{"id":"https://openalex.org/W992289433","doi":"https://doi.org/10.1007/978-0-387-36594-7_36","title":"A Load Balancing Method for Dedicated Photolithography Machine Constraint","display_name":"A Load Balancing Method for Dedicated Photolithography Machine Constraint","publication_year":2007,"publication_date":"2007-03-07","ids":{"openalex":"https://openalex.org/W992289433","doi":"https://doi.org/10.1007/978-0-387-36594-7_36","mag":"992289433"},"language":"en","primary_location":{"id":"doi:10.1007/978-0-387-36594-7_36","is_oa":false,"landing_page_url":"https://doi.org/10.1007/978-0-387-36594-7_36","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IFIP International Federation for Information Processing","raw_type":"book-chapter"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5004724715","display_name":"Arthur M. D. Shr","orcid":null},"institutions":[{"id":"https://openalex.org/I148099254","display_name":"National Chung Cheng University","ror":"https://ror.org/0028v3876","country_code":"TW","type":"education","lineage":["https://openalex.org/I148099254"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Arthur Shr","raw_affiliation_strings":["Department of Electrical Engineering, National Chung Cheng University, Chia-Yi, Taiwan, R. 0. C","Nat. Chung Cheng. Univ"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, National Chung Cheng University, Chia-Yi, Taiwan, R. 0. C","institution_ids":["https://openalex.org/I148099254"]},{"raw_affiliation_string":"Nat. Chung Cheng. Univ","institution_ids":["https://openalex.org/I148099254"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101726185","display_name":"Alan Liu","orcid":"https://orcid.org/0000-0002-8884-6662"},"institutions":[{"id":"https://openalex.org/I148099254","display_name":"National Chung Cheng University","ror":"https://ror.org/0028v3876","country_code":"TW","type":"education","lineage":["https://openalex.org/I148099254"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Alan Liu","raw_affiliation_strings":["Department of Electrical Engineering, National Chung Cheng University, Chia-Yi, Taiwan, R. 0. C","Nat. Chung Cheng. Univ"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, National Chung Cheng University, Chia-Yi, Taiwan, R. 0. C","institution_ids":["https://openalex.org/I148099254"]},{"raw_affiliation_string":"Nat. Chung Cheng. Univ","institution_ids":["https://openalex.org/I148099254"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5005485540","display_name":"Peter P. Chen","orcid":null},"institutions":[{"id":"https://openalex.org/I121820613","display_name":"Louisiana State University","ror":"https://ror.org/05ect4e57","country_code":"US","type":"education","lineage":["https://openalex.org/I121820613"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Peter P. Chen","raw_affiliation_strings":["Department of Computer Science, Louisiana State University, Baton Rouge, USA","Louisiana State University**"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Computer Science, Louisiana State University, Baton Rouge, USA","institution_ids":["https://openalex.org/I121820613"]},{"raw_affiliation_string":"Louisiana State University**","institution_ids":["https://openalex.org/I121820613"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":15,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"339","last_page":"348"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11814","display_name":"Advanced Manufacturing and Logistics Optimization","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11125","display_name":"Petri Nets in System Modeling","score":0.996399998664856,"subfield":{"id":"https://openalex.org/subfields/1703","display_name":"Computational Theory and Mathematics"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/photolithography","display_name":"Photolithography","score":0.892633318901062},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6789485812187195},{"id":"https://openalex.org/keywords/scheduling","display_name":"Scheduling (production processes)","score":0.6274325847625732},{"id":"https://openalex.org/keywords/schedule","display_name":"Schedule","score":0.5781123042106628},{"id":"https://openalex.org/keywords/constraint","display_name":"Constraint (computer-aided design)","score":0.5273840427398682},{"id":"https://openalex.org/keywords/wafer-fabrication","display_name":"Wafer fabrication","score":0.49289798736572266},{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.43251511454582214},{"id":"https://openalex.org/keywords/distributed-computing","display_name":"Distributed computing","score":0.33329489827156067},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.31563276052474976},{"id":"https://openalex.org/keywords/mathematical-optimization","display_name":"Mathematical optimization","score":0.27842193841934204},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.21132367849349976},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.13166257739067078},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.10218361020088196},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.08529439568519592},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.06665033102035522},{"id":"https://openalex.org/keywords/operating-system","display_name":"Operating system","score":0.06131252646446228}],"concepts":[{"id":"https://openalex.org/C105487726","wikidata":"https://www.wikidata.org/wiki/Q622938","display_name":"Photolithography","level":2,"score":0.892633318901062},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6789485812187195},{"id":"https://openalex.org/C206729178","wikidata":"https://www.wikidata.org/wiki/Q2271896","display_name":"Scheduling (production processes)","level":2,"score":0.6274325847625732},{"id":"https://openalex.org/C68387754","wikidata":"https://www.wikidata.org/wiki/Q7271585","display_name":"Schedule","level":2,"score":0.5781123042106628},{"id":"https://openalex.org/C2776036281","wikidata":"https://www.wikidata.org/wiki/Q48769818","display_name":"Constraint (computer-aided design)","level":2,"score":0.5273840427398682},{"id":"https://openalex.org/C35750839","wikidata":"https://www.wikidata.org/wiki/Q7959421","display_name":"Wafer fabrication","level":3,"score":0.49289798736572266},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.43251511454582214},{"id":"https://openalex.org/C120314980","wikidata":"https://www.wikidata.org/wiki/Q180634","display_name":"Distributed computing","level":1,"score":0.33329489827156067},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.31563276052474976},{"id":"https://openalex.org/C126255220","wikidata":"https://www.wikidata.org/wiki/Q141495","display_name":"Mathematical optimization","level":1,"score":0.27842193841934204},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.21132367849349976},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.13166257739067078},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.10218361020088196},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.08529439568519592},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.06665033102035522},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.06131252646446228},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1007/978-0-387-36594-7_36","is_oa":false,"landing_page_url":"https://doi.org/10.1007/978-0-387-36594-7_36","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IFIP International Federation for Information Processing","raw_type":"book-chapter"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":19,"referenced_works":["https://openalex.org/W39887228","https://openalex.org/W1555220825","https://openalex.org/W1591848625","https://openalex.org/W2002186584","https://openalex.org/W2003256546","https://openalex.org/W2082791325","https://openalex.org/W2096110679","https://openalex.org/W2097984481","https://openalex.org/W2099880607","https://openalex.org/W2099964216","https://openalex.org/W2110656341","https://openalex.org/W2128972817","https://openalex.org/W2147179284","https://openalex.org/W2155529449","https://openalex.org/W2164239387","https://openalex.org/W2171236623","https://openalex.org/W2539269770","https://openalex.org/W4239197663","https://openalex.org/W4255641917"],"related_works":["https://openalex.org/W2146435486","https://openalex.org/W2170726572","https://openalex.org/W2006086900","https://openalex.org/W1483119123","https://openalex.org/W2377558694","https://openalex.org/W2992897358","https://openalex.org/W2394172622","https://openalex.org/W1594978932","https://openalex.org/W2083418455","https://openalex.org/W2083874129"],"abstract_inverted_index":null,"counts_by_year":[{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":3},{"year":2016,"cited_by_count":2},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}