{"id":"https://openalex.org/W1571463341","doi":"https://doi.org/10.1007/978-3-540-24653-4_22","title":"Genetic Algorithms to Improve Mask and Illumination Geometries in Lithographic Imaging Systems","display_name":"Genetic Algorithms to Improve Mask and Illumination Geometries in Lithographic Imaging Systems","publication_year":2004,"publication_date":"2004-01-01","ids":{"openalex":"https://openalex.org/W1571463341","doi":"https://doi.org/10.1007/978-3-540-24653-4_22","mag":"1571463341"},"language":"en","primary_location":{"id":"doi:10.1007/978-3-540-24653-4_22","is_oa":false,"landing_page_url":"https://doi.org/10.1007/978-3-540-24653-4_22","pdf_url":null,"source":{"id":"https://openalex.org/S106296714","display_name":"Lecture notes in computer science","issn_l":"0302-9743","issn":["0302-9743","1611-3349"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"book series"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Lecture Notes in Computer Science","raw_type":"book-chapter"},"type":"book-chapter","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5038093455","display_name":"Tim F\u00fchner","orcid":"https://orcid.org/0000-0002-5381-285X"},"institutions":[{"id":"https://openalex.org/I4210148684","display_name":"Fraunhofer Institute for Integrated Systems and Device Technology","ror":"https://ror.org/04q5rka56","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210148684","https://openalex.org/I4923324"]},{"id":"https://openalex.org/I160414472","display_name":"Schott (Germany)","ror":"https://ror.org/000q08p21","country_code":"DE","type":"company","lineage":["https://openalex.org/I160414472"]},{"id":"https://openalex.org/I4923324","display_name":"Fraunhofer Society","ror":"https://ror.org/05hkkdn48","country_code":"DE","type":"funder","lineage":["https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"Tim F\u00fchner","raw_affiliation_strings":["Fraunhofer Institute of Integrated Systems and Device Technology (FhG-IISB), Schottkystr. 10, 91058, Erlangen, Germany","Fraunhofer Institute of Integrated Systems and Device Technology (FhG-IISB)"],"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute of Integrated Systems and Device Technology (FhG-IISB), Schottkystr. 10, 91058, Erlangen, Germany","institution_ids":["https://openalex.org/I4210148684","https://openalex.org/I160414472"]},{"raw_affiliation_string":"Fraunhofer Institute of Integrated Systems and Device Technology (FhG-IISB)","institution_ids":["https://openalex.org/I4923324"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5083240643","display_name":"Andreas Erdmann","orcid":"https://orcid.org/0000-0001-9150-587X"},"institutions":[{"id":"https://openalex.org/I4210148684","display_name":"Fraunhofer Institute for Integrated Systems and Device Technology","ror":"https://ror.org/04q5rka56","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210148684","https://openalex.org/I4923324"]},{"id":"https://openalex.org/I4923324","display_name":"Fraunhofer Society","ror":"https://ror.org/05hkkdn48","country_code":"DE","type":"funder","lineage":["https://openalex.org/I4923324"]},{"id":"https://openalex.org/I160414472","display_name":"Schott (Germany)","ror":"https://ror.org/000q08p21","country_code":"DE","type":"company","lineage":["https://openalex.org/I160414472"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Andreas Erdmann","raw_affiliation_strings":["Fraunhofer Institute of Integrated Systems and Device Technology (FhG-IISB), Schottkystr. 10, 91058, Erlangen, Germany","Fraunhofer Institute of Integrated Systems and Device Technology (FhG-IISB)"],"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute of Integrated Systems and Device Technology (FhG-IISB), Schottkystr. 10, 91058, Erlangen, Germany","institution_ids":["https://openalex.org/I4210148684","https://openalex.org/I160414472"]},{"raw_affiliation_string":"Fraunhofer Institute of Integrated Systems and Device Technology (FhG-IISB)","institution_ids":["https://openalex.org/I4923324"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076395593","display_name":"Rich\u00e1rd Farkas","orcid":"https://orcid.org/0000-0001-7019-2632"},"institutions":[{"id":"https://openalex.org/I181369854","display_name":"Friedrich-Alexander-Universit\u00e4t Erlangen-N\u00fcrnberg","ror":"https://ror.org/00f7hpc57","country_code":"DE","type":"education","lineage":["https://openalex.org/I181369854"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Rich\u00e1rd Farkas","raw_affiliation_strings":["Department of Computer Science II, University of Erlangen-Nuremberg, Martensstr. 3, 91058, Erlangen, Germany","University of Erlangen-Nuremberg"],"affiliations":[{"raw_affiliation_string":"Department of Computer Science II, University of Erlangen-Nuremberg, Martensstr. 