{"id":"https://openalex.org/W7225748684","doi":"https://doi.org/10.1088/1361-6501/aec03b","title":"Real-time synchronization-error prediction using position measurements for reference-side feedforward compensation under main-secondary control","display_name":"Real-time synchronization-error prediction using position measurements for reference-side feedforward compensation under main-secondary control","publication_year":2026,"publication_date":"2026-11-10","ids":{"openalex":"https://openalex.org/W7225748684","doi":"https://doi.org/10.1088/1361-6501/aec03b"},"language":"en","primary_location":{"id":"doi:10.1088/1361-6501/aec03b","doi":"https://doi.org/10.1088/1361-6501/aec03b","is_oa":false,"landing_page_url":"https://doi.org/10.1088/1361-6501/aec03b","pdf_url":null,"source":{"id":"https://openalex.org/S109302362","display_name":"Measurement Science and Technology","issn_l":"0957-0233","issn":["0957-0233","1361-6501"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-class-a","anvur-scientific","cwts-core","jufo-2","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Measurement Science and Technology","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5006577309","display_name":"Longbin Jiang","orcid":"https://orcid.org/0000-0003-3935-209X","observed_orcids":["https://orcid.org/0000-0003-3935-209X","https://orcid.org/0009-0003-0282-5241"]},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Longbin Jiang","raw_affiliation_strings":["Fudan University"],"raw_orcid":"https://orcid.org/0009-0003-0282-5241","affiliations":[{"raw_affiliation_string":"Fudan University","institution_ids":["https://openalex.org/I24943067"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5128692088","display_name":"Manni Li","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Manni Li","raw_affiliation_strings":["Fudan University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fudan University","institution_ids":["https://openalex.org/I24943067"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5013984542","display_name":"Yinyin Lin","orcid":"https://orcid.org/0000-0002-5939-3502","observed_orcids":["https://orcid.org/0000-0002-5939-3502"]},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yinyin Lin","raw_affiliation_strings":["Fudan University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fudan University","institution_ids":["https://openalex.org/I24943067"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101787733","display_name":"Xiaofeng Yang","orcid":"https://orcid.org/0000-0002-7027-3827","observed_orcids":["https://orcid.org/0000-0002-7027-3827","https://orcid.org/0009-0008-8771-9013"]},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiaofeng Yang","raw_affiliation_strings":["Fudan University"],"raw_orcid":"https://orcid.org/0000-0002-7027-3827","affiliations":[{"raw_affiliation_string":"Fudan University","institution_ids":["https://openalex.org/I24943067"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I24943067"],"apc_list":{"value":3325,"currency":"USD","value_usd":3325},"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":0.9829000234603882,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":0.9829000234603882,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.012799999676644802,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13644","display_name":"Control Systems in Engineering","score":0.0010000000474974513,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[],"concepts":[{"id":"https://openalex.org/C38858127","wikidata":"https://www.wikidata.org/wiki/Q5441228","display_name":"Feed forward","level":2,"score":0.8181999921798706},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.7678999900817871},{"id":"https://openalex.org/C13662910","wikidata":"https://www.wikidata.org/wiki/Q193139","display_name":"Trajectory","level":2,"score":0.730400025844574},{"id":"https://openalex.org/C2778562939","wikidata":"https://www.wikidata.org/wiki/Q1298791","display_name":"Synchronization (alternating current)","level":3,"score":0.7289000153541565},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.6919999718666077},{"id":"https://openalex.org/C2780023022","wikidata":"https://www.wikidata.org/wiki/Q1338171","display_name":"Compensation (psychology)","level":2,"score":0.583299994468689},{"id":"https://openalex.org/C198082294","wikidata":"https://www.wikidata.org/wiki/Q3399648","display_name":"Position (finance)","level":2,"score":0.5546000003814697},{"id":"https://openalex.org/C2777303404","wikidata":"https://www.wikidata.org/wiki/Q759757","display_name":"Convergence (economics)","level":2,"score":0.4284999966621399},{"id":"https://openalex.org/C155512373","wikidata":"https://www.wikidata.org/wiki/Q287450","display_name":"Residual","level":2,"score":0.38260000944137573},{"id":"https://openalex.org/C117619785","wikidata":"https://www.wikidata.org/wiki/Q6094414","display_name":"Iterative