{"id":"https://openalex.org/W4413402811","doi":"https://doi.org/10.1002/aisy.202500517","title":"Machine Learning Based on Digital Image Colorimetry Driven In Situ, Noncontact Plasma Etch Depth Prediction","display_name":"Machine Learning Based on Digital Image Colorimetry Driven In Situ, Noncontact Plasma Etch Depth Prediction","publication_year":2025,"publication_date":"2025-08-21","ids":{"openalex":"https://openalex.org/W4413402811","doi":"https://doi.org/10.1002/aisy.202500517"},"language":"en","primary_location":{"id":"doi:10.1002/aisy.202500517","is_oa":true,"landing_page_url":"https://doi.org/10.1002/aisy.202500517","pdf_url":"https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/aisy.202500517","source":{"id":"https://openalex.org/S4210212817","display_name":"Advanced Intelligent Systems","issn_l":"2640-4567","issn":["2640-4567"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Advanced Intelligent Systems","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/aisy.202500517","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5077055206","display_name":"Minji Kang","orcid":"https://orcid.org/0000-0001-6244-4625"},"institutions":[{"id":"https://openalex.org/I196345858","display_name":"Chungnam National University","ror":"https://ror.org/0227as991","country_code":"KR","type":"education","lineage":["https://openalex.org/I196345858"]},{"id":"https://openalex.org/I4210111434","display_name":"Korea Institute of Machinery & Materials","ror":"https://ror.org/01qcq9d74","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2801339556","https://openalex.org/I2801339556","https://openalex.org/I4210111434","https://openalex.org/I4210144908","https://openalex.org/I4387152098","https://openalex.org/I4387152098"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Minji Kang","raw_affiliation_strings":["Department of Materials Science and Engineering Chungnam National University (CNU)  Daejeon 34134 Republic of Korea","Semiconductor Manufacturing Research Center Korea Institute of Machinery and Materials (KIMM)  Daejeon 34103 Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Science and Engineering Chungnam National University (CNU)  Daejeon 34134 Republic of Korea","institution_ids":["https://openalex.org/I196345858"]},{"raw_affiliation_string":"Semiconductor Manufacturing Research Center Korea Institute of Machinery and Materials (KIMM)  Daejeon 34103 Republic of Korea","institution_ids":["https://openalex.org/I4210111434"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100649753","display_name":"Seong-Ho Kim","orcid":"https://orcid.org/0000-0002-5787-7650"},"institutions":[{"id":"https://openalex.org/I193352282","display_name":"Daegu Gyeongbuk Institute of Science and Technology","ror":"https://ror.org/03frjya69","country_code":"KR","type":"education","lineage":["https://openalex.org/I193352282"]},{"id":"https://openalex.org/I196345858","display_name":"Chungnam National University","ror":"https://ror.org/0227as991","country_code":"KR","type":"education","lineage":["https://openalex.org/I196345858"]},{"id":"https://openalex.org/I4210111434","display_name":"Korea Institute of Machinery & Materials","ror":"https://ror.org/01qcq9d74","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2801339556","https://openalex.org/I2801339556","https://openalex.org/I4210111434","https://openalex.org/I4210144908","https://openalex.org/I4387152098","https://openalex.org/I4387152098"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Seongho Kim","raw_affiliation_strings":["Department of Materials Science and Engineering Chungnam National University (CNU)  Daejeon 34134 Republic of Korea","Department of Physics and Chemistry Daegu Gyeongbuk Institute of Science and Technology (DGIST)  Daegu 42988 Republic of Korea","Semiconductor Manufacturing Research Center Korea Institute of Machinery and Materials (KIMM)  Daejeon 34103 Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Science and Engineering Chungnam National University (CNU)  Daejeon 34134 Republic of Korea","institution_ids":["https://openalex.org/I196345858"]},{"raw_affiliation_string":"Department of Physics and Chemistry Daegu Gyeongbuk Institute of Science and Technology (DGIST)  Daegu 42988 Republic of Korea","institution_ids":["https://openalex.org/I193352282"]},{"raw_affiliation_string":"Semiconductor Manufacturing Research Center Korea Institute of Machinery and Materials (KIMM)  Daejeon 34103 Republic of Korea","institution_ids":["https://openalex.org/I4210111434"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5119378294","display_name":"Eunseo