3, 91058, Erlangen, Germany","institution_ids":["https://openalex.org/I181369854"]},{"raw_affiliation_string":"University of Erlangen-Nuremberg","institution_ids":["https://openalex.org/I181369854"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017184459","display_name":"Bernd Tollk\u00fchn","orcid":null},"institutions":[{"id":"https://openalex.org/I4923324","display_name":"Fraunhofer Society","ror":"https://ror.org/05hkkdn48","country_code":"DE","type":"funder","lineage":["https://openalex.org/I4923324"]},{"id":"https://openalex.org/I4210148684","display_name":"Fraunhofer Institute for Integrated Systems and Device Technology","ror":"https://ror.org/04q5rka56","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210148684","https://openalex.org/I4923324"]},{"id":"https://openalex.org/I160414472","display_name":"Schott (Germany)","ror":"https://ror.org/000q08p21","country_code":"DE","type":"company","lineage":["https://openalex.org/I160414472"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Bernd Tollk\u00fchn","raw_affiliation_strings":["Fraunhofer Institute of Integrated Systems and Device Technology (FhG-IISB), Schottkystr. 10, 91058, Erlangen, Germany","Fraunhofer Institute of Integrated Systems and Device Technology (FhG-IISB)"],"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute of Integrated Systems and Device Technology (FhG-IISB), Schottkystr. 10, 91058, Erlangen, Germany","institution_ids":["https://openalex.org/I4210148684","https://openalex.org/I160414472"]},{"raw_affiliation_string":"Fraunhofer Institute of Integrated Systems and Device Technology (FhG-IISB)","institution_ids":["https://openalex.org/I4923324"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5031970198","display_name":"Gabriella K\u00f3kai","orcid":null},"institutions":[{"id":"https://openalex.org/I181369854","display_name":"Friedrich-Alexander-Universit\u00e4t Erlangen-N\u00fcrnberg","ror":"https://ror.org/00f7hpc57","country_code":"DE","type":"education","lineage":["https://openalex.org/I181369854"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Gabriella K\u00f3kai","raw_affiliation_strings":["Department of Computer Science II, University of Erlangen-Nuremberg, Martensstr. 3, 91058, Erlangen, Germany","University of Erlangen-Nuremberg"],"affiliations":[{"raw_affiliation_string":"Department of Computer Science II, University of Erlangen-Nuremberg, Martensstr. 3, 91058, Erlangen, Germany","institution_ids":["https://openalex.org/I181369854"]},{"raw_affiliation_string":"University of Erlangen-Nuremberg","institution_ids":["https://openalex.org/I181369854"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5038093455"],"corresponding_institution_ids":["https://openalex.org/I160414472","https://openalex.org/I4210148684","https://openalex.org/I4923324"],"apc_list":{"value":5000,"currency":"EUR","value_usd":5392},"apc_paid":null,"fwci":10.1333,"has_fulltext":false,"cited_by_count":15,"citation_normalized_percentile":{"value":0.97943967,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"208","last_page":"218"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11517","display_name":"Advanced optical system design","score":0.9976999759674072,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13114","display_name":"Image Processing Techniques and Applications","score":0.996999979019165,"subfield":{"id":"https://openalex.org/subfields/2214","display_name":"Media Technology"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/design-for-manufacturability","display_name":"Design for manufacturability","score":0.8508355021476746},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.8164812922477722},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.7486312389373779},{"id":"https://openalex.org/keywords/focus","display_name":"Focus (optics)","score":0.6057218313217163},{"id":"https://openalex.org/keywords/genetic-algorithm","display_name":"Genetic algorithm","score":0.600184440612793},{"id":"https://openalex.org/keywords/projection","display_name":"Projection (relational algebra)","score":0.5357348918914795},{"id":"https://openalex.org/keywords/a-priori-and-a-posteriori","display_name":"A priori and a posteriori","score":0.496704638004303},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.49612268805503845},{"id":"https://openalex.org/keywords/photolithography","display_name":"Photolithography","score":0.4852037727832794},{"id":"https://openalex.org/keywords/fitness-function","display_name":"Fitness function","score":0.47388073801994324},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.4413536787033081},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.3643454313278198},{"id":"https://openalex.org/keywords/computer-vision","display_name":"Computer