{"id":"https://openalex.org/W4251090426","doi":"https://doi.org/10.1007/978-3-540-79567-4_59","title":"Wet Etching","display_name":"Wet Etching","publication_year":2012,"publication_date":"2012-01-01","ids":{"openalex":"https://openalex.org/W4251090426","doi":"https://doi.org/10.1007/978-3-540-79567-4_59"},"language":"en","primary_location":{"id":"doi:10.1007/978-3-540-79567-4_59","is_oa":false,"landing_page_url":"https://doi.org/10.1007/978-3-540-79567-4_59","pdf_url":null,"source":{"id":"https://openalex.org/S4306511887","display_name":"Handbook of Visual Display Technology","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Handbook of Visual Display Technology","raw_type":"book-chapter"},"type":"book-chapter","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5059585842","display_name":"Hua-Chi Cheng","orcid":null},"institutions":[{"id":"https://openalex.org/I4210148468","display_name":"Industrial Technology Research Institute","ror":"https://ror.org/05szzwt63","country_code":"TW","type":"nonprofit","lineage":["https://openalex.org/I4210148468"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Hua-Chi Cheng","raw_affiliation_strings":["Display Technology Center, Industrial Technology Research Institute (ITRI), Chung Hsing Rd, Chutung Hsinchu, Taiwan, 310 R.O.C, China"],"affiliations":[{"raw_affiliation_string":"Display Technology Center, Industrial Technology Research Institute (ITRI), Chung Hsing Rd, Chutung Hsinchu, Taiwan, 310 R.O.C, China","institution_ids":["https://openalex.org/I4210148468"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5059585842"],"corresponding_institution_ids":["https://openalex.org/I4210148468"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.51513272,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"861","last_page":"870"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.9818999767303467,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10460","display_name":"Electronic Packaging and Soldering Technologies","score":0.9546999931335449,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/etching","display_name":"Etching (microfabrication)","score":0.8882523775100708},{"id":"https://openalex.org/keywords/reactive-ion-etching","display_name":"Reactive-ion etching","score":0.5855337977409363},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5801128149032593},{"id":"https://openalex.org/keywords/dry-etching","display_name":"Dry etching","score":0.5602611303329468},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.5103756785392761},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5027186870574951},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.4990370273590088},{"id":"https://openalex.org/keywords/isotropic-etching","display_name":"Isotropic etching","score":0.4496038556098938},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3217077851295471},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.28651320934295654}],"concepts":[{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.8882523775100708},{"id":"https://openalex.org/C130472188","wikidata":"https://www.wikidata.org/wiki/Q1640159","display_name":"Reactive-ion etching","level":4,"score":0.5855337977409363},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5801128149032593},{"id":"https://openalex.org/C1291036","wikidata":"https://www.wikidata.org/wiki/Q1191918","display_name":"Dry etching","level":4,"score":0.5602611303329468},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.5103756785392761},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5027186870574951},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.4990370273590088},{"id":"https://openalex.org/C33220542","wikidata":"https://www.wikidata.org/wiki/Q6086567","display_name":"Isotropic etching","level":4,"score":0.4496038556098938},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3217077851295471},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.28651320934295654},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1007/978-3-540-79567-4_59","is_oa":false,"landing_page_url":"https://doi.org/10.1007/978-3-540-79567-4_59","pdf_url":null,"source":{"id":"https://openalex.org/S4306511887","display_name":"Handbook of Visual Display Technology","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Handbook of Visual Display Technology","raw_type":"book-chapter"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9","score":0.6100000143051147}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W24136597","https://openalex.org/W589744691","https://openalex.org/W1981599160","https://openalex.org/W2010339802","https://openalex.org/W2033778357","https://openalex.org/W2055152164","https://openalex.org/W2073190516","https://openalex.org/W2243264278","https://openalex.org/W2621919695","https://openalex.org/W6633662725"],"related_works":["https://openalex.org/W1991288435","https://openalex.org/W4387743859","https://openalex.org/W2542354647","https://openalex.org/W2094633807","https://openalex.org/W2070736010","https://openalex.org/W2990622264","https://openalex.org/W2100954478","https://openalex.org/W19452786","https://openalex.org/W2082133582","https://openalex.org/W2495723748"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2022-05-12T00:00:00"}