Go","orcid":null},"institutions":[{"id":"https://openalex.org/I196345858","display_name":"Chungnam National University","ror":"https://ror.org/0227as991","country_code":"KR","type":"education","lineage":["https://openalex.org/I196345858"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Eunseo Go","raw_affiliation_strings":["Department of Organic Materials Engineering Chungnam National University (CNU)  Daejeon 34134 Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Organic Materials Engineering Chungnam National University (CNU)  Daejeon 34134 Republic of Korea","institution_ids":["https://openalex.org/I196345858"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5119378295","display_name":"Donghyeon Paek","orcid":null},"institutions":[{"id":"https://openalex.org/I4210111434","display_name":"Korea Institute of Machinery & Materials","ror":"https://ror.org/01qcq9d74","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2801339556","https://openalex.org/I2801339556","https://openalex.org/I4210111434","https://openalex.org/I4210144908","https://openalex.org/I4387152098","https://openalex.org/I4387152098"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Donghyeon Paek","raw_affiliation_strings":["Semiconductor Manufacturing Research Center Korea Institute of Machinery and Materials (KIMM)  Daejeon 34103 Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Manufacturing Research Center Korea Institute of Machinery and Materials (KIMM)  Daejeon 34103 Republic of Korea","institution_ids":["https://openalex.org/I4210111434"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034635102","display_name":"Geon Lim","orcid":"https://orcid.org/0000-0003-3822-2904"},"institutions":[{"id":"https://openalex.org/I4210111434","display_name":"Korea Institute of Machinery & Materials","ror":"https://ror.org/01qcq9d74","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2801339556","https://openalex.org/I2801339556","https://openalex.org/I4210111434","https://openalex.org/I4210144908","https://openalex.org/I4387152098","https://openalex.org/I4387152098"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Geon Lim","raw_affiliation_strings":["Department of Laser & Electron Beam Technologies Research Korea Institute of Machinery and Materials (KIMM)  Daejeon 34103 Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Laser & Electron Beam Technologies Research Korea Institute of Machinery and Materials (KIMM)  Daejeon 34103 Republic of Korea","institution_ids":["https://openalex.org/I4210111434"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027630307","display_name":"Muyoung Kim","orcid":"https://orcid.org/0000-0002-1102-8194"},"institutions":[{"id":"https://openalex.org/I4210111434","display_name":"Korea Institute of Machinery & Materials","ror":"https://ror.org/01qcq9d74","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2801339556","https://openalex.org/I2801339556","https://openalex.org/I4210111434","https://openalex.org/I4210144908","https://openalex.org/I4387152098","https://openalex.org/I4387152098"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Muyoung Kim","raw_affiliation_strings":["Semiconductor Manufacturing Research Center Korea Institute of Machinery and Materials (KIMM)  Daejeon 34103 Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semiconductor Manufacturing Research Center Korea Institute of Machinery and Materials (KIMM)  Daejeon 34103 Republic of Korea","institution_ids":["https://openalex.org/I4210111434"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101777451","display_name":"Changmin Kim","orcid":null},"institutions":[{"id":"https://openalex.org/I2250650973","display_name":"Samsung (South Korea)","ror":"https://ror.org/04w3jy968","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Changmin Kim","raw_affiliation_strings":["Memory Etch Technology Team Samsung Electronics  Pyeongtaek\u2010si 17786 Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Memory Etch Technology Team Samsung Electronics  Pyeongtaek\u2010si 17786 Republic of Korea","institution_ids":["https://openalex.org/I2250650973"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031375830","display_name":"So-Yeun Kim","orcid":null},"institutions":[{"id":"https://openalex.org/I193352282","display_name":"Daegu Gyeongbuk Institute of Science and Technology","ror":"https://ror.org/03frjya69","country_code":"KR","type":"education","lineage":["https://openalex.org/I193352282"]},{"id":"https://openalex.org/I196345858","display_name":"Chungnam National