{"id":"https://openalex.org/W1842317624","doi":"https://doi.org/10.1007/978-3-540-39869-1_14","title":"An Ontology for Production Control of Semiconductor Manufacturing Processes","display_name":"An Ontology for Production Control of Semiconductor Manufacturing Processes","publication_year":2003,"publication_date":"2003-01-01","ids":{"openalex":"https://openalex.org/W1842317624","doi":"https://doi.org/10.1007/978-3-540-39869-1_14","mag":"1842317624"},"language":"en","primary_location":{"id":"doi:10.1007/978-3-540-39869-1_14","is_oa":false,"landing_page_url":"https://doi.org/10.1007/978-3-540-39869-1_14","pdf_url":null,"source":{"id":"https://openalex.org/S106296714","display_name":"Lecture notes in computer science","issn_l":"0302-9743","issn":["0302-9743","1611-3349"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"book series"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Lecture Notes in Computer Science","raw_type":"book-chapter"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5032060363","display_name":"Lars M\u00f6nch","orcid":null},"institutions":[{"id":"https://openalex.org/I119449181","display_name":"Technische Universit\u00e4t Ilmenau","ror":"https://ror.org/01weqhp73","country_code":"DE","type":"education","lineage":["https://openalex.org/I119449181"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Lars M\u00f6nch","raw_affiliation_strings":["Institute of Information Systems, Technical University of Ilmenau, Helmholtzplatz 3, 98684, Ilmenau, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Information Systems, Technical University of Ilmenau, Helmholtzplatz 3, 98684, Ilmenau, Germany","institution_ids":["https://openalex.org/I119449181"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5050409448","display_name":"Marcel Stehli","orcid":null},"institutions":[{"id":"https://openalex.org/I119449181","display_name":"Technische Universit\u00e4t Ilmenau","ror":"https://ror.org/01weqhp73","country_code":"DE","type":"education","lineage":["https://openalex.org/I119449181"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Marcel Stehli","raw_affiliation_strings":["Institute of Information Systems, Technical University of Ilmenau, Helmholtzplatz 3, 98684, Ilmenau, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Information Systems, Technical University of Ilmenau, Helmholtzplatz 3, 98684, Ilmenau, Germany","institution_ids":["https://openalex.org/I119449181"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I119449181"],"apc_list":{"value":5000,"currency":"EUR","value_usd":5392},"apc_paid":null,"fwci":3.4699,"has_fulltext":false,"cited_by_count":31,"citation_normalized_percentile":{"value":0.91898734,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"156","last_page":"167"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9948999881744385,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9948999881744385,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11741","display_name":"Flexible and Reconfigurable Manufacturing Systems","score":0.9842000007629395,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10703","display_name":"Business Process Modeling and Analysis","score":0.973800003528595,"subfield":{"id":"https://openalex.org/subfields/1404","display_name":"Management Information Systems"},"field":{"id":"https://openalex.org/fields/14","display_name":"Business, Management and Accounting"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ontology","display_name":"Ontology","score":0.7785028219223022},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.743361234664917},{"id":"https://openalex.org/keywords/hierarchy","display_name":"Hierarchy","score":0.5595803260803223},{"id":"https://openalex.org/keywords/product","display_name":"Product (mathematics)","score":0.4979538917541504},{"id":"https://openalex.org/keywords/production","display_name":"Production (economics)","score":0.4751993417739868},{"id":"https://openalex.org/keywords/production-control","display_name":"Production control","score":0.46639153361320496},{"id":"https://openalex.org/keywords/hierarchical-control-system","display_name":"Hierarchical control system","score":0.456287682056427},{"id":"https://openalex.org/keywords/manufacturing-engineering","display_name":"Manufacturing engineering","score":0.39846381545066833},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.3978424668312073},{"id":"https://openalex.org/keywords/industrial-engineering","display_name":"Industrial