{"id":"https://openalex.org/W811769015","doi":null,"title":"Anisotropic high aspect ratio etch development for fluorinated polymers with stress relief technique","display_name":"Anisotropic high aspect ratio etch development for fluorinated polymers with stress relief technique","publication_year":2006,"publication_date":"2006-01-01","ids":{"openalex":"https://openalex.org/W811769015","mag":"811769015"},"language":"en","primary_location":{"id":"pmh:oai:scholarsarchive.byu.edu:facpub-1976","doi":null,"is_oa":true,"landing_page_url":"https://scholarsarchive.byu.edu/facpub/977","pdf_url":"https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=1976&context=facpub","source":{"id":"https://openalex.org/S4377196308","display_name":"ScholarsArchive  (Brigham Young University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I100005738","host_organization_name":"Brigham Young University","host_organization_lineage":["https://openalex.org/I100005738"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Faculty Publications","raw_type":"text"},"volume":null,"type":"article","indexed_in":[],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=1976&context=facpub","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100454609","display_name":"Seunghyun Kim","orcid":"https://orcid.org/0000-0001-5950-7592","observed_orcids":["https://orcid.org/0000-0001-5950-7592"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Seunghyun Kim","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0001-5950-7592","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5014463843","display_name":"Gregory P. Nordin","orcid":"https://orcid.org/0000-0001-7241-5764","observed_orcids":["https://orcid.org/0000-0001-7241-5764"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Gregory P. Nordin","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0001-7241-5764","affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5054283328","display_name":"Nazli Rahmanian","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Nazli Rahmanian","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.6745,"has_fulltext":true,"cited_by_count":2,"citation_normalized_percentile":{"value":0.72974899,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10781","display_name":"Plasma Diagnostics and Applications","score":0.9115999937057495,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10781","display_name":"Plasma Diagnostics and Applications","score":0.9115999937057495,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.022600000724196434,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.01360000018030405,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/anisotropic-etching","display_name":"anisotropic etching","score":0.9359999895095825},{"id":"https://openalex.org/keywords/high-aspect-ratio-etching","display_name":"high aspect ratio etching","score":0.9470000267028809},{"id":"https://openalex.org/keywords/fluorinated-polymers","display_name":"fluorinated polymers","score":0.9710000157356262},{"id":"https://openalex.org/keywords/inductively-coupled-plasma-reactive-ion-etching","display_name":"inductively coupled plasma reactive ion etching","score":0.8899999856948853},{"id":"https://openalex.org/keywords/waveguide-splitters","display_name":"waveguide splitters","score":0.8519999980926514}],"concepts":[{"id":"https://openalex.org/C85725439","wikidata":"https://www.wikidata.org/wiki/Q466686","display_name":"Anisotropy","level":2,"score":0.599070131778717},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5672051310539246},{"id":"https://openalex.org/C521977710","wikidata":"https://www.wikidata.org/wiki/Q81163","display_name":"Polymer","level":2,"score":0.5597290992736816},{"id":"https://openalex.org/C21036866","wikidata":"https://www.wikidata.org/wiki/Q181767","display_name":"Stress (linguistics)","level":2,"score":0.5174108743667603},{"id":"https://openalex.org/C82558694","wikidata":"https://www.wikidata.org/wiki/Q1545619","display_name":"Aspect ratio (aeronautics)","level":2,"score":0.4404159188270569},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.43020790815353394},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.28536534309387207},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.14652177691459656},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.07617467641830444},{"id":"https://openalex.org/C41895202","wikidata":"https://www.wikidata.org/wiki/Q8162","display_name":"Linguistics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"pmh:oai:scholarsarchive.byu.edu:facpub-1976","doi":null,"is_oa":true,"landing_page_url":"https://scholarsarchive.byu.edu/facpub/977","pdf_url":"https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=1976&context=facpub","source":{"id":"https://openalex.org/S4377196308","display_name":"ScholarsArchive  (Brigham Young University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I100005738","host_organization_name":"Brigham Young University","host_organization_lineage":["https://openalex.org/I100005738"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Faculty Publications","raw_type":"text"},{"id":"mag:811769015","doi":null,"is_oa":false,"landing_page_url":"https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=1976&context=facpub","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":null}],"best_oa_location":{"id":"pmh:oai:scholarsarchive.byu.edu:facpub-1976","doi":null,"is_oa":true,"landing_page_url":"https://scholarsarchive.byu.edu/facpub/977","pdf_url":"https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=1976&context=facpub","source":{"id":"https://openalex.org/S4377196308","display_name":"ScholarsArchive  (Brigham Young University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I100005738","host_organization_name":"Brigham Young University","host_organization_lineage":["https://openalex.org/I100005738"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Faculty Publications","raw_type":"text"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W811769015.pdf","grobid_xml":"https://content.openalex.org/works/W811769015.grobid-xml"},"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2000869589","https://openalex.org/W2334242072","https://openalex.org/W1981829339","https://openalex.org/W2136016320","https://openalex.org/W2056222305","https://openalex.org/W1980512471","https://openalex.org/W2324046933","https://openalex.org/W2792170123","https://openalex.org/W2514468448","https://openalex.org/W1976093626"],"abstract_inverted_index":{"The":[0,42,68],"authors":[1,69],"have":[2],"developed":[3],"an":[4,28],"anisotropic,":[5],"high":[6],"aspect":[7],"ratio":[8],"(18:1)":[9],"etch":[10,25,46],"for":[11,44],"perfluorocyclobutyl":[12],"(PFCB)":[13],"polymers":[14],"with":[15],"trenches":[16,53,98],"as":[17,19,54],"narrow":[18],"800":[20],"nm":[21],"using":[22],"a":[23,71,85],"CO/O2":[24],"chemistry":[26],"in":[27],"inductively":[29],"coupled":[30],"plasma":[31],"reactive":[32],"ion":[33],"etcher.":[34],"Anisotropy":[35],"is":[36,48],"achieved":[37],"by":[38],"carbon":[39],"sidewall":[40],"passivation.":[41],"motivation":[43],"this":[45,89],"development":[47],"to":[49,77],"use":[50,93],"the":[51,81,92,103],"air":[52],"very":[55],"compact":[56],"waveguide":[57],"splitters":[58],"[S.":[59],"Kim":[60],"et":[61],"al.,":[62],"Opt.":[63],"Eng.":[64],"45,":[65],"054602":[66],"(2006)]":[67],"report":[70],"new":[72],"trench":[73],"widening":[74,90],"mechanism":[75],"due":[76],"tensile":[78],"stress":[79,96],"of":[80,87,94,102],"PFCB":[82],"films":[83],"and":[84],"method":[86],"avoiding":[88],"through":[91],"additional":[95],"relief":[97],"on":[99],"both":[100],"sides":[101],"desired":[104],"trench.":[105]},"counts_by_year":[],"updated_date":"2026-08-31T07:19:18.363097","created_date":"2016-06-24T00:00:00"}