University","ror":"https://ror.org/0227as991","country_code":"KR","type":"education","lineage":["https://openalex.org/I196345858"]},{"id":"https://openalex.org/I4210111434","display_name":"Korea Institute of Machinery & Materials","ror":"https://ror.org/01qcq9d74","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2801339556","https://openalex.org/I2801339556","https://openalex.org/I4210111434","https://openalex.org/I4210144908","https://openalex.org/I4387152098","https://openalex.org/I4387152098"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Soyeun Kim","raw_affiliation_strings":["Department of Materials Science and Engineering Chungnam National University (CNU)  Daejeon 34134 Republic of Korea","Department of Physics and Chemistry Daegu Gyeongbuk Institute of Science and Technology (DGIST)  Daegu 42988 Republic of Korea","Semiconductor Manufacturing Research Center Korea Institute of Machinery and Materials (KIMM)  Daejeon 34103 Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Science and Engineering Chungnam National University (CNU)  Daejeon 34134 Republic of Korea","institution_ids":["https://openalex.org/I196345858"]},{"raw_affiliation_string":"Department of Physics and Chemistry Daegu Gyeongbuk Institute of Science and Technology (DGIST)  Daegu 42988 Republic of Korea","institution_ids":["https://openalex.org/I193352282"]},{"raw_affiliation_string":"Semiconductor Manufacturing Research Center Korea Institute of Machinery and Materials (KIMM)  Daejeon 34103 Republic of Korea","institution_ids":["https://openalex.org/I4210111434"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046761006","display_name":"Sung Kyu Jang","orcid":"https://orcid.org/0000-0003-0610-0662"},"institutions":[{"id":"https://openalex.org/I4210131650","display_name":"Korea Electronics Technology Institute","ror":"https://ror.org/039k6f508","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2801339556","https://openalex.org/I4210089395","https://openalex.org/I4210131650"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Sung Kyu Jang","raw_affiliation_strings":["Electronic Convergence Material and Device Research Center Korea Electronics Technology Institute (KETI)  Seongnam 13509 Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electronic Convergence Material and Device Research Center Korea Electronics Technology Institute (KETI)  Seongnam 13509 Republic of Korea","institution_ids":["https://openalex.org/I4210131650"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072669883","display_name":"Moon Soo Bak","orcid":"https://orcid.org/0000-0003-2538-3186"},"institutions":[{"id":"https://openalex.org/I848706","display_name":"Sungkyunkwan University","ror":"https://ror.org/04q78tk20","country_code":"KR","type":"education","lineage":["https://openalex.org/I848706"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Moon Soo Bak","raw_affiliation_strings":["School of Mechanical Engineering Sungkyunkwan University  Suwon 16419 Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Mechanical Engineering Sungkyunkwan University  Suwon 16419 Republic of Korea","institution_ids":["https://openalex.org/I848706"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046575574","display_name":"Min Sup Choi","orcid":"https://orcid.org/0000-0002-8448-4043"},"institutions":[{"id":"https://openalex.org/I196345858","display_name":"Chungnam National University","ror":"https://ror.org/0227as991","country_code":"KR","type":"education","lineage":["https://openalex.org/I196345858"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Min Sup Choi","raw_affiliation_strings":["Department of Materials Science and Engineering Chungnam National University (CNU)  Daejeon 34134 Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Science and Engineering Chungnam National University (CNU)  Daejeon 34134 Republic of Korea","institution_ids":["https://openalex.org/I196345858"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103149425","display_name":"Woo Seok Kang","orcid":"https://orcid.org/0000-0003-0047-4997"},"institutions":[{"id":"https://openalex.org/I4210111434","display_name":"Korea Institute of Machinery & Materials","ror":"https://ror.org/01qcq9d74","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2801339556","https://openalex.org/I2801339556","https://openalex.org/I4210111434","https://openalex.org/I4210144908","https://openalex.org/I4387152098","https://openalex.org/I4387152098"]},{"id":"https://openalex.org/I88761825","display_name":"Korea University of Science and Technology","ror":"https://ror.org/000qzf213","country_code":"KR","type":"education","lineage":["https://openalex.org/I88761825"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Woo