{"id":"https://openalex.org/W7225627314","doi":"https://doi.org/10.1002/acs.70157","title":"Disturbance Observer\u2010Based Fixed\u2010Time Super\u2010Twisting Sliding Mode Control for Vibration Isolation Platforms in Lithography Machines","display_name":"Disturbance Observer\u2010Based Fixed\u2010Time Super\u2010Twisting Sliding Mode Control for Vibration Isolation Platforms in Lithography Machines","publication_year":2026,"publication_date":"2026-11-08","ids":{"openalex":"https://openalex.org/W7225627314","doi":"https://doi.org/10.1002/acs.70157"},"language":"en","primary_location":{"id":"doi:10.1002/acs.70157","doi":"https://doi.org/10.1002/acs.70157","is_oa":false,"landing_page_url":"https://doi.org/10.1002/acs.70157","pdf_url":null,"source":{"id":"https://openalex.org/S65092430","display_name":"International Journal of Adaptive Control and Signal Processing","issn_l":"0890-6327","issn":["0890-6327","1099-1115"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-d","jufo-1","norway-1","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"International Journal of Adaptive Control and Signal Processing","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5063576584","display_name":"Shuaishuai Su","orcid":"https://orcid.org/0009-0002-9690-8074","observed_orcids":["https://orcid.org/0009-0002-9690-8074"]},"institutions":[{"id":"https://openalex.org/I4210128284","display_name":"Institute of Optics and Electronics, Chinese Academy of Sciences","ror":"https://ror.org/02bn68w95","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210128284"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shuaishuai Su","raw_affiliation_strings":["College of Materials Science and Opto\u2010Electronic Technology University of Chinese Academy of Sciences  Beijing China","State Key Laboratory of Optical Field Manipulation Science and Technology, Institute of Optics and Electronics Chinese Academy of Sciences  Chengdu China"],"raw_orcid":"https://orcid.org/0009-0002-9690-8074","affiliations":[{"raw_affiliation_string":"College of Materials Science and Opto\u2010Electronic Technology University of Chinese Academy of Sciences  Beijing China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"State Key Laboratory of Optical Field Manipulation Science and Technology, Institute of Optics and Electronics Chinese Academy of Sciences  Chengdu China","institution_ids":["https://openalex.org/I4210128284"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100342397","display_name":"Kun Zhang","orcid":"https://orcid.org/0000-0003-4527-6847","observed_orcids":["https://orcid.org/0000-0003-4527-6847","https://orcid.org/0009-0006-3381-5603","https://orcid.org/0009-0000-9494-9994"]},"institutions":[{"id":"https://openalex.org/I4210128284","display_name":"Institute of Optics and Electronics, Chinese Academy of Sciences","ror":"https://ror.org/02bn68w95","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210128284"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Kun Zhang","raw_affiliation_strings":["College of Materials Science and Opto\u2010Electronic Technology University of Chinese Academy of Sciences  Beijing China","State Key Laboratory of Optical Field Manipulation Science and Technology, Institute of Optics and Electronics Chinese Academy of Sciences  Chengdu China"],"raw_orcid":"https://orcid.org/0009-0006-3381-5603","affiliations":[{"raw_affiliation_string":"College of Materials Science and Opto\u2010Electronic Technology University of Chinese Academy of Sciences  Beijing China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"State Key Laboratory of Optical Field Manipulation Science and Technology, Institute of Optics and Electronics Chinese Academy of Sciences  Chengdu China","institution_ids":["https://openalex.org/I4210128284"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5161337021","display_name":"Mengyu Yang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210128284","display_name":"Institute of Optics and Electronics, Chinese Academy of Sciences","ror":"https://ror.org/02bn68w95","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210128284"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Mengyu Yang","raw_affiliation_strings":["College of Materials Science and Opto\u2010Electronic Technology University of Chinese Academy of Sciences  Beijing China","State Key Laboratory of Optical Field Manipulation Science and Technology, Institute