learning control","level":3,"score":0.35100001096725464},{"id":"https://openalex.org/C158622935","wikidata":"https://www.wikidata.org/wiki/Q660848","display_name":"Nonlinear system","level":2,"score":0.32420000433921814},{"id":"https://openalex.org/C177148314","wikidata":"https://www.wikidata.org/wiki/Q170084","display_name":"Generalization","level":2,"score":0.32190001010894775},{"id":"https://openalex.org/C145565327","wikidata":"https://www.wikidata.org/wiki/Q852514","display_name":"Motion control","level":3,"score":0.31940001249313354},{"id":"https://openalex.org/C39920418","wikidata":"https://www.wikidata.org/wiki/Q11476","display_name":"Kinematics","level":2,"score":0.3190999925136566},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.301800012588501},{"id":"https://openalex.org/C183356978","wikidata":"https://www.wikidata.org/wiki/Q1779213","display_name":"Tracking error","level":3,"score":0.27649998664855957},{"id":"https://openalex.org/C107464732","wikidata":"https://www.wikidata.org/wiki/Q235781","display_name":"Adaptive control","level":3,"score":0.2558000087738037}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1088/1361-6501/aec03b","doi":"https://doi.org/10.1088/1361-6501/aec03b","is_oa":false,"landing_page_url":"https://doi.org/10.1088/1361-6501/aec03b","pdf_url":null,"source":{"id":"https://openalex.org/S109302362","display_name":"Measurement Science and Technology","issn_l":"0957-0233","issn":["0957-0233","1361-6501"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-class-a","anvur-scientific","cwts-core","jufo-2","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Measurement Science and Technology","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":[],"abstract_inverted_index":{"Abstract":[0],"In":[1],"wafer":[2,9],"scanners,":[3],"the":[4,8,13,43,47,76,92,133,147,153,156,163,167,171,178,203,213],"synchronization":[5,93,103,148,157,173,196],"error":[6,149],"between":[7],"stage":[10,15],"(WS)":[11],"and":[12,25,56,135,140,151,183,235,238],"reticle":[14],"(RS)":[16],"is":[17,36,64,95,119,187],"measured":[18,164],"in":[19,82,232],"real":[20],"time":[21],"by":[22],"position":[23,138],"sensors":[24],"directly":[26],"determines":[27],"lithographic":[28],"imaging":[29],"quality.":[30],"A":[31],"main--secondary":[32],"control":[33,220],"(MSC)":[34],"framework":[35],"commonly":[37],"adopted":[38],"for":[39,128],"WS--RS":[40,204],"synchronization.":[41],"Within":[42],"MSC,":[44,90],"simultaneously":[45],"meeting":[46],"requirements":[48],"of":[49,68,215],"real-time":[50,240],"execution,":[51],"cross-trajectory":[52],"generalization,":[53],"disturbance":[54,236],"robustness,":[55],"nonlinear":[57],"error-mapping":[58],"capability":[59],"remains":[60],"challenging.":[61],"Trajectory":[62],"compensation":[63,106,168],"an":[65,111],"effective":[66],"means":[67],"improving":[69],"accuracy,":[70],"but":[71],"existing":[72,179],"methods":[73],"generally":[74],"require":[75],"reference":[77,94,141],"trajectory":[78,142,233],"to":[79,87,89,109],"be":[80],"known":[81],"advance,":[83],"making":[84],"them":[85],"difficult":[86],"apply":[88],"where":[91],"generated":[96],"online.":[97],"This":[98],"paper":[99],"proposes":[100],"SyncTRC-FF,":[101],"a":[102,120,195],"reference-side":[104],"feedforward":[105,115],"method":[107,176],"tailored":[108],"such":[110],"online":[112],"reference.":[113,158],"Its":[114],"predictor,":[116],"termed":[117],"SyncTRC-Net,":[118],"lightweight":[121],"temporal":[122],"residual":[123],"convolutional":[124],"model":[125],"specifically":[126],"designed":[127],"synchronization-error":[129],"prediction.":[130],"It":[131],"takes":[132],"past":[134],"present":[136],"WS":[137,165],"measurements":[139],"derivatives":[143],"as":[144],"input,":[145],"predicts":[146],"online,":[150],"injects":[152],"prediction":[154,185],"into":[155],"Because":[159],"external":[160],"disturbances":[161],"affect":[162],"position,":[166],"also":[169],"suppresses":[170],"disturbance-induced":[172],"error.":[174],"The":[175],"leaves":[177],"feedback":[180],"loops":[181],"unchanged,":[182],"its":[184],"module":[186],"proved":[188],"bounded-input":[189],"bounded-output":[190],"(BIBO)":[191],"stable.":[192],"Experiments":[193],"on":[194,208],"platform":[197],"with":[198],"two":[199],"motion":[200],"stages":[201],"emulating":[202],"configuration":[205],"show":[206],"that,":[207],"repetitive":[209],"references,":[210],"SyncTRC-FF":[211],"approaches":[212],"accuracy":[214],"fully":[216],"converged":[217],"iterative":[218],"learning":[219],"(ILC)":[221],"without":[222],"requiring":[223],"any":[224],"trajectory-specific":[225],"iteration,":[226],"while":[227],"it":[228],"clearly":[229],"outperforms":[230],"ILC":[231],"generalization":[234],"rejection":[237],"meets":[239],"deployment":[241],"requirements.":[242]},"counts_by_year":[],"updated_date":"2026-11-11T12:16:26.678958","created_date":"2026-11-11T00:00:00"}