{"id":"https://openalex.org/W780232082","doi":null,"title":"\u61c9\u7528\u96d9\u5c64\u9ad8\u4ecb\u96fb\u8cea\u6750\u6599\u6c27\u5316\u92ef/\u6c27\u5316\u92c1\u946d\u65bc\u88fd\u5099\u5927\u6c23 \u5674\u5c04\u5f0f\u96fb\u6f3f\u6c89\u7a4d\u6c27\u5316\u92a6\u93b5\u92c5\u8584\u819c\u96fb\u6676\u9ad4\u4e4b\u7279\u6027\u7814\u7a76","display_name":"\u61c9\u7528\u96d9\u5c64\u9ad8\u4ecb\u96fb\u8cea\u6750\u6599\u6c27\u5316\u92ef/\u6c27\u5316\u92c1\u946d\u65bc\u88fd\u5099\u5927\u6c23 \u5674\u5c04\u5f0f\u96fb\u6f3f\u6c89\u7a4d\u6c27\u5316\u92a6\u93b5\u92c5\u8584\u819c\u96fb\u6676\u9ad4\u4e4b\u7279\u6027\u7814\u7a76","publication_year":2013,"publication_date":"2013-01-01","ids":{"openalex":"https://openalex.org/W780232082","mag":"780232082"},"language":"zh","primary_location":{"id":"mag:780232082","doi":null,"is_oa":false,"landing_page_url":"https://ir.nctu.edu.tw:443/handle/11536/72701","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":null},"volume":null,"type":"dissertation","is_traditional":true,"indexed_in":[],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5018026090","display_name":"\u8a31\u7dad\u6046","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"\u8a31\u7dad\u6046","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5015123361","display_name":"Wei-Heng Hsu","orcid":"https://orcid.org/0000-0003-4472-2147","observed_orcids":["https://orcid.org/0000-0003-4472-2147"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Wei-Heng Hsu","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040412880","display_name":"\u5f35\u570b\u660e","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"\u5f35\u570b\u660e","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5113958343","display_name":"Kow\u2010Ming Chang","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Kow\u2010Ming Chang","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.9502000212669373,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.9502000212669373,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10090","display_name":"ZnO doping and properties","score":0.014600000344216824,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.012600000016391277,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/atmospheric-pressure-plasma-jet","display_name":"atmospheric pressure plasma jet","score":0.6069999933242798},{"id":"https://openalex.org/keywords/plasma-enhanced-atomic-layer-deposition","display_name":"plasma-enhanced atomic layer deposition","score":0.6679999828338623},{"id":"https://openalex.org/keywords/indium-gallium-zinc-oxide","display_name":"indium gallium zinc oxide","score":0.8180000185966492},{"id":"https://openalex.org/keywords/igzo-thin-film-transistors","display_name":"IGZO thin-film transistors","score":0.8370000123977661},{"id":"https://openalex.org/keywords/oxide-semiconductors","display_name":"oxide semiconductors","score":0.6039999723434448}],"concepts":[{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.2606470286846161}],"mesh":[],"locations_count":1,"locations":[{"id":"mag:780232082","doi":null,"is_oa":false,"landing_page_url":"https://ir.nctu.edu.tw:443/handle/11536/72701","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2618302451","https://openalex.org/W2467870134","https://openalex.org/W4388681030","https://openalex.org/W1609013849","https://openalex.org/W2792885530","https://openalex.org/W2260240108","https://openalex.org/W2200253532","https://openalex.org/W2412863598","https://openalex.org/W7025886274","https://openalex.org/W854826604"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2026-09-25T08:18:29.962427","created_date":"2016-06-24T00:00:00"}