{"id":"https://openalex.org/W899173497","doi":"https://doi.org/10.4229/23rdeupvsec2008-2cv.5.42","title":"Development of an In-Line Capable Sputtering Process of Silicon Nitride for Crystalline Silicon Solar Cells","display_name":"Development of an In-Line Capable Sputtering Process of Silicon Nitride for Crystalline Silicon Solar Cells","publication_year":2008,"publication_date":"2008-01-01","ids":{"openalex":"https://openalex.org/W899173497","doi":"https://doi.org/10.4229/23rdeupvsec2008-2cv.5.42","mag":"899173497"},"language":"en","primary_location":{"id":"pmh:oai:kops.uni-konstanz.de:123456789/999","doi":null,"is_oa":true,"landing_page_url":"http://nbn-resolving.de/urn:nbn:de:bsz:352-opus-122377","pdf_url":"http://nbn-resolving.de/urn:nbn:de:bsz:352-opus-122377","source":{"id":"https://openalex.org/S4306401487","display_name":"KOPS (University of Konstanz)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I189712700","host_organization_name":"University of Konstanz","host_organization_lineage":["https://openalex.org/I189712700"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"LINCOT, D., Hrsg. und andere. The compiled state-of-the-art of PV solar technology and deployment : 23rd European Photovoltaic Solar Energy Conference. M\u00fcnchen: WIP Renewable Energies, 2008, S. 1717-1719. Verf\u00fcgbar unter: doi: 10.4229/23rdEUPVSEC2008-2CV.5.42","raw_type":"doc-type:conferenceObject"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["datacite"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"http://nbn-resolving.de/urn:nbn:de:bsz:352-opus-122377","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5005319886","display_name":"Stefan Scholz","orcid":"https://orcid.org/0009-0004-9810-8331","observed_orcids":["https://orcid.org/0009-0004-9810-8331"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Scholz, S.","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036626967","display_name":"S. Voser","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Voser, S.","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068437098","display_name":"G. Dovids","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Dovids, G.","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5008186956","display_name":"Helge Haverkamp","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Haverkamp, H.","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5074977563","display_name":"Giso Hahn","orcid":"https://orcid.org/0000-0001-8292-1281","observed_orcids":["https://orcid.org/0000-0001-8292-1281"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Hahn, G.","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":true,"cited_by_count":0,"citation_normalized_percentile":{"value":0.00995977,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1717","last_page":"1719"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.9932000041007996,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.9932000041007996,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.00419999985024333,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.00039999998989515007,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/silicon-nitride","display_name":"silicon nitride","score":0.8299999833106995},{"id":"https://openalex.org/keywords/sputtering","display_name":"sputtering","score":0.7110000252723694},{"id":"https://openalex.org/keywords/antireflection-coatings","display_name":"antireflection coatings","score":0.9769999980926514},{"id":"https://openalex.org/keywords/crystalline-silicon-solar-cells","display_name":"crystalline silicon solar cells","score":0.9929999709129333},{"id":"https://openalex.org/keywords/molecular-hydrogen","display_name":"molecular hydrogen","score":0.871999979019165},{"id":"https://openalex.org/keywords/deposition-rate","display_name":"deposition rate","score":0.734000027179718},{"id":"https://openalex.org/keywords/surface-passivation","display_name":"surface passivation","score":0.9380000233650208},{"id":"https://openalex.org/keywords/czochralski-wafers","display_name":"Czochralski wafers","score":0.902999997138977},{"id":"https://openalex.org/keywords/screen-printing","display_name":"screen printing","score":0.6290000081062317},{"id":"https://openalex.org/keywords/solar-cell-efficiency","display_name":"solar cell efficiency","score":0.7450000047683716}],"concepts":[{"id":"https://openalex.org/C26953177","wikidata":"https://www.wikidata.org/wiki/Q3960534","display_name":"Monocrystalline silicon","level":3,"score":0.9093972444534302},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.7817085981369019},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.7577394247055054},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.726993978023529},{"id":"https://openalex.org/C2777431650","wikidata":"https://www.wikidata.org/wiki/Q413828","display_name":"Silicon nitride","level":3,"score":0.6931383609771729},{"id":"https://openalex.org/C33574316","wikidata":"https://www.wikidata.org/wiki/Q917260","display_name":"Passivation","level":3,"score":0.6565017104148865},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6411608457565308},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5439735054969788},{"id":"https://openalex.org/C2779667780","wikidata":"https://www.wikidata.org/wiki/Q18206302","display_name":"Crystalline silicon","level":3,"score":0.514032244682312},{"id":"https://openalex.org/C2780824857","wikidata":"https://www.wikidata.org/wiki/Q58803","display_name":"Solar