{"id":"https://openalex.org/W2023847838","doi":"https://doi.org/10.1002/ett.4460010310","title":"Simulation of silicon semiconductor processing","display_name":"Simulation of silicon semiconductor processing","publication_year":1990,"publication_date":"1990-05-01","ids":{"openalex":"https://openalex.org/W2023847838","doi":"https://doi.org/10.1002/ett.4460010310","mag":"2023847838"},"language":"en","primary_location":{"id":"doi:10.1002/ett.4460010310","is_oa":false,"landing_page_url":"https://doi.org/10.1002/ett.4460010310","pdf_url":null,"source":{"id":"https://openalex.org/S4393917101","display_name":"European Transactions on Telecommunications","issn_l":"1124-318X","issn":["1124-318X","1541-8251"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"European Transactions on Telecommunications","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5017080697","display_name":"P. Pichler","orcid":"https://orcid.org/0000-0002-8155-8895"},"institutions":[{"id":"https://openalex.org/I4210124274","display_name":"Fraunhofer Institute for Integrated Circuits","ror":"https://ror.org/024ape423","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210124274","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"Peter Pichler","raw_affiliation_strings":["Fraunhofer Arbeitsgruppe fu\u0308r lntegrierte Schaltungen Artilleriestrasse 12, 8520 Erlangen, West Germany"],"affiliations":[{"raw_affiliation_string":"Fraunhofer Arbeitsgruppe fu\u0308r lntegrierte Schaltungen Artilleriestrasse 12, 8520 Erlangen, West Germany","institution_ids":["https://openalex.org/I4210124274"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5012487905","display_name":"H. Ryssel","orcid":null},"institutions":[{"id":"https://openalex.org/I4210124274","display_name":"Fraunhofer Institute for Integrated Circuits","ror":"https://ror.org/024ape423","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210124274","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Heiner Ryssel","raw_affiliation_strings":["Also: Lehrstuhl fu\u0308r Elektronische Bauelemenre. Universita\u0308t Erlangen","Fraunhofer Arbeitsgruppe fu\u0308r lntegrierte Schaltungen Artilleriestrasse 12, 8520 Erlangen, West Germany"],"affiliations":[{"raw_affiliation_string":"Also: Lehrstuhl fu\u0308r Elektronische Bauelemenre. Universita\u0308t Erlangen","institution_ids":[]},{"raw_affiliation_string":"Fraunhofer Arbeitsgruppe fu\u0308r lntegrierte Schaltungen Artilleriestrasse 12, 8520 Erlangen, West Germany","institution_ids":["https://openalex.org/I4210124274"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5017080697"],"corresponding_institution_ids":["https://openalex.org/I4210124274"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.12963113,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"1","issue":"3","first_page":"293","last_page":"299"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/sketch","display_name":"Sketch","score":0.7173988819122314},{"id":"https://openalex.org/keywords/very-large-scale-integration","display_name":"Very-large-scale integration","score":0.6991221904754639},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.6768854856491089},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6738379597663879},{"id":"https://openalex.org/keywords/process-simulation","display_name":"Process simulation","score":0.6565221548080444},{"id":"https://openalex.org/keywords/feeling","display_name":"Feeling","score":0.5252534747123718},{"id":"https://openalex.org/keywords/state","display_name":"State (computer science)","score":0.4601071774959564},{"id":"https://openalex.org/keywords/diffusion","display_name":"Diffusion","score":0.43255913257598877},{"id":"https://openalex.org/keywords/simulation","display_name":"Simulation","score":0.34987086057662964},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.1983809471130371},{"id":"https://openalex.org/keywords/psychology","display_name":"Psychology","score":0.12953150272369385},{"id":"https://openalex.org/keywords/programming-language","display_name":"Programming language","score":0.10372346639633179},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.09592840075492859}],"concepts":[{"id":"https://openalex.org/C2779231336","wikidata":"https://www.wikidata.org/wiki/Q7534724","display_name":"Sketch","level":2,"score":0.7173988819122314},{"id":"https://openalex.org/C14580979","wikidata":"https://www.wikidata.org/wiki/Q876049","display_name":"Very-large-scale integration","level":2,"score":0.6991221904754639},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.6768854856491089},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6738379597663879},{"id":"https://openalex.org/C189575605","wikidata":"https://www.wikidata.org/wiki/Q838129","display_name":"Process