085935","https://openalex.org/I4210114115"]},{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Byron E. Dom","raw_affiliation_strings":["IBM Almaden Research Center, 650 Harry Rd., 95120-6099, San Jose, CA, USA","IBM San Jose, CA"],"affiliations":[{"raw_affiliation_string":"IBM Almaden Research Center, 650 Harry Rd., 95120-6099, San Jose, CA, USA","institution_ids":["https://openalex.org/I4210085935"]},{"raw_affiliation_string":"IBM San Jose, CA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058074817","display_name":"Virginia H. Brecher","orcid":null},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Virginia H. Brecher","raw_affiliation_strings":["IBM T.J. Watson Research Center, 10598, Yorktown Heights, NY, USA","IBM -- T. J. Watson Research Center, Yorktown Heights, NY"],"affiliations":[{"raw_affiliation_string":"IBM T.J. Watson Research Center, 10598, Yorktown Heights, NY, USA","institution_ids":["https://openalex.org/I1341412227"]},{"raw_affiliation_string":"IBM -- T. J. Watson Research Center, Yorktown Heights, NY","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5030075222","display_name":"Raymond Bonner","orcid":null},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Raymond Bonner","raw_affiliation_strings":["IBM T.J. Watson Research Center, 10598, Yorktown Heights, NY, USA","IBM -- T. J. Watson Research Center, Yorktown Heights, NY"],"affiliations":[{"raw_affiliation_string":"IBM T.J. Watson Research Center, 10598, Yorktown Heights, NY, USA","institution_ids":["https://openalex.org/I1341412227"]},{"raw_affiliation_string":"IBM -- T. J. Watson Research Center, Yorktown Heights, NY","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058061863","display_name":"J. S. Batchelder","orcid":null},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"John S. Batchelder","raw_affiliation_strings":["IBM T.J. Watson Research Center, 10598, Yorktown Heights, NY, USA","IBM T. J. Waton Research Center, Yorktown Heights, NY#TAB#"],"affiliations":[{"raw_affiliation_string":"IBM T.J. Watson Research Center, 10598, Yorktown Heights, NY, USA","institution_ids":["https://openalex.org/I1341412227"]},{"raw_affiliation_string":"IBM T. J. Waton Research Center, Yorktown Heights, NY#TAB#","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5018525372","display_name":"Robert S. Jaffe","orcid":null},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Robert S. Jaffe","raw_affiliation_strings":["IBM T.J. Watson Research Center, 10598, Yorktown Heights, NY, USA","IBM -- T. J. Watson Research Center, Yorktown Heights, NY"],"affiliations":[{"raw_affiliation_string":"IBM T.J. Watson Research Center, 10598, Yorktown Heights, NY, USA","institution_ids":["https://openalex.org/I1341412227"]},{"raw_affiliation_string":"IBM -- T. J. Watson Research Center, Yorktown Heights, NY","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5031458509"],"corresponding_institution_ids":["https://openalex.org/I1341412227","https://openalex.org/I4210085935"],"apc_list":{"value":2490,"currency":"EUR","value_usd":3090},"apc_paid":null,"fwci":8.9259,"has_fulltext":false,"cited_by_count":39,"citation_normalized_percentile":{"value":0.97513037,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":"1","issue":"4","first_page":"205","last_page":"221"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12549","display_name":"Image and Object Detection Techniques","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12923","display_name":"Digital Image Processing Techniques","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.7023022174835205},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.6716605424880981},{"id":"https://openalex.org/keywords/false-alarm","display_name":"False alarm","score":0.6632368564605713},{"id":"https://openalex.org/keywords/throughput","display_name":"Throughput","score":0.6275106072425842},{"id":"https://openalex.org/keywords/automated-optical-inspection","display_name":"Automated optical inspection","score":0.6266471147537231},{"id":"https://openalex.org/keywords/automated-x-ray-inspection","display_name":"Automated X-ray inspection","score":0.6068291068077087},{"id":"https://openalex.org/keywords/visual-inspection","display_name":"Visual inspection","score":0.5371464490890503},{"id":"https://openalex.org/keywords/frame-rate","display_name":"Frame rate","score":0.5352773070335388},{"id":"https://openalex.org/keywords/inspection-time","display_name":"Inspection time","score":0.494387149810791},{"id":"https://openalex.org/keywords/machine-vision","display_name":"Machine vision","score":0.49417880177497864},{"id":"https://openalex.org/keywords/constant-false-alarm-rate","display_name":"Constant false alarm rate","score":0.48409879207611084},{"id":"https://openalex.org/keywords/statistical-power","display_name":"Statistical power","score":0.46648481488227844},{"id":"https://openalex.org/keywords/reduction","display_name":"Reduction (mathematics)","score":0.44444939494132996},{"id":"https://openalex.org/keywords/frame","display_name":"Frame (networking)","score":0.438017874956131},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.43383482098579407},{"id":"https://openalex.org/keywords/computer-hardware","display_name":"Computer hardware","score":0.3681270480155945},{"id":"https://openalex.org/keywords/computer-vision","display_name":"Computer vision","score":0.3547484874725342},{"id":"https://openalex.org/keywords/image-processing","display_name":"Image