{"id":"https://openalex.org/W793373367","doi":"https://doi.org/10.1016/j.vacuum.2015.06.027","title":"Improvement of optical and electrical properties of ITO thin films by electro-annealing","display_name":"Improvement of optical and electrical properties of ITO thin films by electro-annealing","publication_year":2015,"publication_date":"2015-06-23","ids":{"openalex":"https://openalex.org/W793373367","doi":"https://doi.org/10.1016/j.vacuum.2015.06.027","mag":"793373367"},"language":"en","primary_location":{"id":"doi:10.1016/j.vacuum.2015.06.027","doi":"https://doi.org/10.1016/j.vacuum.2015.06.027","is_oa":true,"landing_page_url":"https://doi.org/10.1016/j.vacuum.2015.06.027","pdf_url":"https://www.sciencedirect.com/science/article/pii/S0042207X15002894","source":{"id":"https://openalex.org/S86481247","display_name":"Vacuum","issn_l":"0042-207X","issn":["0042-207X","1879-2715"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Vacuum","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"bronze","oa_url":"https://www.sciencedirect.com/science/article/pii/S0042207X15002894","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101576526","display_name":"Hasan K\u00f6seo\u011flu","orcid":"https://orcid.org/0000-0002-9869-2708","observed_orcids":["https://orcid.org/0000-0002-9869-2708"]},"institutions":[{"id":"https://openalex.org/I120217413","display_name":"Izmir Institute of Technology","ror":"https://ror.org/03stptj97","country_code":"TR","type":"education","lineage":["https://openalex.org/I120217413"]}],"countries":["TR"],"is_corresponding":true,"raw_author_name":"Hasan Koseoglu","raw_affiliation_strings":["Department of Material Science and Engineering, Izmir Institute of Technology, 35430, Urla, Izmir, Turkey","Department of Physics, Izmir Institute of Technology, 35430, Urla, Izmir, Turkey"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Material Science and Engineering, Izmir Institute of Technology, 35430, Urla, Izmir, Turkey","institution_ids":["https://openalex.org/I120217413"]},{"raw_affiliation_string":"Department of Physics, Izmir Institute of Technology, 35430, Urla, Izmir, Turkey","institution_ids":["https://openalex.org/I120217413"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108257929","display_name":"F. Turkoglu","orcid":"https://orcid.org/0000-0003-0378-8975","observed_orcids":["https://orcid.org/0000-0003-0378-8975"]},"institutions":[{"id":"https://openalex.org/I120217413","display_name":"Izmir Institute of Technology","ror":"https://ror.org/03stptj97","country_code":"TR","type":"education","lineage":["https://openalex.org/I120217413"]}],"countries":["TR"],"is_corresponding":false,"raw_author_name":"Fulya Turkoglu","raw_affiliation_strings":["Department of Material Science and Engineering, Izmir Institute of Technology, 35430, Urla, Izmir, Turkey","Department of Physics, Izmir Institute of Technology, 35430, Urla, Izmir, Turkey"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Material Science and Engineering, Izmir Institute of Technology, 35430, Urla, Izmir, Turkey","institution_ids":["https://openalex.org/I120217413"]},{"raw_affiliation_string":"Department of Physics, Izmir Institute of Technology, 35430, Urla, Izmir, Turkey","institution_ids":["https://openalex.org/I120217413"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5059982968","display_name":"Metin Kurt","orcid":"https://orcid.org/0000-0002-9603-8788","observed_orcids":["https://orcid.org/0000-0002-9603-8788"]},"institutions":[{"id":"https://openalex.org/I120217413","display_name":"Izmir Institute of Technology","ror":"https://ror.org/03stptj97","country_code":"TR","type":"education","lineage":["https://openalex.org/I120217413"]}],"countries":["TR"],"is_corresponding":false,"raw_author_name":"Metin Kurt","raw_affiliation_strings":["Department of Physics, Izmir Institute of Technology, 35430, Urla, Izmir, Turkey"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, Izmir Institute of Technology, 35430, Urla, Izmir, Turkey","institution_ids":["https://openalex.org/I120217413"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5038253970","display_name":"Mutlu Devran Yaman","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I120217413","display_name":"Izmir Institute of Technology","ror":"https://ror.org/03stptj97","country_code":"TR","type":"education","lineage":["https://openalex.org/I120217413"]}],"countries":["TR"],"is_corresponding":false,"raw_author_name":"Mutlu D. Yaman","raw_affiliation_strings":["Department of Physics, Izmir Institute of Technology, 35430, Urla, Izmir, Turkey","Teknoma Technological Materials Ltd, IZTEKGEB, IZTECH Campus, Urla, Izmir, Turkey"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, Izmir Institute of Technology, 35430, Urla, Izmir, Turkey","institution_ids":["https://openalex.org/I120217413"]},{"raw_affiliation_string":"Teknoma Technological Materials Ltd, IZTEKGEB, IZTECH Campus, Urla, Izmir, Turkey","institution_ids":["https://openalex.org/I120217413"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044815972","display_name":"Fatime G\u00fcl\u015fah