{"id":"https://openalex.org/W2043978013","doi":"https://doi.org/10.1002/ett.4460010215","title":"Doped SiO<sub>2</sub> deposition from TMP in APCVD","display_name":"Doped SiO<sub>2</sub> deposition from TMP in APCVD","publication_year":1990,"publication_date":"1990-03-01","ids":{"openalex":"https://openalex.org/W2043978013","doi":"https://doi.org/10.1002/ett.4460010215","mag":"2043978013"},"language":"en","primary_location":{"id":"doi:10.1002/ett.4460010215","is_oa":false,"landing_page_url":"https://doi.org/10.1002/ett.4460010215","pdf_url":null,"source":{"id":"https://openalex.org/S4393917101","display_name":"European Transactions on Telecommunications","issn_l":"1124-318X","issn":["1124-318X","1541-8251"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"European Transactions on Telecommunications","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5114249054","display_name":"Larry Bartholomew","orcid":null},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"L. D. Bartholomew","raw_affiliation_strings":["Watkins-Johnson Co., Scotts Valley, CA 95066"],"affiliations":[{"raw_affiliation_string":"Watkins-Johnson Co., Scotts Valley, CA 95066","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5087217731","display_name":"Nicholas M. Gralenski","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"N. M. Gralenski","raw_affiliation_strings":["Watkins-Johnson Co., Scotts Valley, CA 95066"],"affiliations":[{"raw_affiliation_string":"Watkins-Johnson Co., Scotts Valley, CA 95066","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042771064","display_name":"Joe C. Sisson","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J. C. Sisson","raw_affiliation_strings":["Watkins-Johnson Co., Scotts Valley, CA 95066"],"affiliations":[{"raw_affiliation_string":"Watkins-Johnson Co., Scotts Valley, CA 95066","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5022542999","display_name":"G.U. Pignatel","orcid":null},"institutions":[{"id":"https://openalex.org/I5561750","display_name":"University of Bari Aldo Moro","ror":"https://ror.org/027ynra39","country_code":"IT","type":"education","lineage":["https://openalex.org/I5561750"]},{"id":"https://openalex.org/I2799818839","display_name":"Thomson Foundation","ror":"https://ror.org/04z3s3f96","country_code":"GB","type":"nonprofit","lineage":["https://openalex.org/I2799818839"]}],"countries":["GB","IT"],"is_corresponding":false,"raw_author_name":"G. U. Pignatel","raw_affiliation_strings":["Dip. di Elettrotecnica ed Elettronica, Universita di Bari Via Re David, 200 - 70125 Bari - Italy","Formely with SGS-Thomson"],"affiliations":[{"raw_affiliation_string":"Dip. di Elettrotecnica ed Elettronica, Universita di Bari Via Re David, 200 - 70125 Bari - Italy","institution_ids":["https://openalex.org/I5561750"]},{"raw_affiliation_string":"Formely with SGS-Thomson","institution_ids":["https://openalex.org/I2799818839"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5114249054"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.15014187,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"1","issue":"2","first_page":"167","last_page":"172"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9948999881744385,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9948999881744385,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11169","display_name":"Silicon Nanostructures and Photoluminescence","score":0.9936000108718872,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.9927999973297119,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/dopant","display_name":"Dopant","score":0.8233643174171448},{"id":"https://openalex.org/keywords/silane","display_name":"Silane","score":0.7497387528419495},{"id":"https://openalex.org/keywords/phosphine","display_name":"Phosphine","score":0.6978276968002319},{"id":"https://openalex.org/keywords/chemical-vapor-deposition","display_name":"Chemical vapor deposition","score":0.6722283363342285},{"id":"https://openalex.org/keywords/doping","display_name":"Doping","score":0.6521812677383423},{"id":"https://openalex.org/keywords/deposition","display_name":"Deposition (geology)","score":0.6144037246704102},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6016157269477844},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.5089631080627441},{"id":"https://openalex.org/keywords/boron","display_name":"Boron","score":0.4707786738872528},{"id":"https://openalex.org/keywords/chemical-engineering","display_name":"Chemical engineering","score":0.4683764576911926},{"id":"https://openalex.org/keywords/inorganic-chemistry","display_name":"Inorganic