processing","score":0.35284656286239624},{"id":"https://openalex.org/keywords/real-time-computing","display_name":"Real-time computing","score":0.33947062492370605},{"id":"https://openalex.org/keywords/image","display_name":"Image (mathematics)","score":0.2544688284397125},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.17947956919670105},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.09950709342956543},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.08651405572891235}],"concepts":[{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.7023022174835205},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6716605424880981},{"id":"https://openalex.org/C2776836416","wikidata":"https://www.wikidata.org/wiki/Q1364844","display_name":"False alarm","level":2,"score":0.6632368564605713},{"id":"https://openalex.org/C157764524","wikidata":"https://www.wikidata.org/wiki/Q1383412","display_name":"Throughput","level":3,"score":0.6275106072425842},{"id":"https://openalex.org/C164830781","wikidata":"https://www.wikidata.org/wiki/Q787330","display_name":"Automated optical inspection","level":2,"score":0.6266471147537231},{"id":"https://openalex.org/C146920229","wikidata":"https://www.wikidata.org/wiki/Q2278114","display_name":"Automated X-ray inspection","level":4,"score":0.6068291068077087},{"id":"https://openalex.org/C168820333","wikidata":"https://www.wikidata.org/wiki/Q448889","display_name":"Visual inspection","level":2,"score":0.5371464490890503},{"id":"https://openalex.org/C3261483","wikidata":"https://www.wikidata.org/wiki/Q119565","display_name":"Frame rate","level":2,"score":0.5352773070335388},{"id":"https://openalex.org/C2780407802","wikidata":"https://www.wikidata.org/wiki/Q6146499","display_name":"Inspection time","level":2,"score":0.494387149810791},{"id":"https://openalex.org/C5339829","wikidata":"https://www.wikidata.org/wiki/Q1425977","display_name":"Machine vision","level":2,"score":0.49417880177497864},{"id":"https://openalex.org/C77052588","wikidata":"https://www.wikidata.org/wiki/Q644307","display_name":"Constant false alarm rate","level":2,"score":0.48409879207611084},{"id":"https://openalex.org/C96608239","wikidata":"https://www.wikidata.org/wiki/Q1199823","display_name":"Statistical power","level":2,"score":0.46648481488227844},{"id":"https://openalex.org/C111335779","wikidata":"https://www.wikidata.org/wiki/Q3454686","display_name":"Reduction (mathematics)","level":2,"score":0.44444939494132996},{"id":"https://openalex.org/C126042441","wikidata":"https://www.wikidata.org/wiki/Q1324888","display_name":"Frame (networking)","level":2,"score":0.438017874956131},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.43383482098579407},{"id":"https://openalex.org/C9390403","wikidata":"https://www.wikidata.org/wiki/Q3966","display_name":"Computer hardware","level":1,"score":0.3681270480155945},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.3547484874725342},{"id":"https://openalex.org/C9417928","wikidata":"https://www.wikidata.org/wiki/Q1070689","display_name":"Image processing","level":3,"score":0.35284656286239624},{"id":"https://openalex.org/C79403827","wikidata":"https://www.wikidata.org/wiki/Q3988","display_name":"Real-time computing","level":1,"score":0.33947062492370605},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.2544688284397125},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.17947956919670105},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.09950709342956543},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.08651405572891235},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C138496976","wikidata":"https://www.wikidata.org/wiki/Q175002","display_name":"Developmental psychology","level":1,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C555944384","wikidata":"https://www.wikidata.org/wiki/Q249","display_name":"Wireless","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1007/bf01212360","is_oa":false,"landing_page_url":"https://doi.org/10.1007/bf01212360","pdf_url":null,"source":{"id":"https://openalex.org/S27728525","display_name":"Machine Vision and Applications","issn_l":"0932-8092","issn":["0932-8092","1432-1769"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Machine Vision and Applications","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":17,"referenced_works":["https://openalex.org/W1493424511","https://openalex.org/W1965840180","https://openalex.org/W1966002912","https://openalex.org/W1970058718","https://openalex.org/W1973937303","https://openalex.org/W1992163384","https://openalex.org/W1994560535","https://openalex.org/W2025438586","https://openalex.org/W2070870894","https://openalex.org/W2099897363","https://openalex.org/W2118961867","https://openalex.org/W2172064169","https://openalex.org/W2190238968","https://openalex.org/W2257701574","https://openalex.org/W2461576494","https://openalex.org/W4233175504","https://openalex.org/W4285719527"],"related_works":["https://openalex.org/W1979172994","https://openalex.org/W1560398276","https://openalex.org/W571879","https://openalex.org/W2120694107","https://openalex.org/W2474903254","https://openalex.org/W2043284758","https://openalex.org/W2164520892","https://openalex.org/W1643470837","https://openalex.org/W2985043303","https://openalex.org/W2008203658"],"abstract_inverted_index":null,"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":3},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}