Ak\u00e7a","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I120217413","display_name":"Izmir Institute of Technology","ror":"https://ror.org/03stptj97","country_code":"TR","type":"education","lineage":["https://openalex.org/I120217413"]}],"countries":["TR"],"is_corresponding":false,"raw_author_name":"Fatime G. Akca","raw_affiliation_strings":["Department of Physics, Izmir Institute of Technology, 35430, Urla, Izmir, Turkey"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, Izmir Institute of Technology, 35430, Urla, Izmir, Turkey","institution_ids":["https://openalex.org/I120217413"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5087509320","display_name":"G\u00fclnur Ayg\u00fcn","orcid":"https://orcid.org/0000-0003-0860-2914","observed_orcids":["https://orcid.org/0000-0003-0860-2914"]},"institutions":[{"id":"https://openalex.org/I120217413","display_name":"Izmir Institute of Technology","ror":"https://ror.org/03stptj97","country_code":"TR","type":"education","lineage":["https://openalex.org/I120217413"]}],"countries":["TR"],"is_corresponding":false,"raw_author_name":"Gulnur Aygun","raw_affiliation_strings":["Department of Physics, Izmir Institute of Technology, 35430, Urla, Izmir, Turkey"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, Izmir Institute of Technology, 35430, Urla, Izmir, Turkey","institution_ids":["https://openalex.org/I120217413"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5049202150","display_name":"Lutfi Ozyuzer","orcid":"https://orcid.org/0000-0001-7630-3938","observed_orcids":["https://orcid.org/0000-0001-7630-3938"]},"institutions":[{"id":"https://openalex.org/I120217413","display_name":"Izmir Institute of Technology","ror":"https://ror.org/03stptj97","country_code":"TR","type":"education","lineage":["https://openalex.org/I120217413"]}],"countries":["TR"],"is_corresponding":false,"raw_author_name":"Lutfi Ozyuzer","raw_affiliation_strings":["Department of Physics, Izmir Institute of Technology, 35430, Urla, Izmir, Turkey"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, Izmir Institute of Technology, 35430, Urla, Izmir, Turkey","institution_ids":["https://openalex.org/I120217413"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5101576526"],"corresponding_institution_ids":["https://openalex.org/I120217413"],"apc_list":{"value":2860,"currency":"USD","value_usd":2860},"apc_paid":null,"fwci":2.6578,"has_fulltext":true,"cited_by_count":70,"citation_normalized_percentile":{"value":0.89902928,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":99},"biblio":{"volume":"120","issue":null,"first_page":"8","last_page":"13"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.7318999767303467,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.7318999767303467,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10090","display_name":"ZnO doping and properties","score":0.2549000084400177,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.0013000000035390258,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ito-thin-films","display_name":"ITO thin films","score":0.8690000176429749},{"id":"https://openalex.org/keywords/indium-tin-oxide","display_name":"indium tin oxide","score":0.902999997138977},{"id":"https://openalex.org/keywords/optical-properties","display_name":"optical properties","score":0.6819999814033508},{"id":"https://openalex.org/keywords/electrical-properties","display_name":"electrical properties","score":0.9269999861717224},{"id":"https://openalex.org/keywords/sheet-resistance","display_name":"sheet resistance","score":0.9290000200271606},{"id":"https://openalex.org/keywords/optical-transmittance","display_name":"optical transmittance","score":0.8500000238418579},{"id":"https://openalex.org/keywords/crystallinity","display_name":"crystallinity","score":0.8349999785423279},{"id":"https://openalex.org/keywords/band-gap","display_name":"band gap","score":0.953000009059906},{"id":"https://openalex.org/keywords/electrical-resistivity","display_name":"electrical resistivity","score":0.8809999823570251},{"id":"https://openalex.org/keywords/vacuum-annealing","display_name":"vacuum annealing","score":0.6850000023841858},{"id":"https://openalex.org/keywords/air-annealing","display_name":"air annealing","score":0.8690000176429749},{"id":"https://openalex.org/keywords/dc-magnetron-sputtering","display_name":"DC magnetron sputtering","score":0.8899999856948853}],"concepts":[{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.838219404220581},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7827200889587402},{"id":"https://openalex.org/C2777855556","wikidata":"https://www.wikidata.org/wiki/Q4339544","display_name":"Annealing (glass)","level":2,"score":0.7767230272293091},{"id":"https://openalex.org/C46275449","wikidata":"https://www.wikidata.org/wiki/Q2458815","display_name":"Crystallinity","level":2,"score":0.7648463249206543},{"id":"https://openalex.org/C69990965","wikidata":"https://www.wikidata.org/wiki/Q65402698","display_name":"Electrical resistivity and conductivity","level":2,"score":0.6602581739425659},{"id":"https://openalex.org/C66825105","wikidata":"https://www.wikidata.org/wiki/Q354718","display_name":"Sheet