of Optics and Electronics Chinese Academy of Sciences  Chengdu China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Materials Science and Opto\u2010Electronic Technology University of Chinese Academy of Sciences  Beijing China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"State Key Laboratory of Optical Field Manipulation Science and Technology, Institute of Optics and Electronics Chinese Academy of Sciences  Chengdu China","institution_ids":["https://openalex.org/I4210128284"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5003608372","display_name":"Hongyun Zhao","orcid":"https://orcid.org/0000-0002-1251-3888","observed_orcids":["https://orcid.org/0000-0002-1251-3888","https://orcid.org/0009-0006-0560-8375","https://orcid.org/0000-0003-2938-5613","https://orcid.org/0000-0002-3539-3532","https://orcid.org/0000-0002-8879-9595","https://orcid.org/0000-0001-6039-9736","https://orcid.org/0000-0001-7903-581X","https://orcid.org/0000-0003-4756-771X","https://orcid.org/0009-0008-5370-813X","https://orcid.org/0000-0001-6618-3039","https://orcid.org/0000-0001-8554-9411","https://orcid.org/0000-0002-4575-811X","https://orcid.org/0000-0002-6298-1217","https://orcid.org/0000-0002-7890-0055","https://orcid.org/0000-0003-2176-9030","https://orcid.org/0000-0003-2384-1606","https://orcid.org/0000-0003-4746-389X","https://orcid.org/0009-0005-8958-7008","https://orcid.org/0009-0005-9482-8953","https://orcid.org/0009-0006-0216-3307","https://orcid.org/0009-0007-6680-596X","https://orcid.org/0000-0001-5407-2569","https://orcid.org/0000-0002-4438-7791","https://orcid.org/0000-0002-7765-2985","https://orcid.org/0000-0003-3832-6439","https://orcid.org/0009-0000-6368-5359","https://orcid.org/0009-0003-4754-1701","https://orcid.org/0009-0003-6018-5115","https://orcid.org/0009-0003-9594-2358","https://orcid.org/0009-0003-9797-6746","https://orcid.org/0009-0004-0308-6214","https://orcid.org/0009-0006-0226-1804","https://orcid.org/0009-0006-6579-8131","https://orcid.org/0009-0006-8593-6079","https://orcid.org/0009-0008-5350-8429","https://orcid.org/0009-0008-7243-9799","https://orcid.org/0009-0008-9829-3900","https://orcid.org/0000-0002-6427-0806"]},"institutions":[{"id":"https://openalex.org/I4210128284","display_name":"Institute of Optics and Electronics, Chinese Academy of Sciences","ror":"https://ror.org/02bn68w95","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210128284"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Haiyang Zhao","raw_affiliation_strings":["College of Materials Science and Opto\u2010Electronic Technology University of Chinese Academy of Sciences  Beijing China","State Key Laboratory of Optical Field Manipulation Science and Technology, Institute of Optics and Electronics Chinese Academy of Sciences  Chengdu China"],"raw_orcid":"https://orcid.org/0009-0007-6680-596X","affiliations":[{"raw_affiliation_string":"College of Materials Science and Opto\u2010Electronic Technology University of Chinese Academy of Sciences  Beijing China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"State Key Laboratory of Optical Field Manipulation Science and Technology, Institute of Optics and Electronics Chinese Academy of Sciences  Chengdu China","institution_ids":["https://openalex.org/I4210128284"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5161310580","display_name":"Bing Wang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210128284","display_name":"Institute of Optics and Electronics, Chinese Academy of Sciences","ror":"https://ror.org/02bn68w95","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210128284"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bing Wang","raw_affiliation_strings":["College of Materials Science and Opto\u2010Electronic Technology University of Chinese Academy of Sciences  Beijing China","State Key Laboratory of Optical Field Manipulation Science and Technology, Institute of Optics and Electronics Chinese Academy of Sciences  Chengdu China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Materials Science and Opto\u2010Electronic Technology University of Chinese Academy of Sciences  Beijing China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"State Key Laboratory of Optical Field Manipulation Science and Technology, Institute of Optics and Electronics Chinese Academy of Sciences  Chengdu China","institution_ids":["https://openalex.org/I4210128284"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5150772860","display_name":"Yupu