{"id":"https://openalex.org/W7225433473","doi":"https://doi.org/10.1063/5.0345816","title":"Laser micromachining of phononic crystals and waveguides in borosilicate glass","display_name":"Laser micromachining of phononic crystals and waveguides in borosilicate glass","publication_year":2026,"publication_date":"2026-11-06","ids":{"openalex":"https://openalex.org/W7225433473","doi":"https://doi.org/10.1063/5.0345816"},"language":"en","primary_location":{"id":"doi:10.1063/5.0345816","doi":"https://doi.org/10.1063/5.0345816","is_oa":false,"landing_page_url":"https://doi.org/10.1063/5.0345816","pdf_url":null,"source":{"id":"https://openalex.org/S187991544","display_name":"Journal of Applied Physics","issn_l":"0021-8979","issn":["0021-8979","1089-7550","1520-8850"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-d","jufo-1","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Applied Physics","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5063659222","display_name":"Wataru Takeda","orcid":"https://orcid.org/0000-0002-2002-8751","observed_orcids":["https://orcid.org/0000-0002-2002-8751"]},"institutions":[{"id":"https://openalex.org/I138006243","display_name":"University of Arizona","ror":"https://ror.org/03m2x1q45","country_code":"US","type":"education","lineage":["https://openalex.org/I138006243"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Wataru Takeda","raw_affiliation_strings":["Department of Materials Science and Engineering, University of Arizona 1 , Tucson, Arizona 85721,","New Frontiers of Sound Science and Technology Center, University of Arizona 2 , Tucson, Arizona 85721,"],"raw_orcid":"https://orcid.org/0000-0002-2002-8751","affiliations":[{"raw_affiliation_string":"Department of Materials Science and Engineering, University of Arizona 1 , Tucson, Arizona 85721,","institution_ids":["https://openalex.org/I138006243"]},{"raw_affiliation_string":"New Frontiers of Sound Science and Technology Center, University of Arizona 2 , Tucson, Arizona 85721,","institution_ids":["https://openalex.org/I138006243"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045118370","display_name":"Samarjith Biswas","orcid":"https://orcid.org/0009-0001-9144-6520","observed_orcids":["https://orcid.org/0009-0001-9144-6520"]},"institutions":[{"id":"https://openalex.org/I138006243","display_name":"University of Arizona","ror":"https://ror.org/03m2x1q45","country_code":"US","type":"education","lineage":["https://openalex.org/I138006243"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Samarjith Biswas","raw_affiliation_strings":["Department of Materials Science and Engineering, University of Arizona 1 , Tucson, Arizona 85721,","New Frontiers of Sound Science and Technology Center, University of Arizona 2 , Tucson, Arizona 85721,"],"raw_orcid":"https://orcid.org/0009-0001-9144-6520","affiliations":[{"raw_affiliation_string":"Department of Materials Science and Engineering, University of Arizona 1 , Tucson, Arizona 85721,","institution_ids":["https://openalex.org/I138006243"]},{"raw_affiliation_string":"New Frontiers of Sound Science and Technology Center, University of Arizona 2 , Tucson, Arizona 85721,","institution_ids":["https://openalex.org/I138006243"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100434847","display_name":"Qing Wang","orcid":"https://orcid.org/0000-0002-5968-3235","observed_orcids":["https://orcid.org/0000-0002-5968-3235","https://orcid.org/0009-0008-9537-115X"]},"institutions":[{"id":"https://openalex.org/I4210092718","display_name":"AdValue Photonics (United States)","ror":"https://ror.org/00dmrtz93","country_code":"US","type":"company","lineage":["https://openalex.org/I4210092718"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Qing Wang","raw_affiliation_strings":["AdValue Photonics Inc. 3 , 2700 E. Bilby Rd, Tucson, Arizona 85706,"],"raw_orcid":"https://orcid.org/0009-0008-9537-115X","affiliations":[{"raw_affiliation_string":"AdValue Photonics Inc. 3 , 2700 E. Bilby Rd, Tucson, Arizona 85706,","institution_ids":["https://openalex.org/I4210092718"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023424513","display_name":"Shibin Jiang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210092718","display_name":"AdValue