resistance","level":3,"score":0.637563169002533},{"id":"https://openalex.org/C150493377","wikidata":"https://www.wikidata.org/wiki/Q1427863","display_name":"Transmittance","level":2,"score":0.6111881732940674},{"id":"https://openalex.org/C181966813","wikidata":"https://www.wikidata.org/wiki/Q806352","display_name":"Band gap","level":2,"score":0.5246548652648926},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.47302675247192383},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.44603046774864197},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.4108816385269165},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.3335992693901062},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.15730014443397522},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.09907457232475281},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.1016/j.vacuum.2015.06.027","doi":"https://doi.org/10.1016/j.vacuum.2015.06.027","is_oa":true,"landing_page_url":"https://doi.org/10.1016/j.vacuum.2015.06.027","pdf_url":"https://www.sciencedirect.com/science/article/pii/S0042207X15002894","source":{"id":"https://openalex.org/S86481247","display_name":"Vacuum","issn_l":"0042-207X","issn":["0042-207X","1879-2715"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Vacuum","raw_type":"journal-article"},{"id":"pmh:oai:gcris.iyte.edu.tr:11147/5857","doi":null,"is_oa":true,"landing_page_url":"https://hdl.handle.net/11147/5857","pdf_url":"http://gcris.iyte.edu.tr/bitstreams/4ee7fd8f-74e0-443a-851a-7b835afab599/download","source":{"id":"https://openalex.org/S4377196445","display_name":"IYTE GCRIS Database (Izmir Institute of Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I120217413","host_organization_name":"Izmir Institute of Technology","host_organization_lineage":["https://openalex.org/I120217413"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Article"},{"id":"pmh:oai:openaccess.iyte.edu.tr:11147/5857","doi":null,"is_oa":true,"landing_page_url":"http://hdl.handle.net/11147/5857","pdf_url":null,"source":{"id":"https://openalex.org/S4377196445","display_name":"IYTE GCRIS Database (Izmir Institute of Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I120217413","host_organization_name":"Izmir Institute of Technology","host_organization_lineage":["https://openalex.org/I120217413"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"article"},{"id":"pmh:oai:openaccess.iyte.edu.tr:8080:11147/5857","doi":null,"is_oa":true,"landing_page_url":"http://doi.org/10.1016/j.vacuum.2015.06.027","pdf_url":null,"source":{"id":"https://openalex.org/S4306400894","display_name":"\u0130YTE (\u0130ZM\u0130R Y\u00dcKSEK TEKNOLOJ\u0130 ENST\u0130T\u00dcS\u00dc)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I120217413","host_organization_name":"Izmir Institute of Technology","host_organization_lineage":["https://openalex.org/I120217413"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"article"}],"best_oa_location":{"id":"doi:10.1016/j.vacuum.2015.06.027","doi":"https://doi.org/10.1016/j.vacuum.2015.06.027","is_oa":true,"landing_page_url":"https://doi.org/10.1016/j.vacuum.2015.06.027","pdf_url":"https://www.sciencedirect.com/science/article/pii/S0042207X15002894","source":{"id":"https://openalex.org/S86481247","display_name":"Vacuum","issn_l":"0042-207X","issn":["0042-207X","1879-2715"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Vacuum","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W793373367.pdf","grobid_xml":"https://content.openalex.org/works/W793373367.grobid-xml"},"referenced_works_count":19,"referenced_works":["https://openalex.org/W1967849031","https://openalex.org/W1968115489","https://openalex.org/W1970126077","https://openalex.org/W1973885500","https://openalex.org/W1981770189","https://openalex.org/W1982329048","https://openalex.org/W1984337837","https://openalex.org/W2006342174","https://openalex.org/W2008888912","https://openalex.org/W2018982823","https://openalex.org/W2034359128","https://openalex.org/W2035777734","https://openalex.org/W2045521669","https://openalex.org/W2049918167","https://openalex.org/W2057269705","https://openalex.org/W2065730012","https://openalex.org/W2077188122","https://openalex.org/W2083399722","https://openalex.org/W2083952926"],"related_works":["https://openalex.org/W2018982823","https://openalex.org/W4364374912","https://openalex.org/W1998100741","https://openalex.org/W1993262935","https://openalex.org/W2186487908","https://openalex.org/W1997384615","https://openalex.org/W2091175618","https://openalex.org/W1982329048","https://openalex.org/W2371133645","https://openalex.org/W2104092695"],"abstract_inverted_index":null,"counts_by_year":[{"year":2026,"cited_by_count":5},{"year":2025,"cited_by_count":5},{"year":2024,"cited_by_count":6},{"year":2023,"cited_by_count":9},{"year":2022,"cited_by_count":7},{"year":2021,"cited_by_count":9},{"year":2020,"cited_by_count":3},{"year":2019,"cited_by_count":7},{"year":2018,"cited_by_count":11},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":6},{"year":2015,"cited_by_count":1}],"updated_date":"2026-11-12T12:28:57.059296","created_date":"2016-06-24T00:00:00"}