Wang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210128284","display_name":"Institute of Optics and Electronics, Chinese Academy of Sciences","ror":"https://ror.org/02bn68w95","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210128284"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yupu Wang","raw_affiliation_strings":["College of Materials Science and Opto\u2010Electronic Technology University of Chinese Academy of Sciences  Beijing China","State Key Laboratory of Optical Field Manipulation Science and Technology, Institute of Optics and Electronics Chinese Academy of Sciences  Chengdu China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Materials Science and Opto\u2010Electronic Technology University of Chinese Academy of Sciences  Beijing China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"State Key Laboratory of Optical Field Manipulation Science and Technology, Institute of Optics and Electronics Chinese Academy of Sciences  Chengdu China","institution_ids":["https://openalex.org/I4210128284"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5161315820","display_name":"Sui Yang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210128284","display_name":"Institute of Optics and Electronics, Chinese Academy of Sciences","ror":"https://ror.org/02bn68w95","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210128284"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Sui Yang","raw_affiliation_strings":["College of Materials Science and Opto\u2010Electronic Technology University of Chinese Academy of Sciences  Beijing China","State Key Laboratory of Optical Field Manipulation Science and Technology, Institute of Optics and Electronics Chinese Academy of Sciences  Chengdu China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Materials Science and Opto\u2010Electronic Technology University of Chinese Academy of Sciences  Beijing China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"State Key Laboratory of Optical Field Manipulation Science and Technology, Institute of Optics and Electronics Chinese Academy of Sciences  Chengdu China","institution_ids":["https://openalex.org/I4210128284"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5161360022","display_name":"Yong Yang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210128284","display_name":"Institute of Optics and Electronics, Chinese Academy of Sciences","ror":"https://ror.org/02bn68w95","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210128284"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yong Yang","raw_affiliation_strings":["College of Materials Science and Opto\u2010Electronic Technology University of Chinese Academy of Sciences  Beijing China","State Key Laboratory of Optical Field Manipulation Science and Technology, Institute of Optics and Electronics Chinese Academy of Sciences  Chengdu China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Materials Science and Opto\u2010Electronic Technology University of Chinese Academy of Sciences  Beijing China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"State Key Laboratory of Optical Field Manipulation Science and Technology, Institute of Optics and Electronics Chinese Academy of Sciences  Chengdu China","institution_ids":["https://openalex.org/I4210128284"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":3460,"currency":"USD","value_usd":3460},"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10040","display_name":"Adaptive Control of Nonlinear Systems","score":0.47780001163482666,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10040","display_name":"Adaptive Control of Nonlinear Systems","score":0.47780001163482666,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10690","display_name":"Vibration Control and Rheological Fluids","score":0.37940001487731934,"subfield":{"id":"https://openalex.org/subfields/2205","display_name":"Civil and Structural Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11394","display_name":"Dynamics and Control of Mechanical Systems","score":0.03310000151395798,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/super-twisting-sliding-mode-control","display_name":"super-twisting sliding mode control","score":0.8659999966621399},{"id":"https://openalex.org/keywords/fixed-time-control","display_name":"fixed-time