{"id":"https://openalex.org/W1513457911","doi":"https://doi.org/10.1007/978-3-642-11598-1_12","title":"Utilisation of FIB/SEM Technology in the Assembly of an Innovative Micro-CMM Probe","display_name":"Utilisation of FIB/SEM Technology in the Assembly of an Innovative Micro-CMM Probe","publication_year":2010,"publication_date":"2010-01-01","ids":{"openalex":"https://openalex.org/W1513457911","doi":"https://doi.org/10.1007/978-3-642-11598-1_12","mag":"1513457911"},"language":"en","primary_location":{"id":"doi:10.1007/978-3-642-11598-1_12","is_oa":true,"landing_page_url":"https://doi.org/10.1007/978-3-642-11598-1_12","pdf_url":"https://link.springer.com/content/pdf/10.1007/978-3-642-11598-1_12.pdf","source":{"id":"https://openalex.org/S4210185096","display_name":"IFIP advances in information and communication technology","issn_l":"1868-422X","issn":["1868-422X","1868-4238"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"book series"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IFIP Advances in Information and Communication Technology","raw_type":"book-chapter"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"bronze","oa_url":"https://link.springer.com/content/pdf/10.1007/978-3-642-11598-1_12.pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5078940493","display_name":"Daniel Smale","orcid":null},"institutions":[{"id":"https://openalex.org/I142263535","display_name":"University of Nottingham","ror":"https://ror.org/01ee9ar58","country_code":"GB","type":"education","lineage":["https://openalex.org/I142263535"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Daniel Smale","raw_affiliation_strings":["Precision Manufacturing Centre, University of Nottingham, UK","University of Nottingham"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Precision Manufacturing Centre, University of Nottingham, UK","institution_ids":["https://openalex.org/I142263535"]},{"raw_affiliation_string":"University of Nottingham","institution_ids":["https://openalex.org/I142263535"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054056243","display_name":"Steve Haley","orcid":null},"institutions":[{"id":"https://openalex.org/I142263535","display_name":"University of Nottingham","ror":"https://ror.org/01ee9ar58","country_code":"GB","type":"education","lineage":["https://openalex.org/I142263535"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Steve Haley","raw_affiliation_strings":["Precision Manufacturing Centre, University of Nottingham, UK","University of Nottingham"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Precision Manufacturing Centre, University of Nottingham, UK","institution_ids":["https://openalex.org/I142263535"]},{"raw_affiliation_string":"University of Nottingham","institution_ids":["https://openalex.org/I142263535"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016431575","display_name":"Joel Segal","orcid":"https://orcid.org/0000-0002-7212-9968"},"institutions":[{"id":"https://openalex.org/I142263535","display_name":"University of Nottingham","ror":"https://ror.org/01ee9ar58","country_code":"GB","type":"education","lineage":["https://openalex.org/I142263535"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Joel Segal","raw_affiliation_strings":["Precision Manufacturing Centre, University of Nottingham, UK","University of Nottingham"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Precision Manufacturing Centre, University of Nottingham, UK","institution_ids":["https://openalex.org/I142263535"]},{"raw_affiliation_string":"University of Nottingham","institution_ids":["https://openalex.org/I142263535"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036251297","display_name":"Ronaldo Ronaldo","orcid":null},"institutions":[{"id":"https://openalex.org/I142263535","display_name":"University of Nottingham","ror":"https://ror.org/01ee9ar58","country_code":"GB","type":"education","lineage":["https://openalex.org/I142263535"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Ronaldo Ronaldo","raw_affiliation_strings":["Precision Manufacturing Centre, University of Nottingham, UK","University of Nottingham"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Precision Manufacturing Centre, University of Nottingham, UK","institution_ids":["https://openalex.org/I142263535"]},{"raw_affiliation_string":"University of Nottingham","institution_ids":["https://openalex.org/I142263535"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5048525765","display_name":"Svetan Ratchev","orcid":"https://orcid.org/0000-0001-9955-2806"},"institutions":[{"id":"https://openalex.org/I142263535","display_name":"University of Nottingham","ror":"https://ror.org/01ee9ar58","country_code":"GB","type":"education","lineage":["https://openalex.org/I142263535"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Svetan Ratchev","raw_affiliation_strings":["Precision Manufacturing Centre, University of Nottingham, UK","University of Nottingham"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Precision Manufacturing Centre, University of Nottingham, UK","institution_ids":["https://openalex.org/I142263535"]},{"raw_affiliation_string":"University of Nottingham","institution_ids":["https://openalex.org/I142263535"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5002204160","display_name":"Richard Leach","orcid":"https://orcid.org/0000-0001-5777-067X"},"institutions":[{"id":"https://openalex.org/I134421475","display_name":"National Physical Laboratory","ror":"https://ror.org/015w2mp89","country_code":"GB","type":"facility","lineage":["https://openalex.org/I134421475"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Richard K. Leach","raw_affiliation_strings":["Industry & Innovation Division, National Physical Laboratory, Teddington, UK","NATIONAL PHYSICAL LABORATORY"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Industry & Innovation Division, National Physical Laboratory, Teddington, UK","institution_ids":["https://openalex.org/I134421475"]},{"raw_affiliation_string":"NATIONAL PHYSICAL LABORATORY","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5000902625","display_name":"James D. Claverley","orcid":null},"institutions":[{"id":"https://openalex.org/I134421475","display_name":"National Physical Laboratory","ror":"https://ror.org/015w2mp89","country_code":"GB","type":"facility","lineage":["https://openalex.org/I134421475"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"James D. Claverley","raw_affiliation_strings":["Industry & Innovation Division, National Physical Laboratory, Teddington, UK","NATIONAL PHYSICAL LABORATORY"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Industry & Innovation