{"id":"https://openalex.org/W830774073","doi":"https://doi.org/10.6028/nbs.sp.400-24","title":"A laser scanner for semiconductor devices","display_name":"A laser scanner for semiconductor devices","publication_year":1977,"publication_date":"1977-01-01","ids":{"openalex":"https://openalex.org/W830774073","doi":"https://doi.org/10.6028/nbs.sp.400-24","mag":"830774073"},"language":"en","primary_location":{"id":"doi:10.6028/nbs.sp.400-24","doi":"https://doi.org/10.6028/nbs.sp.400-24","is_oa":true,"landing_page_url":"https://doi.org/10.6028/nbs.sp.400-24","pdf_url":"https://doi.org/10.6028/nbs.sp.400-24","source":null,"license":"public-domain","license_id":"https://openalex.org/licenses/public-domain","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"National Bureau of Standards","raw_type":"report"},"volume":null,"type":"report","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://doi.org/10.6028/nbs.sp.400-24","any_repository_has_fulltext":null},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5113556916","display_name":"D.E. Sawyer","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"David E Sawyer","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5032305656","display_name":"David W. Berning","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"David W Berning","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":true,"cited_by_count":6,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11429","display_name":"Semiconductor Lasers and Optical Devices","score":0.31709998846054077,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11429","display_name":"Semiconductor Lasers and Optical Devices","score":0.31709998846054077,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.22200000286102295,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14158","display_name":"Optical Systems and Laser Technology","score":0.14309999346733093,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/laser-scanner","display_name":"laser scanner","score":0.9129999876022339},{"id":"https://openalex.org/keywords/semiconductor-devices","display_name":"semiconductor devices","score":0.8730000257492065},{"id":"https://openalex.org/keywords/half-wave-plate","display_name":"half-wave plate","score":0.6769999861717224},{"id":"https://openalex.org/keywords/half-silvered-mirror","display_name":"half-silvered mirror","score":0.8429999947547913},{"id":"https://openalex.org/keywords/color-monitors","display_name":"color monitors","score":0.9539999961853027}],"concepts":[{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.6755418181419373},{"id":"https://openalex.org/C2779751349","wikidata":"https://www.wikidata.org/wiki/Q1474480","display_name":"Scanner","level":2,"score":0.6532040238380432},{"id":"https://openalex.org/C108225325","wikidata":"https://www.wikidata.org/wiki/Q11456","display_name":"Semiconductor","level":2,"score":0.6523663997650146},{"id":"https://openalex.org/C141349535","wikidata":"https://www.wikidata.org/wiki/Q1361664","display_name":"Laser scanning","level":3,"score":0.6356908082962036},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4653872549533844},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.43903791904449463},{"id":"https://openalex.org/C79635011","wikidata":"https://www.wikidata.org/wiki/Q175805","display_name":"Semiconductor device","level":3,"score":0.4372071921825409},{"id":"https://openalex.org/C121477167","wikidata":"https://www.wikidata.org/wiki/Q17154002","display_name":"Semiconductor laser theory","level":3,"score":0.4314194917678833},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3940563499927521},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.37798184156417847},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.22489917278289795},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.1850832998752594},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.6028/nbs.sp.400-24","doi":"https://doi.org/10.6028/nbs.sp.400-24","is_oa":true,"landing_page_url":"https://doi.org/10.6028/nbs.sp.400-24","pdf_url":"https://doi.org/10.6028/nbs.sp.400-24","source":null,"license":"public-domain","license_id":"https://openalex.org/licenses/public-domain","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"National Bureau of Standards","raw_type":"report"}],"best_oa_location":{"id":"doi:10.6028/nbs.sp.400-24","doi":"https://doi.org/10.6028/nbs.sp.400-24","is_oa":true,"landing_page_url":"https://doi.org/10.6028/nbs.sp.400-24","pdf_url":"https://doi.org/10.6028/nbs.sp.400-24","source":null,"license":"public-domain","license_id":"https://openalex.org/licenses/public-domain","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"National Bureau of Standards","raw_type":"report"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W830774073.pdf","grobid_xml":"https://content.openalex.org/works/W830774073.grobid-xml"},"referenced_works_count":5,"referenced_works":["https://openalex.org/W1999755928","https://openalex.org/W2020518594","https://openalex.org/W2075163947","https://openalex.org/W2137577596","https://openalex.org/W3001809205"],"related_works":["https://openalex.org/W2095043481","https://openalex.org/W2139368356","https://openalex.org/W6996588332","https://openalex.org/W3181721215","https://openalex.org/W4321265898","https://openalex.org/W7067069768","https://openalex.org/W7041078378","https://openalex.org/W7050625090","https://openalex.org/W2124520587","https://openalex.org/W7013149990"],"abstract_inverted_index":null,"counts_by_year":[{"year":2017,"cited_by_count":1}],"updated_date":"2026-11-03T10:50:19.383937","created_date":"2016-06-24T00:00:00"}