{"id":"https://openalex.org/W1968427760","doi":"https://doi.org/10.1007/bf01211662","title":"Patterned wafer inspection by high resolution spectral estimation techniques","display_name":"Patterned wafer inspection by high resolution spectral estimation techniques","publication_year":1994,"publication_date":"1994-09-01","ids":{"openalex":"https://openalex.org/W1968427760","doi":"https://doi.org/10.1007/bf01211662","mag":"1968427760"},"language":"en","primary_location":{"id":"doi:10.1007/bf01211662","is_oa":false,"landing_page_url":"https://doi.org/10.1007/bf01211662","pdf_url":null,"source":{"id":"https://openalex.org/S27728525","display_name":"Machine Vision and Applications","issn_l":"0932-8092","issn":["0932-8092","1432-1769"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Machine Vision and Applications","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5016732612","display_name":"Babak Hossein Khalaj","orcid":"https://orcid.org/0000-0002-9289-2338"},"institutions":[{"id":"https://openalex.org/I97018004","display_name":"Stanford University","ror":"https://ror.org/00f54p054","country_code":"US","type":"education","lineage":["https://openalex.org/I97018004"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Babak H. Khalaj","raw_affiliation_strings":["Information Systems Laboratory, Department of Electrical Engineering, Stanford University, 94305, Stanford, CA, USA","Information Systems Laboratory, Department of Electrical Engineering, Stanford University, Stanford, USA"],"affiliations":[{"raw_affiliation_string":"Information Systems Laboratory, Department of Electrical Engineering, Stanford University, 94305, Stanford, CA, USA","institution_ids":["https://openalex.org/I97018004"]},{"raw_affiliation_string":"Information Systems Laboratory, Department of Electrical Engineering, Stanford University, Stanford, USA","institution_ids":["https://openalex.org/I97018004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5105470345","display_name":"Hamid K. Aghajan","orcid":null},"institutions":[{"id":"https://openalex.org/I97018004","display_name":"Stanford University","ror":"https://ror.org/00f54p054","country_code":"US","type":"education","lineage":["https://openalex.org/I97018004"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Hamid K. Aghajan","raw_affiliation_strings":["Information Systems Laboratory, Department of Electrical Engineering, Stanford University, 94305, Stanford, CA, USA","Information Systems Laboratory, Department of Electrical Engineering, Stanford University, Stanford, USA"],"affiliations":[{"raw_affiliation_string":"Information Systems Laboratory, Department of Electrical Engineering, Stanford University, 94305, Stanford, CA, USA","institution_ids":["https://openalex.org/I97018004"]},{"raw_affiliation_string":"Information Systems Laboratory, Department of Electrical Engineering, Stanford University, Stanford, USA","institution_ids":["https://openalex.org/I97018004"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5014088470","display_name":"T. Kailath","orcid":null},"institutions":[{"id":"https://openalex.org/I97018004","display_name":"Stanford University","ror":"https://ror.org/00f54p054","country_code":"US","type":"education","lineage":["https://openalex.org/I97018004"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Thomas Kailath","raw_affiliation_strings":["Information Systems Laboratory, Department of Electrical Engineering, Stanford University, 94305, Stanford, CA, USA","Information Systems Laboratory, Department of Electrical Engineering, Stanford University, Stanford, USA"],"affiliations":[{"raw_affiliation_string":"Information Systems Laboratory, Department of Electrical Engineering, Stanford University, 94305, Stanford, CA, USA","institution_ids":["https://openalex.org/I97018004"]},{"raw_affiliation_string":"Information Systems Laboratory, Department of Electrical Engineering, Stanford University, Stanford, USA","institution_ids":["https://openalex.org/I97018004"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5016732612"],"corresponding_institution_ids":["https://openalex.org/I97018004"],"apc_list":{"value":2490,"currency":"EUR","value_usd":3090},"apc_paid":null,"fwci":1.0699,"has_fulltext":false,"cited_by_count":40,"citation_normalized_percentile":{"value":0.75968629,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"7","issue":"3","first_page":"178","last_page":"185"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9980999827384949,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10688","display_name":"Image and Signal Denoising Methods","score":0.9958999752998352,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6821090579032898},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.6028913855552673},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.60219407081604},{"id":"https://openalex.org/keywords/computer-vision","display_name":"Computer vision","score":0.5926868319511414},{"id":"https://openalex.org/keywords/signal","display_name":"SIGNAL (programming language)","score":0.5134204626083374},{"id":"https://openalex.org/keywords/image","display_name":"Image (mathematics)","score":0.5074149966239929},{"id":"https://openalex.org/keywords/a-priori-and-a-posteriori","display_name":"A priori and a posteriori","score":0.49639493227005005},{"id":"https://openalex.org/keywords/image-processing","display_name":"Image processing","score":0.43608468770980835},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.16307023167610168}],"concepts":[{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6821090579032898},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.6028913855552673},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.60219407081604},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.5926868319511414},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.5134204626083374},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.5074149966239929},{"id":"https://openalex.org/C75553542","wikidata":"https://www.wikidata.org/wiki/Q178161","display_name":"A priori and a posteriori","level":2,"score":0.49639493227005005},{"id":"https://openalex.org/C9417928","wikidata":"https://www.wikidata.org/wiki/Q1070689","display_name":"Image processing","level":3,"score":0.43608468770980835},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.16307023167610168},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.0},{"id":"https://openalex.org/C111472728","wikidata":"https://www.wikidata.org/wiki/Q9471","display_name":"Epistemology","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1007/bf01211662","is_oa":false,"landing_page_url":"https://doi.org/10.1007/bf01211662","pdf_url":null,"source":{"id":"https://openalex.org/S27728525","display_name":"Machine Vision and Applications","issn_l":"0932-8092","issn":["0932-8092","1432-1769"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Machine Vision and Applications","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W25773178","https://openalex.org/W1496923911","https://openalex.org/W1521023302","https://openalex.org/W1965840180","https://openalex.org/W2053460226","https://openalex.org/W2061317374","https://openalex.org/W2066589851","https://openalex.org/W2070870894","https://openalex.org/W2128131274","https://openalex.org/W2155169345","https://openalex.org/W2535538881","https://openalex.org/W2991769464","https://openalex.org/W3042083857"],"related_works":["https://openalex.org/W1998662473","https://openalex.org/W2075391483","https://openalex.org/W4388311650","https://openalex.org/W1974056099","https://openalex.org/W2129617696","https://openalex.org/W2038820605","https://openalex.org/W4245343541","https://openalex.org/W2386077341","https://openalex.org/W2742348144","https://openalex.org/W563589758"],"abstract_inverted_index":null,"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":2},{"year":2020,"cited_by_count":5},{"year":2018,"cited_by_count":1},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":2},{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":4}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}