{"id":"https://openalex.org/W2966851079","doi":"https://doi.org/10.1007/978-3-030-27526-6_34","title":"A Novel Flexure Deflection Device with Damping Function: Towards Laser Reflector of 3D Lithography","display_name":"A Novel Flexure Deflection Device with Damping Function: Towards Laser Reflector of 3D Lithography","publication_year":2019,"publication_date":"2019-01-01","ids":{"openalex":"https://openalex.org/W2966851079","doi":"https://doi.org/10.1007/978-3-030-27526-6_34","mag":"2966851079"},"language":"en","primary_location":{"id":"doi:10.1007/978-3-030-27526-6_34","is_oa":false,"landing_page_url":"https://doi.org/10.1007/978-3-030-27526-6_34","pdf_url":null,"source":{"id":"https://openalex.org/S106296714","display_name":"Lecture notes in computer science","issn_l":"0302-9743","issn":["0302-9743","1611-3349"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"book series"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Lecture Notes in Computer Science","raw_type":"book-chapter"},"type":"book-chapter","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100627962","display_name":"Guixin Zhang","orcid":"https://orcid.org/0000-0002-9327-4056"},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Guixin Zhang","raw_affiliation_strings":["State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Higher Education Mega Center, Guangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Higher Education Mega Center, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009718960","display_name":"Hui Tang","orcid":"https://orcid.org/0000-0003-2155-5235"},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hui Tang","raw_affiliation_strings":["State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Higher Education Mega Center, Guangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Higher Education Mega Center, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100451609","display_name":"Xun Chen","orcid":"https://orcid.org/0000-0003-2547-9022"},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xun Chen","raw_affiliation_strings":["State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Higher Education Mega Center, Guangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Higher Education Mega Center, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101084740","display_name":"Xiaohui Guo","orcid":null},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiaohui Guo","raw_affiliation_strings":["State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Higher Education Mega Center, Guangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Higher Education Mega Center, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5063756735","display_name":"Jiedong Li","orcid":"https://orcid.org/0000-0001-9016-9042"},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jiedong Li","raw_affiliation_strings":["State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Higher Education Mega Center, Guangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Higher Education Mega Center, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032170987","display_name":"Haoyu Pan","orcid":null},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Haoyu Pan","raw_affiliation_strings":["State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Higher Education Mega Center, Guangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Higher Education Mega Center, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100386630","display_name":"Shuo Li","orcid":"https://orcid.org/0000-0002-5184-3230"},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shuo Li","raw_affiliation_strings":["State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Higher Education Mega Center, Guangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Higher Education Mega Center, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I139024713"],"apc_list":{"value":5000,"currency":"EUR","value_usd":5392},"apc_paid":null,"fwci":0.6934,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.66036697,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"393","last_page":"400"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/deflection","display_name":"Deflection (physics)","score":0.7885680794715881},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.7150843143463135},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.5095880031585693},{"id":"https://openalex.org/keywords/laser","display_name":"Laser","score":0.4900625944137573},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4741993546485901},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.4671551585197449},{"id":"https://openalex.org/keywords/frequency-domain","display_name":"Frequency domain","score":0.44706422090530396},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.4320266544818878},{"id":"https://openalex.org/keywords/inertial-frame-of-reference","display_name":"Inertial frame of reference","score":0.4164109528064728},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3869503140449524},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.3582870662212372},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.23214438557624817},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.14653438329696655}],"concepts":[{"id":"https://openalex.org/C2781355719","wikidata":"https://www.wikidata.org/wiki/Q2080698","display_name":"Deflection (physics)","level":2,"score":0.7885680794715881},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.7150843143463135},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.5095880031585693},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.4900625944137573},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4741993546485901},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.4671551585197449},{"id":"https://openalex.org/C19118579","wikidata":"https://www.wikidata.org/wiki/Q786423","display_name":"Frequency domain","level":2,"score":0.44706422090530396},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.4320266544818878},{"id":"https://openalex.org/C173386949","wikidata":"https://www.wikidata.org/wiki/Q192735","display_name":"Inertial frame of reference","level":2,"score":0.4164109528064728},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3869503140449524},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3582870662212372},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.23214438557624817},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.14653438329696655},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1007/978-3-030-27526-6_34","is_oa":false,"landing_page_url":"https://doi.org/10.1007/978-3-030-27526-6_34","pdf_url":null,"source":{"id":"https://openalex.org/S106296714","display_name":"Lecture notes in computer science","issn_l":"0302-9743","issn":["0302-9743","1611-3349"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"book series"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Lecture Notes in Computer Science","raw_type":"book-chapter"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.5199999809265137,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W1906685141","https://openalex.org/W2031759790","https://openalex.org/W2071244795","https://openalex.org/W2146087399","https://openalex.org/W2156192573","https://openalex.org/W2262693898","https://openalex.org/W2295224876","https://openalex.org/W2763162181"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W2120483398","https://openalex.org/W2391127530","https://openalex.org/W2393343784","https://openalex.org/W2045074154","https://openalex.org/W1974353171","https://openalex.org/W2382708890","https://openalex.org/W3041936564","https://openalex.org/W4235327049","https://openalex.org/W48128959"],"abstract_inverted_index":null,"counts_by_year":[{"year":2019,"cited_by_count":1}],"updated_date":"2026-06-26T08:34:08.712188","created_date":"2025-10-10T00:00:00"}