chemistry","score":0.4087132215499878},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.2857130169868469},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2850220203399658},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.25489187240600586},{"id":"https://openalex.org/keywords/organic-chemistry","display_name":"Organic chemistry","score":0.19708746671676636},{"id":"https://openalex.org/keywords/catalysis","display_name":"Catalysis","score":0.1064099669456482},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.06980982422828674}],"concepts":[{"id":"https://openalex.org/C191952053","wikidata":"https://www.wikidata.org/wiki/Q15119237","display_name":"Dopant","level":3,"score":0.8233643174171448},{"id":"https://openalex.org/C2778024649","wikidata":"https://www.wikidata.org/wiki/Q410572","display_name":"Silane","level":2,"score":0.7497387528419495},{"id":"https://openalex.org/C2777716191","wikidata":"https://www.wikidata.org/wiki/Q207877","display_name":"Phosphine","level":3,"score":0.6978276968002319},{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.6722283363342285},{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.6521812677383423},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.6144037246704102},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6016157269477844},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5089631080627441},{"id":"https://openalex.org/C501308230","wikidata":"https://www.wikidata.org/wiki/Q618","display_name":"Boron","level":2,"score":0.4707786738872528},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.4683764576911926},{"id":"https://openalex.org/C179104552","wikidata":"https://www.wikidata.org/wiki/Q11165","display_name":"Inorganic chemistry","level":1,"score":0.4087132215499878},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.2857130169868469},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2850220203399658},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.25489187240600586},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.19708746671676636},{"id":"https://openalex.org/C161790260","wikidata":"https://www.wikidata.org/wiki/Q82264","display_name":"Catalysis","level":2,"score":0.1064099669456482},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.06980982422828674},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1002/ett.4460010215","is_oa":false,"landing_page_url":"https://doi.org/10.1002/ett.4460010215","pdf_url":null,"source":{"id":"https://openalex.org/S4393917101","display_name":"European Transactions on Telecommunications","issn_l":"1124-318X","issn":["1124-318X","1541-8251"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"European Transactions on Telecommunications","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Clean water and sanitation","id":"https://metadata.un.org/sdg/6","score":0.49000000953674316}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W1670857672","https://openalex.org/W2018873121","https://openalex.org/W2049763479","https://openalex.org/W2076171324","https://openalex.org/W2089804501","https://openalex.org/W2996056250"],"related_works":["https://openalex.org/W624695036","https://openalex.org/W2888212710","https://openalex.org/W2060897759","https://openalex.org/W3140789083","https://openalex.org/W2068025821","https://openalex.org/W192243668","https://openalex.org/W2157799364","https://openalex.org/W2052397146","https://openalex.org/W2858766114","https://openalex.org/W858177076"],"abstract_inverted_index":{"Abstract":[0],"In":[1,50],"this":[2],"work":[3],"we":[4],"have":[5],"investigated":[6],"the":[7,53,57],"feasibility":[8],"of":[9,15,56],"atmospheric":[10],"pressure":[11],"chemical":[12],"vapor":[13],"deposition":[14,73],"phosphorus":[16],"and":[17,45,77],"boron":[18],"doped":[19],"silicon":[20],"oxides":[21],"from":[22,74],"a":[23,32,60],"liquid":[24,58],"source\u2014namely":[25],"TMP":[26],"(tri\u2010methyl\u2010phosphite)\u2014an":[27],"alternative":[28],"to":[29,52],"phosphine":[30,78],"as":[31],"P":[33],"dopant":[34,43],"source'.":[35],"The":[36],"most":[37],"important":[38],"results":[39],"on":[40],"process":[41],"characterization,":[42],"incorporation,":[44],"film":[46],"properties":[47],"are":[48],"presented.":[49],"addition":[51],"easy":[54],"operation":[55],"source,":[59],"remarkable":[61],"improvement":[62],"in":[63,69],"step":[64],"coverage":[65],"has":[66],"been":[67],"found,":[68],"comparison":[70],"with":[71],"PSG":[72],"conventional":[75],"silane":[76],"chemistry.":[79]},"counts_by_year":[{"year":2018,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}