Seok Kang","raw_affiliation_strings":["Mechanical Engineering KIMM Campus University of Science & Technology (UST)  Daejeon 34113 Republic of Korea","Semiconductor Manufacturing Research Center Korea Institute of Machinery and Materials (KIMM)  Daejeon 34103 Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Mechanical Engineering KIMM Campus University of Science & Technology (UST)  Daejeon 34113 Republic of Korea","institution_ids":["https://openalex.org/I88761825"]},{"raw_affiliation_string":"Semiconductor Manufacturing Research Center Korea Institute of Machinery and Materials (KIMM)  Daejeon 34103 Republic of Korea","institution_ids":["https://openalex.org/I4210111434"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043159733","display_name":"Jaehyun Kim","orcid":"https://orcid.org/0000-0002-7285-7148"},"institutions":[{"id":"https://openalex.org/I94588446","display_name":"Hongik University","ror":"https://ror.org/00egdv862","country_code":"KR","type":"education","lineage":["https://openalex.org/I94588446"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jaehyun Kim","raw_affiliation_strings":["Department of Mechanical and Design Engineering Hongik University  Sejong 30016 Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Design Engineering Hongik University  Sejong 30016 Republic of Korea","institution_ids":["https://openalex.org/I94588446"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Jaehyun Kim","orcid":null},"institutions":[{"id":"https://openalex.org/I94588446","display_name":"Hongik University","ror":"https://ror.org/00egdv862","country_code":"KR","type":"education","lineage":["https://openalex.org/I94588446"]}],"countries":["KR"],"is_corresponding":true,"raw_author_name":"Jaehyun Kim","raw_affiliation_strings":["Department of Mechanical and Design Engineering Hongik University  Sejong 30016 Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Design Engineering Hongik University  Sejong 30016 Republic of Korea","institution_ids":["https://openalex.org/I94588446"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Jaekwang Kim","orcid":null},"institutions":[{"id":"https://openalex.org/I4210111434","display_name":"Korea Institute of Machinery & Materials","ror":"https://ror.org/01qcq9d74","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2801339556","https://openalex.org/I2801339556","https://openalex.org/I4210111434","https://openalex.org/I4210144908","https://openalex.org/I4387152098","https://openalex.org/I4387152098"]},{"id":"https://openalex.org/I88761825","display_name":"Korea University of Science and Technology","ror":"https://ror.org/000qzf213","country_code":"KR","type":"education","lineage":["https://openalex.org/I88761825"]},{"id":"https://openalex.org/I94588446","display_name":"Hongik University","ror":"https://ror.org/00egdv862","country_code":"KR","type":"education","lineage":["https://openalex.org/I94588446"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jaekwang Kim","raw_affiliation_strings":["Department of Mechanical and Design Engineering Hongik University  Sejong 30016 Republic of Korea","Nano\u2010Mechatronics KIMM Campus University of Science & Technology (UST)  Daejeon 34113 Republic of Korea","Semiconductor Manufacturing Research Center Korea Institute of Machinery and Materials (KIMM)  Daejeon 34103 Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Design Engineering Hongik University  Sejong 30016 Republic of Korea","institution_ids":["https://openalex.org/I94588446"]},{"raw_affiliation_string":"Nano\u2010Mechatronics KIMM Campus University of Science & Technology (UST)  Daejeon 34113 Republic of Korea","institution_ids":["https://openalex.org/I88761825"]},{"raw_affiliation_string":"Semiconductor Manufacturing Research Center Korea Institute of Machinery and Materials (KIMM)  Daejeon 34103 Republic of Korea","institution_ids":["https://openalex.org/I4210111434"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Jaekwang Kim","orcid":null},"institutions":[{"id":"https://openalex.org/I94588446","display_name":"Hongik University","ror":"https://ror.org/00egdv862","country_code":"KR","type":"education","lineage":["https://openalex.org/I94588446"]}],"countries":["KR"],"is_corresponding":true,"raw_author_name":"Jaekwang Kim","raw_affiliation_strings":["Department of Mechanical and Design Engineering Hongik University  Sejong 30016 Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Design Engineering Hongik University  Sejong 30016 Republic of Korea","institution_ids":["https://openalex.org/I94588446"]}]},{"author_position":"last","author":{"id":null,"display_name":"Hyeong\u2010U