Photonics (United States)","ror":"https://ror.org/00dmrtz93","country_code":"US","type":"company","lineage":["https://openalex.org/I4210092718"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Shibin Jiang","raw_affiliation_strings":["AdValue Photonics Inc. 3 , 2700 E. Bilby Rd, Tucson, Arizona 85706,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"AdValue Photonics Inc. 3 , 2700 E. Bilby Rd, Tucson, Arizona 85706,","institution_ids":["https://openalex.org/I4210092718"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036561790","display_name":"Pierre A. Deymier","orcid":"https://orcid.org/0000-0002-1088-7958","observed_orcids":["https://orcid.org/0000-0002-1088-7958","https://orcid.org/0000-0003-1275-3846"]},"institutions":[{"id":"https://openalex.org/I138006243","display_name":"University of Arizona","ror":"https://ror.org/03m2x1q45","country_code":"US","type":"education","lineage":["https://openalex.org/I138006243"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Pierre Deymier","raw_affiliation_strings":["Department of Materials Science and Engineering, University of Arizona 1 , Tucson, Arizona 85721,","New Frontiers of Sound Science and Technology Center, University of Arizona 2 , Tucson, Arizona 85721,"],"raw_orcid":"https://orcid.org/0000-0002-1088-7958","affiliations":[{"raw_affiliation_string":"Department of Materials Science and Engineering, University of Arizona 1 , Tucson, Arizona 85721,","institution_ids":["https://openalex.org/I138006243"]},{"raw_affiliation_string":"New Frontiers of Sound Science and Technology Center, University of Arizona 2 , Tucson, Arizona 85721,","institution_ids":["https://openalex.org/I138006243"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5026527259","display_name":"Pierre Lucas","orcid":"https://orcid.org/0000-0003-1011-0855","observed_orcids":["https://orcid.org/0000-0003-1011-0855"]},"institutions":[{"id":"https://openalex.org/I138006243","display_name":"University of Arizona","ror":"https://ror.org/03m2x1q45","country_code":"US","type":"education","lineage":["https://openalex.org/I138006243"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Pierre Lucas","raw_affiliation_strings":["Department of Materials Science and Engineering, University of Arizona 1 , Tucson, Arizona 85721,","New Frontiers of Sound Science and Technology Center, University of Arizona 2 , Tucson, Arizona 85721,"],"raw_orcid":"https://orcid.org/0000-0003-1011-0855","affiliations":[{"raw_affiliation_string":"Department of Materials Science and Engineering, University of Arizona 1 , Tucson, Arizona 85721,","institution_ids":["https://openalex.org/I138006243"]},{"raw_affiliation_string":"New Frontiers of Sound Science and Technology Center, University of Arizona 2 , Tucson, Arizona 85721,","institution_ids":["https://openalex.org/I138006243"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5063659222"],"corresponding_institution_ids":["https://openalex.org/I138006243"],"apc_list":{"value":3500,"currency":"USD","value_usd":3500},"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"140","issue":"17","first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10822","display_name":"Acoustic Wave Phenomena Research","score":0.6615999937057495,"subfield":{"id":"https://openalex.org/subfields/3102","display_name":"Acoustics and Ultrasonics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10822","display_name":"Acoustic Wave Phenomena Research","score":0.6615999937057495,"subfield":{"id":"https://openalex.org/subfields/3102","display_name":"Acoustics and Ultrasonics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":0.32519999146461487,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10662","display_name":"Ultrasonics and Acoustic Wave Propagation","score":0.0020000000949949026,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/phononic-crystals","display_name":"phononic crystals","score":0.9710000157356262},{"id":"https://openalex.org/keywords/phononic-waveguides","display_name":"phononic waveguides","score":0.9490000009536743},{"id":"https://openalex.org/keywords/borosilicate-glass","display_name":"borosilicate glass","score":0.9509999752044678},{"id":"https://openalex.org/keywords/laser-micromachining","display_name":"laser