simulation","level":3,"score":0.6565221548080444},{"id":"https://openalex.org/C122980154","wikidata":"https://www.wikidata.org/wiki/Q205555","display_name":"Feeling","level":2,"score":0.5252534747123718},{"id":"https://openalex.org/C48103436","wikidata":"https://www.wikidata.org/wiki/Q599031","display_name":"State (computer science)","level":2,"score":0.4601071774959564},{"id":"https://openalex.org/C69357855","wikidata":"https://www.wikidata.org/wiki/Q163214","display_name":"Diffusion","level":2,"score":0.43255913257598877},{"id":"https://openalex.org/C44154836","wikidata":"https://www.wikidata.org/wiki/Q45045","display_name":"Simulation","level":1,"score":0.34987086057662964},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.1983809471130371},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.12953150272369385},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.10372346639633179},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.09592840075492859},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C77805123","wikidata":"https://www.wikidata.org/wiki/Q161272","display_name":"Social psychology","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1002/ett.4460010310","is_oa":false,"landing_page_url":"https://doi.org/10.1002/ett.4460010310","pdf_url":null,"source":{"id":"https://openalex.org/S4393917101","display_name":"European Transactions on Telecommunications","issn_l":"1124-318X","issn":["1124-318X","1541-8251"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"European Transactions on Telecommunications","raw_type":"journal-article"},{"id":"pmh:oai:fraunhofer.de:PX-33717","is_oa":false,"landing_page_url":"http://publica.fraunhofer.de/documents/PX-33717.html","pdf_url":null,"source":{"id":"https://openalex.org/S4306400801","display_name":"Publikationsdatenbank der Fraunhofer-Gesellschaft (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Fraunhofer IIS-B","raw_type":"Journal Article"},{"id":"pmh:oai:publica.fraunhofer.de:publica/179141","is_oa":false,"landing_page_url":"https://publica.fraunhofer.de/handle/publica/179141","pdf_url":null,"source":{"id":"https://openalex.org/S4306400318","display_name":"Fraunhofer-Publica (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"journal article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9","score":0.4399999976158142}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":40,"referenced_works":["https://openalex.org/W85791632","https://openalex.org/W257085138","https://openalex.org/W261712985","https://openalex.org/W612374700","https://openalex.org/W1514320224","https://openalex.org/W1572255512","https://openalex.org/W1592804699","https://openalex.org/W1753800693","https://openalex.org/W1968438214","https://openalex.org/W1975581758","https://openalex.org/W1981249700","https://openalex.org/W1985468612","https://openalex.org/W1986188448","https://openalex.org/W1991080181","https://openalex.org/W2000829777","https://openalex.org/W2022385105","https://openalex.org/W2023387423","https://openalex.org/W2024172140","https://openalex.org/W2026302005","https://openalex.org/W2026524544","https://openalex.org/W2033473601","https://openalex.org/W2040365163","https://openalex.org/W2042140291","https://openalex.org/W2051084504","https://openalex.org/W2058019252","https://openalex.org/W2059729558","https://openalex.org/W2059824139","https://openalex.org/W2061231471","https://openalex.org/W2065735654","https://openalex.org/W2069095448","https://openalex.org/W2069815662","https://openalex.org/W2074431095","https://openalex.org/W2077124524","https://openalex.org/W2077994487","https://openalex.org/W2093817130","https://openalex.org/W2093914900","https://openalex.org/W2098088886","https://openalex.org/W2214412201","https://openalex.org/W2321998191","https://openalex.org/W4255753032"],"related_works":["https://openalex.org/W2378994405","https://openalex.org/W2385974820","https://openalex.org/W2373478030","https://openalex.org/W2378679551","https://openalex.org/W3149739944","https://openalex.org/W2392363776","https://openalex.org/W2063051341","https://openalex.org/W1494563618","https://openalex.org/W2357022711","https://openalex.org/W2358910766"],"abstract_inverted_index":{"Abstract":[0],"In":[1],"VLSI":[2],"development":[3],"process":[4,14,36],"simulation":[5,37,70],"is":[6,29],"needed":[7],"to":[8,17,30,39,60,68],"understand":[9],"the":[10,32,41,46,69],"interaction":[11],"between":[12],"successive":[13],"steps":[15],"and":[16,38,75],"give":[18,40],"input":[19],"data":[20],"for":[21],"device":[22],"simulation.":[23],"The":[24],"goal":[25],"of":[26,35,45,50,71],"this":[27],"paper":[28],"sketch":[31],"present":[33],"state":[34],"reader":[42],"a":[43],"feeling":[44],"difficulties":[47],"but":[48],"also":[49],"what":[51],"can":[52],"be":[53,66],"gained":[54],"by":[55],"using":[56],"such":[57],"tools.":[58],"Due":[59],"their":[61],"importance,":[62],"most":[63],"attention":[64],"will":[65],"given":[67],"ion":[72],"implantation,":[73],"diffusion,":[74],"oxidation.":[76]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}