Kim","orcid":"https://orcid.org/0000-0002-0018-9603"},"institutions":[{"id":"https://openalex.org/I4210111434","display_name":"Korea Institute of Machinery & Materials","ror":"https://ror.org/01qcq9d74","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2801339556","https://openalex.org/I2801339556","https://openalex.org/I4210111434","https://openalex.org/I4210144908","https://openalex.org/I4387152098","https://openalex.org/I4387152098"]},{"id":"https://openalex.org/I88761825","display_name":"Korea University of Science and Technology","ror":"https://ror.org/000qzf213","country_code":"KR","type":"education","lineage":["https://openalex.org/I88761825"]}],"countries":["KR"],"is_corresponding":true,"raw_author_name":"Hyeong\u2010U Kim","raw_affiliation_strings":["Nano\u2010Mechatronics KIMM Campus University of Science & Technology (UST)  Daejeon 34113 Republic of Korea","Semiconductor Manufacturing Research Center Korea Institute of Machinery and Materials (KIMM)  Daejeon 34103 Republic of Korea"],"raw_orcid":"https://orcid.org/0000-0002-0018-9603","affiliations":[{"raw_affiliation_string":"Nano\u2010Mechatronics KIMM Campus University of Science & Technology (UST)  Daejeon 34113 Republic of Korea","institution_ids":["https://openalex.org/I88761825"]},{"raw_affiliation_string":"Semiconductor Manufacturing Research Center Korea Institute of Machinery and Materials (KIMM)  Daejeon 34103 Republic of Korea","institution_ids":["https://openalex.org/I4210111434"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":17,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4210111434","https://openalex.org/I88761825","https://openalex.org/I94588446"],"apc_list":{"value":2750,"currency":"USD","value_usd":2750},"apc_paid":{"value":2750,"currency":"USD","value_usd":2750},"fwci":0.6214,"has_fulltext":true,"cited_by_count":1,"citation_normalized_percentile":{"value":0.72615139,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":96,"max":98},"biblio":{"volume":"8","issue":"1","first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9836999773979187,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9836999773979187,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.982200026512146,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.9818000197410583,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/colorimetry","display_name":"Colorimetry","score":0.8052769899368286},{"id":"https://openalex.org/keywords/in-situ","display_name":"In situ","score":0.7325581908226013},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.5394909977912903},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.48098766803741455},{"id":"https://openalex.org/keywords/computer-vision","display_name":"Computer vision","score":0.46999701857566833},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4455554485321045},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.416655957698822},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.26839518547058105},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.14406120777130127}],"concepts":[{"id":"https://openalex.org/C64299311","wikidata":"https://www.wikidata.org/wiki/Q374535","display_name":"Colorimetry","level":2,"score":0.8052769899368286},{"id":"https://openalex.org/C2777822432","wikidata":"https://www.wikidata.org/wiki/Q216681","display_name":"In situ","level":2,"score":0.7325581908226013},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.5394909977912903},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.48098766803741455},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.46999701857566833},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4455554485321045},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.416655957698822},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.26839518547058105},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.14406120777130127},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1002/aisy.202500517","is_oa":true,"landing_page_url":"https://doi.org/10.1002/aisy.202500517","pdf_url":"https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/aisy.202500517","source":{"id":"https://openalex.org/S4210212817","display_name":"Advanced Intelligent Systems","issn_l":"2640-4567","issn":["2640-4567"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Advanced Intelligent Systems","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:383b40b971b542f4a61fe905028e8882","is_oa":true,"landing_page_url":"https://doaj.org/article/383b40b971b542f4a61fe905028e8882","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Advanced