micromachining","score":0.8709999918937683},{"id":"https://openalex.org/keywords/nanosecond-pulsed-laser","display_name":"nanosecond pulsed laser","score":0.9459999799728394},{"id":"https://openalex.org/keywords/phononic-band-gaps","display_name":"phononic band gaps","score":0.8889999985694885},{"id":"https://openalex.org/keywords/acoustic-waveguides","display_name":"acoustic waveguides","score":0.6380000114440918},{"id":"https://openalex.org/keywords/glass-substrates","display_name":"glass substrates","score":0.6480000019073486}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8666999936103821},{"id":"https://openalex.org/C206802598","wikidata":"https://www.wikidata.org/wiki/Q1422588","display_name":"Borosilicate glass","level":2,"score":0.8593999743461609},{"id":"https://openalex.org/C527607","wikidata":"https://www.wikidata.org/wiki/Q175538","display_name":"Microfabrication","level":4,"score":0.8216999769210815},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.6590999960899353},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.6438999772071838},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5889999866485596},{"id":"https://openalex.org/C2778386843","wikidata":"https://www.wikidata.org/wiki/Q6493035","display_name":"Laser beam machining","level":4,"score":0.5608000159263611},{"id":"https://openalex.org/C200687136","wikidata":"https://www.wikidata.org/wiki/Q11233438","display_name":"Waveguide","level":2,"score":0.5339999794960022},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5029000043869019},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.4909999966621399},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.46299999952316284},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.4596000015735626},{"id":"https://openalex.org/C108225325","wikidata":"https://www.wikidata.org/wiki/Q11456","display_name":"Semiconductor","level":2,"score":0.42820000648498535},{"id":"https://openalex.org/C523214423","wikidata":"https://www.wikidata.org/wiki/Q192047","display_name":"Machining","level":2,"score":0.3808000087738037},{"id":"https://openalex.org/C2779188808","wikidata":"https://www.wikidata.org/wiki/Q1806547","display_name":"Laser ablation","level":3,"score":0.3652999997138977},{"id":"https://openalex.org/C204723758","wikidata":"https://www.wikidata.org/wiki/Q3882459","display_name":"Acoustic wave","level":2,"score":0.3391999900341034},{"id":"https://openalex.org/C51141536","wikidata":"https://www.wikidata.org/wiki/Q838801","display_name":"Nanosecond","level":3,"score":0.31949999928474426},{"id":"https://openalex.org/C6260449","wikidata":"https://www.wikidata.org/wiki/Q41364","display_name":"Wavelength","level":2,"score":0.3160000145435333},{"id":"https://openalex.org/C181966813","wikidata":"https://www.wikidata.org/wiki/Q806352","display_name":"Band gap","level":2,"score":0.302700012922287},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.3001999855041504},{"id":"https://openalex.org/C189278905","wikidata":"https://www.wikidata.org/wiki/Q2157708","display_name":"Wide-bandgap semiconductor","level":2,"score":0.2935999929904938},{"id":"https://openalex.org/C60799052","wikidata":"https://www.wikidata.org/wiki/Q46221","display_name":"Electric field","level":2,"score":0.2888999879360199},{"id":"https://openalex.org/C57528182","wikidata":"https://www.wikidata.org/wiki/Q1271842","display_name":"Miniaturization","level":2,"score":0.27720001339912415},{"id":"https://openalex.org/C75302062","wikidata":"https://www.wikidata.org/wiki/Q900150","display_name":"Photonic crystal","level":2,"score":0.2547000050544739}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1063/5.0345816","doi":"https://doi.org/10.1063/5.0345816","is_oa":false,"landing_page_url":"https://doi.org/10.1063/5.0345816","pdf_url":null,"source":{"id":"https://openalex.org/S187991544","display_name":"Journal of Applied Physics","issn_l":"0021-8979","issn":["0021-8979","1089-7550","1520-8850"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-d","jufo-1","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Applied Physics","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320306076","display_name":"National