Division, National Physical Laboratory, Teddington, UK","institution_ids":["https://openalex.org/I134421475"]},{"raw_affiliation_string":"NATIONAL PHYSICAL LABORATORY","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":2.1053,"has_fulltext":true,"cited_by_count":3,"citation_normalized_percentile":{"value":0.83297566,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"105","last_page":"112"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/focused-ion-beam","display_name":"Focused ion beam","score":0.6142634153366089},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5984882116317749},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.5563371777534485},{"id":"https://openalex.org/keywords/scanning-electron-microscope","display_name":"Scanning electron microscope","score":0.49292469024658203},{"id":"https://openalex.org/keywords/tungsten-carbide","display_name":"Tungsten carbide","score":0.4872366487979889},{"id":"https://openalex.org/keywords/nanometrology","display_name":"Nanometrology","score":0.4603225290775299},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.44769468903541565},{"id":"https://openalex.org/keywords/engineering-drawing","display_name":"Engineering drawing","score":0.42589086294174194},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.38872861862182617},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3310726583003998},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.25769829750061035},{"id":"https://openalex.org/keywords/atomic-force-microscopy","display_name":"Atomic force microscopy","score":0.22895470261573792},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.18482768535614014},{"id":"https://openalex.org/keywords/ion","display_name":"Ion","score":0.07787543535232544}],"concepts":[{"id":"https://openalex.org/C161866238","wikidata":"https://www.wikidata.org/wiki/Q258563","display_name":"Focused ion beam","level":3,"score":0.6142634153366089},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5984882116317749},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.5563371777534485},{"id":"https://openalex.org/C26771246","wikidata":"https://www.wikidata.org/wiki/Q321095","display_name":"Scanning electron microscope","level":2,"score":0.49292469024658203},{"id":"https://openalex.org/C2781422231","wikidata":"https://www.wikidata.org/wiki/Q423265","display_name":"Tungsten carbide","level":2,"score":0.4872366487979889},{"id":"https://openalex.org/C148402106","wikidata":"https://www.wikidata.org/wiki/Q1549529","display_name":"Nanometrology","level":3,"score":0.4603225290775299},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.44769468903541565},{"id":"https://openalex.org/C199639397","wikidata":"https://www.wikidata.org/wiki/Q1788588","display_name":"Engineering drawing","level":1,"score":0.42589086294174194},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.38872861862182617},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3310726583003998},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.25769829750061035},{"id":"https://openalex.org/C102951782","wikidata":"https://www.wikidata.org/wiki/Q49295","display_name":"Atomic force microscopy","level":2,"score":0.22895470261573792},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.18482768535614014},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.07787543535232544},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1007/978-3-642-11598-1_12","is_oa":true,"landing_page_url":"https://doi.org/10.1007/978-3-642-11598-1_12","pdf_url":"https://link.springer.com/content/pdf/10.1007/978-3-642-11598-1_12.pdf","source":{"id":"https://openalex.org/S4210185096","display_name":"IFIP advances in information and communication technology","issn_l":"1868-422X","issn":["1868-422X","1868-4238"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"book series"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IFIP Advances in Information and Communication Technology","raw_type":"book-chapter"},{"id":"pmh:oai:HAL:hal-01055695v1","is_oa":true,"landing_page_url":"https://inria.hal.science/hal-01055695","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL (Le Centre pour la Communication Scientifique Directe)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1294671590","host_organization_name":"Centre National de la Recherche Scientifique","host_organization_lineage":["https://openalex.org/I1294671590"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"5th IFIP WG 5.5 International Precision Assembly Seminar (IPAS), Feb 2010, Chamonix, France. pp.105-112, ⟨10.1007/978-3-642-11598-1_12⟩","raw_type":"info:eu-repo/semantics/conferenceObject"}],"best_oa_location":{"id":"doi:10.1007/978-3-642-11598-1_12","is_oa":true,"landing_page_url":"https://doi.org/10.1007/978-3-642-11598-1_12","pdf_url":"https://link.springer.com/content/pdf/10.1007/978-3-642-11598-1_12.pdf","source":{"id":"https://openalex.org/S4210185096","display_name":"IFIP advances in information and communication technology","issn_l":"1868-422X","issn":["1868-422X","1868-4238"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"book series"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IFIP Advances in Information and Communication Technology","raw_type":"book-chapter"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/9","display_name":"Industry, innovation and infrastructure","score":0.5199999809265137}],"awards":[],"funders":[{"id":"https://openalex.org/F4320321658","display_name":"East Midlands Development Agency","ror":"https://ror.org/00qnxjg67"},{"id":"https://openalex.org/F4320334627","display_name":"Engineering and Physical Sciences Research Council","ror":"https://ror.org/0439y7842"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W1513457911.pdf","grobid_xml":"https://content.openalex.org/works/W1513457911.grobid-xml"},"referenced_works_count":8,"referenced_works":["https://openalex.org/W850795301","https://openalex.org/W1972101450","https://openalex.org/W2035776074","https://openalex.org/W2039962724","https://openalex.org/W2060253171","https://openalex.org/W2141278362","https://openalex.org/W2466303876","https://openalex.org/W2944027024"],"related_works":["https://openalex.org/W2027406803","https://openalex.org/W4248081943","https://openalex.org/W1598734850","https://openalex.org/W2382030804","https://openalex.org/W2093394027","https://openalex.org/W2068295160","https://openalex.org/W2104674172","https://openalex.org/W2415142414","https://openalex.org/W2789763259","https://openalex.org/W3046535600"],"abstract_inverted_index":null,"counts_by_year":[{"year":2013,"cited_by_count":2}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}