Intelligent Systems, Vol 8, Iss 1, Pp n/a-n/a (2026)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.1002/aisy.202500517","is_oa":true,"landing_page_url":"https://doi.org/10.1002/aisy.202500517","pdf_url":"https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/aisy.202500517","source":{"id":"https://openalex.org/S4210212817","display_name":"Advanced Intelligent Systems","issn_l":"2640-4567","issn":["2640-4567"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Advanced Intelligent Systems","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320321237","display_name":"Hongik University","ror":"https://ror.org/00egdv862"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4413402811.pdf","grobid_xml":"https://content.openalex.org/works/W4413402811.grobid-xml"},"referenced_works_count":42,"referenced_works":["https://openalex.org/W1966222493","https://openalex.org/W1968355555","https://openalex.org/W1980815942","https://openalex.org/W1988600768","https://openalex.org/W1995800559","https://openalex.org/W1996609199","https://openalex.org/W2017270223","https://openalex.org/W2052464313","https://openalex.org/W2054095480","https://openalex.org/W2086386645","https://openalex.org/W2086613754","https://openalex.org/W2140595615","https://openalex.org/W2169583634","https://openalex.org/W2332438708","https://openalex.org/W2466111863","https://openalex.org/W2488627123","https://openalex.org/W2890917265","https://openalex.org/W2905019842","https://openalex.org/W2909560691","https://openalex.org/W2947096838","https://openalex.org/W2972397302","https://openalex.org/W2978915149","https://openalex.org/W3015096400","https://openalex.org/W3016753807","https://openalex.org/W3041317547","https://openalex.org/W3112259026","https://openalex.org/W3162108464","https://openalex.org/W3196091311","https://openalex.org/W3214807145","https://openalex.org/W3217336002","https://openalex.org/W4206546042","https://openalex.org/W4247556240","https://openalex.org/W4283381515","https://openalex.org/W4317951653","https://openalex.org/W4380681844","https://openalex.org/W4387058284","https://openalex.org/W4387149357","https://openalex.org/W4387252344","https://openalex.org/W4387781124","https://openalex.org/W4396802182","https://openalex.org/W4404039177","https://openalex.org/W4406061949"],"related_works":["https://openalex.org/W2772917594","https://openalex.org/W2036807459","https://openalex.org/W2058170566","https://openalex.org/W2755342338","https://openalex.org/W2166024367","https://openalex.org/W3116076068","https://openalex.org/W2229312674","https://openalex.org/W2951359407","https://openalex.org/W2079911747","https://openalex.org/W1969923398"],"abstract_inverted_index":{"This":[0,85],"study":[1],"presents":[2],"a":[3,82,89,130],"noncontact,":[4],"in":[5,12,97],"situ":[6,27],"framework":[7],"for":[8,136],"etch":[9,46,116],"depth":[10,47,117],"prediction":[11],"plasma":[13,68,137],"etching":[14],"using":[15],"machine":[16],"learning":[17],"(ML)":[18],"and":[19,35,54,71,107,133],"digital":[20],"image":[21],"colorimetry":[22],"(DIC).":[23],"While":[24],"conventional":[25],"ex":[26],"methods":[28],"offer":[29],"accuracy,":[30],"they":[31],"suffer":[32],"from":[33,110],"delays":[34],"contamination":[36],"risks.":[37],"To":[38],"overcome":[39],"these,":[40],"two":[41],"approaches":[42],"are":[43],"explored.":[44],"First,":[45],"is":[48,86,102],"initially":[49],"obtained":[50],"through":[51],"ellipsometry":[52],"mapping":[53],"used":[55],"to":[56,94],"train":[57],"an":[58],"artificial":[59],"neural":[60,91],"network":[61,92],"(ANN)":[62],"based":[63],"on":[64,120],"process":[65,121,138],"parameters":[66],"(e.g.,":[67],"power,":[69],"pressure,":[70],"gas":[72],"flow),":[73],"achieving":[74],"significantly":[75],"lower":[76],"mean":[77],"squared":[78],"error":[79],"(MSE)":[80],"than":[81],"linear":[83],"baseline.":[84],"extended":[87],"with":[88],"Bayesian":[90],"(BNN)":[93],"capture":[95],"uncertainty":[96],"the":[98],"predictions.":[99],"Second,":[100],"it":[101],"demonstrated":[103],"that":[104],"red,":[105],"green,":[106],"blue":[108],"data":[109],"DIC":[111],"alone":[112],"can":[113],"effectively":[114],"predict":[115],"without":[118],"relying":[119],"parameters.":[122],"Together,":[123],"these":[124],"findings":[125],"establish":[126],"ML\u2010DIC":[127],"integration":[128],"as":[129],"real\u2010time,":[131],"low\u2010cost,":[132],"noninvasive":[134],"alternative":[135],"monitoring.":[139]},"counts_by_year":[{"year":2026,"cited_by_count":1}],"updated_date":"2026-05-07T13:39:58.223016","created_date":"2025-10-10T00:00:00"}