Science Foundation","ror":"https://ror.org/021nxhr62"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":50,"referenced_works":["https://openalex.org/W1832439476","https://openalex.org/W1966368362","https://openalex.org/W1974237992","https://openalex.org/W1977230154","https://openalex.org/W1990560723","https://openalex.org/W1995345828","https://openalex.org/W2004865479","https://openalex.org/W2010301198","https://openalex.org/W2015236025","https://openalex.org/W2018684389","https://openalex.org/W2028333000","https://openalex.org/W2030179526","https://openalex.org/W2030906177","https://openalex.org/W2035754902","https://openalex.org/W2037966194","https://openalex.org/W2041309135","https://openalex.org/W2077622302","https://openalex.org/W2083346041","https://openalex.org/W2090032469","https://openalex.org/W2110301453","https://openalex.org/W2121723464","https://openalex.org/W2167229715","https://openalex.org/W2291084434","https://openalex.org/W2464353485","https://openalex.org/W2522831503","https://openalex.org/W2547226062","https://openalex.org/W2569844473","https://openalex.org/W2809949769","https://openalex.org/W2908048601","https://openalex.org/W2981458775","https://openalex.org/W2981714008","https://openalex.org/W3013599904","https://openalex.org/W3037264102","https://openalex.org/W3040200211","https://openalex.org/W3094179711","https://openalex.org/W3175201234","https://openalex.org/W3187656405","https://openalex.org/W3215687832","https://openalex.org/W4206218584","https://openalex.org/W4212979137","https://openalex.org/W4224241883","https://openalex.org/W4255336898","https://openalex.org/W4309487776","https://openalex.org/W4317106292","https://openalex.org/W4319311278","https://openalex.org/W4393871384","https://openalex.org/W4396605302","https://openalex.org/W4400943805","https://openalex.org/W4411887904","https://openalex.org/W4416772333"],"related_works":["https://openalex.org/W2290564615","https://openalex.org/W2109988703","https://openalex.org/W2034587718","https://openalex.org/W2109826501","https://openalex.org/W1985049215","https://openalex.org/W4317106292","https://openalex.org/W2111505527","https://openalex.org/W2609168192","https://openalex.org/W4246198370","https://openalex.org/W2682997683"],"abstract_inverted_index":{"Fabrication":[0],"of":[1,21,37,43,117,123],"phononic":[2,41,74],"crystals":[3],"(PnCs)":[4],"in":[5,30,53,104,125,154],"borosilicate":[6],"glass":[7,127],"is":[8,51,76],"demonstrated":[9],"through":[10],"laser":[11,17,93,121,133],"microfabrication":[12,122],"with":[13,64,107],"a":[14,19,91,115,130,140,149],"nanosecond":[15],"pulsed":[16],"at":[18],"wavelength":[20],"515":[22],"nm.":[23],"PnC":[24],"and":[25,56,59,79,96],"waveguide":[26,75,88],"structures":[27],"are":[28,100],"produced":[29,78],"6.35":[31],"mm":[32],"thick":[33],"(1/4":[34],"in.)":[35],"plates":[36],"Duran\u00ae":[38],"glass.":[39],"The":[40,136],"bandgap":[42],"the":[44,83,87,108,155],"fabricated":[45],"crystal,":[46],"centered":[47],"near":[48],"200":[49],"kHz,":[50],"measured":[52],"both":[54],"in-plane":[55],"out-of-plane":[57],"modes":[58],"shown":[60],"to":[61,102],"closely":[62],"agree":[63],"finite":[65],"element":[66],"analysis":[67],"(FEA)":[68],"performed":[69],"using":[70,90,129],"COMSOL":[71],"Multiphysics\u00ae.":[72],"A":[73],"similarly":[77],"characterized":[80],"by":[81],"imaging":[82],"velocity":[84],"field":[85],"along":[86],"channel":[89],"scanning":[92],"Doppler":[94],"vibrometer,":[95],"its":[97],"guiding":[98],"properties":[99],"found":[101],"be":[103],"good":[105],"agreement":[106],"corresponding":[109],"FEA":[110],"prediction.":[111],"This":[112],"study":[113],"provides":[114],"proof":[116],"concept":[118,138],"for":[119],"one-step":[120],"PnCs":[124],"dielectric":[126],"substrates":[128],"commercial":[131],"industrial":[132],"machining":[134],"platform.":[135],"presented":[137],"opens":[139],"direct":[141],"route":[142],"toward":[143],"integrated":[144],"acoustic":[145],"functions":[146],"on":[147],"glass,":[148],"substrate":[150],"class":[151],"increasingly":[152],"adopted":[153],"semiconductor":[156],"industry.":[157]},"counts_by_year":[],"updated_date":"2026-11-08T12:12:28.789561","created_date":"2026-11-07T00:00:00"}