control","score":0.8949999809265137},{"id":"https://openalex.org/keywords/disturbance-observer","display_name":"disturbance observer","score":0.9980000257492065},{"id":"https://openalex.org/keywords/vibration-isolation","display_name":"vibration isolation","score":0.8029999732971191},{"id":"https://openalex.org/keywords/lithography-machines","display_name":"lithography machines","score":0.9810000061988831},{"id":"https://openalex.org/keywords/chattering-reduction","display_name":"chattering reduction","score":0.8519999980926514},{"id":"https://openalex.org/keywords/precision-positioning","display_name":"precision positioning","score":0.4399999976158142}],"concepts":[{"id":"https://openalex.org/C45799244","wikidata":"https://www.wikidata.org/wiki/Q109968206","display_name":"Vibration isolation","level":3,"score":0.7748000025749207},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.7598999738693237},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.6868000030517578},{"id":"https://openalex.org/C2777303404","wikidata":"https://www.wikidata.org/wiki/Q759757","display_name":"Convergence (economics)","level":2,"score":0.5658000111579895},{"id":"https://openalex.org/C36662352","wikidata":"https://www.wikidata.org/wiki/Q6008560","display_name":"Sliding mode control","level":3,"score":0.5372999906539917},{"id":"https://openalex.org/C2775941552","wikidata":"https://www.wikidata.org/wiki/Q25212305","display_name":"Isolation (microbiology)","level":2,"score":0.5248000025749207},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5195000171661377},{"id":"https://openalex.org/C2780023022","wikidata":"https://www.wikidata.org/wiki/Q1338171","display_name":"Compensation (psychology)","level":2,"score":0.510200023651123},{"id":"https://openalex.org/C158622935","wikidata":"https://www.wikidata.org/wiki/Q660848","display_name":"Nonlinear system","level":2,"score":0.47200000286102295},{"id":"https://openalex.org/C49240428","wikidata":"https://www.wikidata.org/wiki/Q3305953","display_name":"Vibration control","level":3,"score":0.47049999237060547},{"id":"https://openalex.org/C165165292","wikidata":"https://www.wikidata.org/wiki/Q4677595","display_name":"Active vibration control","level":4,"score":0.44839999079704285},{"id":"https://openalex.org/C2780704645","wikidata":"https://www.wikidata.org/wiki/Q9251458","display_name":"Observer (physics)","level":2,"score":0.4408000111579895},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.42149999737739563},{"id":"https://openalex.org/C2777601987","wikidata":"https://www.wikidata.org/wiki/Q5283581","display_name":"Disturbance (geology)","level":2,"score":0.4090999960899353},{"id":"https://openalex.org/C48677424","wikidata":"https://www.wikidata.org/wiki/Q6888088","display_name":"Mode (computer interface)","level":2,"score":0.384799987077713},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.37119999527931213},{"id":"https://openalex.org/C3031470","wikidata":"https://www.wikidata.org/wiki/Q818544","display_name":"State observer","level":3,"score":0.3547999858856201},{"id":"https://openalex.org/C112972136","wikidata":"https://www.wikidata.org/wiki/Q7595718","display_name":"Stability (learning theory)","level":2,"score":0.3531999886035919},{"id":"https://openalex.org/C31531917","wikidata":"https://www.wikidata.org/wiki/Q915157","display_name":"Robust control","level":3,"score":0.328900009393692},{"id":"https://openalex.org/C17500928","wikidata":"https://www.wikidata.org/wiki/Q959968","display_name":"Control system","level":2,"score":0.3158999979496002},{"id":"https://openalex.org/C2780842517","wikidata":"https://www.wikidata.org/wiki/Q7314001","display_name":"Repetitive control","level":3,"score":0.29089999198913574},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.2768999934196472},{"id":"https://openalex.org/C2778512855","wikidata":"https://www.wikidata.org/wiki/Q6036808","display_name":"Input shaping","level":4,"score":0.26190000772476196}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1002/acs.70157","doi":"https://doi.org/10.1002/acs.70157","is_oa":false,"landing_page_url":"https://doi.org/10.1002/acs.70157","pdf_url":null,"source":{"id":"https://openalex.org/S65092430","display_name":"International Journal of Adaptive Control and Signal Processing","issn_l":"0890-6327","issn":["0890-6327","1099-1115"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-d","jufo-1","norway-1","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"International