vision","score":0.3304053544998169},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.23698359727859497},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.090105801820755},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.07930904626846313},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.07044249773025513}],"concepts":[{"id":"https://openalex.org/C62064638","wikidata":"https://www.wikidata.org/wiki/Q553878","display_name":"Design for manufacturability","level":2,"score":0.8508355021476746},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.8164812922477722},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.7486312389373779},{"id":"https://openalex.org/C192209626","wikidata":"https://www.wikidata.org/wiki/Q190909","display_name":"Focus (optics)","level":2,"score":0.6057218313217163},{"id":"https://openalex.org/C8880873","wikidata":"https://www.wikidata.org/wiki/Q187787","display_name":"Genetic algorithm","level":2,"score":0.600184440612793},{"id":"https://openalex.org/C57493831","wikidata":"https://www.wikidata.org/wiki/Q3134666","display_name":"Projection (relational algebra)","level":2,"score":0.5357348918914795},{"id":"https://openalex.org/C75553542","wikidata":"https://www.wikidata.org/wiki/Q178161","display_name":"A priori and a posteriori","level":2,"score":0.496704638004303},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.49612268805503845},{"id":"https://openalex.org/C105487726","wikidata":"https://www.wikidata.org/wiki/Q622938","display_name":"Photolithography","level":2,"score":0.4852037727832794},{"id":"https://openalex.org/C176066374","wikidata":"https://www.wikidata.org/wiki/Q629118","display_name":"Fitness function","level":3,"score":0.47388073801994324},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.4413536787033081},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.3643454313278198},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.3304053544998169},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.23698359727859497},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.090105801820755},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.07930904626846313},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.07044249773025513},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.0},{"id":"https://openalex.org/C111472728","wikidata":"https://www.wikidata.org/wiki/Q9471","display_name":"Epistemology","level":1,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1007/978-3-540-24653-4_22","is_oa":false,"landing_page_url":"https://doi.org/10.1007/978-3-540-24653-4_22","pdf_url":null,"source":{"id":"https://openalex.org/S106296714","display_name":"Lecture notes in computer science","issn_l":"0302-9743","issn":["0302-9743","1611-3349"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"book series"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Lecture Notes in Computer Science","raw_type":"book-chapter"},{"id":"pmh:oai:fraunhofer.de:N-32684","is_oa":false,"landing_page_url":"http://publica.fraunhofer.de/documents/N-32684.html","pdf_url":null,"source":{"id":"https://openalex.org/S4306400801","display_name":"Publikationsdatenbank der Fraunhofer-Gesellschaft (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Fraunhofer IISB","raw_type":"Conference Paper"},{"id":"pmh:oai:publica.fraunhofer.de:publica/344605","is_oa":false,"landing_page_url":"https://publica.fraunhofer.de/handle/publica/344605","pdf_url":null,"source":{"id":"https://openalex.org/S4306400318","display_name":"Fraunhofer-Publica (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"conference paper"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W180797010","https://openalex.org/W1550950318","https://openalex.org/W1594489858","https://openalex.org/W1658472922","https://openalex.org/W1983348509","https://openalex.org/W2006326292","https://openalex.org/W2070944221","https://openalex.org/W2075743969","https://openalex.org/W2083762784","https://openalex.org/W2091201258","https://openalex.org/W2096861910"],"related_works":["https://openalex.org/W2157255030","https://openalex.org/W4254591121","https://openalex.org/W2149415078","https://openalex.org/W2625379356","https://openalex.org/W1977680521","https://openalex.org/W2020522377","https://openalex.org/W2532313240","https://openalex.org/W2013138940","https://openalex.org/W2805151322","https://openalex.org/W2050729681"],"abstract_inverted_index":null,"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2015,"cited_by_count":1}],"updated_date":"2026-04-04T16:13:02.066488","created_date":"2025-10-10T00:00:00"}