engineering","score":0.3361695110797882},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.1937147080898285},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.14659404754638672}],"concepts":[{"id":"https://openalex.org/C25810664","wikidata":"https://www.wikidata.org/wiki/Q44325","display_name":"Ontology","level":2,"score":0.7785028219223022},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.743361234664917},{"id":"https://openalex.org/C31170391","wikidata":"https://www.wikidata.org/wiki/Q188619","display_name":"Hierarchy","level":2,"score":0.5595803260803223},{"id":"https://openalex.org/C90673727","wikidata":"https://www.wikidata.org/wiki/Q901718","display_name":"Product (mathematics)","level":2,"score":0.4979538917541504},{"id":"https://openalex.org/C2778348673","wikidata":"https://www.wikidata.org/wiki/Q739302","display_name":"Production (economics)","level":2,"score":0.4751993417739868},{"id":"https://openalex.org/C2780682718","wikidata":"https://www.wikidata.org/wiki/Q16321575","display_name":"Production control","level":3,"score":0.46639153361320496},{"id":"https://openalex.org/C124527596","wikidata":"https://www.wikidata.org/wiki/Q17029359","display_name":"Hierarchical control system","level":3,"score":0.456287682056427},{"id":"https://openalex.org/C117671659","wikidata":"https://www.wikidata.org/wiki/Q11049265","display_name":"Manufacturing engineering","level":1,"score":0.39846381545066833},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.3978424668312073},{"id":"https://openalex.org/C13736549","wikidata":"https://www.wikidata.org/wiki/Q4489420","display_name":"Industrial engineering","level":1,"score":0.3361695110797882},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.1937147080898285},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.14659404754638672},{"id":"https://openalex.org/C111472728","wikidata":"https://www.wikidata.org/wiki/Q9471","display_name":"Epistemology","level":1,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C34447519","wikidata":"https://www.wikidata.org/wiki/Q179522","display_name":"Market economy","level":1,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C139719470","wikidata":"https://www.wikidata.org/wiki/Q39680","display_name":"Macroeconomics","level":1,"score":0.0},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1007/978-3-540-39869-1_14","is_oa":false,"landing_page_url":"https://doi.org/10.1007/978-3-540-39869-1_14","pdf_url":null,"source":{"id":"https://openalex.org/S106296714","display_name":"Lecture notes in computer science","issn_l":"0302-9743","issn":["0302-9743","1611-3349"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"book series"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Lecture Notes in Computer Science","raw_type":"book-chapter"},{"id":"pmh:oai:CiteSeerX.psu:10.1.1.197.5520","is_oa":false,"landing_page_url":"http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.197.5520","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"http://www.wirtschaft.tu-ilmenau.de/deutsch/institute/wi/wi1/download/moench/mates.pdf","raw_type":"text"},{"id":"pmh:oai:CiteSeerX.psu:10.1.1.5.1882","is_oa":false,"landing_page_url":"http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.5.1882","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"http://www.netobjectdays.org/node03/de/Conf/publish/../../../../pdf/03/papers/mates/28310156.pdf","raw_type":"text"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":15,"referenced_works":["https://openalex.org/W199410162","https://openalex.org/W200531746","https://openalex.org/W1488806426","https://openalex.org/W1542500160","https://openalex.org/W1604418810","https://openalex.org/W2051448938","https://openalex.org/W2115855991","https://openalex.org/W2133109597","https://openalex.org/W2143338622","https://openalex.org/W2152480378","https://openalex.org/W2155078139","https://openalex.org/W2165242406","https://openalex.org/W2642557535","https://openalex.org/W2914415576","https://openalex.org/W3048214708"],"related_works":["https://openalex.org/W2167940021","https://openalex.org/W2942485139","https://openalex.org/W2910225356","https://openalex.org/W573714618","https://openalex.org/W2071815174","https://openalex.org/W2007455779","https://openalex.org/W2164371879","https://openalex.org/W4205449067","https://openalex.org/W1880526535","https://openalex.org/W4293879402"],"abstract_inverted_index":null,"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2012,"cited_by_count":6}],"updated_date":"2026-08-04T08:18:43.703281","created_date":"2025-10-10T00:00:00"}