Journal of Adaptive Control and Signal Processing","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":37,"referenced_works":["https://openalex.org/W1994468395","https://openalex.org/W2011070371","https://openalex.org/W2015215640","https://openalex.org/W2030959268","https://openalex.org/W2230652337","https://openalex.org/W2754719735","https://openalex.org/W2781358222","https://openalex.org/W2808872532","https://openalex.org/W2898672927","https://openalex.org/W2901396511","https://openalex.org/W2905039588","https://openalex.org/W2955632439","https://openalex.org/W3021274174","https://openalex.org/W3165161626","https://openalex.org/W3198610401","https://openalex.org/W4200548382","https://openalex.org/W4214591010","https://openalex.org/W4224314738","https://openalex.org/W4285154589","https://openalex.org/W4292982609","https://openalex.org/W4293318315","https://openalex.org/W4308547941","https://openalex.org/W4376130278","https://openalex.org/W4387831826","https://openalex.org/W4388125325","https://openalex.org/W4389497087","https://openalex.org/W4396995118","https://openalex.org/W4400844621","https://openalex.org/W4401642085","https://openalex.org/W4402833906","https://openalex.org/W4404421475","https://openalex.org/W4407261860","https://openalex.org/W4407753868","https://openalex.org/W4408914795","https://openalex.org/W4411405046","https://openalex.org/W4412651318","https://openalex.org/W7167513363"],"related_works":["https://openalex.org/W4383817372","https://openalex.org/W2970965514","https://openalex.org/W7221102090","https://openalex.org/W4386512305","https://openalex.org/W3149382793","https://openalex.org/W4390985854","https://openalex.org/W1964838510","https://openalex.org/W2754513591","https://openalex.org/W4388001376","https://openalex.org/W3088059646"],"abstract_inverted_index":{"ABSTRACT":[0],"To":[1],"improve":[2],"the":[3,6,42,53,62,71,88,100,118,124,129,149,171,191,198],"capability":[4,184],"of":[5,90],"6\u2010DOF":[7],"vibration":[8,18,56,164,176,210],"isolation":[9,57,165,177,201,211],"platform":[10],"for":[11,80,145,213],"lithography":[12,54],"machines":[13],"to":[14,52,140],"suppress":[15],"both":[16],"ground":[17],"and":[19,65,75,113,117,157,166,182,195,206],"internal":[20],"direct":[21,167],"disturbances,":[22,146,186],"this":[23,84],"article":[24,40],"proposes":[25],"a":[26,35,77,103,133],"fixed\u2010time":[27,104,134],"super\u2010twisting":[28,46,105,119],"sliding":[29,47,92],"mode":[30,48,93],"control":[31,49,82,107,120],"strategy":[32],"based":[33],"on":[34,99],"disturbance":[36,43,72,135,168],"observer":[37,44,136],"(FTSMC\u2010DOB).":[38],"This":[39],"applies":[41],"(DOB)\u2010based":[45],"(SMC)":[50],"algorithm":[51,131],"machine":[55],"platform,":[58],"which":[59],"effectively":[60],"overcomes":[61],"system's":[63,150],"nonlinear":[64],"strongly":[66],"coupled":[67],"characteristics,":[68],"significantly":[69,174],"enhances":[70,197],"rejection":[73],"capability,":[74],"provides":[76],"new":[78],"approach":[79],"precision":[81,209],"in":[83,155,208],"field.":[85],"Aiming":[86],"at":[87],"shortcoming":[89],"traditional":[91],"algorithms":[94],"whose":[95],"convergence":[96,106,115],"time":[97],"depends":[98],"initial":[101],"state,":[102],"law":[108],"is":[109,138],"designed,":[110],"achieving":[111],"fast":[112],"predictable":[114],"performance,":[116],"technique":[121],"greatly":[122,196],"mitigates":[123],"inherent":[125],"chattering":[126],"problem.":[127],"Within":[128],"improved":[130],"framework,":[132],"(DOB)":[137],"integrated":[139],"achieve":[141],"high\u2010precision":[142],"real\u2010time":[143],"compensation":[144],"thereby":[147],"enhancing":[148],"robustness.":[151],"A":[152],"comparative":[153],"co\u2010simulation":[154],"ADAMS":[156],"Simulink":[158],"under":[159,185],"two":[160],"typical":[161],"working":[162],"conditions\u2014ground":[163],"suppression\u2014demonstrates":[169],"that":[170],"proposed":[172],"method":[173],"improves":[175],"accuracy,":[178],"exhibits":[179],"better":[180],"stability":[181],"recovery":[183],"delivers":[187],"superior":[188],"performance":[189],"across":[190],"full":[192],"frequency":[193,200],"range,":[194],"ultra\u2010low":[199],"effectiveness,":[202],"verifying":[203],"its":[204],"effectiveness":[205],"superiority":[207],"applications":[212],"lithography.":[214]},"counts_by_year":[],"updated_date":"2026-11-11T12:16:26.678958","created_date":"2026-11-10T00:00:00"}