cell","level":2,"score":0.49472472071647644},{"id":"https://openalex.org/C191716631","wikidata":"https://www.wikidata.org/wiki/Q31887","display_name":"Copper indium gallium selenide solar cells","level":3,"score":0.4637957215309143},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.44975677132606506},{"id":"https://openalex.org/C195114451","wikidata":"https://www.wikidata.org/wiki/Q1798244","display_name":"LOCOS","level":4,"score":0.4431096911430359},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3011554777622223},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.19353768229484558},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.15111255645751953},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"pmh:oai:kops.uni-konstanz.de:123456789/999","doi":null,"is_oa":true,"landing_page_url":"http://nbn-resolving.de/urn:nbn:de:bsz:352-opus-122377","pdf_url":"http://nbn-resolving.de/urn:nbn:de:bsz:352-opus-122377","source":{"id":"https://openalex.org/S4306401487","display_name":"KOPS (University of Konstanz)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I189712700","host_organization_name":"University of Konstanz","host_organization_lineage":["https://openalex.org/I189712700"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"LINCOT, D., Hrsg. und andere. The compiled state-of-the-art of PV solar technology and deployment : 23rd European Photovoltaic Solar Energy Conference. M\u00fcnchen: WIP Renewable Energies, 2008, S. 1717-1719. Verf\u00fcgbar unter: doi: 10.4229/23rdEUPVSEC2008-2CV.5.42","raw_type":"doc-type:conferenceObject"},{"id":"doi:10.4229/23rdeupvsec2008-2cv.5.42","doi":"https://doi.org/10.4229/23rdeupvsec2008-2cv.5.42","is_oa":true,"landing_page_url":"https://doi.org/10.4229/23rdeupvsec2008-2cv.5.42","pdf_url":null,"source":{"id":"https://openalex.org/S7407053010","display_name":"EU PVSEC","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"article-journal"},{"id":"mag:899173497","doi":null,"is_oa":false,"landing_page_url":"https://kops.uni-konstanz.de/handle/123456789/999","pdf_url":null,"source":{"id":"https://openalex.org/S4306499005","display_name":"23rd European Photovoltaic Solar Energy Conference and Exhibition, 1-5 September 2008, Valencia, Spain","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"23rd European Photovoltaic Solar Energy Conference and Exhibition, 1-5 September 2008, Valencia, Spain","raw_type":null}],"best_oa_location":{"id":"pmh:oai:kops.uni-konstanz.de:123456789/999","doi":null,"is_oa":true,"landing_page_url":"http://nbn-resolving.de/urn:nbn:de:bsz:352-opus-122377","pdf_url":"http://nbn-resolving.de/urn:nbn:de:bsz:352-opus-122377","source":{"id":"https://openalex.org/S4306401487","display_name":"KOPS (University of Konstanz)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I189712700","host_organization_name":"University of Konstanz","host_organization_lineage":["https://openalex.org/I189712700"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"LINCOT, D., Hrsg. und andere. The compiled state-of-the-art of PV solar technology and deployment : 23rd European Photovoltaic Solar Energy Conference. M\u00fcnchen: WIP Renewable Energies, 2008, S. 1717-1719. Verf\u00fcgbar unter: doi: 10.4229/23rdEUPVSEC2008-2CV.5.42","raw_type":"doc-type:conferenceObject"},"sustainable_development_goals":[{"score":0.75,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W899173497.pdf","grobid_xml":"https://content.openalex.org/works/W899173497.grobid-xml"},"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W7070517465","https://openalex.org/W7061960992","https://openalex.org/W2107329474","https://openalex.org/W2063301086","https://openalex.org/W2010005452","https://openalex.org/W6996403837","https://openalex.org/W7135353065","https://openalex.org/W2019393051","https://openalex.org/W1558197025","https://openalex.org/W2092365420"],"abstract_inverted_index":{"The":[0],"purpose":[1],"of":[2,16,39,45,81,107,122,130,148],"this":[3],"work":[4],"is":[5,28],"to":[6,29,77,87],"develop":[7],"a":[8,31,43,111,115,127,145,151],"high":[9],"rate":[10,133],"sputtering":[11,132],"process":[12,58,67,112],"for":[13,21,36],"the":[14,37,46,66,79,82,105,119,123,131,135],"deposition":[15,73],"silicon":[17,23],"nitride":[18],"antireflection":[19],"coatings":[20],"crystalline":[22],"solar":[24],"cells.":[25],"Our":[26],"goal":[27],"achieve":[30],"cycle":[32],"time":[33],"that":[34,104],"allows":[35],"processing":[38,54],"single":[40],"wafers":[41,98],"without":[42],"reduction":[44],"production":[47],"line":[48],"throughput.":[49],"We":[50,101,142],"have":[51,102,143],"varied":[52],"several":[53],"parameters":[55],"such":[56],"as":[57,69,71,110],"gas":[59,63,113],"composition":[60],"and":[61],"individual":[62],"flows":[64],"into":[65],"chamber":[68],"well":[70],"different":[72],"rates.":[74],"In":[75],"order":[76],"assess":[78],"performance":[80,138],"deposited":[83,124],"layers":[84],"with":[85],"respect":[86],"their":[88],"passivation":[89,120],"quality":[90,121],"complete":[91],"cells":[92],"were":[93],"processed":[94],"on":[95,118,134],"monocrystalline":[96],"Czochralski":[97],"(125x125":[99],"mm2).":[100],"found":[103],"implementation":[106],"molecular":[108],"hydrogen":[109],"has":[114],"detrimental":[116],"effect":[117],"layers.":[125],"Furthermore,":[126],"clear":[128],"influence":[129],"overall":[136],"cell":[137,146],"can":[139],"be":[140],"seen.":[141],"achieved":[144],"efficiency":[147],"17.5%":[149],"applying":[150],"standard":[152],"screen":[153],"printed":[154],"process.":[155]},"counts_by_year":[],"updated_date":"2026-08-28T12:50:07.497085","created_date":"2016-06-24T00:00:00"}