{"id":"https://openalex.org/W1552567182","doi":"https://doi.org/10.1007/11846802_53","title":"Parallel DSMC Gasflow Simulation of an In-Line Coater for Reactive Sputtering","display_name":"Parallel DSMC Gasflow Simulation of an In-Line Coater for Reactive Sputtering","publication_year":2006,"publication_date":"2006-01-01","ids":{"openalex":"https://openalex.org/W1552567182","doi":"https://doi.org/10.1007/11846802_53","mag":"1552567182"},"language":"en","primary_location":{"id":"doi:10.1007/11846802_53","is_oa":false,"landing_page_url":"https://doi.org/10.1007/11846802_53","pdf_url":null,"source":{"id":"https://openalex.org/S106296714","display_name":"Lecture notes in computer science","issn_l":"0302-9743","issn":["0302-9743","1611-3349"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"book series"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Lecture Notes in Computer Science","raw_type":"book-chapter"},"type":"book-chapter","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5068131797","display_name":"Andreas Pflug","orcid":"https://orcid.org/0009-0007-2430-8666"},"institutions":[{"id":"https://openalex.org/I4210149217","display_name":"Fraunhofer Institute for Surface Engineering and Thin Films","ror":"https://ror.org/048vzmn57","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210149217","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"A. Pflug","raw_affiliation_strings":["Fraunhofer Institute for Surface Engineering and Thin Films IST, Bienroder\u00a0Weg\u00a054e, 38108, Braunschweig, Germany"],"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Surface Engineering and Thin Films IST, Bienroder\u00a0Weg\u00a054e, 38108, Braunschweig, Germany","institution_ids":["https://openalex.org/I4210149217"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077312977","display_name":"Michael Siemers","orcid":null},"institutions":[{"id":"https://openalex.org/I4210149217","display_name":"Fraunhofer Institute for Surface Engineering and Thin Films","ror":"https://ror.org/048vzmn57","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210149217","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"M. Siemers","raw_affiliation_strings":["Fraunhofer Institute for Surface Engineering and Thin Films IST, Bienroder\u00a0Weg\u00a054e, 38108, Braunschweig, Germany"],"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Surface Engineering and Thin Films IST, Bienroder\u00a0Weg\u00a054e, 38108, Braunschweig, Germany","institution_ids":["https://openalex.org/I4210149217"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5020298875","display_name":"Bernd Szyszka","orcid":"https://orcid.org/0000-0001-8070-4304"},"institutions":[{"id":"https://openalex.org/I4210149217","display_name":"Fraunhofer Institute for Surface Engineering and Thin Films","ror":"https://ror.org/048vzmn57","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210149217","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"B. Szyszka","raw_affiliation_strings":["Fraunhofer Institute for Surface Engineering and Thin Films IST, Bienroder\u00a0Weg\u00a054e, 38108, Braunschweig, Germany"],"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Surface Engineering and Thin Films IST, Bienroder\u00a0Weg\u00a054e, 38108, Braunschweig, Germany","institution_ids":["https://openalex.org/I4210149217"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5068131797"],"corresponding_institution_ids":["https://openalex.org/I4210149217"],"apc_list":{"value":5000,"currency":"EUR","value_usd":5392},"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":8,"citation_normalized_percentile":{"value":0.10084034,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"383","last_page":"390"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10313","display_name":"Surface Modification and Superhydrophobicity","score":0.9869999885559082,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10313","display_name":"Surface Modification and Superhydrophobicity","score":0.9869999885559082,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12141","display_name":"Fluid Dynamics and Thin Films","score":0.9502000212669373,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11382","display_name":"Fluid Dynamics and Heat Transfer","score":0.9106000065803528,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/sputtering","display_name":"Sputtering","score":0.9509626626968384},{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.6110835075378418},{"id":"https://openalex.org/keywords/line","display_name":"Line (geometry)","score":0.5172334313392639},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.49337807297706604},{"id":"https://openalex.org/keywords/monte-carlo-method","display_name":"Monte Carlo method","score":0.478833943605423},{"id":"https://openalex.org/keywords/deposition","display_name":"Deposition (geology)","score":0.4559020698070526},{"id":"https://openalex.org/keywords/phase","display_name":"Phase (matter)","score":0.4380413591861725},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.41507112979888916},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3688676059246063},{"id":"https://openalex.org/keywords/mechanics","display_name":"Mechanics","score":0.35816100239753723},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.25078248977661133},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.22097402811050415},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.19612401723861694},{"id":"https://openalex.org/keywords/geometry","display_name":"Geometry","score":0.0746433436870575}],"concepts":[{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.9509626626968384},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.6110835075378418},{"id":"https://openalex.org/C198352243","wikidata":"https://www.wikidata.org/wiki/Q37105","display_name":"Line (geometry)","level":2,"score":0.5172334313392639},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.49337807297706604},{"id":"https://openalex.org/C19499675","wikidata":"https://www.wikidata.org/wiki/Q232207","display_name":"Monte Carlo method","level":2,"score":0.478833943605423},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.4559020698070526},{"id":"https://openalex.org/C44280652","wikidata":"https://www.wikidata.org/wiki/Q104837","display_name":"Phase (matter)","level":2,"score":0.4380413591861725},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.41507112979888916},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3688676059246063},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.35816100239753723},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.25078248977661133},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.22097402811050415},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.19612401723861694},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0746433436870575},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1007/11846802_53","is_oa":false,"landing_page_url":"https://doi.org/10.1007/11846802_53","pdf_url":null,"source":{"id":"https://openalex.org/S106296714","display_name":"Lecture notes in computer science","issn_l":"0302-9743","issn":["0302-9743","1611-3349"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"book series"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Lecture Notes in Computer Science","raw_type":"book-chapter"},{"id":"pmh:oai:fraunhofer.de:N-50424","is_oa":false,"landing_page_url":"http://publica.fraunhofer.de/documents/N-50424.html","pdf_url":null,"source":{"id":"https://openalex.org/S4306400801","display_name":"Publikationsdatenbank der Fraunhofer-Gesellschaft (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Fraunhofer IST","raw_type":"Conference Paper"},{"id":"pmh:oai:publica.fraunhofer.de:publica/351986","is_oa":false,"landing_page_url":"https://publica.fraunhofer.de/handle/publica/351986","pdf_url":null,"source":{"id":"https://openalex.org/S4306400318","display_name":"Fraunhofer-Publica (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"conference paper"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":4,"referenced_works":["https://openalex.org/W70668290","https://openalex.org/W1980929018","https://openalex.org/W2024060531","https://openalex.org/W2040870129"],"related_works":["https://openalex.org/W2035249489","https://openalex.org/W1967383351","https://openalex.org/W850150341","https://openalex.org/W2295922851","https://openalex.org/W142388841","https://openalex.org/W2066362799","https://openalex.org/W1969082957","https://openalex.org/W1992258975","https://openalex.org/W2331021532","https://openalex.org/W2034041074"],"abstract_inverted_index":null,"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2012,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}